Enhanced structure for plasma dissociation chamber in production equipment process exhaust gas removal

Abstract

An enhanced structure for a plasma dissociation chamber in a production equipment process waste gas separation system allows individual or mixed waste gas from the process to enter a dissociation chamber of a waste gas plasma processor via separate gas pipelines. A vertical plasma body is positioned in the center of the dissociation chamber, which is then supplied with nitrogen working gas to dissociate the tail gas containing the special gases generated in the waste gas within the dissociation chamber at high temperature. The key feature is that an air supply pipeline is introduced into the high-temperature middle section of the heating flame formed by the plasma body within the dissociation chamber. This reduces the high-temperature reaction zone generated in the front section of the heating flame, resulting in a faster and more direct dissociation reaction rate in the rear section of the heating flame after air supply. It also reduces the generation rate of NOx (gaseous nitrogen oxides) and shortens the cooling chamber at the rear of the heating flame in the dissociation chamber, thereby reducing the overall length and installation cost of the plasma processor.

Description

Technical Field

[0001] This utility model relates to a plasma dissociation chamber structure for removing process waste gas from production equipment, and in particular, to a structure that increases the dissociation reaction rate and dissociation rate, thereby reducing the generation rate of NOx (nitrogen oxides) byproducts. Background Technology

[0002] Existing technologies for plasma dissociation structures in production equipment for waste gas removal are limited. Semiconductor manufacturing processes utilize large quantities of high-concentration, high-purity, toxic specialty chemicals such as perfluorinated gases and nitrogen. For over a decade, to meet environmental requirements, special treatment of exhaust gases in these specialty gas pipelines has been necessary. This has evolved from large-scale gas-heated combustion treatment machines to single-unit, one-to-one, small-batch plasma-heated treatment machines, which may also include end-stage treatment for acid washing and rinsing. Essentially, these systems utilize high temperatures for the dissociation reaction of the specialty gases. This invention does not discuss the related chemical reaction processes but only describes the structure of the plasma processor. When individual or mixed waste gases from the process enter a dissociation chamber of the waste gas plasma processor through their respective gas pipelines, the dissociation chamber... The device features a vertical plasma unit that uses nitrogen as the working gas to dissociate exhaust gases, including perfluorocarbons, chlorofluorocarbons, and hydrogen chloride, in a dissociation chamber at high temperatures. Simultaneously, air is introduced through a central channel or through another parallel channel parallel to the gas lines to the top of the dissociation chamber. The top of the dissociation chamber is also where the electrodes of the plasma unit are fixed, from which the plasma's heating flame is emitted. Essentially, to ensure uniform dissociation reaction, the plasma unit is supplied with the highest setting for dissociation. However, after long-term use and analysis of the results, it was found that while previous methods were effective, some special gases remained undissociated in the dissociation chamber, and the production rate of NOx (nitrogen oxides) byproducts was high. To provide a product that better meets practical needs, the creators conducted research and development to solve the problems that arise with existing technologies. Utility Model Content

[0003] The main objective of this invention is to provide an enhanced plasma dissociation chamber structure for removing process waste gas from production equipment. This structure increases the dissociation reaction rate and reduces the generation rate of byproduct NOx gas. Traditionally, air introduced from the highest temperature heating flame section at the inlet is mainly recombined into hydrogen fluoride, water, carbon dioxide, etc., after dissociation with special gases such as fluorine and chlorine. However, dissociation is easy in the high-temperature section (2000°C), but recombination is difficult, as they are all active ions. Therefore, this invention introduces air from the high-temperature middle section (1000°C) of the heating flame. At this temperature, all components in the air are also easy to dissociate, and the dissociated special gas ions can easily bind to their readily combinable counterparts. This increases the dissociation reaction rate. Similarly, because the oxygen supply section is reduced, the generation rate of byproduct NOx gas is also reduced.

[0004] To achieve the above objectives, the structure of this utility model is as follows: when the individual or mixed waste gas from the process enters a dissociation chamber of the waste gas plasma processor through various gas pipelines, a vertical plasma body is provided in the middle of the dissociation chamber to cooperate with the introduction of working gas nitrogen to dissociate the tail gas of the waste gas generated in the dissociation chamber at high temperature. An air supply pipeline is introduced into the high-temperature middle section of the heating flame formed by the plasma body in the dissociation chamber.

[0005] The beneficial effects of this utility model are as follows: by introducing an air supply pipe into the high-temperature middle section of the heating flame formed by the plasma body in the dissociation chamber, the high-temperature reaction zone generated in the high-temperature front section of the heating flame is reduced. Correspondingly, the dissociation reaction rate in the high-temperature rear section of the heating flame after air supply is faster and more direct, and the amount of NOx gas generated by the byproduct is also reduced. At the same time, the cooling chamber at the rear end of the heating flame in the dissociation chamber can be shortened, thereby reducing the overall length and installation cost of the plasma processor.

[0006] To enable your review committee to further understand the technology, means and effects of this utility model in order to achieve its intended purpose, a preferred and feasible embodiment is described below in detail with reference to the drawings. It is believed that the purpose, features and advantages of this utility model can be understood in depth and in detail from this embodiment. Attached Figure Description

[0007] Figure 1 This is a cross-sectional view of the present invention.

[0008] Explanation of reference numerals in the attached figures

[0009] 1. Gas pipeline; 2. Plasma processor; 3. Dissociation chamber; 4. Plasma body; 5. Gas supply pipeline. Detailed Implementation

[0010] like Figure 1As shown, this utility model discloses an enhanced structure for a plasma dissociation chamber in a production equipment process waste gas separation system. Individual gases or mixed waste gas from the process flow into a dissociation chamber 3 of the waste gas plasma processor 2 via gas pipelines 1. A vertical plasma body 4 is located in the center of the dissociation chamber 3, which, in conjunction with the introduction of working gas nitrogen, dissociates the tail gas containing perfluorocarbons, chlorine, and hydrogen fluoride generated in the waste gas within the dissociation chamber 3 at high temperatures. An air injection pipeline 5 is introduced into the high-temperature middle section of the heating flame formed by the plasma body within the dissociation chamber 3. This reduces the high-temperature reaction zone generated in the front section of the heating flame, resulting in a faster and more direct dissociation reaction rate in the rear section of the heating flame after air injection. This also reduces the amount of NOx gas produced as a byproduct. Furthermore, it shortens the cooling chamber at the rear of the heating flame in the dissociation chamber, thereby reducing the overall length and installation cost of the plasma processor.

[0011] In summary, this invention utilizes a special design that modifies the introduction of air from the high-temperature mid-section of the plasma heating flame. This facilitates the dissociation of various components in the air, allowing the dissociated gas ions to easily bind to readily bound objects. This increases the dissociation reaction rate. Similarly, the reduction in the oxygen supply section also reduces the amount of NOx gas produced, thus enhancing the dissociation of gas and reducing byproducts. This design is easy to understand and implement, providing excellent usability and convenience, and is a completely different mechanism from existing technologies.

[0012] The above description and drawings are the preferred embodiments of the present utility model and are not intended to limit the present utility model. The scope of the present utility model shall be determined by the following patent scope. All embodiments and similar structures with similar variations to the spirit of the patent scope shall be included in the present utility model.

Claims

1. A plasma dissociation chamber enhancement structure for removing process waste gas from production equipment, comprising a dissociation chamber for receiving individual gases or mixed waste gas from the process, wherein a vertical plasma body is disposed in the center of the dissociation chamber, characterized in that: An air supply line is introduced into the high-temperature section of the heating flame formed by the plasma body within the dissociation chamber.

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