A silicon carbide powder cleaning device

Abstract

This utility model discloses a silicon carbide powder cleaning device, relating to the field of silicon carbide processing technology. It includes a mounting frame and a cleaning water tank. The top of the cleaning water tank is covered with a tank cover, and a drive shaft and a stirring rod are arranged inside the cleaning water tank. A mounting box is connected to one side of the mounting frame, and a drive motor and a transmission mechanism are arranged inside the mounting box. A limiting mechanism is provided at the bottom of the cleaning water tank. This silicon carbide powder cleaning device is efficient, safe, and easy to operate. Driven by the drive motor and transmitted by the transmission mechanism, the drive shaft and stirring rod stir and clean the silicon carbide powder inside the cleaning water tank. The special structural design of the stirring rod increases its stirring range and intensity, thereby effectively improving the cleaning power. Simultaneously, the limiting mechanism axially fixes the cleaning water tank to ensure the safe operation of personnel and equipment.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide processing technology, specifically to a silicon carbide powder cleaning device. Background Technology

[0002] Silicon carbide, a commonly used material in semiconductor manufacturing, possesses characteristics such as a wide bandgap, high critical breakdown electric field, high thermal conductivity, and excellent chemical stability. Therefore, it is widely used in the fabrication of electronic devices under extreme operating conditions. To ensure the performance of silicon carbide in subsequent applications, the purity of its raw material (silicon carbide synthetic powder) is crucial. Typically, a silicon carbide synthetic powder pickling machine is a specialized piece of equipment used to clean silicon carbide synthetic powder. Its main function is to remove impurities from the synthetic powder through the pickling process, thereby improving the purity of the material.

[0003] In the existing technology, silicon carbide powder pickling machines generally adopt a single-shaft stirring structure for cleaning, and the material is discharged naturally from the discharge pipe at the bottom. However, relying solely on the above structure, there are still problems such as insufficient pickling cleaning power and slow and difficult discharge process.

[0004] To address the aforementioned issues, innovative designs are urgently needed based on existing equipment. Therefore, we propose a silicon carbide powder cleaning device that can effectively solve these problems. Utility Model Content

[0005] The purpose of this invention is to provide a silicon carbide powder cleaning device to solve the problems of insufficient cleaning force and low discharge efficiency in the existing silicon carbide powder pickling machine with single-shaft stirring and bottom natural discharge structure mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a silicon carbide powder cleaning device, comprising a mounting frame, a cleaning water tank being provided on the inner side of the top of the mounting frame; a water tank cover being flipped closed on the top of the cleaning water tank, a water inlet being fixedly connected to the top of the water tank cover, and a water outlet being fixedly connected to the bottom of one side of the cleaning water tank; a mounting box being fixedly connected to one side of the mounting frame, and a drive motor being fixedly installed at the bottom of the mounting box; a transmission shaft rotatably passing through the inner side of the cleaning water tank, with one side of the transmission shaft rotatably connected to the mounting frame and the other side passing through the interior of the mounting box and driven by the drive motor through a transmission mechanism; a stirring rod being fixedly connected to the outer wall of the transmission shaft, and the stirring rod having a transverse S-shaped structure; both the transmission shaft and the stirring rod are made of polytetrafluoroethylene; a limiting mechanism for axially fixing the cleaning water tank is provided at the bottom of the cleaning water tank to ensure the safe operation of personnel and equipment.

[0007] Preferably, an electromagnetic lock is provided between the cleaning water tank and the tank cover to ensure that the two are tightly sealed during the pickling process. Two flanges are fixedly connected to the outer wall of the drive shaft, and the two flanges are respectively tightly fitted to the two outer walls of the cleaning water tank. The flanges are also made of polytetrafluoroethylene to ensure the sealing and corrosion resistance of the connection parts.

[0008] Preferably, an inlet solenoid valve is installed on the water inlet, and an overflow port is provided on the top side of the cleaning water tank to ensure the stability of the water level during the cleaning process.

[0009] Preferably, a water level probe is fixedly installed on the top of the inner wall of the cleaning water tank to monitor the water level in the cleaning water tank in real time and prevent overflow or water shortage.

[0010] Preferably, the transmission mechanism includes two transmission wheels, which are respectively fixedly connected to the output shaft of the drive motor and rotatably connected to the side wall of the mounting box. A transmission belt is connected to the outer side of both transmission wheels. A reduction gear set is provided between one of the transmission wheels and the transmission shaft, and the reduction gear set consists of two meshing reduction gears. By setting the transmission mechanism, the drive motor drives one transmission wheel to rotate. This transmission wheel continues to drive the other transmission wheel to rotate through the transmission belt. The driven second transmission wheel continues to drive the transmission shaft to rotate through the reduction gear set, so as to achieve a stable stirring effect.

[0011] Preferably, the limiting mechanism includes two anti-tilting protrusions formed on the bottom of the cleaning water tank, and a limiting lifting block is engaged between the two anti-tilting protrusions. A hydraulic rod is installed inside the bottom of the mounting frame, and the output end of the hydraulic rod is connected to the limiting lifting block. By pushing the limiting lifting block with the hydraulic rod and engaging it between the two anti-tilting protrusions, the cleaning water tank can be axially limited to prevent it from rotating during pickling. After pickling is completed, the hydraulic rod drives the limiting lifting block to move downwards, causing it to disengage from the two anti-tilting protrusions. At this time, the cleaning water tank will be flipped downwards under the drive of the transmission shaft, so that the silicon carbide powder in the cleaning water tank can be easily poured into the material frame for easy discharge and improved discharge efficiency.

[0012] Preferably, this device is equipped with a power distribution cabinet and a timer for electrical control and linkage of the drive motor, water inlet solenoid valve, water level probe, and hydraulic rod to set the stirring start time and cleaning time, so as to achieve automated operation.

[0013] Compared with the prior art, the beneficial effects of this utility model are: the silicon carbide powder cleaning device is efficient, safe, and easy to operate. A drive motor drives the transmission mechanism, causing the transmission shaft and stirring rod to stir and clean the silicon carbide powder inside the cleaning water tank. The stirring rod adopts a special structural design, which increases its stirring range and intensity, thereby effectively improving the cleaning effect. Simultaneously, a limiting mechanism is set to axially limit and fix the cleaning water tank, ensuring the safety of operators and equipment. The specific details are as follows:

[0014] (1) Power is provided by the drive motor and transmitted through the transmission mechanism to realize the rotation of the drive shaft, thereby driving the stirring rod to effectively stir and clean the silicon carbide powder in the cleaning water tank. The special structural design of the stirring rod effectively increases its stirring range and intensity, thereby effectively improving the cleaning effect in the pickling process. In addition, both the drive shaft and the stirring rod are made of polytetrafluoroethylene, which has good corrosion resistance and durability, and can ensure the stable operation of the equipment in an acidic environment.

[0015] (2) By coordinating the inlet solenoid valve with the overflow port, the water level can be kept stable during the cleaning process. Furthermore, by setting a water level probe that can monitor the water level in real time, changes in the water level can be detected in a timely manner, effectively preventing overflow or water shortage during the cleaning process.

[0016] (3) By setting up a transmission mechanism, a drive motor drives a transmission wheel to rotate. This transmission wheel then drives another transmission wheel to rotate via a transmission belt. The second transmission wheel, which is driven, then drives the transmission shaft to rotate via a reduction gear set. This achieves smooth rotation of the transmission shaft and ensures stability and mixing effect during the mixing process.

[0017] (4) By setting a limiting mechanism, the hydraulic rod pushes the limiting lifting block to engage between the two anti-tilting protrusions, which can axially limit the cleaning water tank and prevent it from rotating during the pickling process. After pickling is completed, the hydraulic rod drives the limiting lifting block to descend and disengage it from the two anti-tilting protrusions. At this time, the cleaning water tank will flip downward under the drive of the transmission shaft, and the silicon carbide powder in the cleaning water tank can be easily poured into the material frame, realizing the simple and quick discharge process and effectively improving the discharge efficiency. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the overall cross-sectional structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the internal cross-sectional structure of the mounting box of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the cleaning water tank of this utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the transmission shaft of this utility model;

[0023] Figure 6 This is a schematic diagram of the snap-fit ​​structure between the anti-tilting protrusion and the limiting lifting block of this utility model.

[0024] In the diagram: 1. Mounting frame; 2. Cleaning water tank; 3. Mounting box; 4. Drive motor; 5. Transmission wheel; 6. Transmission belt; 7. Reduction gear set; 8. Transmission shaft; 9. Stirring rod; 10. Flange; 11. Water tank cover; 12. Water inlet; 13. Water outlet; 14. Inlet solenoid valve; 15. Overflow port; 16. Water level probe; 17. Anti-tilt protrusion; 18. Limit lifting block; 19. Hydraulic rod. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Example 1: Please refer to Figures 1-6 This utility model provides the following technical solution: a silicon carbide powder cleaning device, including a mounting frame 1, with a cleaning water tank 2 disposed on the inner side of the top of the mounting frame 1; a water tank cover 11 is flipped and closed on the top of the cleaning water tank 2, and a water inlet 12 is fixedly connected to the top of the water tank cover 11; a water outlet 13 is fixedly connected to the bottom of one side of the cleaning water tank 2, and an electromagnetic lock is provided between the cleaning water tank 2 and the water tank cover 11 to ensure that the two are tightly closed during the pickling process. The water inlet 12 is equipped with an inlet valve. The water inlet solenoid valve 14 and the overflow port 15 are provided on the top side of the cleaning water tank 2. The combination of the water inlet solenoid valve 14 and the overflow port 15 can ensure the stability of the water level during the cleaning process. In addition, a water level probe 16 is fixedly installed on the top of the inner wall of the cleaning water tank 2 to monitor the water level in the cleaning water tank 2 in real time to prevent overflow or water shortage. When water shortage is detected, an early warning will be sent to the control terminal to remind the staff to open the water inlet solenoid valve 14 to control the water injection from the water inlet 12 to maintain the water level stability.

[0027] A mounting box 3 is fixedly connected to one side of the mounting frame 1, and a drive motor 4 is fixedly installed at the bottom of the mounting box 3. A transmission shaft 8 is rotatably driven through the inner side of the cleaning water tank 2, and one side of the transmission shaft 8 is rotatably connected to the mounting frame 1, while the other side passes through the interior of the mounting box 3 and is driven by the drive motor 4 through the transmission mechanism. A stirring rod 9 is fixedly connected to the outer wall of the transmission shaft 8, and the stirring rod 9 has a transverse S-shaped structure. Both the transmission shaft 8 and the stirring rod 9 are made of polytetrafluoroethylene.

[0028] In use, the drive shaft 8 is rotated by the drive motor 4 and the transmission mechanism. In this way, the drive shaft 8 and the stirring rod 9 can stir and clean the silicon carbide powder inside the cleaning water tank 2. The special structural design of the stirring rod 9 can increase its stirring range and intensity, thereby effectively improving the cleaning power. In addition, the polytetrafluoroethylene material of the drive shaft 8 and the stirring rod 9 has good corrosion resistance and durability, which can ensure the stable operation of the equipment in acidic environments. The above structure makes this device efficient, safe and easy to operate, and it is well-suited for the efficient cleaning of silicon carbide powder.

[0029] Furthermore, the transmission mechanism includes two transmission wheels 5, which are fixedly connected to the output shaft of the drive motor 4 and rotatably connected to the side wall of the mounting box 3. The outer sides of the two transmission wheels 5 are connected to a transmission belt 6. A reduction gear set 7 is provided between one of the transmission wheels 5 and the transmission shaft 8. The reduction gear set 7 consists of two meshing reduction gears. By setting up the transmission mechanism, the drive motor 4 drives one transmission wheel 5 to rotate. This transmission wheel 5 continues to drive the other transmission wheel 5 to rotate through the transmission belt 6. The driven second transmission wheel 5 continues to drive the transmission shaft 8 to rotate through the reduction gear set 7, so as to achieve a stable stirring effect.

[0030] In addition, two flanges 10 are fixedly connected to the outer wall of the drive shaft 8, and the two flanges 10 are tightly fitted to the outer walls of the two sides of the cleaning water tank 2. The flanges 10 are also made of polytetrafluoroethylene to ensure the sealing and corrosion resistance of the connection parts.

[0031] Example 2: Based on Example 1, a limiting mechanism for axially fixing the cleaning water tank 2 is provided at the bottom of the cleaning water tank 2 to ensure the safe operation of personnel and equipment. The limiting mechanism includes two anti-tilt protrusions 17 formed at the bottom of the cleaning water tank 2, and a limiting lifting block 18 is engaged between the two anti-tilt protrusions 17. A hydraulic rod 19 is installed inside the bottom of the mounting frame 1, and the output end of the hydraulic rod 19 is connected to the limiting lifting block 18. By pushing the limiting lifting block 18 with the hydraulic rod 19 and engaging it between the two anti-tilt protrusions 17, the cleaning water tank 2 can be axially limited to prevent it from rotating during pickling. After pickling is completed, the hydraulic rod 19 drives the limiting lifting block 18 to move downward, causing it to disengage from the two anti-tilt protrusions 17. At this time, the cleaning water tank 2 will be flipped downward under the drive of the transmission shaft 8, so that the silicon carbide powder in the cleaning water tank 2 can be easily poured into the material frame for easy discharge and improved discharge efficiency.

[0032] Furthermore, a central horizontal plate is provided on the inner side of the mounting frame 1, and the central horizontal plate is connected to the side wall of the mounting box 3. When the hydraulic rod 19 drives the limit lifting block 18 to move downward, the limit lifting block 18 will contact the central horizontal plate to further enhance the operational stability.

[0033] In addition, this device is equipped with a power distribution cabinet and a timer for electrical control and linkage of the drive motor 4, water inlet solenoid valve 14, water level probe 16, and hydraulic rod 19 to set the stirring start time and cleaning time, so as to achieve automated operation.

[0034] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A silicon carbide powder cleaning device, comprising a mounting frame (1), wherein a cleaning water tank (2) is provided on the inner side of the top of the mounting frame (1); characterized in that The top of the cleaning water tank (2) is flipped to cover the water tank cover (11), the top of the water tank cover (11) is fixedly connected to the water inlet (12), and the bottom of one side of the cleaning water tank (2) is fixedly connected to the water outlet (13). The mounting frame (1) is fixedly connected to a mounting box (3) on one side, and a drive motor (4) is fixedly installed at the bottom of the mounting box (3). A transmission shaft (8) is rotatably driven through the inner side of the cleaning water tank (2), and one side of the transmission shaft (8) is rotatably connected to the mounting frame (1), while the other side extends into the interior of the mounting box (3) and is driven by the drive motor (4) through the transmission mechanism. A stirring rod (9) is fixedly connected to the outer wall of the transmission shaft (8), and the stirring rod (9) has a transverse S-shaped structure. Both the transmission shaft (8) and the stirring rod (9) are made of polytetrafluoroethylene. The bottom of the cleaning water tank (2) is provided with a limiting mechanism for axially fixing the cleaning water tank (2) to ensure the safe operation of people and equipment.

2. A silicon carbide powder cleaning apparatus as claimed in claim 1, wherein: An electromagnetic lock is provided between the cleaning water tank (2) and the water tank cover (11) to ensure that the two are tightly sealed during the pickling process. Two flanges (10) are fixedly connected to the outer wall of the drive shaft (8), and the two flanges (10) are respectively tightly attached to the outer walls of the two sides of the cleaning water tank (2), and the flanges (10) are also made of polytetrafluoroethylene.

3. A silicon carbide powder cleaning apparatus as defined in claim 2, wherein: The water inlet (12) is equipped with a water inlet solenoid valve (14), and an overflow port (15) is provided on the top of one side of the cleaning water tank (2).

4. A silicon carbide powder cleaning apparatus as defined in claim 3, wherein: A water level probe (16) is fixedly installed on the top of the inner wall of the cleaning water tank (2) for real-time monitoring of the water level in the cleaning water tank (2).

5. A silicon carbide powder cleaning apparatus as claimed in claim 1, wherein: The transmission mechanism includes two transmission wheels (5), which are fixedly connected to the output shaft of the drive motor (4) and rotatably connected to the side wall of the mounting box (3). The outer sides of the two transmission wheels (5) are connected to a transmission belt (6). A reduction gear set (7) is provided between one of the transmission wheels (5) and the transmission shaft (8), and the reduction gear set (7) is composed of two meshing reduction gears.

6. A silicon carbide powder cleaning apparatus as defined in claim 4, wherein: The limiting mechanism includes two anti-tilt protrusions (17) formed on the bottom of the cleaning water tank (2), and a limiting lifting block (18) is engaged between the two anti-tilt protrusions (17). A hydraulic rod (19) is installed inside the bottom of the mounting frame (1), and the output end of the hydraulic rod (19) is connected to the limiting lifting block (18).

7. A silicon carbide powder cleaning apparatus as defined in claim 6, wherein: This device is equipped with a power distribution cabinet and a timer for electrical control and linkage with the drive motor (4), water inlet solenoid valve (14), water level probe (16), and hydraulic rod (19) to set the stirring start time and cleaning time.

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