Open type laser head device combined with near-field optical microscope

Abstract

The utility model discloses an open type laser head device combined with a near-field optical microscope, which comprises a light source emitting device, a light source receiving device and a scanning probe, and an included angle alpha is formed between the top surface of a cantilever of the scanning probe and the horizontal plane. The plane where an AFM detection light path formed by the scanning probe between the light source emitting device and the light source receiving device is located is set as a second plane, an included angle b is formed between a first intersecting line of the top face of a cantilever of the scanning probe and the horizontal plane and a second intersecting line of the second plane and the horizontal plane, and the included angle b is larger than or equal to-30 degrees and smaller than or equal to 30 degrees. According to the scheme, the position of the AFM detection light path is adjusted, so that a spatially staggered position relationship can be formed between the plane 2 where the AFM detection light path is located and the plane where the SNOM detection light path is located, and the simultaneous detection of the two light paths on the sample cannot be influenced.

Description

Technical Field

[0001] This invention belongs to the field of scanning probe microscopy technology, and in particular relates to an open laser head device for use with near-field optical microscopy. Background Technology

[0002] Atomic force microscopy (AFM) utilizes a microcantilever to sense and amplify the interaction forces between a sharp probe on the cantilever and the atoms in the sample, thereby achieving atomic-level resolution. Its basic principle is as follows: a microcantilever, extremely sensitive to minute forces, is fixed at one end, while the other end has a tiny needle tip. The tip gently contacts the sample surface. Due to the extremely weak repulsive force between the atoms at the tip and those on the sample surface, by controlling this force to remain constant during scanning, the microcantilever with the tip will undulate perpendicularly to the sample surface, corresponding to the equipotential plane of the interaction force between the tip and the sample surface atoms. Using optical detection or tunneling current detection methods, the positional changes of the microcantilever at various scanning points can be measured, thus obtaining information about the sample surface morphology.

[0003] Near-field optical microscopy (SNOM) is a novel ultra-high resolution microscopy technique, a product of the combination of scanning probe technology and optical microscopy. In near-field optical microscopy, a probe with an aperture much smaller than the wavelength of light is used instead of an optical lens. When such a probe is placed within one wavelength of the object's surface, i.e., in the near-field region, rich submicron to nanometer optical information can be detected by probing the non-radiative field confined to the object's surface.

[0004] For scanning probes, they are mainly used in the two microscopy techniques mentioned above. Ideally, they can simultaneously detect the surface morphology and optical information of the sample. However, due to the large size of traditional AFM laser heads, they are difficult to integrate into the SNOM optical path. The AFM laser detection optical path and the SNOM excitation optical path are usually physically blocked, which causes a spatial competition problem between the AFM feedback signal and the SNOM optical signal in the existing technology. Therefore, the AFM-SNOM linkage scheme usually uses the rotating objective lens wheel to quickly switch between AFM and SNOM modes, thereby achieving the correlation of morphology-optical data of the same area.

[0005] Due to the limitations of existing technologies, obtaining both sample surface morphology and optical information simultaneously requires two steps. Therefore, a solution is needed to overcome these limitations and improve detection efficiency. Utility Model Content

[0006] The purpose of this invention is to provide an open laser head device for use with near-field optical microscopes, in order to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, one technical solution adopted by this utility model is: an open laser head device for use with near-field optical microscopes, comprising a light source emitting device, a light source receiving device, and a scanning probe. An angle α exists between the top surface of the cantilever of the scanning probe and the horizontal plane. The plane containing the AFM detection optical path formed by the scanning probe between the light source emitting device and the light source receiving device is defined as plane two. An angle b is formed between the intersection line one of the top surface of the scanning probe cantilever and the horizontal plane, and the intersection line two of plane two and the horizontal plane. The range of angle b is -30°≤b≤30°.

[0008] Preferably, the angle α between the top surface of the cantilever of the scanning probe and the horizontal plane is in the range of 10°≤a≤20°.

[0009] Preferably, both the light source emitting device and the light source receiving device are disposed on a substrate, and the substrate is provided with a light source emitting position adjustment component for adjusting the landing point of the emitted light path on the top surface of the cantilever.

[0010] Preferably, the light source emission position adjustment assembly includes a slider seat 1 placed on a substrate, a slider 1 that moves in the X-axis direction sliding on the slider seat 1, a slider 2 that slides along the Y-axis direction on the slider 1, and the light source emission device is disposed on the slider 2.

[0011] Preferably, the substrate is further provided with a position fixing component one, which includes a slider fixing component one and a slider fixing component two.

[0012] The slider fixing assembly includes an elastic element one with one end connected to the slider one and placed on the slider seat one. A threaded seat one is provided on the base plate. An adjusting screw one is threadedly connected to the threaded seat one, which abuts against the slider one and can apply a force in the opposite direction to that applied by the elastic element one.

[0013] The second slider fixing assembly includes an elastic element two with one end connected to the second slider and placed on the first slider. A threaded seat two is provided on the base plate. An adjusting screw two is threadedly connected to the threaded seat two, which abuts against the second slider and can apply force in the opposite direction to that applied by the elastic element two.

[0014] Preferably, the substrate is further provided with a light source receiving position adjustment component for adjusting the landing point of the light path reflected by the probe cantilever on the light source receiving device.

[0015] Preferably, the light source receiving position adjustment assembly includes a second slider seat placed on a substrate, a third slider that moves in the X-axis direction sliding on the second slider seat, a fourth slider that slides in the Y-axis direction on the third slider, and the light source receiving device is disposed on the fourth slider.

[0016] Preferably, the substrate is further provided with a second position fixing component, which includes a third slider fixing component and a fourth slider fixing component;

[0017] The slider three fixing assembly includes an elastic element three with one end connected to the slider three and placed on the slider seat two. A threaded seat three is provided on the base plate. An adjusting screw three is threadedly connected to the threaded seat three, which abuts against the slider three and can apply force in the opposite direction to that of the elastic element three.

[0018] The slider four fixing assembly includes an elastic element four with one end connected to the slider three. A threaded seat four is provided on the base plate. An adjusting screw four is threadedly connected to the threaded seat four, which abuts against the slider four and can apply a force in the opposite direction to that applied by the elastic element four.

[0019] The beneficial effects of this utility model are as follows: By adjusting the position of the AFM detection optical path, the second plane in which it is located can be spatially offset from the plane in which the SNOM detection optical path is located, so as not to affect the simultaneous detection of the sample by the two optical paths, effectively improving the efficiency and effect of AFM-SNOM linkage.

[0020] By limiting the range of angles on each plane, the compactness of the various structures can be ensured when assembling the equipment during AFM-SNOM linkage, thereby reducing production costs. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure and optical path of this utility model;

[0022] Figure 2 This is a sectional view of the side of this utility model;

[0023] Figure 3 This is a top view of the present invention;

[0024] Figure 4 This is a schematic diagram of the path through which the light emitting device of the light source emits light in this utility model;

[0025] Figure 5 This is a schematic diagram of the path through which the light source receiving device receives light in this utility model;

[0026] Figure 6 This is a schematic diagram illustrating the spatial contention problem in the time path of the existing AFM-SNOM linkage technology;

[0027] Figure 7 This is a schematic diagram of the AFM-SNOM linkage time path in this utility model;

[0028] In the diagram: 1. Substrate; 2. Slider seat 1; 3. Slider 1; 4. Adjusting screw 1; 5. Slider 2; 6. Adjusting screw 2; 7. Laser fixture; 8. Laser; 9. Slider seat 2; 10. Slider 3; 11. Adjusting screw 3; 12. Slider 4; 13. Adjusting screw 4; 14. Four-quadrant fixture; 15. Four-quadrant; 16. Probe fixture; 17. Scanning probe; 18. Horizontal plane; 19. Cantilever top surface; 20. AFM detection optical path; 201. Plane 1; 202. Plane 2; 21. Eyepiece; 22. SNOM detection optical path; 23. Elastic element 1; 24. Elastic element 2; 25. Elastic element 3; 26. Elastic element 4. Detailed Implementation

[0029] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention. Example

[0030] See Figure 6 In existing AFM microscopes, the detection optical path typically takes the following form: There is a certain angle between the top surface of the scanning probe 17 cantilever and the horizontal plane 18 (this angle is to ensure that only the tip of the scanning probe 17 contacts the sample, while other parts do not). The plane 201 containing the AFM detection optical path 20 emitted by the light source (i.e., the incident and reflected light rays on the top surface of the scanning probe 17 cantilever) is usually perpendicular to both the top surface 19 of the scanning probe 17 cantilever and the horizontal plane 18. For example, the probe tracking device and atomic force microscope disclosed in patent CN119044543A demonstrate the structure of a conventional atomic force microscope. This patent... Figure 1 , Figure 2 As can be seen, the plane in which the AFM detection optical path 20 emitted by the light source in this patent is located exhibits the above-mentioned positional relationship;

[0031] As can be seen from the above-mentioned technical disclosure, if the AFM microscope and the SNOM microscope are linked together, there will be a problem of optical path competition between the SNOM detection optical path 22 and the AFM detection optical path 20 during the process of the SNOM detection optical path 22 entering the eyepiece 21 in the SNOM microscope.

[0032] See Figure 1-5 , Figure 7To address the deficiencies in existing technologies, this application discloses an open laser head device for use with near-field optical microscopy. Specifically, it includes a light source emitting device, a light source receiving device, and a scanning probe 17. The scanning probe 17 is fixed to a probe holder 16, which is fixed to the outer casing of the microscope device or other fixed location. This mounting location is conventional and will not be shown here. An angle α exists between the cantilevered top surface 19 of the scanning probe 17 and the horizontal plane 18. The light source emitting device and the light source receiving device are connected via the scanning probe. The plane containing the AFM detection optical path 20 formed by the scanning probe 17 is plane two 202. An angle b is formed between the intersection line 1 of the top surface of the cantilever of the scanning probe 17 and the horizontal plane 18, and the intersection line 2 of plane two 202 and the horizontal plane 18. The range of the angle b is -30°≤b≤30°. The preferred method is b=0 degrees, which means that the intersection line 1 and the intersection line 2 are parallel. However, due to the working principle of the scanning probe 17, it will be affected by the shape of the sample and shake up and down. Therefore, in the optimal design scheme of this product, that is, when the equipment is not in use, the angle b=0°.

[0033] The angle α between the cantilever top surface 19 of the scanning probe 17 and the horizontal plane 18 is in the range of 10°≤a≤20°, and the preferred angle is 15°.

[0034] Among them, see Figure 2 The light source emitting device and the light source receiving device are both disposed on a substrate 1. The substrate 1 is provided with a light source emitting position adjustment component for adjusting the light path of the light source emitting position and the landing point of the light path on the top surface 19 of the cantilever.

[0035] Among them, see Figure 2 The light source emission position adjustment component includes a slider seat 2 placed on the substrate 1, a slider 3 that moves in the X-axis direction slides on the slider seat 2, and a slider 5 that slides along the Y-axis direction on the slider 3. The light source emission device includes a laser holder 7 and a laser 8 fixed thereon, and the laser holder 7 is fixed on the slider 5.

[0036] Among them, see Figure 2 The substrate 1 is further provided with a position fixing component 1, which includes a slider 1 fixing component and a slider 2 fixing component;

[0037] The slider fixing assembly includes an elastic element 23 with one end connected to the slider 3 and placed on the slider seat 2. The other end of the elastic element is connected to the slider seat 2. A threaded seat (not shown) is provided on the base plate 1. An adjusting screw 4 is threadedly connected to the threaded seat 1, which abuts against the slider 3 and can apply force in the opposite direction to that applied by the elastic element 23.

[0038] The second slider fixing assembly includes an elastic element 24 with one end connected to the second slider 5 and placed on the first slider 3. The other end of the elastic element is fixed to the first slider 3. A threaded seat 2 (not shown) is provided on the base plate 1. An adjusting screw 2 6 is threadedly connected to the threaded seat 2, which abuts against the second slider 5 and can apply force in the opposite direction to that applied by the elastic element 24.

[0039] Among them, see Figure 2 The substrate 1 is also provided with a light source receiving position adjustment component for adjusting the landing point of the light path reflected by the probe cantilever on the light source receiving device.

[0040] Among them, see Figure 2 The light source receiving position adjustment assembly includes a second slider seat 9 placed on the substrate 1, a third slider 10 that moves in the X-axis direction slides on the second slider seat 9, and a fourth slider 12 that slides on the third slider 10 in the Y-axis direction. The light source receiving device includes a four-quadrant fixing seat 14 and a four-quadrant 15 fixed thereon, and the four-quadrant fixing seat 14 is fixed on the fourth slider 12.

[0041] Among them, see Figure 2 The substrate 1 is further provided with a second position fixing component, which includes a third slider fixing component and a fourth slider fixing component.

[0042] The slider three fixing assembly includes an elastic element three 25, which is placed on the slider seat two 9 and connected to the slider three 10 at one end. The base plate 1 is provided with a threaded seat three (not shown). The threaded seat three is threadedly connected to an adjusting screw three 11 that abuts against the slider three 10 and can apply force in the opposite direction to that applied by the elastic element three 25.

[0043] The slider four fixing assembly includes an elastic element four 26 with one end connected to slider four 12 and placed on slider three 10. A threaded seat four (not shown) is provided on the base plate 1. An adjusting screw four 13 is threadedly connected to the threaded seat four, which abuts against slider four 12 and can apply force in the opposite direction to that applied by elastic element four 26.

[0044] In the above description, elastic elements 1 to 23 can all be tension springs, and threaded seats 1 to 4 can all be blocks with threaded through holes. Furthermore, in the accompanying drawings of this embodiment, Figure 1-5 The dotted lines in the diagram represent the light path.

[0045] Working principle and process:

[0046] This solution adjusts the position of the AFM detection optical path 20 so that its plane 202 and the plane of the SNOM detection optical path 22 are spatially offset, thus not affecting the simultaneous detection of the sample by the two optical paths.

[0047] When using the equipment applying this solution, first adjust the relevant optical path to the appropriate position using the light source emission position adjustment component and the light source position receiving component. Specifically, taking the light source emission position adjustment component as an example, in this solution, rotating the adjustment screw 4 will fix the position of the slider 3 after adjustment because its supporting force on the slider 3 is opposite to the direction of the elastic force of the elastic element 23 on the slider 3. The adjustment of the sliders 2 to 4 is the same. After the adjustment parameters are correct, the linkage of AFM-SNOM can be realized.

[0048] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. An open laser head device for use with near-field optical microscopy, comprising a light source emitting device, a light source receiving device, and a scanning probe (17), characterized in that: An angle a exists between the top surface (19) of the cantilever of the scanning probe (17) and the horizontal plane (18). The plane containing the AFM detection optical path (20) formed by the scanning probe (17) between the light source emitting device and the light source receiving device is set as plane two (202). An angle b is formed between the intersection line one of the top surface of the cantilever of the scanning probe (17) and the horizontal plane (18), and the intersection line two of plane two (202) and the horizontal plane (18).

2. The open laser head device for use with near-field optical microscopy according to claim 1, characterized in that: The angle α between the cantilever top surface (19) of the scanning probe (17) and the horizontal plane (18) is in the range of 10°≤a≤20°.

3. The open laser head device for use with near-field optical microscopy according to claim 1, characterized in that: The included angle b is in the range of -30°≤b≤30°.

4. The open laser head device for use with near-field optical microscopy according to claim 1, characterized in that: Both the light source emitting device and the light source receiving device are disposed on a substrate (1). The substrate (1) is provided with a light source emitting position adjustment component for adjusting the light path of the light source emitting position and the landing point of the light path on the top surface (19) of the cantilever.

5. The open laser head device for use with near-field optical microscopy according to claim 4, characterized in that: The light source emission position adjustment assembly includes a slider seat (2) placed on a substrate (1), a slider (3) that moves in the X-axis direction slides on the slider seat (2), a slider (5) that slides in the Y-axis direction slides on the slider (3), and the light source emission device is disposed on the slider (5).

6. The open laser head device for use with near-field optical microscopy according to claim 5, characterized in that: The substrate (1) is also provided with a position fixing component 1, which includes a slider 1 fixing component and a slider 2 fixing component; The slider fixing assembly includes an elastic element (23) with one end connected to the slider (3) and placed on the slider seat (2). A threaded seat is provided on the base plate (1). An adjusting screw (4) is threadedly connected to the threaded seat, which abuts against the slider (3) and can apply force in the opposite direction to that applied by the elastic element (23). The second slider fixing assembly includes an elastic element (24) with one end connected to the second slider (5) and placed on the first slider (3). A threaded seat is provided on the base plate (1). An adjusting screw (6) is threadedly connected to the threaded seat, which abuts against the second slider (5) and can apply force in the opposite direction to that applied by the elastic element (24).

7. The open laser head device for use with near-field optical microscopy according to claim 6, characterized in that: The substrate (1) is also provided with a light source receiving position adjustment component for adjusting the landing point of the light path reflected by the probe cantilever on the light source receiving device.

8. The open laser head device for use with near-field optical microscopy according to claim 7, characterized in that: The light source receiving position adjustment assembly includes a second slider seat (9) placed on a substrate (1), a third slider (10) that moves in the X-axis direction slides on the second slider seat (9), a fourth slider (12) that slides on the third slider (10) in the Y-axis direction, and the light source receiving device is disposed on the fourth slider (12).

9. The open laser head device for use with near-field optical microscopy according to claim 8, characterized in that: The substrate (1) is also provided with a second position fixing component, which includes a third slider fixing component and a fourth slider fixing component. The slider three fixing assembly includes an elastic element three (25) placed on the slider seat two (9) with one end connected to the slider three (10). The base plate (1) is provided with a threaded seat three. The threaded seat three is threadedly connected to an adjusting screw three (11) that abuts against the slider three (10) and can apply force in the opposite direction to that of the elastic element three (25). The slider four fixing assembly includes an elastic element four (26) placed on slider three (10) with one end connected to slider four (12). A threaded seat four is provided on the base plate (1). An adjusting screw four (13) is threadedly connected to the threaded seat four, which abuts against slider four (12) and can apply force in the opposite direction to that applied by elastic element four (26).

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