PECVD (Plasma Enhanced Chemical Vapor Deposition) cavity with electrode plate insulation structure

Abstract

The utility model relates to the field of coating equipment, and discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) cavity with an electrode plate insulation structure, which comprises a cavity and a cavity cover arranged on the cavity. An electrode column is arranged on the cavity cover, an electrode plate is arranged in the cavity, and the electrode column penetrates through the cavity cover and is connected with the electrode plate. And an electrode mounting plate for fixing the electrode plate is arranged outside the electrode plate. A plurality of quartz plate covers are arranged between the upper end face of the electrode plate and the electrode mounting plate, a staggered and overlapped structure is adopted at the joint of the quartz plates, quartz strips with C-shaped sections are arranged on the two sides of the electrode plate for covering, and side baffles for fixing are arranged on the two sides of the quartz strips. And a quartz tube wraps the periphery of the electrode column. The quartz material is arranged on the periphery of the electrode plate, so that the electrode plate is prevented from sparking, the product yield is improved, and the equipment reliability is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment, and in particular to a PECVD cavity with an electrode plate insulation structure. Background Technology

[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment is an industrial device that uses plasma to deposit thin film materials. Its core principle is to use plasma to enhance chemical reactions and generate the desired thin film on the substrate surface. Typically, it is excited by radio frequency or microwave, causing gas molecules to undergo a chemical reaction at a relatively low temperature, thereby depositing a solid thin film on the substrate surface.

[0003] Excitation of plasma using radio frequency (RF) power sources requires the placement of electrode plates within the chamber. Current technology uses electrode mounting plates to fix the electrode plates, but the gap between the mounting plate and the electrode plate creates a slit, making arcing likely. Arcing can also occur between the electrode plate and the surrounding chamber or carrier plate. To address this, a single piece of ceramic is used to encapsulate the electrode plate, forming an insulating structure. While this provides some protection against arcing, PECVD equipment often uses high-frequency circuits, which are best suited for insulating materials with low dielectric constants. Ceramic, with its relatively high dielectric constant (6-20), performs poorly in high-frequency circuits. Furthermore, ceramic materials have a relatively high coefficient of thermal expansion and are easily affected by moisture and airborne impurities, resulting in insufficient stability. These limitations fail to meet the demands of precision manufacturing. Utility Model Content

[0004] The purpose of this invention is to provide a PECVD cavity with an electrode plate insulation structure. By arranging quartz material around the electrode plate, arcing of the electrode plate is avoided, thereby improving product yield and equipment reliability.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This utility model discloses a PECVD cavity with an electrode plate insulation structure, comprising a cavity body and a cavity cover disposed on the cavity body. Electrode posts are disposed on the cavity cover, and an electrode plate is disposed within the cavity body, with the electrode posts passing through the cavity cover and connecting to the electrode plate. An electrode mounting plate is disposed outside the electrode plate for fixing the electrode plate. Several quartz plates are provided between the upper surface of the electrode plate and the electrode mounting plate to effectively prevent arcing between the electrode plate and the electrode mounting plate.

[0007] Due to the large length of the cavity, a single quartz plate could not be used for coverage. Therefore, multiple quartz plates were stacked to improve installation convenience and reduce material costs. The joints between the quartz plates utilize an interlocking structure to effectively prevent arcing caused by the electrode plate passing through the narrow gaps between the plates.

[0008] Both sides of the electrode plate are covered with quartz strips with a "C-shaped cross-section". The quartz strips prevent arcing between the electrode plate and the surrounding cavity or carrier plate. The C-shaped cross-section design can better cover the sides of the electrode plate.

[0009] Side baffles are provided on both sides of the quartz strip to fix the quartz strip and prevent it from falling off.

[0010] The electrode post is surrounded by a quartz tube, which forms an insulating layer between the electrode post and the cavity cover or electrode mounting plate to prevent arcing.

[0011] Furthermore, the quartz plate comprises three pieces, namely a first quartz plate, a second quartz plate, and a third quartz plate. The first and third quartz plates respectively press down on both ends of the second quartz plate; the electrode post is secured in the middle of the second quartz plate. This staggered lamination method, where both ends press down on the middle section, makes the structure more robust and the connection with the electrode post tighter.

[0012] The advantages of this utility model are:

[0013] 1. In terms of dielectric properties, the dielectric constant of quartz is generally between 4 and 6, while that of ceramics is relatively large, ranging from 6 to 20. Therefore, quartz has a lower dielectric constant, giving it excellent performance in the high-frequency circuits used in PECVD equipment. Ceramic materials, due to their higher dielectric constant, are suitable for low-frequency circuits and high-voltage equipment. Regarding thermal stability, quartz exhibits excellent thermal stability, with a very small coefficient of thermal expansion, approximately zero, and it does not easily absorb moisture or impurities from the air. In contrast, ceramic materials have a relatively large coefficient of thermal expansion and are easily affected by moisture and impurities in the air, thus their stability is inferior to quartz. This invention uses quartz plates and strips to replace ceramics as insulating materials in existing technologies, providing insulation protection for the electrode plates, further preventing arcing of the electrode plates, improving product yield, and enhancing equipment reliability.

[0014] 2. This utility model provides "C-shaped cross-section" quartz strips and quartz tubes to cover the sides of the electrode plate and the electrode posts, respectively, to further insulate them, further prevent arcing, improve the stability of the equipment, and increase the production yield of the products.

[0015] 3. The quartz plate of this utility model is made of multiple quartz plates stacked together to improve installation convenience and reduce material costs. The joints between the quartz plates adopt an interlocking structure, which effectively avoids arcing caused by the electrode plate passing through the narrow gaps between several quartz plates. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a structural schematic diagram of this embodiment.

[0018] Explanation of key component symbols:

[0019] 1. Cavity;

[0020] 2. Cavity cover;

[0021] 3. Electrode post;

[0022] 4. Electrode plates;

[0023] 5. Electrode mounting plate;

[0024] 6. Quartz plate; 61. First quartz plate; 62. Second quartz plate; 63. Third quartz plate;

[0025] 7. Quartz bar;

[0026] 8. Side baffles;

[0027] 9. Quartz tube. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] In this utility model, unless otherwise stated, directional terms such as "up," "down," "left," and "right" are generally understood in conjunction with the accompanying drawings and the directions shown in actual applications.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0031] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of the various ranges, the endpoint values ​​of the various ranges and individual point values, and individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. The terms "optional" and "discretionary" mean that they may or may not be included (or may or may not be present).

[0033] like Figure 1 As shown, this embodiment discloses a PECVD cavity 1 with an insulating structure for an electrode plate 4, comprising a cavity 1 and a cavity cover 2 disposed on the cavity 1. An electrode post 3 is disposed on the cavity cover 2, and the electrode plate 4 is disposed inside the cavity 1. The electrode post 3 passes through the cavity cover 2 and connects to the electrode plate 4. An electrode mounting plate 5 is disposed outside the electrode plate 4 for fixing the electrode plate 4. A plurality of quartz plates 6 are disposed between the upper end face of the electrode plate 4 and the electrode mounting plate 5 to effectively prevent arcing between the electrode plate 4 and the electrode mounting plate 5.

[0034] Because the cavity 1 is long, it cannot be covered by a single piece of quartz plate. Therefore, multiple quartz plates are stacked to improve installation convenience and reduce material costs. The joints between the quartz plates 6 use an interleaved structure to effectively prevent arcing of the electrode plate 4 through the narrow gaps between the plates. In this embodiment, three quartz plates 6 are provided: a first quartz plate 61, a second quartz plate 62, and a third quartz plate 63. The first quartz plate 61 and the third quartz plate 63 respectively press against the two ends of the second quartz plate 62; the electrode post 3 is positioned in the middle of the second quartz plate 62. This interleaved lamination method, with both ends pressing against the middle section, makes the structure more robust and the connection with the electrode post 3 tighter.

[0035] Both sides of the electrode plate 4 are covered with quartz strips 7 with a "C-shaped cross section". The quartz strips 7 can prevent the electrode plate 4 from arcing with the surrounding cavity 1 or carrier plate. The C-shaped cross section design can better cover the sides of the electrode plate 4.

[0036] Side baffles 8 are provided on both sides of the quartz strip 7 to fix the quartz strip 7 and prevent the quartz strip 7 from falling off.

[0037] The electrode post 3 is surrounded by a quartz tube 9, which forms an insulating layer between the electrode post 3 and the cavity cover 2 or the electrode mounting plate 5 to prevent arcing.

[0038] In summary, this invention uses quartz plates or quartz strips with lower dielectric properties and higher stability to replace ceramics as the insulating material in the prior art, providing insulation protection for the electrode plates. Furthermore, through unique design and connection of the quartz plates and quartz strips, arcing of the electrode plates is further prevented, improving product yield and enhancing equipment reliability.

[0039] The preferred embodiments of this utility model have been described in detail above; however, this utility model is not limited thereto. Within the scope of the technical concept of this utility model, various simple modifications can be made to the technical solution of this utility model, including combining the various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed by this utility model and are all within the protection scope of this utility model.

Claims

1. A PECVD cavity with an electrode plate insulation structure, comprising a cavity and a cavity cover disposed on the cavity, wherein an electrode post is disposed on the cavity cover, an electrode plate is disposed inside the cavity, and the electrode post passes through the cavity cover and is connected to the electrode plate; an electrode mounting plate for fixing the electrode plate is disposed outside the electrode plate, characterized in that: Several quartz plates are laid between the upper surface of the electrode plate and the electrode mounting plate. The joints between the quartz plates adopt an interlocking structure. Both sides of the electrode plate are covered with quartz strips with "C-shaped cross-section". Side baffles for fixing are provided on both sides of the quartz strips. The electrode post is wrapped with a quartz tube.

2. The PECVD cavity with an electrode plate insulation structure according to claim 1, characterized in that: The quartz plate consists of three pieces, namely the first quartz plate, the second quartz plate, and the third quartz plate; the first quartz plate and the third quartz plate respectively press down on both ends of the second quartz plate; the electrode post is clamped in the middle of the second quartz plate.

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