Positioning device clamping mechanism

Abstract

The utility model relates to a clamping mechanism of a positioning device, which belongs to the technical field of semiconductor wafer testing and comprises a chuck, a mounting plate is arranged on the chuck, a mounting clamp is fixedly connected onto the mounting plate, a positioning block is fixedly connected to the top of the mounting clamp, and a clamping assembly is arranged on the mounting plate. The clamping assembly comprises a round pipe, a connecting groove is formed in the chuck, the connecting groove formed in the chuck is attached to the outer wall of the round pipe, a first spring is fixedly connected to the inner wall of the round pipe, a telescopic rod is fixedly connected to the top of the first spring, and the telescopic rod is in sliding connection with the round pipe. By arranging the clamping assembly, the positioning device is installed, debugged, maintained or replaced, if the positioning device breaks down, the positioning device can be rapidly replaced through the rapid dismounting and mounting structure, the production downtime is shortened, meanwhile, the rapid dismounting and mounting structure is easier to operate, and the labor intensity of workers is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer testing technology, and specifically to a positioning device locking mechanism. Background Technology

[0002] In the field of semiconductor wafer testing technology, wafer testing is a key link to ensure the quality and performance of semiconductor products. With the rapid development of semiconductor manufacturing technology, wafer size is constantly increasing and integration is continuously improving, which puts forward higher requirements for the accuracy, stability and reliability of wafer testing equipment.

[0003] A review of the public announcement (CN222800795U) reveals a square probe card mounting and positioning mechanism. This technology discloses "a chuck, the chuck having a mounting clip for fixing the square probe card, one of the square probe card and the chuck having at least two positioning blocks, the positioning blocks being staggered in the clamping direction of the mounting clip, and the other having a positioning hole adapted to the positioning block. The square probe card, through the cooperation of the positioning block and the positioning hole, is positioned relative to the chuck in a first direction and a second direction. The mounting clip..." The technical solution of pressing and fixing the square probe card on the chuck includes a chuck, the chuck is provided with a mounting clip for fixing the square probe card, one of the square probe card and the chuck is provided with at least two positioning blocks, the positioning blocks are staggered in the clamping direction of the mounting clip, and the other is provided with a positioning hole adapted to the positioning block. The square probe card is positioned relative to the chuck in a first direction and a second direction through the cooperation of the positioning block and the positioning hole. The mounting clip presses and fixes the square probe card on the chuck, etc.

[0004] However, in the aforementioned comparative documents, the positioning components are installed and replaced using bolt connections. Bolted installation requires the use of specific tools to tighten the bolts and precisely control the tightening torque, making the installation process relatively complex, consuming a lot of time and manpower, and seriously affecting production efficiency. At the same time, since semiconductor wafer testing has extremely high time requirements, if the positioning device malfunctions, the bolt removal and replacement method cannot be completed quickly, leading to long-term production downtime and causing huge economic losses. Furthermore, with the continuous development of the semiconductor industry, the requirements for the flexibility and scalability of testing equipment are also increasing, and the traditional bolt connection method is difficult to meet the needs of rapid equipment upgrades, modifications, and layout adjustments.

[0005] To address the aforementioned problems, this application proposes a positioning device locking mechanism. Utility Model Content

[0006] This utility model addresses the technical problems existing in the prior art by providing a positioning device locking mechanism.

[0007] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A positioning device latching mechanism includes a chuck, an mounting plate is provided on the chuck, a mounting clip is fixedly connected to the mounting plate, a positioning block is fixedly connected to the top of the mounting clip, and a latching assembly is provided on the mounting plate; the latching assembly includes a round tube, a connecting groove is opened on the chuck, the connecting groove of the chuck fits against the outer wall of the round tube, a first spring is fixedly connected to the inner wall of the round tube, a telescopic rod is fixedly connected to the top of the first spring, the telescopic rod is slidably connected to the round tube, a rotating block is fixedly connected to the top of the telescopic rod, a flipping rod is hinged to the bottom of the telescopic rod, a fixing rod is hinged to one end of the flipping rod, and the fixing rod is slidably connected to the round tube.

[0008] The inner wall of the circular tube has a groove, and a baffle is fixedly connected to the circular tube through the groove. A fixing block is fixedly connected to the rotating block, and the outer wall of the fixing block fits into the groove of the circular tube. By setting the groove, fixing block and baffle, the rotation position of the rotating block can be positioned.

[0009] The circular tube is fixedly connected to a magnetic block via a groove. One side of the magnetic block is in contact with one side of the fixing block. By setting the magnetic block, the fixing block is fixed.

[0010] The chuck has a slot at its top, and the mounting plate has a fixed block at its bottom. The outer wall of the block fits into the slot in the chuck. By setting the slot and the block, the mounting plate is further limited.

[0011] The chuck is fixedly connected to a second spring via a connecting slot. The top of the second spring fits against the bottom of the telescopic rod. By setting the second spring, the rotating block and the telescopic rod can be further reset.

[0012] The top outer wall of the rotating block is provided with anti-slip grooves, which enable convenient rotation of the rotating block.

[0013] A sliding block is fixedly connected to the outer wall of the circular tube. The sliding block is slidably connected to the mounting plate. The circular tube is positioned by setting the sliding block.

[0014] The beneficial effects of this utility model are:

[0015] By setting up snap-fit ​​components, the positioning device can be installed, debugged, repaired, or replaced. If the positioning device malfunctions, it can be quickly replaced using the quick-disassembly and installation structure, reducing production downtime. At the same time, the quick-disassembly and installation structure makes operation easier and reduces the labor intensity of workers.

[0016] By setting grooves, fixing blocks, and baffles, the rotation position of the rotating block can be positioned. When it is necessary to press the telescopic rod with the rotating block, the rotating block can be rotated. When the rotating block rotates, it will drive the fixing block to rotate. When the fixing block rotates, it will be blocked by the baffle. At this time, the rotating block and the telescopic rod can be pressed, thereby realizing the disassembly of the mounting plate and its related components. Attached Figure Description

[0017] Figure 1 This is a schematic diagram illustrating the overall structure of this utility model;

[0018] Figure 2 This utility model is illustrated by a schematic diagram of the insert block and its related parts.

[0019] Figure 3 This utility model is a schematic diagram illustrating the structure of a circular tube and its related parts;

[0020] Figure 4 This utility model is shown as a schematic diagram illustrating the structure of the fixing block and its related parts.

[0021] The attached diagram lists the components represented by each number as follows:

[0022] 1. Chuck; 2. Mounting clip; 3. Positioning block; 4. Mounting plate;

[0023] 5. Snap-fit ​​assembly; 501. Connecting groove; 502. Round tube; 503. Rotating block; 504. Telescopic rod; 505. First spring; 506. Flipping rod; 507. Fixing rod;

[0024] 6. Groove; 7. Fixing block; 8. Baffle; 9. Magnetic block; 10. Slot; 11. Insert block; 12. Second spring; 13. Anti-slip groove; 14. Sliding block. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0027] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0028] Reference Figure 1-4 A positioning device latching mechanism includes a chuck 1, a mounting plate 4 on the chuck 1, a mounting clip 2 fixedly connected to the mounting plate 4, and a positioning block 3 fixedly connected to the top of the mounting clip 2. The mounting clip 2, positioning block 3, and mounting plate 4 are a positioning device for positioning a square probe card. A latching assembly 5 is provided on the mounting plate 4. The latching assembly 5 is used to realize quick installation and quick removal of the positioning assembly. The latching assembly 5 includes a circular tube 502. A connecting groove 501 is opened on the chuck 1 for receiving the circular tube 502. The connecting groove 501 of the chuck 1 fits against the outer wall of the circular tube 502. A first spring 505 is fixedly connected to the inner wall of the circular tube 502. A telescopic rod 504 is fixedly connected to the top of the spring 505. The first spring 505 is used to reset the telescopic rod 504 after it is pressed. The rotating block 503 is used to facilitate pressing the telescopic rod 504. The telescopic rod 504 is slidably connected to the round tube 502. The rotating block 503 is fixedly connected to the top of the telescopic rod 504. A flipping rod 506 is hinged to the bottom of the telescopic rod 504. A fixing rod 507 is hinged to one end of the flipping rod 506. The fixing rod 507 is slidably connected to the round tube 502. Pressing the rotating block 503 drives the fixing rod 507 to move through the flipping rod 506. The fixing rod 507 can be inserted into the chuck 1 to fix the mounting plate 4.

[0029] Reference Figure 4 The inner wall of the round tube 502 has a groove 6. A baffle 8 is fixedly connected to the round tube 502 through the groove 6. A fixing block 7 is fixedly connected to the rotating block 503. The outer wall of the fixing block 7 fits into the groove 6 of the round tube 502. The baffle 8 is used to block the fixing block 7, so that the fixing block 7 and the groove 6 are connected. Thus, through the connection between the groove 6 and the fixing block 7, the rotating block 503 and the telescopic rod 504 are pressed and reset.

[0030] Reference Figure 4The round tube 502 is fixedly connected to the magnetic block 9 through the groove 6. One side of the magnetic block 9 is in contact with one side of the fixing block 7. The magnetic block 9 is used to fix the fixing block 7. When it is not necessary to press the rotating block 503, the fixing block 7 can be fixed by the magnetic block 9 to prevent the fixing block 7 from shaking during use.

[0031] Reference Figure 2 The chuck 1 has a slot 10 on its top and a plug 11 is fixedly connected to the bottom of the mounting plate 4. The outer wall of the plug 11 fits into the slot 10 on the chuck 1. The cooperation between the slot 10 and the plug 11 can further limit the mounting plate 4 and prevent the mounting plate 4 from shaking during use, thereby avoiding affecting the use of the mounting clip 2 and the positioning block 3.

[0032] Reference Figure 3 The chuck 1 is fixedly connected to the second spring 12 via the connecting groove 501. The top of the second spring 12 is in contact with the bottom of the telescopic rod 504. The second spring 12 is used to further reset the rotating block 503 and the telescopic rod 504, thereby avoiding incomplete reset of the rotating block 503 and the telescopic rod 504, thus avoiding affecting the fixing effect of the fixing rod 507.

[0033] Reference Figure 4 The top outer wall of the rotating block 503 is provided with an anti-slip groove 13. The anti-slip groove 13 is used to facilitate the rotation of the rotating block 503, thereby avoiding affecting the installation and disassembly efficiency of the positioning component.

[0034] Reference Figure 3 A sliding block 14 is fixedly connected to the outer wall of the round tube 502. The sliding block 14 is slidably connected to the mounting plate 4. The sliding block 14 is used to position the round tube 502 to prevent the round tube 502 from shifting position when it is installed into the connecting groove 501, thereby avoiding affecting the fixing effect of the fixing rod 507.

[0035] Working principle:

[0036] The positioning device's locking mechanism allows the operator to install the mounting plate 4 onto the chuck 1 when installation is required. After initial installation of the mounting plate 4, the round tube 502 can be inserted into the connecting groove 501. When the round tube 502 is inserted into the connecting groove 501, the operator needs to press the telescopic rod 504 using the rotating block 503. This, through the telescopic rod 504 and the flipping rod 506, causes the fixing rod 507 to retract into the round tube 502. After the round tube 502 is installed into the connecting groove 501, the operator releases the rotating block 503. At this time, the first spring 505 will cause the telescopic rod 504 to return to its original position. The fixed rod 507 is inserted into the chuck 1 to fix the mounting plate 4. After the mounting plate 4 is fixed, the operator rotates the rotating block 503 to disengage the fixed block 7 from the groove 6. When the positioning component needs to be disassembled, the telescopic rod 504 can be pressed by the rotating block 503. When the rotating block 503 needs to press the telescopic rod 504, the rotating block 503 can be rotated. When the rotating block 503 rotates, it will drive the fixed block 7 to rotate. When the fixed block 7 rotates, it will be blocked by the baffle 8. At this time, the rotating block 503 and the telescopic rod 504 can be pressed to disassemble the mounting plate 4 and its related components.

[0037] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0038] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A positioning device locking mechanism, comprising a chuck (1), characterized in that, The chuck (1) is provided with a mounting plate (4), a mounting clip (2) is fixedly connected to the mounting plate (4), a positioning block (3) is fixedly connected to the top of the mounting clip (2), and a snap-fit ​​assembly (5) is provided on the mounting plate (4). The snap-fit ​​assembly (5) includes a round tube (502), and a connecting groove (501) is provided on the chuck (1). The connecting groove (501) of the chuck (1) is fitted to the outer wall of the round tube (502). A first spring (505) is fixedly connected to the inner wall of the round tube (502). A telescopic rod (504) is fixedly connected to the top of the first spring (505). The telescopic rod (504) is slidably connected to the round tube (502). A rotating block (503) is fixedly connected to the top of the telescopic rod (504). A flipping rod (506) is hinged to the bottom of the telescopic rod (504). A fixing rod (507) is hinged to one end of the flipping rod (506). The fixing rod (507) is slidably connected to the round tube (502).

2. The positioning device locking mechanism according to claim 1, characterized in that, The inner wall of the round tube (502) is provided with a groove (6), and a baffle (8) is fixedly connected to the round tube (502) through the groove (6). A fixing block (7) is fixedly connected to the rotating block (503), and the outer wall of the fixing block (7) fits against the groove (6) of the round tube (502).

3. The positioning device locking mechanism according to claim 1, characterized in that, The circular tube (502) is fixedly connected to a magnetic block (9) through a groove (6), and one side of the magnetic block (9) is in contact with one side of the fixing block (7).

4. The positioning device locking mechanism according to claim 1, characterized in that, The chuck (1) has a slot (10) on its top, and the mounting plate (4) has a plug (11) fixedly connected to its bottom. The outer wall of the plug (11) fits into the slot (10) of the chuck (1).

5. The positioning device locking mechanism according to claim 1, characterized in that, The chuck (1) is fixedly connected to a second spring (12) via a connecting groove (501), and the top of the second spring (12) is in contact with the bottom of the telescopic rod (504).

6. The positioning device locking mechanism according to claim 1, characterized in that, The top outer wall of the rotating block (503) is provided with anti-slip grooves (13).

7. The positioning device locking mechanism according to claim 1, characterized in that, A sliding block (14) is fixedly connected to the outer wall of the round tube (502), and the sliding block (14) is slidably connected to the mounting plate (4).

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