Device for improving stability and safety of plasma manual photoresist removing equipment

Abstract

The utility model discloses a device for improving the stability and safety of plasma manual photoresist removing equipment. The device comprises a second buffer mechanism arranged behind an upper cavity and a second buffer mechanism arranged on the side edge of the upper cavity, the second buffering mechanism arranged behind the upper cavity comprises a fixed base and a rubber pad, the second buffering mechanism arranged on the side edge of the upper cavity comprises an upper buffering check block, a lower buffering check block and a damper, and the damper is installed on the lower buffering check block and used for adjusting the buffering effect. The safety and stability of equipment are improved, the use cost of the equipment is reduced, and the safety of operators is protected.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and in particular to a device for improving the stability and safety of plasma manual resist removal equipment. Background Technology

[0002] In the complex processes of wafer fabrication, plasma resist stripping equipment plays a crucial role, especially in certain production processes where its importance is irreplaceable. As manufacturing processes continue to evolve towards greater precision, the performance and process requirements for plasma resist stripping equipment are becoming increasingly stringent.

[0003] In the operation of existing manual plasma degumming equipment, the upper chamber requires frequent opening and closing. Due to its considerable weight, the operator faces the risk of injury from the upper chamber falling during opening and closing. Furthermore, opening the chamber is strenuous, especially in the latter part of the opening process, and lacks an effective buffering mechanism, potentially causing the upper chamber to suddenly fall. This sudden fall could not only injure the operator but also damage the quartz barrel or other related hardware inside the chamber, thus affecting the equipment's normal operating efficiency, increasing maintenance costs, and reducing its utilization rate.

[0004] Currently, the industry urgently needs an effective solution that can improve the safety of plasma manual degumming equipment operation, enhance equipment stability, reduce damage to structural components, lower equipment operating costs, and thus improve overall production efficiency. Utility Model Content

[0005] This invention addresses the aforementioned shortcomings by providing a device to improve the stability and safety of a plasma manual adhesive removal equipment. By adding specific buffer mechanisms to the rear and sides of the upper cavity, it solves the safety hazards and stability problems existing in the opening and closing of the existing equipment, reduces damage to equipment structural components, increases equipment utilization, protects operator safety, and reduces equipment operating costs.

[0006] The above-mentioned objective of this utility model is achieved through the following technical solution: a device for improving the stability and safety of a plasma manual adhesive removal device, including a second buffer mechanism disposed at the rear of the upper cavity and a second buffer mechanism disposed on the side of the upper cavity;

[0007] The first buffer mechanism includes a fixed base and rubber pads. The fixed base is securely fixed to the rear of the lower cavity with three M4×16 screws. The fixed base is preferably made of metal, and its position, shape, and size are carefully designed to perfectly fit the rear of the upper cavity, ensuring that it will not loosen or shift during equipment operation. Three cylindrical rubber pads, 30mm thick, are installed on the fixed base. These pads can be made of natural or synthetic rubber, which have good elasticity and wear resistance. When the cavity opens, the rubber pads effectively provide a buffering effect, preventing the upper cavity from suddenly falling, while ensuring that the opening angle of the upper cavity is within a safe range, protecting the quartz barrel and related hardware inside the cavity, and improving the stability of the equipment.

[0008] The second buffer mechanism includes an upper buffer block, a lower buffer block, and a damper. The upper and lower buffer blocks are fixedly installed with screws at the sensing sensors on the sides of the upper and lower cavities, respectively. The upper and lower buffer blocks can be made of hard plastic or metal, and their surfaces are treated with an anti-slip finish to enhance the buffering effect. The damper is installed on the lower buffer block and can be a hydraulic or pneumatic damper. The buffering force can be precisely adjusted by rotating the threads of the damper. When the upper cavity is closed, this buffer mechanism provides significant cushioning, protecting the operator's hands from injury and ensuring personal safety, while also not affecting the normal operation of the suction chamber, further improving the stability of the equipment.

[0009] The advantages of this utility model compared with the prior art are:

[0010] 1. Enhanced safety: By setting buffer mechanisms at the rear and sides of the upper cavity, the risk of the upper cavity falling and injuring the operator during the opening and closing process is effectively avoided, thus protecting the personal safety of the operator.

[0011] 2. Improve equipment stability: The first buffer mechanism can prevent the upper cavity from falling suddenly during the opening process, reducing damage to the quartz barrel and related hardware inside the cavity and improving the stability of the equipment; the second buffer mechanism provides buffering when closing the cavity, which also helps to improve the stability of the equipment, reduce damage to the structural components of the equipment, and extend the service life of the equipment.

[0012] 3. Reduced costs: It reduces maintenance costs caused by structural component damage to the equipment, while increasing equipment utilization, reducing equipment operating costs, and improving production efficiency. Attached Figure Description

[0013] Figure 1 This is a structural schematic diagram of the cavity in the open state of this utility model.

[0014] Figure 2This is a structural schematic diagram of the cavity in the closed state of this utility model. Detailed Implementation

[0015] The present invention will now be described in further detail with reference to the accompanying drawings.

[0016] Example 1:

[0017] like Figure 1 , Figure 2 As shown, in this embodiment, a device for improving the stability and safety of a plasma manual adhesive removal device includes a first buffer mechanism 100 disposed behind the upper cavity 300 and a second buffer mechanism 200 disposed on the side of the upper cavity 300. The first buffer mechanism 100 disposed behind the upper cavity 300 includes a fixed base 101 and three rubber pads 102. The fixed base 101 is firmly fixed to the rear of the lower cavity 400 by three M4×16 screws. The fixed base 101 is made of aluminum alloy and is precision machined to fit tightly against the rear of the lower cavity 400. The three rubber pads 102 are 30mm thick, cylindrical in shape, and made of natural rubber, which has excellent elasticity. After the fixed base 101 is firmly installed behind the upper cavity 300 by three M4×16 screws, the rubber pads 102 can significantly buffer the falling speed of the upper cavity 300 during the cavity opening process, protecting the quartz barrel and related hardware inside the cavity.

[0018] The second buffer mechanism 200 includes an upper buffer stop 201, a lower buffer stop 202, and a damper 203. The upper buffer stop 201 and lower buffer stop 202 are respectively fixed to the sensing sensors 500 on the sides of the upper cavity 300 and lower cavity 400 by screws. The upper buffer stop 201 and lower buffer stop 202 are made of hard plastic with a frosted, anti-slip surface. The damper 203 is a hydraulic damper 203, installed on the lower buffer stop 202. The buffering effect is adjusted to the optimal state by rotating the threads of the damper 203. When closing the upper cavity 300, the operator can clearly feel the buffering effect provided by the buffer stops and damper 203, preventing injury to the hand from the rapid closing of the upper cavity 300, while not affecting the normal operation of the suction chamber. After long-term use testing, the stability of the equipment has been significantly improved, the damage rate of the equipment components has been greatly reduced, and the safety of the operator has been effectively guaranteed.

[0019] Example 2:

[0020] like Figure 1 , Figure 2As shown in this embodiment, a device for improving the stability and safety of a plasma manual adhesive removal device includes a first buffer mechanism 100 disposed behind the upper cavity 300 and a second buffer mechanism 200 disposed on the side of the upper cavity 300. The first buffer mechanism includes a fixed base 101 and three rubber pads 102. The fixed base 101 is firmly fixed to the rear of the lower cavity 400 by three M4×16 screws. The fixed base 101 is made of stainless steel and has good corrosion resistance. The rubber pads 102 are made of synthetic rubber and have strong wear resistance. The installation method is the same as in Embodiment 1. In actual use, this first buffer mechanism can also effectively buffer the impact force when the upper cavity 300 is opened.

[0021] The second buffer mechanism includes an upper buffer block 201, a lower buffer block 202, and a damper 203. The upper and lower buffer blocks 201 and 202 are respectively fixed to the sensing sensors 500 on the sides of the upper cavity 300 and lower cavity 400 by screws. The upper and lower buffer blocks 201 and 202 are made of metal and have undergone surface anti-slip treatment. The damper 203 is a pneumatic damper 203, installed on the lower buffer block 202. A suitable buffering effect is achieved through precise adjustment of the threads. During cavity closing operations, the buffer mechanism provides excellent buffering, ensuring operational safety and further improving equipment stability. Verification through multiple embodiments demonstrates that this utility model's device for improving the stability and safety of manual plasma degumming equipment has significant practical value and promotional significance.

[0022] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A device for improving the stability and safety of plasma manual glue removal equipment, characterized in that: It includes a second buffer mechanism located at the rear of the upper cavity and a second buffer mechanism located on the side of the upper cavity; the second buffer mechanism located at the rear of the upper cavity includes a fixed base and a rubber pad, and the second buffer mechanism located on the side of the upper cavity includes an upper buffer block, a lower buffer block and a damper, the damper is installed on the lower buffer block and the damper is used to adjust the buffering effect.

2. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1, characterized in that: The fixed base is fixed to the rear of the lower cavity with three M4×16 screws, and three rubber pads are installed on the fixed base.

3. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1 or 2, characterized in that: The rubber pad is cylindrical and has a thickness of 30 mm.

4. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1, characterized in that: The upper and lower buffer blocks are respectively fixed to the sensing sensors on the sides of the upper and lower cavities by screws.

5. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1, characterized in that: The fixing base is made of metal, and its shape and size are adapted to the rear of the upper cavity to ensure stable installation.

6. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1, characterized in that: The rubber pad is made of natural or synthetic rubber and has good elasticity and wear resistance.

7. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1, characterized in that: The upper and lower buffer blocks are made of hard plastic or metal and have an anti-slip surface treatment.

8. The device for improving the stability and safety of a plasma manual adhesive removal device according to claim 1, characterized in that: The damper is a hydraulic damper or a pneumatic damper, and the buffering effect is precisely adjusted by rotating its threads.

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