Clamping crystal support and clamping device for silicon rod cutting
By employing a foolproof clamping crystal holder and an upward locking mechanism during the silicon rod cutting process, the problems of clamping device wear and crystal orientation deviation were solved, thus achieving accuracy and stability of silicon wafer crystal orientation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- MCL ELECTRONICS MATERIALS
- Filing Date
- 2025-06-27
- Publication Date
- 2026-05-19
AI Technical Summary
In the current silicon rod slicing process, friction between the clamping tray and the clamping device causes wear, and the silicon rod is easily installed in the wrong direction, resulting in crystal orientation deviation.
The clamping wafer holder features a foolproof design, which prevents incorrect orientation by setting three positioning grooves of different shapes on the clamping head and combining them with positioning protrusions on the clamping device; the pull-up locking method avoids wear and ensures that the silicon rod is installed correctly.
It effectively avoids crystal orientation deviation caused by incorrect orientation during silicon rod cutting, reduces wear, and ensures accurate crystal orientation of silicon wafers after cutting.
Smart Images
Figure CN224255762U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of silicon rod processing technology, specifically relating to a clamping crystal holder and clamping device for cutting silicon rods. Background Technology
[0002] Silicon rods are a common raw material in the semiconductor processing field, and silicon rod slicing is a necessary step in the semiconductor processing technology. In the silicon rod slicing process, clamping trays are used to fix the silicon rods to form silicon rod assemblies, and then the silicon rod assemblies are firmly clamped on the clamping device at the dicing station, thereby maintaining positional stability during the silicon rod dicing process and achieving stable dicing.
[0003] The current clamping crystal holder has a clamping head with a trapezoidal cross-section. The corresponding clamping device is provided with a clamping groove. One inner wall of the clamping groove in the width direction is inclined and can fit with the inclined surface of the clamping head. The other inner wall of the clamping groove is a vertical plane. Moreover, the width of the clamping groove is greater than the width of the clamping head so that a wedge can be inserted between the clamping head and the vertical plane. The inclined surface of the wedge can fit with the inclined surface of the clamping head. A tightening screw is screwed into the clamping groove from one side and acts on the wedge. As the tightening screw is tightened, the clamping head is clamped in the clamping groove by the wedge.
[0004] When fixing silicon rods and clamping crystal holders, they are generally attached by adhesive. When the silicon rod is attached to the bottom of the clamping crystal holder, it needs to be deflected at a certain angle to ensure that the crystal orientation of the silicon wafer after cutting can reach the target value. Therefore, the above-mentioned clamping method using wedges has the following defects: 1. Friction will occur between the clamping crystal holder and the clamping device. Over time, friction will cause wear and tear, resulting in crystal orientation deviation; 2. The orientation of the clamping crystal holder cannot be guaranteed when it is inserted into the clamping groove of the clamping device. If the head and tail of the silicon rod are reversed, the crystal orientation of the silicon wafer after cutting will become the opposite of the target value. Utility Model Content
[0005] The purpose of this invention is to provide a clamping crystal holder and clamping device for cutting silicon rods. By optimizing the structure of the clamping crystal holder and adopting a foolproof design, the crystal orientation error after cutting is avoided due to incorrect installation direction. Furthermore, the upward locking clamping method overcomes the crystal orientation deviation caused by wear during the clamping process in the prior art.
[0006] To achieve the above objectives, the first technical solution adopted by this utility model is: a clamping crystal holder for cutting silicon rods, comprising a base and a clamping head disposed on the upper part of the base. The lower surface of the base is used to fix and connect the silicon rod to be cut. The upper surface of the clamping head is provided with three parallel grooves at intervals. The three grooves extend along the length direction of the clamping head, and both ends of the three grooves open at both ends of the clamping head. The three grooves include a locking groove and a first positioning groove and a second positioning groove located on both sides of the locking groove. The first positioning groove and the second positioning groove have different cross-sectional shapes.
[0007] Furthermore, the cross-section of the first positioning groove is U-shaped, V-shaped, semi-circular, or an arc shape smaller than a semi-circle, and the cross-section of the second positioning groove is U-shaped, V-shaped, semi-circular, or an arc shape smaller than a semi-circle.
[0008] Furthermore, the locking groove is a T-shaped groove with an inverted T-shaped cross-section, forming locking step surfaces on both sides of its opening.
[0009] Furthermore, the cross-section of the clamping head is an inverted trapezoid, or the cross-section of the clamping head is rectangular.
[0010] The second technical solution proposed by this utility model is: a clamping device for clamping the aforementioned clamping crystal tray, including a support, a clamping groove disposed on the lower surface of the support, and a lifting mechanism disposed on the upper surface of the support. The clamping groove is used to accommodate the clamping head. A first positioning protrusion and a second positioning protrusion are also provided on the lower surface of the support, located within the clamping groove. The first positioning protrusion convexly and concavely engages with the first positioning groove on the clamping head, and the second positioning protrusion convexly and concavely engages with the second positioning groove on the clamping head. A locking head is also provided between the first positioning protrusion and the second positioning protrusion. The upper end of the locking head is fixedly connected to the telescopic end of the lifting mechanism passing through the support. The locking head is used to cooperate with the locking groove to lock the clamping crystal tray.
[0011] Furthermore, an anti-detachment strip is provided on each side of the lower opening of the clamping groove, and the anti-detachment strip can provide support for the clamping head.
[0012] Furthermore, the height of the clamping groove is greater than the height of the clamping head, and the width of the clamping groove is greater than the width of the clamping head.
[0013] Furthermore, the lifting mechanism can be a hydraulic cylinder, a pneumatic cylinder, an electric push rod, or a screw mechanism.
[0014] Furthermore, a mounting position is provided on the support for connecting one of the clamping crystal holders. Two lifting mechanisms are provided on the mounting position, each lifting mechanism is connected to a locking head, or the two lifting mechanisms are connected to the same elongated locking head.
[0015] Furthermore, the mounting position is provided on the support in two places, and each of the two mounting positions is provided with the clamping groove, or the two mounting positions share a through groove as the clamping groove.
[0016] The beneficial effects of this utility model are as follows: 1. This utility model, through the two types of positioning grooves provided on the clamping head of the crystal tray, can avoid directional errors during installation. Because, if a directional error occurs, the positioning protrusions in the clamping device cannot form a convex-concave fit with the corresponding positioning grooves, and in this case, the clamping head cannot be inserted into the clamping grooves of the clamping device. This foolproof design can effectively avoid directional errors during installation, ensuring that the cut silicon wafers conform to the required crystal orientation.
[0017] 2. This utility model uses a clamping device to clamp the crystal tray by pulling and locking it up. It also combines two positioning grooves with their corresponding positioning heads for lateral positioning, thereby avoiding wear during the clamping process of the crystal tray and ensuring that the crystal orientation will not deviate after cutting. Attached Figure Description
[0018] Figure 1 This is an isometric view of the clamping crystal holder structure described in Embodiment 1 of this utility model;
[0019] Figure 2 This is an end view of the clamping crystal holder described in Embodiment 1 of this utility model;
[0020] Figure 3 This is a schematic diagram of the clamping device described in Embodiment 2 of this utility model;
[0021] Figure 4 This is a schematic diagram showing the clamping device described in Embodiment 2 of this utility model in use when cutting silicon rods;
[0022] Figure 5 This is a side view of another embodiment of the clamping device described in Embodiment 2 of this utility model when cutting silicon rods;
[0023] The markings in the diagram are: 1. Base, 2. First positioning groove, 3. Locking groove, 4. Second positioning groove, 5. Clamping head, 6. Locking step surface, 7. Inclined surface, 8. Stop step surface, 9. Clamping groove, 10. Locking head, 11. Support, 12. First positioning protrusion, 13. Hydraulic cylinder, 14. Second positioning protrusion, 15. Anti-slip strip;
[0024] 100. Silicon rod; 200. Clamping crystal holder; 300. Clamping device. Detailed Implementation
[0025] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments, but this should not be construed as limiting the present invention in any way.
[0026] Example 1
[0027] See attached document Figure 1 , 2 As shown, a clamping tray for cutting silicon rods is generally elongated, with a base 1 at the bottom. The lower surface of the base 1 is used to fix the silicon rod to be cut, typically by bonding. A clamping head 5 is centrally located at the top of the base 1 in the width direction. The clamping head 5 has an inverted trapezoidal cross-section. The lower part of the clamping head 5 is connected to the base 1 by a transition section, and the clamping head 5, the transition section, and the base 1 are integral structures. Three parallel grooves are arranged at intervals along the width direction on the upper surface of the clamping head 5. These three grooves extend along the length direction of the clamping head 5, and both ends of the three grooves open onto the end faces of the clamping head 5. These three grooves include a centrally located locking groove 3 and a first positioning groove 2 and a second positioning groove 4 located on both sides of the locking groove 3. The locking groove 3 has an inverted T-shaped cross-section, with locking step surfaces 6 formed on both sides of its opening. These surfaces cooperate with the clamping device to lock the crystal tray onto the clamping device. The first positioning groove 2 is a U-shaped positioning groove with a U-shaped cross-section. The second positioning groove 4 is a V-shaped positioning groove with a V-shaped cross-section. The first positioning groove 2 is used to engage with the first positioning protrusion on the clamping device, and the second positioning groove 4 is used to engage with the second positioning protrusion on the clamping device.
[0028] When the crystal tray is connected to the clamping device, the crystal tray needs to be inserted into the clamping groove of the clamping device along its length. If the direction of the crystal tray is correct, the first positioning protrusion of the clamping device can slide into the first positioning groove 2, and the second positioning protrusion of the clamping device can slide into the second positioning groove 4. However, when the crystal tray is installed in reverse, the first positioning protrusion and the second positioning protrusion cannot be installed into the corresponding positioning grooves. This can avoid the situation where the silicon wafer has the wrong crystal orientation after cutting due to the wrong orientation of the silicon rod.
[0029] In other embodiments, the cross-sections of the first positioning groove 2 and the second positioning groove 4 can be set to other shapes, as long as the cross-sectional shapes of the first positioning groove 2 and the second positioning groove 4 are different. For example, the cross-section of the first positioning groove 2 or the second positioning groove 4 can be set to a semi-circle or an arc shape smaller than a semi-circle, or a trapezoid, etc.
[0030] In other embodiments, the cross-section of the clamping head 5 may also be rectangular.
[0031] Example 2
[0032] like Figure 3As shown, a clamping device is used to clamp the crystal tray described in Embodiment 1. Its structure includes a support 11, a clamping groove 9 disposed on the lower surface of the support 11, and a hydraulic cylinder 13 disposed on the upper surface of the support 11. The cross-sectional shape of the clamping groove 9 is the same as the cross-sectional shape of the clamping head 5 of the crystal tray, but the internal dimensions of the clamping groove 9, including its width and height, are greater than the width and height of the clamping head 5. The lower opening of the clamping groove 9 is designed to accommodate the connection position between the crystal tray and the silicon rod. An anti-detachment strip 15 is provided on each side of the lower opening of the clamping groove 9. After the clamping head 5 of the crystal tray is inserted into the clamping groove 9, the anti-detachment strip 15 can cooperate with the stop step surface 8 of the clamping head 5 to provide support for the clamping head 5 and prevent the crystal tray from falling off.
[0033] Inside the clamping groove 9, a strip-shaped first positioning protrusion 12 and a second positioning protrusion 14 are also provided on the lower surface of the support 11. The cross-sectional shape of the first positioning protrusion 12 and the second positioning protrusion 14 matches the cross-sectional shape of the first positioning groove 2 and the second positioning groove 4 on the clamping head 5. That is, the cross-section of the first positioning protrusion 12 is rectangular and can be inserted into the first positioning groove 2 with a U-shaped cross-section to form a convex-concave fit; the cross-section of the second positioning protrusion 14 is V-shaped and can be inserted into the second positioning groove 4 with a V-shaped cross-section to form a convex-concave fit.
[0034] Furthermore, a locking head 10 that can extend and retract vertically is provided between the first positioning protrusion 12 and the second positioning protrusion 14. The cross-section of the locking head 10 is an inverted T-shaped head, which can form a stop engagement with the locking groove 3 on the clamping head 5. When the locking head 10 moves upward, it can pull the clamping head 5 upward, thereby realizing the locking and fixing of the crystal tray on the clamping device.
[0035] The hydraulic cylinder 13 is bolted to the upper surface of the support 11. The piston rod of the hydraulic cylinder 13 extends downward and passes through a through hole provided on the support 11, and is fixedly connected to the upper end of the locking head 10. The upper end of the locking head 10 and the piston rod can be connected by a threaded connection. For example, an internal threaded hole can be machined on the end face of the piston rod, and an external thread can be machined on the upper end of the locking head 10 to achieve a threaded connection between the two. By extending and retracting the hydraulic cylinder 3, the locking head 10 is driven to move up and down, thereby locking and unlocking the clamping head 5. The height of the clamping groove 9 is greater than the height of the clamping head 5, which provides room for the clamping head 5 to move up and down during locking and unlocking. The width of the clamping groove 9 is greater than the width of the clamping head 5, which can prevent sliding friction between the two sides of the clamping head 5 and the inner wall of the clamping groove 9, thereby avoiding wear caused by friction.
[0036] Preferably, since the locking groove 3 on the clamping head 5 is elongated, to ensure reliable locking, the locking groove 3 is locked from both ends by two locking heads 10, each locking head 5 connected to a hydraulic cylinder 13. Thus, two hydraulic cylinders 13 are provided on the support 11 at the position for connecting a clamping crystal tray. Alternatively, the locking head 10 can be configured as an elongated structure, with two hydraulic cylinders 13 respectively connected to both ends of the length direction of the locking head 10.
[0037] like Figure 4 As shown, when using the clamping crystal holder 200 and clamping device 300 of this utility model for the installation and positioning of silicon rod cutting, the clamping crystal holder 200, which is fixed with silicon rod 100, is inserted into the clamping groove 9 of the clamping device 300 from one end. During insertion, it is necessary to ensure that the locking head 10 is inserted into the locking groove 3. After insertion (i.e., the clamping head 5 is fully inserted into the clamping groove 9), the hydraulic cylinder 13 is activated to pull the locking head 10 upward. The locking head 10 pulls the clamping head 5 upward a certain distance, and the top surface of the clamping head 5 is pressed against the lower surface of the support 11. At this time, the clamping crystal holder 200 is locked and fixed.
[0038] During this process, the first positioning groove 2 and the first positioning protrusion 12 engage in a convex-concave fit, and the second positioning groove 4 and the second positioning protrusion 14 engage in a convex-concave fit to position the clamping head 5. If the installation direction of the clamping crystal tray 200 is incorrect, the first positioning protrusion 12 cannot be inserted into the first positioning groove 2, and the second positioning protrusion 14 cannot be inserted into the second positioning groove 4, resulting in the clamping head 5 of the clamping crystal tray 200 being unable to be inserted into the clamping groove 9. The installer can then know that the installation direction is incorrect and complete the installation correctly after adjusting the direction.
[0039] In other embodiments, if the clamping head 5 of the clamping tray 200 has a rectangular or other cross-sectional shape, the clamping groove 9 on the clamping device 300 is also set to a rectangular or other matching shape.
[0040] In other embodiments, a lifting mechanism capable of linear movement, such as a cylinder, electric push rod, or screw mechanism, can be used to replace the hydraulic cylinder to drive the locking head to move up and down.
[0041] In other implementations, such as Figure 5 As shown, the support 11 can be provided with two mounting positions, each connected to a clamping crystal tray 200, thus completing the clamping and positioning of the two clamping crystal trays 200 for clamping and cutting the two silicon rods. At this time, the clamping device 300 is equipped with four hydraulic cylinders, each responsible for clamping and fixing the two clamping crystal trays 200 at the two mounting positions. The clamping groove 9 can be a through groove passing through both mounting positions, or two clamping grooves 9 with a certain interval, which can be selected according to the actual situation.
[0042] The above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Those skilled in the art should understand that modifications or equivalent substitutions can be made to the specific implementation of this utility model with reference to the above embodiments. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model are within the protection scope of the pending claims.
Claims
1. A clamping crystal holder for cutting silicon rods, comprising a base (1) and a clamping head (5) disposed on the upper part of the base (1), wherein the lower surface of the base (1) is used to fix and connect the silicon rod (100) to be cut, and the upper surface of the clamping head (5) is provided with three parallel grooves spaced apart, the three grooves extending along the length direction of the clamping head (5), and both ends of the three grooves opening onto the two end faces of the clamping head (5), characterized in that: The three grooves include a locking groove (3) and a first positioning groove (2) and a second positioning groove (4) located on both sides of the locking groove (3). The first positioning groove (2) and the second positioning groove (4) have different cross-sectional shapes.
2. The clamping crystal holder according to claim 1, characterized in that: The cross-section of the first positioning groove (2) is U-shaped, V-shaped, semi-circular or smaller than a semi-circular arc, and the cross-section of the second positioning groove (4) is U-shaped, V-shaped, semi-circular or smaller than a semi-circular arc.
3. The clamping crystal holder according to claim 1, characterized in that: The locking groove (3) is a T-shaped groove with an inverted T-shaped cross-section, forming locking step surfaces (6) on both sides of its groove opening.
4. The clamping crystal holder according to claim 1, characterized in that: The cross-section of the clamping head (5) is an inverted trapezoid, or the cross-section of the clamping head (5) is a rectangle.
5. A clamping device for clamping a crystal holder as described in any one of claims 1-4, characterized in that: The device includes a support (11), a clamping groove (9) on the lower surface of the support (11), and a lifting mechanism on the upper surface of the support (11). The clamping groove (9) is used to accommodate the clamping head (5). The lower surface of the support (11) is also provided with a first positioning protrusion (12) and a second positioning protrusion (14) located in the clamping groove (9). The first positioning protrusion (12) is in convex-concave engagement with the first positioning groove (2) on the clamping head (5), and the second positioning protrusion (14) is in convex-concave engagement with the second positioning groove (4) on the clamping head (5). A locking head (10) is also provided between the first positioning protrusion (12) and the second positioning protrusion (14). The upper end of the locking head (10) is fixedly connected to the telescopic end of the lifting mechanism passing through the support (11). The locking head (10) is used to cooperate with the locking groove (3) to lock the clamping crystal holder (200).
6. The clamping device according to claim 5, characterized in that: An anti-detachment strip (15) is provided on each side of the lower opening of the clamping groove (9), and the anti-detachment strip (15) can support the clamping head (5).
7. The clamping device according to claim 5, characterized in that: The height of the clamping groove (9) is greater than the height of the clamping head (5), and the width of the clamping groove (9) is greater than the width of the clamping head (5).
8. The clamping device according to claim 5, characterized in that: The lifting mechanism is a hydraulic cylinder (13), a pneumatic cylinder, an electric push rod, or a threaded screw mechanism.
9. The clamping device according to claim 5, characterized in that: A mounting position is provided on the support (11) for connecting a clamping crystal holder (200). Two lifting mechanisms are provided on the mounting position, each lifting mechanism is connected to a locking head (10), or the two lifting mechanisms are connected to the same elongated locking head (10).
10. The clamping device according to claim 9, characterized in that: The mounting positions are provided on the support (11) in two ways. Each mounting position is provided with a clamping groove (9), or the two mounting positions share a through groove as a clamping groove (9).