Detection module and electron microscope

Abstract

The embodiment of the utility model relates to a detection module and an electron microscope. The detection module comprises a first shell, a detector and a cooling assembly, the first shell is provided with a first accommodating cavity, a third accommodating cavity and a detection port, a separation part is arranged in the first shell and divides the interior of the first shell into the first accommodating cavity and the third accommodating cavity, and the first accommodating cavity is communicated with the exterior of the first shell through the detection port; the detector is positioned in the first accommodating cavity; the cooling assembly is located in the third containing cavity and cools the detector through the separation part. The detector and the cooling assembly are respectively located in the first accommodating cavity and the third accommodating cavity which are not communicated with each other, so that the cooling assembly which is relatively high in refrigerating capacity and has a liquid cooling function can be arranged in the third accommodating cavity, and the risk that liquid may leak into the electron microscope is avoided. A large amount of heat generated when the detector works can be rapidly absorbed by the cooling assembly through the separation part, the detector is effectively cooled, and the stability and accuracy of the detection module are improved.

Description

Technical Field

[0001] This application relates to the field of electron microscopy technology, and more particularly to a detection module and an electron microscope. Background Technology

[0002] An electron microscope is a microscopic device that uses an electron beam instead of a light beam to observe samples, providing higher resolution than traditional optical microscopes. The detector module is one of the core components of an electron microscope, responsible for receiving electron signals reflected or transmitted from the surface of the sample and converting them into observable images. The detector module typically includes a series of sophisticated electronic components and optical systems that need to operate in a high-vacuum environment to avoid scattering and absorption of the electron beam by air molecules.

[0003] In the detection module, the detector is a crucial component. Common detector types include scintillator detectors, semiconductor detectors, charge-coupled devices (CCDs), and photonics-based detectors. These detectors generate heat during operation, especially during prolonged operation of the electron microscope or in high-resolution mode, where the heat generation issue becomes particularly significant.

[0004] Since the heat generated by the detector affects its performance and stability, heat dissipation is an essential consideration in the design of the detector module. Poor heat dissipation can lead to increased detector temperature, resulting in increased noise, signal distortion, and even damage to the detector. Therefore, effective heat dissipation design is crucial for ensuring the normal operation of the electron microscope's detector module and extending its service life.

[0005] Because the detector operates within the vacuum environment of an electron microscope, thermoelectric coolers are typically used to cool it. This is because thermoelectric coolers are simple in structure, easy to miniaturize, and do not complicate the structure of the electron microscope. However, the detector generates a significant amount of heat during operation, while the cooling capacity of thermoelectric coolers is limited, resulting in less than ideal cooling performance. Using a liquid-cooled device with higher cooling capacity would require introducing liquid pipes from the outside of the electron microscope, complicating its structure and increasing the risk of liquid leakage into the microscope's interior, potentially damaging the detector and other electronic components. Utility Model Content

[0006] In view of the above problems, embodiments of this application provide a detection module and an electron microscope that overcome or at least partially solve the above problems.

[0007] According to one aspect of the embodiments of this application, a cooling assembly is provided, including a first housing, a detector, and a cooling component; the first housing has a first receiving cavity, a third receiving cavity, and a detection port; a partition is provided inside the first housing, the partition dividing the interior of the first housing into the first receiving cavity and the third receiving cavity; the detection port communicates the first receiving cavity with the outside of the first housing; the detector is located in the first receiving cavity; the cooling component is located in the third receiving cavity and cools the detector via the partition.

[0008] In one alternative embodiment, the cooling assembly includes a cooler having a cold end and a hot end, the cold end facing the partition and the hot end facing away from the partition.

[0009] In one alternative approach, the cooler is a thermoelectric cooler.

[0010] In one alternative embodiment, the cooling assembly further includes a cooling element comprising a main body, an inlet pipe, and an outlet pipe, wherein the main body contacts the hot end, and the inlet pipe and the outlet pipe are respectively connected to the interior of the main body.

[0011] In one alternative embodiment, the cooling assembly further includes a heat insulation element having a receiving cavity, the main body of the cooling assembly being housed in the receiving cavity, the cooler being at least partially housed in the receiving cavity, and the cold end of the cooler being exposed.

[0012] In one alternative embodiment, the insulation member has a first opening and a second opening communicating the receiving cavity with the outside of the insulation member, the inlet pipe passing through the first opening and the outlet pipe passing through the second opening.

[0013] In an alternative embodiment, the cooling assembly further includes a heat-conducting element disposed between the cooler and the partition, one side of the heat-conducting element contacting the cold end of the cooler, and the other side of the heat-conducting element contacting the partition.

[0014] In one alternative embodiment, the heat-conducting element has a socket for inserting a temperature sensor.

[0015] In one alternative embodiment, a support portion is further provided within the first housing, the support portion being connected to the partition portion and contacting the back of the detector.

[0016] In one alternative embodiment, the detection module further includes a second housing and a telescopic tube; the second housing has a second receiving cavity and a first through hole, the first through hole communicating the second receiving cavity with the outside of the second housing; the telescopic tube is received within the second receiving cavity, one axial end of the telescopic tube is hermetically connected to the first housing, and the other axial end of the telescopic tube is hermetically connected to the second housing; when the telescopic tube extends or retracts, the first housing moves relative to the second housing; the second receiving cavity includes a first sub-chamber, the first sub-chamber being located between the telescopic tube and the second housing or between the telescopic tube, the first housing, and the second housing; the first sub-chamber is communicating with the outside of the second housing via the first through hole; the interior of the telescopic tube is not in communication with the interior of the outer housing.

[0017] In one alternative embodiment, at least a portion of the first housing is received within the second receiving cavity. When the retractable tube is retracted, the first housing retracts into the second receiving cavity via the first through-hole. When the retractable tube is not retracted, the first housing extends out of the second receiving cavity via the first through-hole.

[0018] According to one aspect of the embodiments of this application, an electron microscope is provided, comprising: a housing and the aforementioned detection module; the housing having an entry port; a second housing hermetically connected to the housing, and a first through-hole facing the entry port; the first housing being capable of entering the interior of the housing via the entry port, the detection port communicating a first receiving cavity with the interior of the housing; a first sub-chamber communicating with the interior of the housing via the first through-hole and the entry port; and the interior of a retractable tube not communicating with the interior of the housing.

[0019] The beneficial effects of this application embodiment include: providing a detection module, including a first housing, a detector, and a cooling assembly; the first housing has a first receiving cavity, a third receiving cavity, and a detection port; a partition is provided inside the first housing, the partition dividing the interior of the first housing into the first receiving cavity and the third receiving cavity; the detection port communicates the first receiving cavity with the outside of the first housing; the detector is located in the first receiving cavity; the cooling assembly is located in the third receiving cavity, cooling the detector via the partition. Since the detector and the cooling assembly are located in the first and third receiving cavities respectively, which are not interconnected, a cooling assembly with strong cooling capacity and liquid cooling function can be provided in the third receiving cavity, avoiding the risk of liquid leakage into the electron microscope's interior. Furthermore, the large amount of heat generated by the detector during operation can be quickly absorbed by the cooling assembly with strong cooling capacity via the partition, effectively cooling the detector and improving the stability and accuracy of the detection module. Attached Figure Description

[0020] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0021] Figure 1 This is a schematic diagram of a detection module provided in an embodiment of this application from one perspective;

[0022] Figure 2 This is a schematic diagram from another perspective of the detection module provided in the embodiments of this application;

[0023] Figure 3 The embodiments of this application provide the following: Figure 1 A sectional view of P;

[0024] Figure 4 The embodiments of this application provide the following: Figure 1 A three-dimensional sectional view of P;

[0025] Figure 5 This is a schematic diagram of a cooling assembly connected to a temperature sensor provided in an embodiment of this application;

[0026] Figure 6 This is a partial schematic diagram of the cooling assembly provided in an embodiment of this application;

[0027] Figure 7 This is a schematic diagram of the heat insulation component provided in an embodiment of this application;

[0028] Figure 8This is a partial explosion diagram of a detection module including a locked component and an unlocking device provided in an embodiment of this application;

[0029] Figure 9 This is a partial schematic diagram of a detection module including a locked component and an unlocking device provided in an embodiment of this application;

[0030] Figure 10 This is a cross-sectional view of the electron microscope provided in the embodiments of this application.

[0031] The labels in the attached diagram are as follows:

[0032] 100. Detection module;

[0033] 1. First housing; 2. Second housing; 3a. First spacer; 3b. Second spacer; 4. First seal; 5. Protective component; 7. Sealing component; 8. Detector; 9. Second seal; 10. Detection circuit board; 11. Data transmission line; 12. Electrical control board; 13. First electrical connector; 14. Second electrical connector; 15. Electrical connecting rod; 16. Third housing; 17. Third seal; 18. Drive mechanism; 19. Connection mechanism; 20. Locked component; 21. Telescopic tube; 22. Fourth seal; 23. Fifth seal; 24. First sleeve; 25. Second sleeve; 26. Locking mechanism; 27. Mounting base; 28. Unlocking device; 29. ​​Cooling assembly; 30. Cooling pipe; 31. Pump; 32. Temperature sensor;

[0034] 101. First receiving cavity; 102. Detection port; 103. Third through hole; 104. Third receiving cavity; 105. Divider; 106. Second through hole; 107. Support;

[0035] 201. Second receiving cavity; 202. First sub-chamber; 204. First through hole;

[0036] 2a. Part One; 2b. Part Two;

[0037] 2s, inner cavity;

[0038] 161. Unlocking port;

[0039] 181. Drive unit; 182. Transmission unit;

[0040] 2001, Inner surface; 2002, Outer surface; 2003, Groove;

[0041] 251. Metal sleeve; 252. Nylon sleeve;

[0042] 261. Driver; 262. Locking tongue; 2621. Protrusion; 26211. Bevel;

[0043] 271. Mounting holes;

[0044] 281. Fourth through hole;

[0045] 291. Refrigerator; 292. Cooling component; 293. Thermal insulation component; 294. Thermal conductive component;

[0046] 2911 Cold end; 2912 Hot end; 2913 Power cord;

[0047] 2921. Main body; 2922. Liquid inlet pipe; 2923. Liquid outlet pipe;

[0048] 2931. Receiving cavity; 2932. First opening; 2933. Second opening; 2934. Stop.

[0049] 2941. Socket;

[0050] 1000. Electron microscope;

[0051] 200, outer casing; 200s, entry hole. Detailed Implementation

[0052] To facilitate understanding of this application, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed to" another element, it can be directly attached to the other element, or one or more intermediate elements may exist between them. When an element is described as being "connected to" another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "vertical," "horizontal," "left," "right," "inner," "outer," and similar expressions used in this specification are for illustrative purposes only.

[0053] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0054] Please see Figures 1 to 4This application provides a detection module 100, which includes a first housing 1, a second housing 2, a first spacer 3a, a second spacer 3b, a first seal 4, a protective component 5, a sealing component 7, a detector 8, a second seal 9, a detection circuit board 10, a data transmission line 11, an electrical control board 12, a first electrical connector 13, a second electrical connector 14, an electrical connecting rod 15, a third housing 16, a third seal 17, a drive mechanism 18, a connecting mechanism 19, a locked component 20, a telescopic tube 21, a fourth seal 22, a fifth seal 23, a first sleeve 24, a second sleeve 25, a locking mechanism 26, a mounting base 27, an unlocking device 28, a cooling assembly 29, a cooling pipe 30, and a pump 31.

[0055] like Figure 10 As shown, the detector module 100 is used in the electron microscope 1000. To ensure stable operation of the electronic components within the electron microscope 1000, the vacuum pressure within the electron microscope 1000 is typically 10... -5 Up to 10 -8 Pa. The electron microscope 1000 has a housing 200. The housing 200 has an access hole 200s. When the probe module 100 is installed in the electron microscope 1000, the first housing 1 can enter the interior of the housing 200 through the access hole 200s.

[0056] The structure, function, and connection relationship of each component in the detection module 100 are briefly described below:

[0057] A first housing 1 is inserted into a second housing 2, and the first housing 1 is movable relative to the second housing 2. A second spacer 3a is disposed between the telescopic tube 21 and the second housing 2. A second spacer 3b is disposed between the first housing 1 and the second housing 2. A first seal 4 is disposed in the second housing 2. When the detection module 100 is installed in the electron microscope 1000, the second housing 2 is hermetically connected to the outer shell 200 of the electron microscope 1000, and the first seal 4 is used to seal between the second housing 2 and the outer shell 200. A protective component 5 is disposed between the first housing 1 and the second housing 2. A sealing component 7 is disposed inside the first housing 1. A second seal 9 seals between the first housing 1 and the sealing component 7. A detection circuit board 10 is located inside the first housing 1 and is electrically connected to the detector 8. An electrical connecting rod 15 is sealed and inserted into the sealing component 7. A first electrical connector 13 is located inside the first housing 1, and the first electrical connector 13 and the second electrical connector 14 are electrically connected to the two ends of the electrical connecting rod 15. The detection circuit board 10 is electrically connected to the first electrical connector 13. Data transmission line 11 is electrically connected to second electrical connector 14. Control board 12 is disposed within third housing 16, and data transmission line 11 is electrically connected to control board 12. Third housing 16 covers at least a portion of second housing 2. Third seal 17 is used for sealing between two parts of second housing 2. Drive mechanism 18 is disposed in second housing 2, and connecting mechanism 19 connects one axial end of telescopic tube 21 to drive mechanism 18, which drives first housing 1 to move relative to second housing 2. Locking member 20 is connected to one axial end of telescopic tube 21 via connecting mechanism 19, and is used to fix data transmission line 11. One axial end of telescopic tube 21 is hermetically connected to the end of first housing 1 that inserts into second housing 2 via fourth seal 22. The other axial end of telescopic tube 21 is hermetically connected to second housing 2 via fifth seal 23, and telescopic tube 21 extends and retracts when first housing 1 moves relative to second housing 2. A first sleeve 24 is nested outside the telescopic tube 21, and a second sleeve 25 is nested inside the telescopic tube 21. A locking mechanism 26 is disposed in the second housing 2 and is used to lock the locked component 20 to restrict the position of the first housing 1. A mounting base 27 is disposed in the second housing 2, and an unlocking device 28 is used to cooperate with the mounting base 27 to unlock the locked component 20 by the locking mechanism 26. A cooling assembly 29 is disposed in the first housing 1 and is used to cool the detector 8. A cooling pipe 30 connects the cooling assembly 29 and the pump 31 so that the coolant flowing in the cooling pipe 30 exchanges heat with the cooling assembly 29. The cooling pipe 30 is fixed to the locked component 20. When the detection module 100 is installed in the electron microscope 1000, the detector 8 can receive the electronic signals reflected or transmitted from the surface of the sample in the electron microscope 1000 and convert them into observable images for user use.

[0058] The first housing 1 and detector 8 described above have a first receiving cavity 101, a detection port 102, a third receiving cavity 104, and a second through hole 106. A partition 105 is provided inside the first housing 1, and this partition 105 has a third through hole 103. The detector 8 is housed in the first receiving cavity 101, and the detector 8 is positioned corresponding to the detection port 102. The detection port 102 connects the first receiving cavity 101 to the outside of the first housing 1, allowing the electron beam inside the electron microscope 1000 to pass through, so that the detector 8 can receive electron signals reflected or transmitted from the surface of the sample. The third through hole 103 is formed in the partition 105, and the third through hole 103 allows communication between the first receiving cavity 101 and the third receiving cavity 104. The partition 105 divides the interior of the first housing 1 into a first receiving cavity 101 and a third receiving cavity 104. The third receiving cavity 104 communicates with the interior of the retractable tube 21 via a second through hole 106 and an opening at one end of the retractable tube 21. The second through hole 106 allows the detector 8 to transmit data with the electronic control board 12. The third receiving cavity 104 is used to house the cooling assembly 29.

[0059] It is worth noting that in some embodiments, a support portion 107 is also provided inside the first housing 1. The support portion 107 is connected to the partition portion 105 and contacts the back side of the detector 8. In other embodiments, the support portion 107 may not be provided. In this case, the partition portion 105 directly contacts the back side of the detector 8.

[0060] For the aforementioned sealing component 7 and second sealing component 9, both the partition 105 and the sealing component 7 are disposed within the first housing 1. The partition 105 supports the detector 8 via the support 107. The sealing component 7 hermetically seals the third through hole 103 via the second sealing component 9, thereby forming a first receiving cavity 101 between the partition 105, the sealing component 7, and the first housing 1. When the second housing 2 is hermetically connected to the outer shell 200 of the electron microscope 1000, the detection port 102 communicates the first receiving cavity 101 with the interior of the electron microscope 1000, allowing a vacuum to be formed within the first receiving cavity 101 to ensure the accuracy and precision of the sample detection by the detection module 100.

[0061] In some embodiments, the third through-hole may not be formed in the partition 105, but rather in a portion of the first housing 1 that allows direct communication between the first receiving cavity 101 and the interior of the telescopic tube 21. Thus, without the sealing member 7, the first receiving cavity 101 communicates with the interior of the telescopic tube 21 directly through the third through-hole and an opening at one end of the telescopic tube 21, without passing through the third receiving cavity 104.

[0062] It is worth noting that, in some embodiments, the pressure of the vacuum formed within the first receiving cavity 101 is 10. -5 Up to 10-8 Pa.

[0063] The detection circuit board 10, data transmission line 11, control board 12, first electrical connector 13, second electrical connector 14, and multiple electrical connecting rods 15 are configured as follows: the detection circuit board 10 is located within the first receiving cavity 101; the first electrical connector 13 and the second electrical connector 14 are respectively located on both sides of the sealing component 7; a portion of the data transmission line 11 is located within the second receiving cavity 201 of the second housing 2; the detection circuit board 10 electrically connects the detector 8 and the first electrical connector 13; the multiple electrical connecting rods 15 hermetically penetrate the sealing component 7; and the first electrical connector 13 and the second electrical connector 14 are respectively electrically connected to the two ends of the multiple electrical connecting rods 15. The data transmission line 11 is electrically connected between the second electrical connector 14 and the control board 12. Through this configuration, the detection module 100 can efficiently transmit the electrical signals received by the detector 8 to the control board 12 for processing, thereby converting them into observable images. The first electrical connector 13 and the second electrical connector 14 achieve a stable and sealed connection through the electrical connecting rods 15, ensuring the stability and reliability of signal transmission. In addition, the data transmission line 11 makes the connection between the control board 12 and the detection circuit board 10 more flexible.

[0064] Regarding the aforementioned cooling assembly 29, cooling pipe 30, and pump 31, the cooling assembly 29 is disposed within the third receiving cavity 104 of the first housing 1. The third receiving cavity 104 is separated from the first receiving cavity 101. Specifically, the first receiving cavity 101 is formed between the partition 105, one side of the sealing member 7, and the first housing 1, while the third receiving cavity 104 is formed between the other side of the partition 105, the sealing member 7, and the first housing 1. Since the detector 8 and the liquid-cooled cooling assembly 29 are located in the non-communicating first receiving cavity 101 and third receiving cavity 104, even if the coolant in the cooling assembly 29 leaks, it is difficult to damage the detector 8, the detection circuit board 10, etc., disposed in the first receiving cavity 101. Furthermore, when the second housing 2 is hermetically connected to the outer shell 200 of the electron microscope 1000 and the first receiving cavity 101 is in communication with the interior of the electron microscope 1000, the risk of liquid leakage into the interior of the electron microscope 1000 is avoided. In addition, the large amount of heat generated by the detector 8 during operation can be quickly absorbed by the cooling component 29 with strong cooling capacity through the partition 105, effectively cooling the detector 8 and improving the stability and accuracy of the detection module 100.

[0065] A portion of the cooling pipe 30 is disposed within the second housing 2. The cooling pipe 30 connects the cooling assembly 29 and the pump 31. The pump 31 pumps the coolant into the cooling assembly 29 through the cooling pipe 30 to achieve heat exchange between the coolant and the cooling assembly 29.

[0066] It is worth noting that the detector 8 of the detection module 100 is disposed on the partition 105 via the support 107. Therefore, the heat generated by the detector 8 can be transferred to the cooling assembly 29 through the support 107 and the partition 105 for heat exchange, thereby reducing the temperature of the detector 8 and ensuring the accuracy and reliability of the detector 8.

[0067] Please refer to the above-mentioned cooling component 29 as well. Figures 3 to 7 The cooling assembly 29 is located in the third receiving cavity 104 of the first housing 1 and cools the detector 8 via the partition 105 of the first housing 1.

[0068] In some embodiments, the cooling assembly 29 includes a cooler 291, a cooling element 292, a heat insulation element 293, and a heat-conducting element 294. The cooler 291 is disposed between the heat-conducting element 294 and the cooling element 292. The heat-conducting element 294 is disposed on the side of the partition 105 facing away from the detector 8 and is used to conduct heat from the detector 8 to the cooler 291. The cooling element 292 is used for heat exchange with the cooler 291. The heat insulation element 293 houses at least a portion of the cooling element 292. The cooling assembly 29 effectively cools the detector 8, ensuring its stable operation within a suitable temperature range.

[0069] The cooler 291 has a cold end 2911 and a hot end 2912. The cold end 2911 faces the partition 105 and is used to cool the detector 8. The hot end 2912 is disposed away from the partition 104.

[0070] In some embodiments, the cooler 291 is a thermoelectric cooler, which can generate a temperature difference between the cold end 2911 and the hot end 2912, thereby achieving effective cooling of the detector 8.

[0071] Understandably, the power cord 2913 of the cooler 291 is electrically connected to the control board 12.

[0072] The cooling component 292 is in contact with the hot end 2912 of the refrigerator 291, and the cooling component 292 exchanges heat with the hot end 2912 of the refrigerator 291.

[0073] In some embodiments, the cooling component 292 includes a main body 2921, an inlet pipe 2922, and an outlet pipe 2923. A cooling channel is provided inside the main body 2921, and the inlet pipe 2922 and the outlet pipe 2923 are respectively connected to the cooling channel. The cooling pipe 30 connects the inlet pipe 2922 and the outlet pipe 2923 to the pump 31.

[0074] The heat insulation component 293 is provided with a receiving cavity 2931, which is used to accommodate at least a portion of the cooling component 292, such as the main body 2921. An inlet pipe 2922 and an outlet pipe 2923 extend out of the heat insulation component 293. The heat insulation component 293 effectively isolates the heat from the cooling component 292 from the external environment.

[0075] It is worth noting that in some embodiments, the receiving cavity 2931 is also used to house at least a portion of the cooler 291, and the cold end 2921 of the cooler 291 is exposed.

[0076] It is worth noting that in some embodiments, the heat insulation member 293 is provided with a first opening 2932 and a second opening 2933 that connects to the receiving cavity 2931, with the liquid inlet pipe 2922 passing through the first opening 2932 and the liquid outlet pipe 2923 passing through the second opening 2933.

[0077] It is worth noting that in some embodiments, a stop 2934 is formed between the first opening 2932 and the second opening 2933, and the main body 2921 of the cooling member 292 abuts against the stop 2934. The stop 2934 restricts the position of the cooling member 292 and fixes the cooling member 292.

[0078] The heat-conducting element 294 is attached to the cold end 2911 of the cooler 291 and is disposed between the cooler 291 and the partition 105 of the first housing 1. One side of the heat-conducting element 294 is in contact with the cold end 2921 of the cooler 291, and the other side of the heat-conducting element 294 is in contact with the partition 105 of the first housing 1. The heat-conducting element 294 conducts heat from the detector 8 to the cooler 291.

[0079] In some embodiments, the heat-conducting element 294 covers the opening of the receiving cavity 2931 of the heat insulation element 293, which makes the cooling assembly 29 integrated and enhances the structural stability of the cooling assembly 29.

[0080] In some embodiments, the heat-conducting component 294 is provided with a socket 2941 for mounting a temperature sensor 32. The temperature sensor 32 is connected to the electronic control board 12, which monitors the temperature of the heat-conducting component 294 and adjusts the operating state of the cooler 291 based on the monitoring results to ensure that the cooling assembly 29 can effectively maintain the detector 8 within a suitable operating temperature range. The installation of the temperature sensor 32 enables the cooling system to monitor temperature changes in real time, thereby achieving precise temperature control.

[0081] It is worth noting that when a support portion 107 is also provided inside the first housing 1, the support portion 107 transfers the heat generated by the detector 8 to the partition portion 105, and then to the cooling assembly 29.

[0082] In some embodiments, the heat-conducting element 294 is made of a highly thermally conductive material, such as copper or aluminum, to ensure that heat can be rapidly conducted from the detector 8 to the cooler 291.

[0083] Please see Figure 3 and Figure 4 Regarding the second housing 2, the second spacer 3b, the first seal 4, and the protective component 5, the second housing 2 has a second receiving cavity 201 and a first through hole 204, the first through hole 204 communicating the second receiving cavity 201 with the outside of the second housing 2. The second receiving cavity 201 is used to receive the retractable tube 21.

[0084] The first housing 1 is inserted into the second receiving cavity 201 of the second housing 2, that is, at least a portion of the first housing 1 is received within the second receiving cavity 201. The first housing 1 is movable relative to the second housing 2, so that the first housing 1 is received within the second receiving cavity 201 of the second housing 2, or so that the first housing 1 extends out from the second receiving cavity 201 of the second housing 2. The second spacer 3b is disposed between the first housing 1 and the second housing 2, located within the first sub-cavity 202. The placement of the second spacer 3b avoids friction between the first housing 1 and the second housing 2 due to contact with each other, ensuring smooth movement of the first housing 1 relative to the second housing 2, and extending the service life of the detection module 100.

[0085] It is worth noting that in some embodiments, the second spacer 3b is made of a wear-resistant material.

[0086] The first sealing element 4 is disposed at the edge of the first through hole 204 of the second housing 2. When the second housing 2 is airtightly connected to the outer shell 200 of the electron microscope 1000, the first sealing element 4 can ensure the sealing between the second housing 2 and the outer shell 200.

[0087] The protective component 5 is disposed between the first housing 1 and the second housing 2. In some embodiments, the protective component 5 is made of lead. The protective component 5 can effectively shield the radiation inside the electron microscope 1000 from leaking into the external environment.

[0088] In some embodiments, the second housing 2 includes a first portion 2a and a second portion 2b connected together, with a second spacer 3b disposed between the first portion 2a and the first housing 1. A third seal 17 seals the first portion 2a and the second portion 2b. The first portion 2a is a cylindrical shape with openings at both ends, one end of which is a first through hole 204. The second portion 2b has an inner cavity 2s, one end of which is an open end connected to the opening at the other end of the first portion 2a, and the other end is a closed end. The second portion 2b is used to house the telescopic tube 21 and the drive mechanism 18.

[0089] The drive mechanism 18 described above drives the first housing 1 to move relative to the second housing 2. The drive mechanism 18 includes a drive unit 181 and a transmission unit 182.

[0090] In some embodiments, the output end of the drive unit 181 is connected to the transmission unit 182, and the drive unit 181 drives the first housing 1 to move relative to the second housing 2 via the transmission unit 182. The transmission unit 182 is directly or indirectly connected to one end of the axial direction of the telescopic tube 21 within the telescopic tube 21.

[0091] In some embodiments, both the drive unit 181 and the transmission unit 182 are disposed within the telescopic tube 21.

[0092] In some embodiments, such as Figure 3 , 4 As shown, the drive unit 181 is disposed outside the second housing 2, and the transmission unit 182 passes through the second housing 2 (the closed end of the inner cavity 2s of the second part 2b), passes through the opening at the other end of the telescopic tube 21, and is directly or indirectly connected to one end of the telescopic tube 21 in the axial direction.

[0093] In some embodiments, the drive unit 181 is a cylinder and the transmission unit 182 is a drive rod.

[0094] It is worth noting that the specific implementation of the drive mechanism 18 is not limited to the above structure, and may also have other forms. For example, the drive mechanism 18 includes a drive motor, a transmission gear and a drive component. The drive motor is connected to the drive component through the transmission gear to drive the drive component to move, so that the first housing 1 connected to the drive component moves relative to the second housing 2.

[0095] The connecting mechanism 19 is connected to one axial end of the telescopic tube 21, and the transmission part 182 of the drive mechanism 18 is indirectly connected to one axial end of the telescopic tube 21 via the connecting mechanism 19. The connection mechanism 19 improves the ease of connecting the transmission part 182 of the drive mechanism 18 to the telescopic tube 21.

[0096] In some embodiments, the transmission part 182 is directly connected to one end of the telescopic tube 21 in the axial direction within the telescopic tube 21.

[0097] Please refer to the following: Figure 3 , Figure 4 and Figure 8Regarding the aforementioned locked component 20, the locked component 20 is connected to the connecting mechanism 19 within the telescopic tube 21, that is, the locked component 20 is indirectly connected to one axial end of the telescopic tube 21 via the connecting mechanism 19. When the driving mechanism 18 drives the first housing 1 to move relative to the second housing 2, the first housing 1, the connecting mechanism 19, and the locked component 20 move together.

[0098] In some embodiments, the locking member 20 is directly connected to one axial end of the telescopic tube 21 within the telescopic tube 21.

[0099] In some embodiments, such as Figure 3 , Figure 4 As shown, the locking component 20 passes through the second housing 2 (the closed end of the inner cavity 2s of the second part 2b), passes through the opening at the other end of the telescopic tube 21, and is directly or indirectly connected to one end of the telescopic tube 21 in the axial direction.

[0100] In some embodiments, the locking component 20 is disposed within the telescopic tube 21.

[0101] Additionally, the locking component 20 is used to secure the data transmission line 11.

[0102] In some embodiments, such as Figure 3 , Figure 4 , Figure 8 and Figure 9 As shown, the locking component 20 is a U-shaped part, with its opening facing the first housing 1, meaning the inner surface 2001 of the locking component 20 faces the first housing 1, and its outer surface 2002 faces away from the first housing 1. A portion of the data transmission line 11 is fixed to the outer surface 2002 of the locking component 20, so that when the first housing 1 moves relative to the second housing 2, this portion of the data transmission line 11 moves together with the locking component 20, the connecting mechanism 19, one axial end of the telescopic tube 21, and the first housing 1. This avoids excessive bending or stretching of the data transmission line 11 due to its movement relative to the first housing 1, ensuring the reliability of the data transmission line 11 and the stability and reliability of the connection between the data transmission line 11 and the second electrical connector 14 and the control board 12.

[0103] In addition, a portion of the cooling pipe 30 connected to the cooling assembly 29 is fixed to the inner surface 2001 of the locking component 20. With this arrangement, when the first housing 1 moves relative to the second housing 2, this portion of the cooling pipe 30 moves together with the locking component 20, the connecting mechanism 19, one axial end of the telescopic pipe 21, and the first housing 1, thereby avoiding excessive bending or pulling due to the movement of the cooling pipe 30 relative to the first housing 1, ensuring the reliability of the cooling pipe 30 in use, and ensuring the stability and reliability of the connection between the cooling pipe 30 and the cooling assembly 29 and the pump 31.

[0104] Please see Figure 3 , Figure 4 Regarding the aforementioned telescopic tube 21, fourth seal 22, and fifth seal 23, the telescopic tube 21 is housed within the second receiving cavity 201 of the second housing 2. Specifically, one axial end of the telescopic tube 21 is hermetically connected to the portion of the first housing 1 inserted into the second housing 2 via the fourth seal 22, and the other axial end of the telescopic tube 21 is hermetically connected to the closed end of the inner cavity 2s of the second portion 2b of the second housing 2 via the fifth seal 23. When the telescopic tube 21 extends or retracts, the first housing 1 moves relative to the second housing 2. A first sub-chamber 202 is formed between the telescopic tube 21 and the second housing 2, or between the telescopic tube 21, the first housing 1, and the second housing 2. The first sub-chamber 202 communicates with the outside of the second housing 2 via the first through hole 204. The interior of the telescopic tube 21 is not in communication with the first receiving cavity 101 or the first sub-chamber 202. When the second housing 2 is hermetically connected to the outer shell 200 of the electron microscope 1000, a vacuum is formed within the first sub-chamber 202.

[0105] It is worth noting that, in some embodiments, the vacuum pressure formed in the first sub-chamber 202 is 10. -5 Up to 10 -8 Pa.

[0106] At least a portion of the first housing 1 is housed in the second receiving cavity 201 of the second housing 2. When the telescopic tube 21 is retracted, the first housing 1 is retracted into the second receiving cavity 201 through the first through hole 204 of the second housing 2. When the telescopic tube 21 is not retracted, the first housing 1 extends out of the second receiving cavity 201 through the first through hole 204.

[0107] It is worth noting that in some embodiments, the telescopic tube 21 is a corrugated tube or an elastic rubber tube.

[0108] It is worth noting that in some embodiments, a first spacer 3a is provided between one end of the telescopic tube 21 and the second housing 2. The first spacer 3a is located in the first sub-chamber 202. By providing the first spacer 3a, friction between the telescopic tube 21 and the second housing 2 due to contact with each other is avoided, ensuring the smooth movement of the telescopic tube 21 relative to the second housing 2, and extending the service life of the detection module 100.

[0109] It is worth noting that in some embodiments, the first spacer 3a is made of a wear-resistant material.

[0110] For the first sleeve 24 and the second sleeve 25 mentioned above, as Figure 3 , Figure 4 As shown, the first sleeve 24 is nested outside the telescopic tube 21, and the first sleeve 24 is located inside the first sub-chamber 202. The telescopic tube 21 can extend and retract relative to the first sleeve 24; the second sleeve 25 is nested inside the telescopic tube 21.

[0111] One of the first sleeve 24 and the second sleeve 25 is adjacent to one end of the telescopic tube 21 and can move together with one end of the telescopic tube 21, while the other of the first sleeve 24 and the second sleeve 25 is adjacent to the other end of the telescopic tube 21. When the telescopic tube 21 is not retracted, the first sleeve 24 and the second sleeve 25 are spaced apart in the axial direction of the telescopic tube 21. When the telescopic tube 21 is retracted, the second sleeve 25 is inserted into the first sleeve 24.

[0112] Specifically, in some embodiments, such as Figure 3 , Figure 4 As shown, the first sleeve 24 is disposed in the inner cavity 2s of the second part 2b of the second housing 2 and connected to the closed end of the inner cavity 2s. The second sleeve 25 is connected to one end of the telescopic tube 21 and can move together with one end of the telescopic tube 21. In other embodiments, the second sleeve 25 is disposed in the inner cavity 2s of the second part 2b of the second housing 2 and connected to the closed end of the inner cavity 2s. The first sleeve 24 is connected to one end of the telescopic tube 21 and can move together with one end of the telescopic tube 21.

[0113] When the second housing 2 is hermetically connected to the outer shell 200 of the electron microscope 1000, a vacuum is formed in the first sub-chamber 202 outside the telescopic tube 21, while the inside of the telescopic tube 21 is not a vacuum. This means there is a pressure difference between the inside and outside of the telescopic tube 21, thus posing a risk of deformation during telescopic movement. The first sleeve 24 and the second sleeve 25 restrict the telescopic tube 21, reducing the risk of deformation and failure.

[0114] It is worth noting that in some embodiments, such as Figure 9As shown, the first sleeve 24 is divided into two parts.

[0115] It is worth noting that in some embodiments, the first sleeve 24 is made of nylon.

[0116] It is worth noting that in some embodiments, such as Figure 3 , Figure 4 As shown, the second sleeve 25 includes a metal sleeve 251 and a nylon sleeve 252 connected to each other. The metal sleeve 251 is connected to one axial end of the telescopic tube 21, with the metal sleeve 251 positioned close to the first housing 1 and the nylon sleeve 252 positioned away from the first housing 1. The metal sleeve 251 improves the structural strength of the second sleeve 25, while the nylon sleeve 252 effectively reduces wear caused by the second sleeve 25 potentially contacting the telescopic tube 21, thus extending the service life of the telescopic tube 21. In other embodiments, the metal sleeve 251 of the second sleeve 25 may be connected to the closed end of the inner cavity 2s of the second part 2b of the second housing 2, positioned away from the first housing 1, while the nylon sleeve 252 is positioned close to the first housing 1.

[0117] Please refer to the following: Figure 3 , Figure 4 , Figure 8 and Figure 9 Regarding the aforementioned locking mechanism 26, the locking mechanism 26 is disposed outside the second housing 2, and the locking mechanism 26 is used to lock the first housing 1 relative to the second housing 2.

[0118] In some embodiments, the locking mechanism 26 includes an actuator 261 and a latch 262, the actuator 261 being capable of driving the latch 262 to move back and forth. The locked component 20 has a groove 2003. When the latch 262 is aligned with the groove 2003, the actuator 261 is capable of driving the latch 262 to insert into the groove 2003, thereby locking the locked component 20. Since the locked component 20 is disposed on the connecting mechanism 19, which is connected to one axial end of the telescopic tube 21, and the axial end of the telescopic tube 21 is connected to the first housing 1, the locking mechanism 26 can lock the first housing 1.

[0119] In some embodiments, the actuator 261 is an electromagnet. When the actuator 261 is de-energized and loses its magnetism, the locking tongue 262 inserts into the groove 2003 of the locked component 20. At this time, the first housing 1 is stationary relative to the second housing 2, that is, the locking mechanism 26 locks the first housing 1 relative to the second housing 2. When the actuator 261 is energized and becomes magnetic, it attracts the locking tongue 262 to disengage (not insert) from the groove 2003 of the locked component 20, allowing the first housing 1 to move relative to the second housing 2. The locking mechanism 26 improves the ease of use of the detection module 100.

[0120] It is worth noting that in some embodiments, the locked component 20 has two grooves 2003 formed on its two sides respectively, and the number of locking mechanisms 26 is also two. The two locking mechanisms 26 are disposed opposite to each other on both sides of the locked component 20, thereby improving the stability of the locking mechanism 26 locking the locked component 20.

[0121] The mounting base 27 is disposed on the second housing 2, the driver 261 is disposed on the mounting base 27, the mounting base 27 has a mounting hole 271, and the locking tongue 262 can pass through the mounting hole 271 to be inserted into the groove 2003 of the locked component 20.

[0122] It is worth noting that in some embodiments, when there are two locking mechanisms 26, there are also two mounting seats 27. The mounting holes 271 of the two mounting seats 27 are arranged opposite to each other, and the mounting hole 271 of each mounting seat 27 is used for the locking tongue 262 of one locking mechanism 26 to pass through.

[0123] In some embodiments, the locked component 20, the locking mechanism 26, and the mounting base 27 are all disposed within the telescopic tube 21.

[0124] The unlocking device 28 is used to manually operate the locking mechanism 26 to unlock the locked component 20. Specifically, the locking mechanism 26 has a protrusion 2621 connected to the latch 262, and the protrusion 2621 has a slope 26211. The unlocking device 28 has a fourth through hole 281, into which the protrusion 2621 can be inserted. Normally, the unlocking device 28 is inserted from the unlocking port 161 of the third housing 16 and connected to the mounting base 27, with the protrusion 2621 inserted into the fourth through hole 281. At this time, the latch 262 is inserted into the groove 2003 of the locked component 20. When the unlocking device 28 is manually pulled out of the third housing 16, the unlocking device 28 abuts against the slope 26211 and drives the slope 26211, causing the protrusion 2621 to drive the latch 262 to retract, and the latch 262 disengages from the groove 2003 of the locked component 20, thereby unlocking the locked component 20 by the locking mechanism 26.

[0125] It is worth noting that in some embodiments, when there are two locking mechanisms 26 and two mounting bases 27, the number of fourth through holes 281 of the unlocking device 28 is also two, with the two fourth through holes 281 arranged opposite to each other, and each fourth through hole 281 is used to allow the protrusion 2621 of a locking mechanism 26 to be inserted.

[0126] It is worth noting that in some embodiments, the unlocking device 28 is detachably connected to the second housing 2 by screws.

[0127] In this embodiment, the detection module 100 comprises a first housing 1, a second housing 2, a detector 8, and a telescopic tube 21. The first housing 1 has a first receiving cavity 101 and a detection port 102, the detection port 102 connecting the first receiving cavity 101 to the outside of the first housing 1. The second housing 2 has a second receiving cavity 201 and a first through hole 204, the first through hole 204 connecting the second receiving cavity 201 to the outside of the second housing 2. The detector 8 is located inside the first receiving cavity 101. The telescopic tube 21 is received inside the second receiving cavity 201, and one axial end of the telescopic tube 21 is connected to the first housing 101. A first housing 1 is airtightly connected, and the other end of a telescopic tube 21 is airtightly connected to a second housing 2. When the telescopic tube 21 extends or retracts, the first housing 1 moves relative to the second housing 2. The second receiving cavity 201 includes a first sub-cavity 202, which is located between the telescopic tube 21 and the second housing 2, or between the telescopic tube 21, the first housing 1, and the second housing 2. The first sub-cavity 202 communicates with the outside of the second housing 2 through a first through hole 204. The inside of the telescopic tube 21 is not connected to the first receiving cavity 101 or the first sub-cavity 202. This detection module 100, by providing the telescopic tube 21, ensures that the first housing 1 of the receiving detector 8 can move relative to the second housing 2, and also forms the first sub-cavity 202 between the telescopic tube 21 and the second housing 2, or between the telescopic tube 21, the first housing 1, and the second housing 2. Therefore, it is ensured that when the first housing 1 moves relative to the second housing 2, there is no tight contact between the telescopic tube 21 and the second housing 2, or between the telescopic tube 21, the first housing 1, and the second housing 2, thus preventing the generation of significant friction and reducing the difficulty of driving the first housing 1 to move. Furthermore, the transmission part 182 (e.g., the drive rod) of the drive mechanism 18 is located inside the telescopic tube 21 and does not contact the telescopic tube. Therefore, when the drive mechanism 18 drives the first housing 1 to move relative to the second housing 2, no friction is generated in the transmission part 182, further reducing the difficulty of driving the first housing 1 to move.

[0128] Embodiments of this application also provide an electron microscope 1000. For example... Figure 10 As shown, the electron microscope 1000 includes a housing 200 and the aforementioned detector module 100. Typically, the vacuum pressure inside the electron microscope 1000 is 10... -5 Up to 10 -8 Pa.

[0129] The outer casing 200 has an inlet hole 200s. A second casing 2 is hermetically connected to the outer casing 200; specifically, the second casing 2 of the detection module 100 is hermetically connected to the electron microscope 1000 via a first seal 4. Furthermore, the first through hole 204 faces the inlet hole 200s. In some embodiments, the line connecting the geometric center of the first through hole 204 and the geometric center of the inlet hole 200s is perpendicular to the plane containing both the first through hole 204 and the inlet hole 200s.

[0130] The first housing 1 of the detection module 100 can enter the interior of the outer shell 200 through the inlet 200s. The detection port 102 connects the first receiving cavity 101 to the interior of the outer shell 200. The first sub-chamber 101 is connected to the interior of the outer shell 200 through the first through hole 204 and the inlet 200s. At this time, the first receiving cavity 101 and the first sub-chamber 202 also become the same vacuum as inside the electron microscope 1000. The vacuum in the first receiving cavity 101 is conducive to the normal operation of the detector 8. In addition, since the two ends of the telescopic tube 21 are hermetically connected to the first housing 1 and the second housing 2 respectively, the interior of the telescopic tube 21 is not connected to the interior of the outer shell 200, and the interior of the telescopic tube 21 still maintains atmospheric pressure. Furthermore, since the interior of the retractable tube 21 is not connected to the first receiving cavity 101 and the first sub-cavity 202, when the probe module 100 is installed on the electron microscope 1000, although the first receiving cavity 101 and the first sub-cavity 202 are connected to the interior of the outer shell 200 and become a vacuum, the interior of the retractable tube 21 is not connected to the interior of the outer shell 200. Therefore, the transmission part 182 located inside the retractable tube 21 will not enter and be exposed to the vacuum inside the electron microscope 1000. Thus, it is not necessary to set a sealing ring between the outer shell 200 and the transmission part 182 of the electron microscope 1000 as in the prior art. Moreover, the gas adsorbed on the surface of the transmission part 182 will not be released into the vacuum inside the electron microscope 1000, thus avoiding adverse effects on the vacuum inside the electron microscope 1000 due to wear of the sealing ring and release of gas.

[0131] It should be noted that while preferred embodiments of this application are provided in the specification and accompanying drawings, this application can be implemented in many different forms and is not limited to the embodiments described herein. These embodiments are not intended to impose additional limitations on the content of this application; their purpose is to provide a more thorough and comprehensive understanding of the disclosure of this application. Furthermore, the above-described technical features can be combined with each other to form various embodiments not listed above, all of which are considered to be within the scope of this application's specification. Moreover, those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A detection module, characterized in that, include: First housing, detector, and cooling assembly; The first housing has a first receiving cavity, a third receiving cavity, and a detection port. A partition is provided inside the first housing, which divides the interior of the first housing into the first receiving cavity and the third receiving cavity. The detection port connects the first receiving cavity to the outside of the first housing. The detector is located inside the first containment cavity; The cooling assembly is located within the third containment cavity and cools the detector via the partition.

2. The detection module according to claim 1, characterized in that, The cooling assembly includes a refrigerator; The refrigerator has a cold end and a hot end, with the cold end facing the partition and the hot end facing away from the partition.

3. The detection module according to claim 2, characterized in that, The refrigerator is a thermoelectric refrigerator.

4. The detection module according to claim 2, characterized in that, The cooling assembly further includes a cooling element, which includes a main body, an inlet pipe, and an outlet pipe. The main body is in contact with the hot end, and the inlet pipe and the outlet pipe are respectively connected to the interior of the main body.

5. The detection module according to claim 4, characterized in that, The cooling assembly further includes a heat insulation element having a receiving cavity, the main body of the cooling assembly being housed in the receiving cavity, the cooler being at least partially housed in the receiving cavity, and the cold end of the cooler being exposed.

6. The detection module according to claim 5, characterized in that, The heat insulation component has a first opening and a second opening that connects the receiving cavity to the outside of the heat insulation component, the liquid inlet pipe passes through the first opening, and the liquid outlet pipe passes through the second opening.

7. The detection module according to claim 2, characterized in that, The cooling assembly further includes a heat-conducting element disposed between the refrigerator and the partition, with one side of the heat-conducting element contacting the cold end of the refrigerator and the other side of the heat-conducting element contacting the partition.

8. The detection module according to claim 7, characterized in that, The heat-conducting component has a socket for inserting a temperature sensor.

9. The detection module according to claim 1, characterized in that, The first housing is further provided with a support portion, which is connected to the partition portion and contacts the back of the detector.

10. The detection module according to any one of claims 1-9, characterized in that, The detection module also includes a second housing and a retractable tube; The second housing has a second receiving cavity and a first through hole, the first through hole communicating the second receiving cavity with the outside of the second housing; The telescopic tube is housed within the second receiving cavity. One axial end of the telescopic tube is airtightly connected to the first housing, and the other axial end of the telescopic tube is airtightly connected to the second housing. When the telescopic tube extends or retracts, the first housing moves relative to the second housing. The second receiving cavity includes a first sub-cavity, which is located between the telescopic tube and the second housing or between the telescopic tube, the first housing, and the second housing. The first sub-cavity communicates with the outside of the second housing through the first through hole. The inside of the telescopic tube is not connected to the first receiving cavity or the first sub-cavity.

11. The detection module according to claim 10, characterized in that, At least a portion of the first housing is housed within the second receiving cavity. When the retractable tube retracts, the first housing retracts into the second receiving cavity through the first through hole. When the retractable tube is not retracted, the first housing extends out of the second receiving cavity through the first through hole.

12. An electron microscope, characterized in that, include: The housing and the detection module as described in claim 10 or 11; The outer casing has an entry hole; The second housing is hermetically connected to the outer housing, and the first through hole faces the inlet hole; The first housing can enter the interior of the outer shell through the access hole, and the probe port communicates the first receiving cavity with the interior of the outer shell; The first sub-chamber communicates with the interior of the outer casing via the first through-hole and the inlet hole; The interior of the expandable tube is not connected to the interior of the outer shell.

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