Induction coil device and CVD reaction equipment

Abstract

The utility model discloses an induction coil device and CVD reaction equipment, and belongs to the technical field of semiconductor manufacturing equipment.The induction coil device in the embodiment of the utility model comprises a supporting assembly; the supporting assembly is used for supporting the induction coil; the supporting assembly comprises a base block, a first displacement piece, a second displacement piece and a supporting piece. The base block extends along a first direction; the first displacement part is arranged on the base block and can move in the first direction relative to the base block. The second displacement part is arranged on the first displacement part and can move in the second direction relative to the first displacement part, the first direction intersects with the second direction, and the intersection plane is parallel to the horizontal plane; the supporting piece is arranged on the second displacement piece and supports the induction coil. Through the adjustable design of the supporting assembly, positioning deviation generated in the induction coil assembling process is compensated, the safety and stability of the induction coil are guaranteed, and meanwhile the maintenance cost and time are reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and in particular to an induction coil device and a CVD reaction device. Background Technology

[0002] Existing semiconductor manufacturing equipment typically places an induction coil spirally outside the reaction chamber and heats the reaction chamber through induction heating. By adjusting the position of each turn of the induction coil, the temperature field generated is made to meet the process requirements.

[0003] However, the overall positioning of the induction coil is prone to shift during the assembly process. Utility Model Content

[0004] This application provides an induction coil device and a CVD reaction apparatus to solve the technical problem that the overall positioning of the induction coil is prone to shift during the assembly process; this application also provides a CVD reaction apparatus.

[0005] Technical solution: This application provides an induction coil device, including a support assembly for supporting the induction coil. The support assembly includes:

[0006] A base block, the base block extending along a first direction;

[0007] A first displacement element is disposed on the base block and is capable of displacement relative to the base block along the first direction;

[0008] The second displacement member is disposed on the first displacement member and is capable of displacement relative to the first displacement member along a second direction, wherein the first direction intersects the second direction and both are parallel to the horizontal plane;

[0009] A support member is disposed on the second displacement member and supports the induction coil.

[0010] In some embodiments, the support member has a receiving groove at one end facing the induction coil, and the induction coil has a protrusion that is received in the receiving groove and is detachably connected to the support member.

[0011] In some embodiments, the base block includes a first slide rail extending along the first direction, and the first displacement member includes a first moving part that slides in cooperation with the first slide rail.

[0012] In some embodiments, the first displacement member further includes a second slide rail, the second slide rail being connected to the first moving part, the second displacement member including a second moving part extending along the second direction, and the second slide rail slidingly engaging with the second moving part.

[0013] In some embodiments, the induction coil device further includes:

[0014] A first locking member passes through the first slide rail and is able to abut against the first moving part;

[0015] And / or, a second locking member, which passes through the second moving part and is capable of abutting against the second slide rail.

[0016] In some embodiments, the induction coil device further includes an adjusting member disposed between the support member and the second displacement member, and connected to the support member and the second displacement member respectively, for driving the support member to move along a third direction, the third direction being perpendicular to the horizontal plane.

[0017] In some embodiments, the support member is configured as a non-conductive ceramic material; the first displacement member and the second displacement member are configured as aluminum blocks.

[0018] In some embodiments, the induction coil is arranged in a disc shape and has multiple turns, the base block extends from the inner turns of the induction coil to the outer turns, multiple support components are provided, the multiple support components share a base block and form a support assembly, and the support components of the same support assembly are respectively connected to different turns of the induction coil along the first direction.

[0019] In some embodiments, a plurality of the support components are arranged at intervals along the circumferential direction of the induction coil.

[0020] This application also discloses a CVD reaction apparatus, including:

[0021] A housing having a receiving cavity, the housing including a bottom wall;

[0022] As described in the above embodiments, the induction coil device is disposed within the accommodating cavity and supported on the bottom wall.

[0023] Beneficial Effects: The induction coil device in this embodiment includes a support assembly; the support assembly supports the induction coil; the support assembly includes: a base block, a first displacement member, a second displacement member, and a support member; the base block extends along a first direction; the first displacement member is disposed on the base block and can be displaced relative to the base block along the first direction; the second displacement member is disposed on the first displacement member and can be displaced relative to the first displacement member along a second direction, the first direction and the second direction intersect, and the plane of intersection is parallel to the horizontal plane; the support member is disposed on the second displacement member and supports the induction coil. Through the cooperation of the base block, the first displacement member, the second displacement member, and the support member, an adjustable support assembly is formed, which supports the induction coil while allowing fine adjustments in two different directions to compensate for positioning deviations generated during the assembly of the induction coil. It eliminates the need for forcibly fixing the position of the induction coil; precise positioning is achieved by adjusting the first and second displacement members, effectively avoiding coil deformation caused by forced fixing. This ensures the safety and stability of the induction coil while reducing maintenance costs and time.

[0024] The CVD reaction apparatus in this application includes the induction coil device as described in the above embodiments. Therefore, it can have all the technical features and effects of the induction coil device described above, which will not be repeated here. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a partial three-dimensional structural diagram of the induction coil device and the induction coil after assembly according to an embodiment of this application;

[0027] Figure 2 This is a cross-sectional view of the induction coil device and the induction coil after assembly according to an embodiment of this application;

[0028] Figure 3 This is a schematic diagram showing the positional relationship between multiple support components and the induction coil in an embodiment of this application;

[0029] Figure 4 This is a schematic diagram of the CVD reaction equipment in an embodiment of this application.

[0030] Explanation of reference numerals in the attached figures:

[0031] 10. Support assembly; 20. Induction coil; 11. Base block; X, first direction; 12. First displacement member; 13. Second displacement member; Y, second direction; 14. Support member; 140. Receiving groove; 21. Protrusion; 110. First slide rail; 121. First moving part; 122. Second slide rail; 130. Second moving part; 15. First locking member; 16. Second locking member; 17. Adjusting member; Z, third direction; 1. Housing; 100. Receiving cavity; 101. Bottom wall. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.

[0033] In the description of this application, it should be understood that the terms "upper," "lower," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In the description of this application, "multiple" means two or more, and "at least one" can refer to one, two, or more, unless otherwise explicitly specified. The terms "first" and "second" are only for the convenience of description and are used to name parts or embodiments by number, and do not imply any order of importance between the parts or embodiments.

[0034] It should also be noted that in the accompanying drawings of this application, the arrow marked X indicates the first direction X or its opposite direction, the arrow marked Y indicates the second direction Y or its opposite direction, and the arrow marked Z indicates the third direction Z. The introduction of the first direction X, the second direction Y, and the third direction Z in the description of this application is to more clearly define the structure and relative positional relationships of the components in the induction coil device. In actual implementation, the third direction Z is generally a vertical direction or a height direction, and the first direction X and the second direction Y are generally horizontal directions. The first direction X, the second direction Y, and the third direction Z intersect each other. Optionally, the first direction X, the second direction Y, and the third direction Z are perpendicular to each other to optimize the layout of the induction coil device. In the description of this application, "perpendicular" means completely perpendicular to 90° or almost completely perpendicular; for example, an angle between 80° and 100° is considered perpendicular. Similarly, "parallel" means completely parallel or almost completely parallel; for example, a completely parallel angle within 10° is considered parallel.

[0035] As a preamble to the embodiments of this application, conventional semiconductor manufacturing equipment typically places an induction coil spirally outside the reaction chamber and heats the chamber through induction heating. The position of each turn of the induction coil is adjusted to ensure the generated temperature field meets process requirements. However, coil manufacturing is difficult, and the overall positioning of the induction coil is prone to misalignment during assembly. Furthermore, since the induction coil is a single unit, adjusting its position often causes the entire coil's positioning point to shift. Forcibly fixing it can lead to coil deformation and create safety hazards.

[0036] It should be understood that the CVD reaction equipment in this application is officially called Chemical Vapor Deposition Reaction Equipment.

[0037] In view of this, embodiments of this application provide an induction coil 20 device, which aims to solve at least one of the above-mentioned technical problems.

[0038] Please see Figure 1 As shown in the embodiment of this application, the induction coil 20 device includes: a support assembly 10, which supports and connects the induction coil 20. The support assembly 10 includes a base block 11, a first displacement member 12, a second displacement member 13, and a support member 14. The base block 11 extends along a first direction X. The first displacement member 12 is disposed on the base block 11 and can be displaced relative to the base block 11 along the first direction X. The second displacement member 13 is disposed on the first displacement member 12 and can be displaced relative to the first displacement member 12 along a second direction Y. The first direction X and the second direction Y intersect and are both parallel to the horizontal plane. The support member 14 is disposed on the second displacement member 13 and supports the induction coil 20. It is important to understand that by driving the first displacement member 12 to move relative to the base block 11 along the first direction X, and driving the second displacement member 13 to move relative to the first displacement member 12 along the second direction Y, the support member 14 makes fine adjustments to the induction coil 20 in two different directions (parallel to the horizontal plane). This solves the problem of positioning misalignment of the induction coil 20 during assembly and compensates for positioning point deviations that may occur during manufacturing. The adjustable design of the support assembly 10, by adjusting the first displacement member 12 and the second displacement member 13, achieves precise positioning of the induction coil 20, effectively avoiding coil deformation caused by forced fixing, thereby improving the safety and stability of the induction coil 20.

[0039] The design of the support component 10 makes the induction coil 20 more flexible during installation and maintenance, and allows for fine-tuning without disassembling the entire induction coil 20 device, thereby reducing maintenance costs and time.

[0040] Please see Figure 2 As shown, in some embodiments, the support member 14 has a receiving groove 140 at one end facing the induction coil 20, and the induction coil 20 has a protrusion 21, which is received within the receiving groove 140 and detachably connected to the support member 14. It should be understood that the detachable connection between the induction coil 20 and the support member 14 via the protrusion 21 makes the installation and maintenance of the induction coil 20 more convenient. The cooperation between the protrusion 21 and the receiving groove 140 enables precise positioning, ensuring the stability of the induction coil 20 during operation. It should also be understood that the protrusion 21 is made of metal and is fixed to the induction coil 20 by welding, while the support member 14 is made of non-conductive ceramic material. The support member 14 does not have inductive capabilities, reducing its impact on the magnetic field distribution of the induction coil 20 and ensuring that the operation of the induction coil 20 is not interfered with by the support assembly 10.

[0041] In some embodiments, the support member 14 is made of non-conductive ceramic material, and the first displacement member 12 and the second displacement member 13 are made of metal material, such as aluminum blocks, to ensure that the first displacement member 12 and the second displacement member 13 have sufficient mechanical strength while reducing their heat generation in the electromagnetic field of the induction coil, thereby improving the safety of the system and reducing production costs.

[0042] Please see Figure 1 and Figure 2 As shown, in some embodiments, the base block 11 includes a first slide rail 110 extending along a first direction X. The first displacement member 12 includes a first moving part 121, which slides in conjunction with the first slide rail 110. It should be understood that the sliding contact between the first slide rail 110 and the first moving part 121 allows the first displacement member 12 to be precisely positioned on the base block 11 along the first direction X, ensuring that the induction coil 20 reaches a preset working position, thereby improving the positioning accuracy and reliability of the system. The first slide rail 110 provides stable support for the first displacement member 12, reducing displacement deviation caused by vibration or external impact, and further enhancing the overall structural stability of the device. Furthermore, the first slide rail 110 can be a groove or track structure, primarily serving a guiding function. The first moving part 121 can be a protrusion or a groove structure. When the first slide rail 110 is a groove structure, the first moving part 121 can be a protrusion; when the first slide rail 110 is a track structure, the first moving part 121 can be a groove.

[0043] The base block 11 and the first displacement component 12 have a simple structure, are adjustable and easy to operate, and are convenient for standardized design, mass production and assembly. The first slide rail 110 of the base block 11 and the first moving part 121 of the first displacement component 12 are both made of wear-resistant materials, which reduces the risk of performance degradation due to friction or wear, thereby extending the service life of the overall device.

[0044] Please see Figure 1 and Figure 2 As shown, in some embodiments, the first displacement member 12 further includes a second slide rail 122, which is connected to the first moving part 121. The second displacement member 13 includes a second moving part 130, which extends along the second direction Y and slides in cooperation with the second slide rail 122. It should be understood that the sliding cooperation structure between the first displacement member 12 and the second displacement member 13 can refer to the sliding structure between the base block 11 and the first displacement member 12. The effects of the sliding structure will not be elaborated here. Furthermore, both the first slide rail 110 on the base block 11 and the second moving part 130 on the second displacement member 13 can adopt a groove structure. The projection of the first displacement member 12 in the second direction Y is T-shaped, or the projection of the first displacement member 12 in the third direction Z is cross-shaped. The above structure is easy to design and manufacture, has high structural stability, and the sliding process of the first displacement member 12 relative to the base block 11 and the sliding process of the first displacement member 12 relative to the second displacement member 13 do not interfere with each other, resulting in high displacement accuracy. In a preferred embodiment, the first direction X and the second direction Y are orthogonal.

[0045] Please see Figure 1 and Figure 2 As shown, in some embodiments, the induction coil 20 device further includes a first locking member 15, which passes through the first slide rail 110 and abuts against the first moving part 121. It should be understood that the first slide rail 110 has a through hole, and the first locking member 15 can be a positioning pin. By passing through the through hole and abutting against the first moving part 121, the sliding of the first displacement member 12 relative to the base block 11 is restricted, further ensuring the positioning stability of the induction coil 20 in the first direction X.

[0046] Please see Figure 1 As shown, in some embodiments, the induction coil 20 device further includes a second locking member 16, which passes through the second moving part 130 and abuts against the second slide rail 122. It should be understood that the second moving part 130 also has a through hole, and the second locking member 16 can also be a positioning pin. By passing through the through hole in the second moving part 130 and abutting against the second slide rail 122, the sliding of the second displacement member 13 relative to the first displacement member 12 is restricted. Similarly, this further ensures the positioning stability of the induction coil 20 in the second direction Y.

[0047] Please see Figure 1As shown, in some embodiments, the induction coil 20 device includes a first locking member 15 and a second locking member 16. For other technical details, please refer to the above embodiments. It should be understood that by using the method where the first locking member 15 passes through the first slide rail 110 and abuts against the first moving part 121, and the second locking member 16 passes through the second moving part 130 and abuts against the second slide rail 122, the positioning and engagement of the base block 11 and the first displacement member 12, and the positioning and engagement of the first displacement member 12 and the second displacement member 13 are achieved. This method has a simple structure and is easy to operate.

[0048] Please see Figure 2 As shown, in some embodiments, the induction coil 20 device further includes an adjusting member 17. The adjusting member 17 is disposed between the support member 14 and the second displacement member 13, and is connected to the support member 14 and the second displacement member 13 respectively. It is used to drive the support member 14 to move along a third direction Z, which is perpendicular to the horizontal plane. It should be understood that the adjustment method between the support member 14 and the second displacement member 13 can be threaded adjustment. In this case, the adjusting member 17 includes a mating external thread portion and an internal thread portion. The external thread portion is disposed on one of the support member 14 and the second displacement member 13; the internal thread portion is disposed on the other of the support member 14 and the second displacement member 13. The external thread portion is at least partially received within the internal thread portion and is rotatably connected to the internal thread portion. The support height of the support column can be adjusted by the adjusting member 17 to keep the induction coil 20 at the same horizontal height, ensuring that the induction coil 20 works normally. The adjustment method is simple and convenient, and realizes the compensation of assembly error of the induction coil 20.

[0049] It should be noted that the protrusion 21 on the induction coil 20 and the receiving groove 140 on the support member 14 are detachably coupled, and the protrusion 21 and the receiving groove 140 cannot rotate relative to each other after assembly. In order to prevent the induction coil 20 from tortuous deformation under the drive of the support column during the adjustment of the support column by the adjusting member 17, it is usually necessary to first adjust the height of the support member 14 by adjusting the adjusting member 17, then place the protrusion 21 of the induction coil 20 in the receiving groove 140 of the support member 14, and after the support member 14 stably supports the induction coil 20, the positioning adjustment of the induction coil 20 in the first direction X and the second direction Y is then performed.

[0050] Please see Figure 1As shown, in some embodiments, the induction coil 20 is arranged in a disc shape and has multiple turns. The base block 11 extends from the inner turns of the induction coil 20 to the outer turns. Multiple support components 10 are provided, and the multiple support components 10 share a base block 11 to form a support assembly. The support components 10 of the same support assembly are connected to different turns of the induction coil 20 along the first direction X. It should be understood that the multiple support components 10 sharing the same base block 11 helps to maintain the consistency and stability of the entire structure and avoids positional deviation caused by the independence of each support component 14. At the same time, the design of sharing a base block 11 reduces the number of components and connection points, making the adjustment of the entire support system easier and reducing the incidence of potential failures. The multiple support components 10 connecting different turns of the induction coil 20 along the extension direction of the base block 11 can make the force on each turn of the induction coil 20 more balanced, reduce local stress concentration, and improve the reliability and stability of the overall structure.

[0051] Please see Figure 3 As shown, in some embodiments, multiple support assemblies are arranged at intervals along the circumferential direction of the induction coil 20. It should be understood that multiple base blocks 11 are arranged at intervals around the center of the induction coil 20, and each base block 11 is provided with at least one support member 14. By arranging multiple support assemblies 10 around the induction coil 20 to provide more balanced support force, it avoids deformation or vibration of the overall structure of the induction coil 20 due to uneven force at a single point or in a localized area, thus helping to improve the mechanical stability and vibration resistance of the entire device. The circumferential arrangement design naturally possesses symmetry, allowing the induction coil 20 to distribute the load evenly when under stress, reducing structural stress concentration problems caused by eccentricity or asymmetry. Simultaneously, it ensures that each support assembly 10 can independently and precisely support different areas of the induction coil 20, avoiding overall structural displacement due to the failure or adjustment of a single support member 14, and helping to maintain the roundness of the coil.

[0052] It should also be noted that the entire induction coil 20 device is more modular. During installation or maintenance, a single base block 11 and its corresponding support assembly 10 can be adjusted or replaced without disassembling the entire system, thereby reducing maintenance costs and time.

[0053] Please see Figure 4 As shown in the embodiments, this application also provides a CVD reaction apparatus, including a housing 1 and an induction coil 20 device as described in the above embodiments. The housing 1 has a receiving cavity 100 and includes a bottom wall 101. The induction coil 20 device is disposed within the receiving cavity 100 and supported on the bottom wall 101. Therefore, it can have all the technical features and effects of the induction coil 20 device described above, which will not be repeated here.

[0054] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0055] The induction coil 20 device and CVD reaction equipment provided in the embodiments of this application have been described in detail above, and specific examples have been used to illustrate the principle and implementation of this application. The description of the above embodiments is only used to help understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. An induction coil device, characterized in that, Includes a support assembly (10) for supporting the induction coil (20), the support assembly (10) comprising: A base block (11) extends along a first direction (X); A first displacement member (12) is disposed on the base block (11) and is capable of displacement relative to the base block (11) along the first direction (X); The second displacement member (13) is disposed on the first displacement member (12) and can be displaced relative to the first displacement member (12) along the second direction (Y). The first direction (X) intersects with the second direction (Y) and both are parallel to the horizontal plane. A support member (14) is disposed on the second displacement member (13) and supports the induction coil (20).

2. The induction coil device according to claim 1, characterized in that, The support member (14) has a receiving groove (140) at one end facing the induction coil (20), and the induction coil (20) has a protrusion (21) which is received in the receiving groove (140) and is detachably connected to the support member (14).

3. The induction coil device according to claim 1, characterized in that, The base block (11) includes a first slide rail (110) which extends along the first direction (X). The first displacement member (12) includes a first moving part (121) which slides in cooperation with the first slide rail (110).

4. The induction coil device according to claim 3, characterized in that, The first displacement member (12) further includes a second slide rail (122), which is connected to the first moving part (121). The second displacement member (13) includes a second moving part (130), which extends along the second direction (Y). The second slide rail (122) and the second moving part (130) are slidably engaged.

5. The induction coil device according to claim 4, characterized in that, The induction coil (20) device also includes: The first locking member (15) passes through the first slide rail (110) and can abut against the first moving part (121); And / or, a second locking member (16), which passes through the second moving part (130) and is able to abut against the second slide rail (122).

6. The induction coil device according to claim 2, characterized in that, The induction coil (20) device further includes an adjusting member (17), which is disposed between the support member (14) and the second displacement member (13) and connects the support member (14) and the second displacement member (13) respectively, for driving the support member (14) to move along a third direction (Z), which is perpendicular to the horizontal plane.

7. The induction coil device according to claim 1, characterized in that, The support member (14) is made of non-conductive ceramic material; the first displacement member (12) and the second displacement member (13) are made of aluminum blocks.

8. The induction coil device according to any one of claims 1 to 7, characterized in that, The induction coil (20) is arranged in a disc shape and has multiple turns. The base block (11) extends from the inner turn of the induction coil (20) to the outer turn. Multiple support components (10) are provided. Multiple support components (10) share one base block (11) and form a support assembly. The support components (10) of the same support assembly are connected to different turns of the induction coil (20) along the first direction (X).

9. The induction coil device according to claim 8, characterized in that, Multiple support assemblies are arranged at intervals along the circumferential direction of the induction coil (20).

10. A CVD reaction apparatus, characterized in that, include: A housing (1) having a receiving cavity (100), the housing (1) including a bottom wall (101); The induction coil (20) device as described in any one of claims 1 to 9, wherein the induction coil (20) device is disposed within the accommodating cavity (100) and supported on the bottom wall (101).

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