Aluminum nitride ceramic substrate sintering furnace

Abstract

The utility model relates to the field of sintering furnaces, in particular to an aluminum nitride ceramic substrate sintering furnace which comprises a furnace body, a left furnace door and a right furnace door are arranged on the left side and the right side of the furnace body respectively, a plurality of supporting columns are fixed to the bottom of the furnace body, and a heat preservation layer, a heating body and a sagger are sequentially arranged in the furnace body from outside to inside. The heat preservation layer comprises a side enclosure wall part, a left end cover part and a right end cover part, the left end cover part is connected with the left end of the side enclosure wall part in an openable and closable mode through a telescopic mechanism, a rotating rod is rotationally connected to the right end cover part, a clamping mechanism is fixed to the right end of the rotating rod, and a fan is fixed to the portion, between the clamping mechanism and the right end cover part, of the rotating rod. According to the sintering furnace, the heat preservation effect is greatly improved in the material sintering process, and after material sintering is finished, the cooling efficiency and effect are greatly improved; and through the arrangement of the fan, air cooling is conducted on the interior of the furnace body, and the cooling efficiency and effect are further improved.

Description

Technical Field

[0001] This utility model relates to the field of sintering furnaces, and in particular to a sintering furnace for aluminum nitride ceramic substrates. Background Technology

[0002] An aluminum nitride ceramic substrate sintering furnace is a specialized device for sintering aluminum nitride ceramic substrates. It is primarily used to perform high-temperature treatment on aluminum nitride ceramic powder or substrates to achieve densification and metallization. Patent application number CN202322629682.X discloses an aluminum nitride ceramic sintering furnace. The furnace in this patent cools the material primarily by opening the furnace door after sintering, connecting an inlet pipe installed on one side of the material feeding support frame to an external pipeline, allowing cooling gas to enter, and then spraying it towards the material through outlet holes on the inner side of the cooling pipe and support cooling pipe. This method of cooling the material has the following drawbacks: the temperature inside the aluminum nitride ceramic substrate sintering furnace is often very high during the sintering process, typically around 1900 degrees Celsius, so it is not possible to cool the material after sintering is complete. Immediately opening the furnace door requires a cooling process inside the furnace. The door can only be opened when the temperature inside the furnace drops to a safe level (for example, below 200 degrees Celsius). However, the furnace body is often very airtight and the material is covered with an insulation layer. It takes a long time for the temperature inside the furnace to naturally cool from 1900 degrees Celsius to below 200 degrees Celsius. Therefore, the method of directly spraying cooling gas onto the material by opening the furnace door in the aforementioned patent to cool the material requires waiting for the temperature inside the furnace to drop to a safe level before opening the furnace door. This not only results in extremely low cooling efficiency but also extremely poor cooling effect. Therefore, there is an urgent need for a sintering furnace that can rapidly cool the material inside the furnace after sintering. Utility Model Content

[0003] (a) Technical problems to be solved

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an aluminum nitride ceramic substrate sintering furnace, which solves the problems existing in the prior art and greatly improves the cooling efficiency and cooling effect of the materials in the furnace.

[0005] (II) Technical Solution

[0006] To achieve the above objectives, this utility model provides the following technical solution: an aluminum nitride ceramic substrate sintering furnace, comprising a furnace body, with a left furnace door and a right furnace door respectively on the left and right sides of the furnace body, and several support columns fixed at the bottom of the furnace body. The furnace body contains, from the outside to the inside, an insulation layer, a heating element, and a sagger. The insulation layer includes a side wall portion, a left end cover portion, and a right end cover portion. The left end cover portion is connected to the left end of the side wall portion through a telescopic mechanism that can be opened and closed. A rotating rod is rotatably connected to the right end cover portion, and a clamping mechanism is fixed to the right end of the rotating rod. A fan is fixed to the rotating rod portion between the clamping mechanism and the right end cover portion, and a rotating mechanism is provided on the clamping mechanism.

[0007] Preferably, the clamping mechanism includes a chuck fixedly connected to the rotating rod, a pull rod fixedly attached to the chuck, and a piston rod of the first hydraulic cylinder fixedly attached to the right end of the pull rod.

[0008] Preferably, the rotating mechanism includes a main shaft that encloses the chuck and the pull rod. The main shaft has a cavity for the chuck and the pull rod to move. A motor is fixed on the outer wall of the main shaft. The motor is fixed in a fixed seat. The fixed seat is fixed on the right furnace door. The first oil cylinder is rotatably connected to the fixed seat.

[0009] Preferably, the telescopic mechanism includes a second hydraulic cylinder fixed to the left furnace door, and a left end cap is fixed to the piston rod of the second hydraulic cylinder.

[0010] Preferably, the sagger includes a graphite box that is fixedly connected to the furnace body and has an opening at the right end, and the graphite box is slidably connected to a material placement plate.

[0011] Preferably, the left end of the rotating rod extends out of the right end cover, and a graphite baffle is rotatably connected to the left end of the rotating rod, which can block the right end opening of the graphite box.

[0012] Preferably, the heating element includes a side heating element and a left heating element, both of which are connected to heating electrodes.

[0013] Preferably, a temperature measuring instrument is connected to the sagger.

[0014] Preferably, several connecting columns are fixed on the inner bottom surface of the furnace body, and the connecting columns are fixed through the insulation layer, the heating element and the sagger.

[0015] Preferably, the insulation layer is made of graphite hard felt or graphite soft felt.

[0016] (III) Beneficial Effects

[0017] 1. This utility model configures the insulation layer as consisting of a side wall portion, a left end cover portion, and a right end cover portion. The left end cover portion is detachably connected to the left end of the side wall portion, and the right end cover portion is detachably connected to the right end of the side wall portion. During the sintering process, the left end cover portion closes to the left end of the side wall portion, and the right end cover portion closes to the right end of the side wall portion, which greatly increases the insulation effect and improves the efficiency and effect of sintering. After the material sintering is completed, the left end cover portion separates from the left end of the side wall portion, and the right end cover portion separates from the right end of the side wall portion. This greatly accelerates the flow of heat from the inside of the insulation layer to the outside of the insulation layer, and the temperature outside the insulation layer is much lower than the temperature inside, which greatly improves the efficiency and effect of cooling. Furthermore, the installation of a fan for air cooling inside the furnace further enhances the efficiency and effect of cooling.

[0018] 2. This utility model configures the sagger as a graphite box body and a material placement plate that is retractably connected to the graphite box body, and sets a graphite baffle at the left end of the rotating rod. When material is placed on the material placement plate and pushed back into the graphite box body, the right furnace door is closed. At this time, the clamping mechanism is activated, causing the rotating rod to move to the left, which in turn drives the right end cover and the graphite baffle to the left. When the right end cover closes with the side wall, the graphite baffle precisely blocks the right end opening of the graphite box body and simultaneously abuts against the right end of the material placement plate. This process not only protects the material placement plate... It provides excellent limiting function, preventing movement, and greatly increases the sealing of the sagger during sintering, thereby improving its heat preservation. After sintering, the rotating rod moves to the right, causing the graphite baffle to move to the right. At this time, the right end opening of the graphite box opens, allowing the hot air inside the sagger to escape and accelerating the cooling inside the sagger. When the rotating rod rotates, because the rotating rod and the graphite baffle are rotatably connected, the graphite baffle remains stationary during the rotation of the rod. This provides excellent protection for the graphite baffle and prevents it from breaking during rotation. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall design of this utility model.

[0020] Figure 2 This is a schematic diagram of the overall design of this utility model.

[0021] Figure 3 This is a schematic diagram of the right end cover, rotating rod, clamping mechanism, fan, rotating mechanism and fan blades of this utility model.

[0022] Figure 4 This is a schematic diagram of the sagger of this utility model.

[0023] Figure 5 This utility model Figure 4 A schematic diagram showing the material placement plate in the pulled-out state.

[0024] In the diagram: 1-furnace body, 2-left furnace door, 3-right furnace door, 4-support column, 5-insulation layer, 6-heating element, 7-sagger, 8-side wall, 9-left end cover, 10-right end cover, 11-telescopic mechanism, 12-rotating rod, 13-clamping mechanism, 14-fan, 15-rotating mechanism, 16-clamp, 17-pull rod, 18-first hydraulic cylinder, 19-main shaft, 20-motor, 21-fixed seat, 22-second hydraulic cylinder, 23-graphite box, 24-material placement plate, 25-graphite baffle, 26-side heating element, 27-left heating element, 28-heating electrode, 29-thermometer, 30-connecting column. Detailed Implementation

[0025] The following will refer to the appendix in the embodiments of this utility model. Figure 1-5 The technical solutions in the embodiments of this utility model are clearly and completely described. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0026] This utility model provides a technical solution: an aluminum nitride ceramic substrate sintering furnace, including a furnace body 1, with a left furnace door 2 and a right furnace door 3 respectively on the left and right sides of the furnace body 1. Several support columns 4 are fixed at the bottom of the furnace body 1. The furnace body 1 is provided with an insulation layer 5, a heating element 6 and a sagger 7 from the outside to the inside. The insulation layer 5 includes a side wall part 8, a left end cover part 9 and a right end cover part 10. The left end cover part 9 is connected to the left end of the side wall part 8 through a telescopic mechanism 11. A rotating rod 12 is rotatably connected to the right end cover part 10. A clamping mechanism 13 is fixed at the right end of the rotating rod 12. A fan 14 is fixed on the part of the rotating rod 12 between the clamping mechanism 13 and the right end cover part 10. A rotating mechanism 15 is provided on the clamping mechanism 13. During operation, the right furnace door 3 is first opened, and the material is placed in the sagger 7. Then, the telescopic mechanism 11 and the clamping mechanism 13 are activated simultaneously. The telescopic mechanism 11 closes the left end cover 9 with the left end of the side wall 8, and the clamping mechanism 13 closes the right end cover 10 with the right end of the side wall 8. Then, the heating element 6 is activated to heat the material. After heating is completed, the telescopic mechanism 11 and the clamping mechanism 13 are activated simultaneously. The telescopic mechanism 11 separates the left end cover 9 from the left end of the side wall 8, and the clamping mechanism 13 separates the right end cover 10 from the right end of the side wall 8. Then, the rotating mechanism 15 is activated, which drives the clamping mechanism 13 to rotate, which in turn drives the rotating rod 12 to rotate, which in turn drives the fan 14 to rotate, thus cooling the material inside the furnace. This invention configures the insulation layer 5 as consisting of a side wall portion 8, a left end cover portion 9, and a right end cover portion 10. The left end cover portion 9 is closable to the left end of the side wall portion 8, and the right end cover portion 10 is closable to the right end of the side wall portion 8. During the sintering process, the left end cover portion 9 closes to the left end of the side wall portion 8, and the right end cover portion 10 closes to the right end of the side wall portion 8, which greatly increases the insulation effect and improves the efficiency and effect of sintering. After the sintering is completed, the left end cover portion 9 separates from the left end of the side wall portion 8, and the right end cover portion 10 separates from the right end of the side wall portion 8. This greatly accelerates the flow of heat from the inside of the insulation layer 5 to the outside of the insulation layer 5, and the temperature outside the insulation layer 5 is much lower than the temperature inside, which greatly improves the efficiency and effect of cooling. Furthermore, the fan 14 provides air cooling inside the furnace body 1, further improving the efficiency and effect of cooling. The furnace body 1 is designed with a double-layer structure, with a water-cooled jacket inside. The water-cooled jacket circulates cooling water, which keeps the temperature of the furnace body 1 at a low and safe level, and also facilitates cooling of the furnace after sintering. The sintering furnace is also equipped with conventional features such as a vacuum system and an atmosphere charging system, which are existing technologies and will not be described in detail here.

[0027] The clamping mechanism 13 includes a chuck 16 fixedly connected to the rotating rod 12. A pull rod 17 is fixed to the chuck 16, and the piston rod of the first hydraulic cylinder 18 is fixed to the right end of the pull rod 17. This is the specific structure of the clamping mechanism 13. The left and right movement of the chuck 16 is achieved by the extension and retraction of the first hydraulic cylinder 18, which in turn achieves the left and right movement of the rotating rod 12 fixed inside the chuck 16, and ultimately achieves the opening and closing of the right end cap 10 and the right end of the side wall portion 8 provided on the rotating rod 12.

[0028] The rotating mechanism 15 includes a main shaft 19 that encloses a chuck 16 and a pull rod 17. The main shaft 19 has a cavity within which the chuck 16 and pull rod 17 can move. A motor 20 is fixed to the outer wall of the main shaft 19 and is fixed within a fixed base 21, which is fixed to the right furnace door 3. The first hydraulic cylinder 18 is rotatably connected to the fixed base 21. The chuck 16 is a three-jaw chuck, which is existing technology and will not be described further here. The chuck 16 and pull rod 17 can move left and right within the main shaft 19 via the first hydraulic cylinder 18. When the chuck 16 is outside the main shaft 19, it is in an open state. When the chuck 16 is pulled into the main shaft 19 by the pull rod 17, it will slowly tighten until it can no longer be pulled. At this point, the chuck 16 and the main shaft 19 are locked together, thus fixing the entire clamping mechanism 13 to the main shaft 19. At this time, the motor 20 starts, driving the main shaft 19 to rotate, which in turn drives the clamping mechanism 13 to rotate, which in turn drives the rotating rod 12 to rotate, and finally drives the fan 14 fixed on the rotating rod 12 to rotate. The clamping mechanism 13 and the rotating mechanism 15 are a whole, realizing both the opening and closing of the right end cover 10 and the rotation of the fan 14 when the right end cover 10 is open.

[0029] The telescopic mechanism 11 includes a second hydraulic cylinder 22 fixed to the left furnace door 2, and a left end cover 9 is fixed to the piston rod of the second hydraulic cylinder 22. The telescopic mechanism 11 realizes the opening and closing of the left end cover 9, specifically through the second hydraulic cylinder 22.

[0030] The sagger 7 includes a graphite box 23 fixedly connected to the furnace body 1 and open at the right end. A material placement plate 24 is retractably connected to the graphite box 23. This configuration is equivalent to making the sagger 7 a drawer type. When materials need to be placed before sintering, the right furnace door 3 is opened first, and then the material placement plate 24 is pulled outwards. This allows most of the material placement plate 24 to be pulled out of the furnace body 1, facilitating material placement. Several rollers can be provided on the inner bottom surface of the graphite box 23. The front and rear ends of the rollers are rotatably connected to the front and rear inner walls of the graphite box 23, respectively. The material placement plate 24 is placed directly on the rollers, facilitating its removal.

[0031] The left end of the rotating rod 12 extends out of the right end cover 10, and a graphite baffle 25 is rotatably connected to the left end of the rotating rod 12. The graphite baffle 25 can block the right end opening of the graphite box 23. After the material placed on the material placement plate 24 is pushed back into the graphite box 23, the right furnace door 3 is closed. At this time, the clamping mechanism 13 is activated, causing the rotating rod 12 to move to the left, which in turn drives the right end cover 10 and the graphite baffle 25 to the left. When the right end cover 10 closes with the side wall 8, the graphite baffle 25 just blocks the right end opening of the graphite box 23 and abuts against the right end of the material placement plate 24. This process not only plays a good limiting role for the material placement plate 24, preventing it from moving, but also greatly reduces the impact on the sintering process. The sealing of the sagger 7 is increased, thereby improving its heat preservation. After sintering, the rotating rod 12 moves to the right, causing the graphite baffle 25 to move to the right. At this time, the right end opening of the graphite box 23 opens, allowing the hot air inside the sagger 7 to escape and accelerating the cooling inside the sagger 7. When the rotating rod 12 rotates, since the rotating rod 12 and the graphite baffle 25 are rotatably connected, the graphite baffle 25 does not move during the rotation of the rotating rod 12. This provides good protection for the graphite baffle 25 and prevents it from breaking during rotation.

[0032] The heating element 6 includes a side heating element 26 and a left heating element 27, both of which are connected to heating electrodes 28. This structure of the heating element 6 helps to improve the uniformity of heating.

[0033] A thermometer 29 is connected to the sagger 7. The temperature of the sagger 7 is monitored in real time through the settings of the thermometer 29.

[0034] Several connecting columns 30 are fixed on the inner bottom surface of the furnace body 1. The connecting columns 30 pass through and fix the insulation layer 5, the heating element 6, and the sagger 7. The connection columns 30 are used to fix the insulation layer 5, the heating element 6, and the sagger 7.

[0035] The insulation layer 5 is made of either hard graphite felt or soft graphite felt. Both hard graphite felt and soft graphite felt are resistant to high temperatures and have good insulation properties.

[0036] Working principle: During operation, the right furnace door 3 is first opened, and the material is placed in the sagger 7. Then, the telescopic mechanism 11 and the clamping mechanism 13 are activated simultaneously. The telescopic mechanism 11 closes the left end cover 9 with the left end of the side wall 8, and the clamping mechanism 13 closes the right end cover 10 with the right end of the side wall 8. Then, the heating element 6 is activated to heat the material. After heating is completed, the telescopic mechanism 11 and the clamping mechanism 13 are activated simultaneously. The telescopic mechanism 11 separates the left end cover 9 from the left end of the side wall 8, and the clamping mechanism 13 separates the right end cover 10 from the right end of the side wall 8. Then, the rotating mechanism 15 is activated, driving the clamping mechanism 13 to rotate, which in turn drives the rotating rod 12 to rotate, which in turn drives the fan 14 to rotate, thus cooling the material inside the furnace. This invention configures the insulation layer 5 as consisting of a side wall portion 8, a left end cover portion 9, and a right end cover portion 10. The left end cover portion 9 is closable to the left end of the side wall portion 8, and the right end cover portion 10 is closable to the right end of the side wall portion 8. During the sintering process, the left end cover portion 9 closes to the left end of the side wall portion 8, and the right end cover portion 10 closes to the right end of the side wall portion 8, which greatly increases the insulation effect and improves the efficiency and effect of sintering. After the sintering is completed, the left end cover portion 9 separates from the left end of the side wall portion 8, and the right end cover portion 10 separates from the right end of the side wall portion 8. This greatly accelerates the flow of heat from the inside of the insulation layer 5 to the outside of the insulation layer 5, and the temperature outside the insulation layer 5 is much lower than the temperature inside, which greatly improves the efficiency and effect of cooling. Furthermore, the fan 14 provides air cooling inside the furnace body 1, further improving the efficiency and effect of cooling. The furnace body 1 is designed as a double-layer furnace body structure, with a water-cooled jacket inside. The water-cooled jacket is filled with circulating cooling water, which keeps the temperature of the furnace body 1 at a low and safe level, and also facilitates cooling inside the furnace after sintering.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A sintering furnace for aluminum nitride ceramic substrates, characterized in that, The furnace includes a furnace body (1), with a left furnace door (2) and a right furnace door (3) on the left and right sides respectively. Several support columns (4) are fixed at the bottom of the furnace body (1). The furnace body (1) is provided with an insulation layer (5), a heating element (6) and a sagger (7) from the outside to the inside. The insulation layer (5) includes a side wall (8), a left end cover (9) and a right end cover (10). The left end cover (9) is connected to the left end of the side wall (8) through a telescopic mechanism (11). A rotating rod (12) is rotatably connected to the right end cover (10). A clamping mechanism (13) is fixed at the right end of the rotating rod (12). A fan (14) is fixed on the part of the rotating rod (12) between the clamping mechanism (13) and the right end cover (10). A rotating mechanism (15) is provided on the clamping mechanism (13).

2. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, The clamping mechanism (13) includes a chuck (16) fixedly connected to the rotating rod (12), and a pull rod (17) is fixed to the chuck (16). The piston rod of the first oil cylinder (18) is fixed to the right end of the pull rod (17).

3. The aluminum nitride ceramic substrate sintering furnace according to claim 2, characterized in that, The rotating mechanism (15) includes a main shaft (19) that encloses the chuck (16) and the pull rod (17). The main shaft (19) has a cavity for the chuck (16) and the pull rod (17) to move. A motor (20) is fixed on the outer wall of the main shaft (19). The motor (20) is fixed in a fixed seat (21). The fixed seat (21) is fixed on the right furnace door (3). The first oil cylinder (18) is rotatably connected to the fixed seat (21).

4. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, The telescopic mechanism (11) includes a second oil cylinder (22) fixed on the left furnace door (2), and the left end cover (9) is fixed on the piston rod of the second oil cylinder (22).

5. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, The sagger (7) includes a graphite box (23) that is fixedly connected to the furnace body (1) and has an opening at the right end. The graphite box (23) is detachably connected to a material placement plate (24).

6. The aluminum nitride ceramic substrate sintering furnace according to claim 5, characterized in that, The left end of the rotating rod (12) extends out of the right end cover (10), and the left end of the rotating rod (12) is rotatably connected to a graphite baffle (25), which can block the right end opening of the graphite box (23).

7. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, The heating element (6) includes a side heating element (26) and a left heating element (27), both of which are connected to heating electrodes (28).

8. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, A thermometer (29) is connected to the sagger (7).

9. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, A number of connecting columns (30) are fixed on the inner bottom surface of the furnace body (1), and the connecting columns (30) are fixed through the insulation layer (5), the heating element (6) and the sagger (7).

10. The aluminum nitride ceramic substrate sintering furnace according to claim 1, characterized in that, The insulation layer (5) is made of graphite hard felt or graphite soft felt.

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