Connecting assembly for epitaxial equipment and epitaxial equipment
By adopting a tapered adapter and sealing ring design in the extended equipment, the problem of complicated connection caused by inconsistent pipe joint sizes is solved, and the stability of gas flow and ease of equipment maintenance are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SICENTURY SEMICONDUCTOR TECHNOLOGY (SUZHOU) CO LTD
- Filing Date
- 2025-06-30
- Publication Date
- 2026-05-12
AI Technical Summary
In existing epitaxial equipment, the different sizes of pipe joints and the existence of gaps lead to complicated connections and the possibility of gaps being too small, which affects equipment maintenance efficiency and gas flow stability.
The hollow adapter pipe design features a tapered cross-section along the axial direction and is equipped with first and second grooves for sealing rings. Combined with fasteners, it ensures a reliable connection and reduces pipeline turbulence.
实现了可靠连接，降低了管路内湍流，提高了真空泵抽气流场的稳定性。
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Figure CN224229490U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of epitaxial technology, and more specifically to a connection component for an epitaxial device and an epitaxial device. Background Technology
[0002] CVD equipment used for preparing thin film materials is a high-tech device that integrates vacuum, high temperature, and high-speed rotation technologies. In the reaction chamber, the reaction gas flows over the heated substrate surface, where a chemical reaction occurs to generate single-crystal thin films of GaN, AlN, SiC, or other materials.
[0003] During equipment maintenance and modification, the following occurred Figure 1 In the location shown in section a, two pipes need to be connected. Because the pipe fittings (ISO flanges) are of different sizes and there is a gap between the two fittings (the distance between the two flange faces is H), the current standard practice is as follows: Figure 1 As shown in Figure b, a new straight pipe is introduced, with connectors at both ends. These connectors are then connected to the connectors on the equipment's pipe via a central ring (with sealing rings on the connectors) and locked in place with a fitting. In actual operation, it is very cumbersome to confirm the thickness of the central ring, the size of the introduced straight pipe, and the clearance dimensions of the fittings. Furthermore, there is a possibility that the gap between the connectors of the two pipes is too small. Summary of the Invention
[0004] To overcome the above-mentioned shortcomings, the purpose of this application is to provide a connection assembly for an epitaxial device that is not affected by the distance between the two flange end faces and can reliably connect even if the distance is very small.
[0005] To achieve the above objectives, this application adopts the following technical solution:
[0006] A connection component for an epitaxial device, comprising:
[0007] A hollow adapter pipe, the adapter pipe being configured with a tapered cross-section along its axial direction.
[0008] The adapter pipe has a first connecting end on one side, and a first groove on the first connecting end. The first groove is used to place a first sealing ring. The first connecting end is connected to a first flange installed on the first pipeline, and the inner diameter of the first connecting end is larger than the inner diameter of the first pipeline (the inner diameter of the first pipeline is the same as the inner diameter of the first flange).
[0009] The adapter pipe has a second connecting end on the side opposite to the first connecting end. The second connecting end has a second groove for placing a second sealing ring. The second connecting end is connected to a second flange installed on the second pipeline, and the inner diameter of the first connecting end side is larger than the inner diameter of the second connecting end side.
[0010] Preferably, the cross-sections of the first groove and the second groove are trapezoidal or dovetail-shaped.
[0011] Preferably, the first sealing ring and the second sealing ring are both fluororubber rings.
[0012] Preferably, the inner diameter of the second connecting end is the same as the inner diameter of the second flange.
[0013] Preferably, the connection component further includes:
[0014] The fastener includes a first pressure ring, a second pressure ring, and fasteners;
[0015] The first pressure ring is fitted to the outer mounting surface of the first flange, and the second pressure ring is fitted to the outer mounting surface of the second flange. The first pressure ring and the second pressure ring are connected by the fastener.
[0016] Preferably, the outer circumferential side of the first pressure ring has a first protrusion with a first through hole extending axially along the first pressure ring, and the outer circumferential side of the second pressure ring has a second protrusion with a second through hole extending axially along the second pressure ring, the fastener passing through the first through hole and the second through hole.
[0017] Preferably, there is a preset gap between the first pressure ring and the second pressure ring, the preset gap being between 0.5-1mm.
[0018] Preferably, the connecting assembly includes two fasteners arranged symmetrically along the axial direction of the connecting assembly.
[0019] Preferably, this application provides an epitaxial device that includes the connecting components described above.
[0020] Preferably, the epitaxial device has a reaction chamber, the reaction chamber has an exhaust pipe, and the exhaust pipe has the aforementioned connecting component.
[0021] Beneficial effects
[0022] Compared to the two connecting components installed on the pipeline of existing epitaxial equipment, the connecting component proposed in this application can reliably connect to the pipelines on both sides while reducing turbulence in the pipeline, thus making the flow field of the pump end (such as a vacuum pump) on the downstream side more stable. Attached Figure Description
[0023] The accompanying drawings are provided to illustrate the technical solutions of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the technical solutions of this disclosure and do not constitute a limitation on the technical solutions of this disclosure. The shapes and sizes of the components in the drawings do not reflect actual proportions and are only intended to illustrate the content of this application.
[0024] Figure 1 This is a schematic diagram showing the connection between the first and second pipelines in an existing epitaxial device;
[0025] Figure 1a This is a schematic diagram of the connection assembly connecting the first and second pipelines in an existing epitaxial device;
[0026] Figure 2 This is a schematic diagram of a connection component according to an embodiment of this application;
[0027] Figure 3 for Figure 2 A schematic diagram of the connecting components with some fasteners hidden;
[0028] Figure 4 for Figure 3 Top view;
[0029] Figure 5 for Figure 4 A schematic diagram of the cross-section at point AA in the middle;
[0030] Figure 6 This is a schematic diagram of the transfer tube structure of this application;
[0031] Figure 7 This is a schematic diagram of the structure of the first connector according to an embodiment of this application;
[0032] Figure 8 This is a schematic diagram of the connection component from another perspective of an embodiment of this application;
[0033] Figure 9 This is a cross-sectional schematic diagram of the transfer pipe of this application. Detailed Implementation
[0034] The above-described solution will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of this application. The implementation conditions used in the embodiments may be further adjusted according to the conditions of specific manufacturers, and the implementation conditions not specified are generally those in routine experiments.
[0035] In this application, the terms "upper," "lower," "inner," "middle," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.
[0036] As mentioned in the background section, epitaxial devices require regular maintenance. During the equipment repair and modification process, issues may arise... Figure 1In the location shown in section a, pipe 11 and pipe 12 need to be connected. Because the pipe fittings (ISO flanges) are of different sizes and there is a gap between the two fittings (the distance between the two flange faces is H), the current standard practice is as follows: Figure 1 As shown in Figure b, a new straight pipe is introduced, with connectors 2 / 4 at both ends. These connectors 2 / 4 are then connected to the connectors on the equipment's pipe via a central ring 1 / 5 (a sealing ring is installed on the connector at this time) and locked with connector 3. In actual operation, it is necessary to confirm the thickness of the central ring, the size of the introduced straight pipe, and the clearance dimensions of the connectors, which is very cumbersome. Furthermore, there is a possibility that the gap between the connectors of the two pipes is too small. If the flange distance H between the two pipes is too small, and H < 2*H1 + 2*H2 + H3 (see [reference needed]), then... Figure 1a H1 is 1 / 5 of the thickness of the ISO center ring, H2 is 1 / 5 of the thickness of the ISO flange, and H3 is the distance that the locking connector 3 needs to avoid. The straight pipe type pipeline needs to be modified.
[0037] To this end, the applicant has improved the connection of the existing equipment's piping and proposed an improved connection component for epitaxial devices.
[0038] This application discloses a connection assembly for an epitaxial device and the epitaxial device itself. The connection assembly includes: a hollow adapter pipe configured with a tapered cross-section along its axial direction; a first connecting end on one side of the adapter pipe, the first connecting end having a first groove for placing a first sealing ring; the first connecting end being connected to a first flange installed in a first pipeline, and the inner diameter of the first connecting end being larger than the inner diameter of the first pipeline; and a second connecting end on the side of the adapter pipe opposite to the first connecting end, the second connecting end having a second groove for placing a second sealing ring; the second connecting end being connected to a second flange installed in a second pipeline, and the inner diameter of the first connecting end side being larger than the inner diameter of the second connecting end side. The connection assembly can reliably connect to pipelines on both sides while reducing turbulence within the pipelines, thus resulting in a more stable flow field for the pump (e.g., a vacuum pump) downstream.
[0039] Next, we will combine the appendix Figures 2-9 This application describes a connection assembly for an epitaxial device. During connection, it sits between two pipes, serving to connect these two pipelines. This connection assembly, through pipeline optimization, reduces turbulence within the pipelines while connecting them, thus resulting in a more stable flow field for the pump (e.g., a vacuum pump) downstream. Downstream refers to the side in front of it along the airflow direction, while the side behind it is upstream.
[0040] The connecting assembly 100 connects pipe 11 and pipe 12, and its cross-sectional view after connecting pipe 11 and pipe 12 is shown below. Figure 5As shown.
[0041] The connecting assembly 100 includes a hollow adapter tube 110. One side of the adapter tube 110 has a first connecting end 112 with a first groove 112a for placing a first sealing ring 112b. The side of the adapter tube 110 opposite the first connecting end 112 has a second connecting end 113 with a second groove 113a for placing a second sealing ring 113b. Preferably, the cross-sections of the first groove 112a and the second groove 113a are trapezoidal, or the first groove 112a and the second groove 113a are designed as dovetail grooves. This prevents the first sealing ring 112b inserted into the first groove 112a and the second sealing ring 113b inserted into the second groove 113a from falling out, and facilitates assembly.
[0042] The first connecting end 112 is connected to the first flange 120, which is installed on the first pipeline 11. The second connecting end 113 is connected to the second flange 130, which is installed on the second pipeline 12.
[0043] The adapter pipe 110 is installed between the first pipe 11 and the second pipe 12 and fixed by fasteners, including a first pressure ring 140, a second pressure ring 150, and fasteners (such as bolts and nuts). Preferably, there are two first pressure rings 140 and two second pressure rings 150, symmetrically installed on the first pipe 11 and the second pipe 12. This ensures more even stress on the first and second sealing rings and more reliable sealing. The first and second sealing rings are made of fluororubber (such as ISO fluororubber). During fixing, one first pressure ring 140 and one second pressure ring 150 are used as a group, with two connecting parts provided on them.
[0044] The adapter 110 has a tapered cross-section along its axial direction. Specifically, the inner wall of the adapter 110 has a bevel 111. The inner diameter D1 of the first connecting end 112 of the adapter 110 is larger than the inner diameter D2 of the second connecting end 113. Preferably, the inner diameter D1 of the first connecting end 112 is larger than the inner diameter of the first pipe 11, and the inner diameter D2 of the second connecting end 113 is equal to or approximately equal to the inner diameter of the second pipe 12. This allows the gas to transition smoothly from the first pipe 11 through the adapter 110, resulting in less turbulence in the pipe and a more stable gas flow field for the downstream pump.
[0045] The fastener includes a first pressure ring 140, a second pressure ring 150, and a fastener. The first pressure ring 140 is fitted to the outer mounting surface of the first flange 120, and the second pressure ring 150 is fitted to the outer mounting surface of the second flange 130. The first pressure ring 140 has a first protrusion 140a on its circumferential outer side, and the first protrusion 140a has a first through hole 140a1 extending axially along its first pressure ring. The second pressure ring 150 has a second protrusion 150a on its circumferential outer side, and the second protrusion 150a has a through hole extending axially along its second pressure ring. The fastener passes through the through hole of the first protrusion 140a and the second through hole 150a1 of the second protrusion 150a to fix the adapter pipe 110 between the first pipeline 11 and the second pipeline 12. Preferably, a preset gap of 0.5-1 mm is provided between the first pressure ring 140 and the second pressure ring 150 after they are pressed together to prevent interference.
[0046] This application provides an epitaxial device, which can be a silicon carbide epitaxial device, a gallium nitride epitaxial device, or a gallium oxide epitaxial device. The epitaxial device has the aforementioned connecting components on its piping. Preferably, the epitaxial device has a reaction chamber with an exhaust pipe, and the exhaust pipe has the aforementioned connecting components. By providing the aforementioned connecting components in the exhaust pipe, turbulence in the exhaust pipe is reduced, making the airflow field of the pump (vacuum pump) at its downstream end more stable, thus achieving reliable exhaust.
[0047] The above embodiments are only for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be used to limit the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit and essence of this application should be included within the scope of protection of this application.
Claims
1. A connection assembly for an epitaxial device, characterized in that, include: A hollow adapter pipe, the adapter pipe being configured with a tapered cross-section along its axial direction. The adapter pipe has a first connecting end on one side, and a first groove on the first connecting end. The first groove is used to place a first sealing ring. The first connecting end is connected to a first flange installed on the first pipeline, and the inner diameter of the first connecting end is larger than the inner diameter of the first pipeline. The adapter pipe has a second connecting end on the side opposite to the first connecting end. The second connecting end has a second groove for placing a second sealing ring. The second connecting end is connected to a second flange installed on the second pipeline, and the inner diameter of the first connecting end side is larger than the inner diameter of the second connecting end side.
2. The connection assembly for an epitaxial device as described in claim 1, characterized in that, The cross-sections of the first and second grooves are trapezoidal or dovetail-shaped.
3. The connection assembly for an epitaxial device as described in claim 1, characterized in that, The first sealing ring and the second sealing ring are both fluororubber rings.
4. The connection assembly for an epitaxial device as described in claim 1, characterized in that, The inner diameter of the second connecting end is the same as the inner diameter of the second flange.
5. The connection assembly for an epitaxial device as described in claim 1, characterized in that, Also includes: The fastener includes a first pressure ring, a second pressure ring, and fasteners; The first pressure ring is fitted to the outer mounting surface of the first flange, and the second pressure ring is fitted to the outer mounting surface of the second flange. The first pressure ring and the second pressure ring are connected by the fastener.
6. The connection assembly for an epitaxial device as described in claim 5, characterized in that, The first pressure ring has a first protrusion on its circumferential outer side, the first protrusion having a first through hole extending axially along its first pressure ring, and the second pressure ring has a second protrusion on its circumferential outer side, the second protrusion having a second through hole extending axially along its second pressure ring, the fastener passing through the first through hole and the second through hole.
7. The connection assembly for an epitaxial device as described in claim 5, characterized in that, There is a preset gap between the first pressure ring and the second pressure ring, and the preset gap is between 0.5-1mm.
8. The connection assembly for an epitaxial device as described in claim 5, characterized in that, include: The two fasteners are arranged symmetrically along the axial direction of the connecting assembly.
9. An epitaxial device, characterized in that, Includes the connection component as described in any one of claims 1-8.
10. The epitaxial device as described in claim 9, characterized in that, The epitaxial device has a reaction chamber, the reaction chamber has an exhaust pipe, and the exhaust pipe has the aforementioned connecting component.