Position adjusting device for positioning piece and semiconductor equipment

Abstract

The utility model relates to a position adjusting device for a positioning piece and semiconductor equipment. The position adjusting device comprises a first bearing part and a second bearing part, the first adjusting piece is rotatably connected to the first bearing piece, and a first containing cavity used for containing the positioning piece is formed in the first bearing piece; one end of the opening and closing piece is connected to the first bearing piece, a second containing cavity used for containing the positioning piece is formed in the opening and closing piece, and the axis of the second containing cavity and the axis of the first containing cavity are collinear; when the first adjusting piece is rotated, the first adjusting piece moves in the first direction relative to the first bearing piece, and the opening and closing piece is tightened or loosened towards the central axis of the opening and closing piece under the moving action of the first adjusting piece. According to the position adjusting device, the positioning piece can be efficiently disassembled and assembled by rotating the first adjusting piece, the position of the positioning piece in the first direction can be adjusted, the replacement efficiency can be guaranteed even if the ejector pin is frequently replaced, convenience and rapidness are achieved, and the adjusting precision can be guaranteed.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a position adjustment device and semiconductor equipment for a positioning element. Background Technology

[0002] In the semiconductor coating process, ejector pins in semiconductor equipment are typically used to support and position the wafer. Multiple ejector pins are usually welded to their respective bases, and then the bases are fixed with screws or other fasteners.

[0003] During the coating process, the ejector pin is in a high-temperature aluminum process environment, and a large number of aluminum ions easily adhere to the ejector pin, affecting the positioning accuracy and requiring frequent replacement of the ejector pin.

[0004] However, due to the compact structure of the process chamber, the limited space for movement, and the narrow field of vision, disassembly and assembly are time-consuming and labor-intensive. Utility Model Content

[0005] In view of this, the present application provides a position adjustment device and a semiconductor device for a positioning element to solve at least one problem existing in the background art.

[0006] In a first aspect, embodiments of this application provide a position adjustment device for a positioning member, the position adjustment device comprising:

[0007] First load-bearing component;

[0008] A first adjusting member is rotatably connected to the first supporting member, and the first supporting member has a first receiving cavity for accommodating the positioning member.

[0009] An opening and closing component, one end of which is connected to the first bearing component, and the opening and closing component is provided with a second receiving cavity for accommodating the positioning component, the second receiving cavity being collinear with the axis of the first receiving cavity;

[0010] When the first adjusting member is rotated, the first adjusting member moves relative to the first bearing member along a first direction. Under the action of the movement of the first adjusting member, the opening and closing member tightens or loosens towards its central axis. The first direction is the axial direction of the first adjusting member.

[0011] In conjunction with the first aspect of this application, in an optional embodiment, the opening and closing member is provided with an opening and closing seat and a plurality of opening and closing pieces, one end of the plurality of opening and closing pieces is connected to the opening and closing seat and is spaced apart, the opening and closing seat is connected to the first support member, and the plurality of opening and closing pieces are circumferentially distributed around the central axis of the opening and closing seat.

[0012] In conjunction with the first aspect of this application, in an optional embodiment, the end of the opening and closing piece is provided with a first inclined surface;

[0013] The end of the first adjusting member near the opening and closing member is provided with a second inclined surface that is adapted to the first inclined surface;

[0014] Rotating the first adjusting member allows its second inclined surface to adapt to and abut against the first inclined surface of the opening / closing piece.

[0015] When the first adjusting member moves closer to the opening and closing member, the plurality of opening and closing pieces converge inward under the action of the first adjusting member;

[0016] When the first adjusting member moves away from the opening and closing member, the plurality of opening and closing pieces separate outwards against their own elastic force.

[0017] In conjunction with the first aspect of this application, in an optional embodiment, the position adjustment device further includes:

[0018] The second support member is movably connected to the first support member, and the first support member can move relative to the first support member along a second direction, the second direction being perpendicular to the first direction;

[0019] A pair of first locking elements are located inside the first carrier element;

[0020] The second adjusting member is rotatably connected to one of the pair of first locking members. Rotating the second adjusting member causes the pair of first locking members to move away from or abut against the first carrier.

[0021] In conjunction with the first aspect of this application, in an optional embodiment, the second carrier is provided with a first groove that extends along the second direction and protrudes from the surface of the second carrier;

[0022] The first support member is provided with a first slider, and the first slider is slidably connected to the first slide groove;

[0023] Rotating the second adjusting member allows the pair of first locking members to abut against the outer wall of the first slide groove, thereby defining the relative position between the first carrier member and the second carrier member.

[0024] In conjunction with the first aspect of this application, in an optional embodiment, a third inclined surface is provided on the side of a pair of first locking members near the first slide groove, and a fourth inclined surface adapted to the third inclined surface is provided on the outer wall of the first slide groove.

[0025] In conjunction with the first aspect of this application, in an optional embodiment, the first locking member is a cylindrical structure, and the second adjusting member is connected to the first locking member at a position off its central axis, the central axis of the first locking member extending along a third direction, the third direction being perpendicular to the second direction.

[0026] In conjunction with the first aspect of this application, in an alternative embodiment, the second adjusting member and the first locking member are threadedly connected.

[0027] In conjunction with the first aspect of this application, in an optional embodiment, the second carrier is provided with a limiting groove that extends along a third direction, the third direction being perpendicular to the second direction;

[0028] The position adjustment device further includes:

[0029] The second locking member is adapted to the limiting groove. The second locking member is used to lock the relative position between the second carrier and the platform. The platform is used to place the position adjustment device.

[0030] In a second aspect, embodiments of this application provide a semiconductor device, the semiconductor device including a plurality of position adjustment devices for a positioning element as described in the first aspect; the semiconductor device further includes:

[0031] The platform, wherein the position adjustment device is movably mounted on the platform;

[0032] The positioning element is detachably connected to the opening and closing element.

[0033] The position adjustment device for positioning components provided in this application embodiment can not only achieve efficient disassembly and assembly of positioning components by rotating the first adjustment component, but also achieve position adjustment of positioning components in the first direction. Even if the ejector pin is frequently replaced, the replacement efficiency can be guaranteed, which is convenient and quick, and the adjustment accuracy can be guaranteed. In addition, the position adjustment device can also be adapted to positioning components of different diameters, thereby improving the applicability of the position adjustment device.

[0034] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0035] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0036] Figure 1 A side view of a position adjustment device for a positioning element provided in an embodiment of this application;

[0037] Figure 2 This is a perspective view of a position adjustment device for a positioning component provided in an embodiment of this application;

[0038] Figure 3This is an exploded view of the structure of the position adjustment device for the positioning component provided in the embodiments of this application;

[0039] Figure 4 for Figure 1 Sectional view from AA;

[0040] Figure 5 A three-dimensional structural diagram of the opening and closing member in the position adjustment device for the positioning member provided in the embodiments of this application;

[0041] Figure 6 for Figure 1 Sectional view at point BB.

[0042] Figure label:

[0043] 100. Position adjustment device;

[0044] 10. First support member; 110. First receiving cavity; 120. First slider; 130. Third receiving cavity;

[0045] 20. First adjusting component; 210. First bolt; 211. Second inclined plane; 220. First adjusting handle;

[0046] 30. Opening / closing component; 310. Second receiving cavity; 320. Opening / closing seat; 330. Opening / closing piece; 331. First inclined surface;

[0047] 40. Second bearing component; 410. First slide groove; 411. Fourth inclined surface; 420. Limiting groove;

[0048] 50. First locking element; 510. Third inclined plane;

[0049] 60. Second adjusting component; 610. Second bolt; 620. Second adjusting handle;

[0050] 200. Positioning components. Detailed Implementation

[0051] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0052] In the description of this utility model, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "height", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this utility model.

[0053] In this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this utility model, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0054] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0055] In this utility model, unless otherwise explicitly defined, the terms "above," "on top of," "above," "over," "below," "below," "below," or "below" for "first feature above second feature" can refer to direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Furthermore, "above," "above," and "over" for "first feature above second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature below second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0056] The positioning element 200 in this embodiment is a pin used to support and position the wafer, but it is not limited to this.

[0057] Please refer to Figures 1 to 4The position adjustment device 100 for positioning member 200 provided in this application embodiment includes a first support member 10, a first adjustment member 20 and an opening and closing member 30. The first adjustment member 20 is rotatably connected to the first support member 10. The first support member 10 and the opening and closing member 30 are respectively provided with a first receiving cavity 110 and a second receiving cavity 310 for accommodating the positioning member 200. The first receiving cavity 110 and the second receiving cavity 310 are respectively located at the center position of the first support member 10 and the opening and closing member 30, and the axes of the first receiving cavity 110 and the second receiving cavity 310 are collinear.

[0058] The first support member 10 is further provided with a third accommodating cavity 130, which is connected to the first accommodating cavity 110. The third accommodating cavity 130 is used to accommodate the opening and closing member 30 in the gathered state and the opening and closing state, as well as part of the structure of the first adjusting member 20.

[0059] One end of the opening / closing member 30 is connected to the first bearing member 10, and the other end is a free end.

[0060] Rotating the first adjusting member 20, the first adjusting member 20 can be positioned relative to the first bearing member 10 along a first direction (i.e., Figure 2 The first adjusting member 20 moves in the direction of the Z-axis in the coordinate system shown in the figure. When it moves closer to the opening and closing member 30, it can abut against the free end of the opening and closing member 30, so that the opening and closing member 30 is tightened in the direction of its central axis, thereby clamping the positioning member 200; or, when the first adjusting member 20 moves away from the opening and closing member 30, it can reduce the force acting on the free end of the opening and closing member 30, and the opening and closing member 30 is released under its own elastic force, thereby adjusting the position of the positioning member 200 in the first direction.

[0061] The above-mentioned position adjustment device 100 can not only achieve efficient disassembly and assembly of the positioning component 200 by rotating the first adjustment component 20, but also achieve position adjustment of the positioning component 200 in the first direction. Even if the ejector pin is frequently replaced, the replacement efficiency can be guaranteed, which is convenient and quick, and the adjustment accuracy can be guaranteed. In addition, the position adjustment device 100 can also be adapted to positioning components 200 of different diameters, thereby improving the applicability of the position adjustment device 100.

[0062] The connection between the first adjusting member 20 and the first bearing member 10 is a threaded connection. The outer wall of the first adjusting member 20 is provided with an external thread, and the inner wall of the first bearing member 10 is provided with an internal thread that matches the external thread. The first adjusting member 20 is a first bolt 210. By rotating the first bolt 210, the relative position between the first adjusting member 20, the opening and closing member 30, and the first bearing member 10 can be adjusted, thereby enabling the clamping and positioning member 200 to be locked, or the positioning member 200 to be loosened and its position adjusted.

[0063] In one alternative embodiment, please refer to Figures 3 to 5 The opening and closing component 30 is provided with an opening and closing seat 320 and a plurality of opening and closing pieces 330. One end of the plurality of opening and closing pieces 330 is connected to the opening and closing seat 320 and is spaced apart. The opening and closing seat 320 is connected to the first bearing component 10. The plurality of opening and closing pieces 330 are circumferentially distributed around the central axis of the opening and closing seat 320.

[0064] This can be understood as follows: when the multiple opening and closing pieces 330 are in their natural state, and the positioning member 200 is located within the second accommodating cavity 310, the positioning member 200 is not subjected to pressure from the opening and closing pieces 330, and the positioning member 200 can be adjusted in the first direction. By rotating the first adjusting member 20, the first adjusting member 20 abuts against the free ends of the multiple opening and closing pieces 330 and brings them together inward, and abuts against the outer wall of the positioning member 200, thereby locking the positioning member 200.

[0065] The opening and closing seat 320 can be connected to the first bearing member 10 by welding, but it is not limited to this.

[0066] In an optional embodiment, the free end of the opening / closing piece 330 is provided with a first inclined surface 331. The end of the first adjusting member 20 near the opening / closing member 30 is provided with a second inclined surface 211 that matches the first inclined surface 331. By rotating the first adjusting member 20, the second inclined surface 211 of the first adjusting member 20 can adapt to and abut against the first inclined surface 331 of the opening / closing piece 330.

[0067] When the first adjusting member 20 moves close to the opening and closing member 30, the multiple opening and closing pieces 330 converge inward under the action of the first adjusting member 20, so that the multiple opening and closing pieces 330 can abut against the outer wall of the positioning member 200, thereby locking the positioning member 200.

[0068] When the first adjusting member 20 moves away from the closing member 30, the multiple opening and closing pieces 330 overcome their own elasticity and separate outward, so that the multiple opening and closing pieces 330 disengage from the outer wall of the positioning member 200, thereby enabling the position adjustment of the positioning member 200 in the first direction.

[0069] In one alternative embodiment, please refer to Figure 3 and Figure 6 The position adjustment device 100 also includes a second support member 40, a pair of first locking members 50, and a second adjusting member 60. The second support member 40 is movably connected to the first support member 10, and the first support member 10 can move along a second direction (i.e., Figure 2 The second direction (the Y-axis direction in the coordinate system shown in the figure) moves relative to the first support member 10, and the second direction is perpendicular to the first direction.

[0070] A pair of first locking members 50 are located inside the first carrier member 10 and are movable relative to the first carrier member 10.

[0071] The second adjusting member 60 is rotatably connected to one of the pair of first locking members 50. Rotating the second adjusting member 60 allows the pair of first locking members 50 to move relative to or away from each other, thereby allowing the pair of first locking members 50 to abut against the surface of the first carrier member 10, thus locking the relative position between the first carrier member 10 and the second carrier member 40; or it allows the pair of first locking members 50 to move away from the first carrier member 10, thereby adjusting the relative position between the first carrier member 10 and the second carrier member 40, and thus adjusting the position of the positioning member 200 installed on the first carrier member 10.

[0072] This can be understood as follows: the first adjusting member 20 can be used to adjust the position of the positioning member 200 in the first direction, and the second adjusting member 60 can be used to adjust the position of the positioning member 200 in the second direction, thereby increasing the adjustment range of the positioning member 200.

[0073] In an optional embodiment, the second adjusting member 60 is threadedly connected to one of the pair of first locking members 50. The second adjusting member 60 has external threads, and the first locking member 50 has internal threads adapted to the external threads. By rotating the second adjusting member 60, the pair of first locking members 50 are brought closer or further apart, thereby locking or unlocking the relative position between the first bearing member 10 and the second bearing member 40. The second adjusting member 60 is a second bolt 610, and locking or unlocking is achieved by rotating the second bolt 610, which is convenient and quick to operate.

[0074] In an optional embodiment, the first adjusting member 20 and the second adjusting member 60 are respectively provided with a first adjusting handle 220 and a second adjusting handle 620. Both the first adjusting handle 220 and the second adjusting handle 620 protrude from the outside of the first supporting member 10, so that the operator can hold the first adjusting handle 220 and the second adjusting handle 620 to achieve rotational adjustment and improve adjustment efficiency.

[0075] In an optional embodiment, the second support member 40 is provided with a first groove 410, the first groove 410 being along a second direction (i.e., Figure 2 Extending along the Y-axis direction in the coordinate system shown, the first groove 410 protrudes from the surface of the second support member 40 so that the locking member abuts against the outer wall of the first groove 410.

[0076] The first support member 10 is provided with a first slider 120, which is slidably connected to the first slide groove 410. By rotating the second adjusting member 60, a pair of first locking members 50 can abut against the outer wall of the first slide groove 410 to limit the relative position between the first support member 10 and the second support member 40.

[0077] In an optional embodiment, the first slider 120 is fitted into the first groove 410. The first slider 120 can move along the first groove 410 in a second direction, but the first slider 120 cannot move in a first direction, so as to improve the sliding stability of the first slider 120 relative to the first groove 410.

[0078] In an optional embodiment, a third inclined surface 510 is provided on the side of a pair of first locking members 50 near the first slide groove 410, and a fourth inclined surface 411 adapted to the third inclined surface 510 is provided on the outer wall of the first slide groove 410. The adaptation of the third inclined surface 510 of the pair of first locking members 50 to the fourth inclined surface 411 of the first slide groove 410 can increase the contact area between the locking members and the first slide groove 410, thereby increasing the friction between the locking members and the first slide groove 410 and improving the locking firmness between the locking members and the first slide groove 410.

[0079] In an optional embodiment, the first locking member 50 is a cylindrical structure, and the second adjusting member 60 is connected to the first locking member 50 at a position off its central axis, the central axis of the first locking member 50 being along a third direction (i.e., Figure 2 The X-axis direction in the coordinate system shown in the figure extends, and the third direction is perpendicular to the second direction.

[0080] The second adjusting member 60 is connected to the first locking member 50 at a position off its central axis, which can prevent the first locking member 50 from rotating simultaneously during the rotation of the second adjusting member 60.

[0081] In an optional embodiment, the second support member 40 is provided with a limiting groove 420, which extends along a third direction perpendicular to the second direction. The position adjustment device 100 also includes a second locking member (not shown in the figure), which is adapted to the limiting groove 420 and is used to lock the relative position between the second support member 40 and the platform, with the position adjustment device 100 placed on the platform.

[0082] In this embodiment, the positioning member 200 is adjusted in the first direction by cooperating with the first adjusting member 20 and the opening / closing member 30, the positioning member 200 is adjusted in the second direction by cooperating with the second adjusting member 60 and a pair of locking blocks, and the positioning member 200 is adjusted in the third direction by cooperating with the second locking member and the limiting groove 420. This enables the positioning member 200 to be adjusted in three axes, improving the adjustment range of the positioning member 200 and the adjustment accuracy of the positioning member 200.

[0083] The second locking element is a standard bolt, but it is not limited to this. The second bearing element 40 is locked to the platform by the standard bolt, thereby realizing the adjustment of the relative position between the second bearing element 40 and the platform.

[0084] The position adjustment device 100 for the positioning member 200 provided in this application embodiment can first determine the relative position between the second carrier 40 and the platform to realize the position of the positioning member 200 in the third direction, and then confirm the position of the positioning member 200 in the second direction and the first direction.

[0085] This application also provides a semiconductor device, which is exemplary, being a magnetron sputtering device, but is not limited thereto. The semiconductor device includes a plurality of position adjustment devices 100 for positioning members 200 provided in any of the above embodiments. The plurality of position adjustment devices 100 are arranged in a shape adapted to the wafer, so that the positioning members 200 mounted on the position adjustment devices 100 can support and position the wafer.

[0086] The semiconductor device also includes a platform and a positioning element 200, which is detachably connected to the opening and closing element 30, and a position adjustment device 100 is movably mounted on the platform.

[0087] Semiconductor equipment, including a position adjustment device 100 for positioning element 200, can greatly reduce the time required for maintenance and calibration, thereby greatly improving production efficiency, and the semiconductor equipment can reduce the professional level requirements of the operator.

[0088] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. A position adjustment device for a positioning component, characterized in that, The position adjustment device includes: First load-bearing component; A first adjusting member is rotatably connected to the first supporting member, and the first supporting member has a first receiving cavity for accommodating the positioning member. An opening and closing component, one end of which is connected to the first bearing component, and the opening and closing component is provided with a second receiving cavity for accommodating the positioning component, the second receiving cavity being collinear with the axis of the first receiving cavity; When the first adjusting member is rotated, the first adjusting member moves relative to the first bearing member along a first direction. Under the action of the movement of the first adjusting member, the opening and closing member tightens or loosens towards its central axis. The first direction is the axial direction of the first adjusting member.

2. The position adjustment device for a positioning component according to claim 1, characterized in that, The opening and closing component is provided with an opening and closing base and a plurality of opening and closing pieces. One end of the plurality of opening and closing pieces is connected to the opening and closing base and they are spaced apart. The opening and closing base is connected to the first support component. The plurality of opening and closing pieces are circumferentially distributed around the central axis of the opening and closing base.

3. The position adjustment device for a positioning component according to claim 2, characterized in that, The end of the opening and closing piece is provided with a first inclined surface; The end of the first adjusting member near the opening and closing member is provided with a second inclined surface that is adapted to the first inclined surface; Rotating the first adjusting member allows its second inclined surface to adapt to and abut against the first inclined surface of the opening / closing piece. When the first adjusting member moves closer to the opening and closing member, the plurality of opening and closing pieces converge inward under the action of the first adjusting member; When the first adjusting member moves away from the opening and closing member, the plurality of opening and closing pieces separate outwards against their own elastic force.

4. The position adjustment device for a positioning component according to claim 1, characterized in that, The position adjustment device further includes: The second support member is movably connected to the first support member, and the first support member can move relative to the first support member along a second direction, the second direction being perpendicular to the first direction; A pair of first locking elements are located inside the first carrier element; The second adjusting member is rotatably connected to one of the pair of first locking members. Rotating the second adjusting member causes the pair of first locking members to move away from or abut against the first carrier.

5. The position adjustment device for a positioning component according to claim 4, characterized in that, The second support member is provided with a first groove, which extends along the second direction and protrudes from the surface of the second support member; The first support member is provided with a first slider, and the first slider is slidably connected to the first slide groove; Rotating the second adjusting member allows the pair of first locking members to abut against the outer wall of the first slide groove, thereby defining the relative position between the first carrier member and the second carrier member.

6. The position adjustment device for a positioning component according to claim 5, characterized in that, A third inclined surface is provided on the side of the first locking member near the first slide groove, and a fourth inclined surface adapted to the third inclined surface is provided on the outer wall of the first slide groove.

7. The position adjustment device for a positioning component according to claim 5, characterized in that, The first locking member is a cylindrical structure, and the second adjusting member is connected to the first locking member at a position off its central axis. The central axis of the first locking member extends along a third direction, which is perpendicular to the second direction.

8. The position adjustment device for a positioning member according to any one of claims 4 to 7, characterized in that, The second adjusting member and the first locking member are connected by a thread.

9. The position adjustment device for a positioning component according to claim 4, characterized in that, The second support member is provided with a limiting groove, which extends along a third direction and is perpendicular to the second direction; The position adjustment device further includes: The second locking member is adapted to the limiting groove. The second locking member is used to lock the relative position between the second carrier and the platform. The platform is used to place the position adjustment device.

10. A semiconductor device, characterized in that, The semiconductor device includes a plurality of position adjustment devices for a positioning element according to any one of claims 1 to 9; the semiconductor device further includes: The platform, wherein the position adjustment device is movably mounted on the platform; The positioning element is detachably connected to the opening and closing element.

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