Workpiece transfer device

Abstract

The utility model relates to the technical field of workpiece conveying devices, in particular to a workpiece transfer device which comprises a main platform and a piece grabbing mechanism, the piece grabbing mechanism is connected with the main platform through a driving mechanism, and the piece grabbing mechanism moves in the first movement direction and the second movement direction relative to the main platform through the driving mechanism. The piece grabbing mechanism comprises a second lifting device, a first clamping jaw assembly and a second clamping jaw assembly, the first clamping jaw assembly and the second clamping jaw assembly are oppositely arranged on the second lifting device, and the second lifting device drives the first clamping jaw assembly and the second clamping jaw assembly to move face to face or back to back relative to the driving mechanism so as to clamp or loosen the workpiece. The transfer device integrates the sheet grabbing mechanism, the multiple lifting mechanism, the translation mechanism and the like, automatic loading and unloading of the workpieces are achieved, the workpieces are accurately installed in the target positions, the labor cost is greatly saved, the workpiece transfer steps are simplified, the workpiece transport efficiency is improved, meanwhile, the equipment occupied space is reduced, and the production efficiency is improved. The production cost and the accident risk are reduced, and the stability of the product quality is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of workpiece conveying devices, and in particular to a workpiece transfer device. Background Technology

[0002] In the loading and unloading process of heavy workpieces for vacuum coating, manual assistance is usually provided by various transportation equipment such as forklifts, overhead cranes, and electric hoists to transfer the workpieces to the substrate rack for substrate mounting. However, due to the heavy weight and large size of the workpieces, manual loading of heavy workpieces has many problems such as low efficiency, poor safety, and high risk of product contamination. In addition, the workpieces need to be transferred between multiple transportation equipment, which is time-consuming and labor-intensive, with a high risk of workpiece damage and significant safety hazards to workers.

[0003] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0004] This utility model addresses the aforementioned issues with existing methods for transferring heavy workpieces to substrate racks using multiple transport devices such as forklifts, overhead cranes, and electric hoists. Due to the workpieces' thickness and large size, manual loading of heavy workpieces presents numerous problems, including low efficiency, poor safety, and a high risk of product contamination. Furthermore, the workpieces need to be transferred between multiple transport devices, which is time-consuming, labor-intensive, and carries a high risk of workpiece damage, posing significant safety hazards to workers. Therefore, this utility model proposes a workpiece transfer device.

[0005] The technical solution adopted by this utility model to solve its technical problem is:

[0006] A workpiece transfer device, comprising:

[0007] The main platform, which contains a motion space;

[0008] A gripping mechanism is provided, which is connected to the main platform via a drive mechanism. The drive mechanism is located within the motion space, and the gripping mechanism moves relative to the main platform along a first motion direction and a second motion direction via the drive mechanism.

[0009] The gripping mechanism includes a second lifting device connected to the drive mechanism, a first gripper assembly and a second gripper assembly disposed opposite to the second lifting device, and the first gripper assembly and the second gripper assembly are driven by the second lifting device to move towards or away from the drive mechanism to clamp or release the workpiece.

[0010] As described above, in a workpiece transfer device, the first gripper assembly includes a first gripper frame connected to the drive mechanism and a plurality of first grippers disposed on one side of the first gripper frame. Each first gripper is spaced apart along the length direction of the first gripper frame, and each first gripper is provided with a first clamping groove. The second gripper assembly includes a second gripper frame connected to the drive mechanism and a plurality of second grippers disposed on one side of the second gripper frame. Each second gripper is spaced apart along the length direction of the second gripper frame, and each second gripper is provided with a second clamping groove. The clamping space for fixing the workpiece is formed by the first clamping groove and the second clamping groove.

[0011] As described above, in a workpiece transfer device, the second lifting device includes a second active lifting module, which includes a third motor, a fifth guide rail connected to the third motor, a third transmission slider and a fourth transmission slider slidably disposed on the fifth guide rail, a first gripper assembly connected to the third transmission slider, and a second gripper assembly connected to the fourth transmission slider. The sliding directions of the third transmission slider and the fourth transmission slider are opposite.

[0012] As described above, in a workpiece transfer device, the second lifting device further includes a second auxiliary lifting module. The second auxiliary lifting module includes at least one sixth guide rail disposed on the main platform and located on one side of the fifth guide rail, a third driven slider and a fourth driven slider slidably connected to the sixth guide rail. The third driven slider is connected to the first gripper assembly, and the fourth driven slider is connected to the second gripper assembly. The sliding directions of the third driven slider and the fourth driven slider are opposite.

[0013] The workpiece transfer device described above further includes a third detection device disposed between the gripping mechanism and the driving mechanism, the third detection device being used to detect the moving position of the first gripper assembly and / or the second gripper assembly relative to the driving mechanism.

[0014] As described above, a workpiece transfer device includes a driving mechanism comprising a first lifting device disposed on the main platform, a lifting platform connected to the first lifting device, a forward and backward moving device disposed on the lifting platform, and a secondary platform passing through the lifting platform and connected to the forward and backward moving device. A gripping mechanism is disposed within the secondary platform and connected to the forward and backward moving device via the secondary platform. The first lifting device drives the gripping mechanism to move along a first direction of motion, and the forward and backward moving device drives the gripping mechanism to move along a second direction of motion. A connecting seat for connecting to the forward and backward moving device is also provided on the outer side of the lifting platform. A first detection device is provided between the lifting platform and the connecting seat, and a second detection device is provided between the lifting platform and the main platform.

[0015] As described above, in a workpiece transfer device, the first lifting device includes a first active lifting module, which includes a first motor mounted on the main platform, a first guide rail connected to the first motor, and a first transmission slider slidably connected to the first guide rail. The lifting platform is connected to the first transmission slider.

[0016] As described above, in a workpiece transfer device, the first lifting device further includes a first auxiliary lifting module. The first auxiliary lifting module includes at least one second guide rail disposed on one side of the first guide rail and a first driven slider slidably connected to the second guide rail. The lifting platform is connected to the first driven slider.

[0017] As described above, in a workpiece transfer device, the forward and backward moving device includes an active translation module. The active translation module includes a second motor, a belt drive module connected to the second motor, a third guide rail connected to the belt drive module, and a second transmission slider slidably connected to the third guide rail. The belt drive module is located on the side of the main platform away from the gripping mechanism, the second motor is located on the side of the belt drive module, and the sub-platform is connected to the second transmission slider.

[0018] As described above, the workpiece transfer device further includes an auxiliary translation module. The auxiliary translation module includes a fourth guide rail disposed on the side of the lifting platform away from the third guide rail, and a second driven slider slidably disposed on the fourth guide rail. The sub-platform is connected to the second driven slider.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] This utility model proposes a workpiece transfer device, including a gripping mechanism and a drive mechanism for moving the gripping mechanism. The workpiece is first loaded via a feeding mechanism, and then the drive mechanism drives the gripping mechanism to move longitudinally up and down and laterally forward and backward relative to the main platform. Through the coordinated operation of the gripping mechanism and the drive mechanism, the workpiece is fed into the gripping mechanism and automatically transported to the target position. Compared to the traditional method of transporting workpieces using forklifts, overhead cranes, and electric hoists, this utility model's transfer device integrates gripping, multiple lifting, and translation mechanisms to achieve automatic loading and unloading of workpieces. This ensures that the workpiece is accurately installed in the target position, significantly saving labor costs, simplifying the workpiece transfer process, improving workpiece transportation efficiency, reducing equipment space requirements, lowering production costs and accident risks, and enhancing product quality stability.

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0022] Figure 1 The three-dimensional workpiece transfer device of this utility model Figure 1 ;

[0023] Figure 2 The three-dimensional workpiece transfer device of this utility model Figure 2 ;

[0024] Figure 3 This diagram illustrates the connection between the main platform, the lifting platform, and the first lifting device of this utility model. Figure 1 ;

[0025] Figure 4 This diagram illustrates the connection between the main platform, the lifting platform, and the first lifting device of this utility model. Figure 2 ;

[0026] Figure 5 This is a schematic diagram showing the connection of the lifting platform, the front and rear moving device, the auxiliary platform, and the gripping mechanism of this utility model.

[0027] Figure 6 This is a perspective view of the sub-platform of this utility model;

[0028] Figure 7 This is a perspective view of the gripping mechanism of this utility model;

[0029] Figure 8 This is a schematic diagram showing the connection between the first detection device and the third detection device of this utility model;

[0030] Figure 9 This is a schematic diagram of the connection of the second detection device of this utility model. Detailed Implementation

[0031] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings. The described embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0032] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0033] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0034] like Figures 1 to 9 As shown, Figure 1 This indicates that the workpiece transfer device is in the receiving state. Figure 2 This invention provides a workpiece transfer device, including a main platform 1, a drive mechanism 3, and a gripping mechanism 4. The gripping mechanism 4 is connected to the drive mechanism 3, and the drive mechanism 3 can drive the gripping mechanism 4 to move relative to the main platform 1 along a first movement direction and a second movement direction, so as to transfer the workpiece from the substrate holder in a vacuum coating production line. Figure 1 The splice position shown is transported to, as... Figure 2 The wafer feeding position is shown; the first movement direction and the second movement direction are perpendicular; as shown Figure 1 As shown, Figure 1 The Z-axis is the first direction of motion axis, and the Y-axis is the second direction of motion axis. In this embodiment, the drive mechanism 3 can drive the gripping mechanism 4 to move longitudinally up and down and laterally forward and backward relative to the main platform 1. Through the coordinated operation of the gripping mechanism 4 and the drive mechanism 3, the workpiece is automatically transported to the target position. In practical applications, the workpiece can first be loaded into the feeding mechanism 2 manually or by other conveying equipment, and then the drive mechanism 3 drives the gripping mechanism 4 to move longitudinally up and down and laterally forward and backward relative to the main platform 1, so that the gripping mechanism 4 can grab the workpiece from the receiving position and transport the workpiece into the substrate holder, realizing the transfer of workpieces in the vacuum coating production process. Compared with the traditional method of transporting workpieces by forklifts, overhead cranes and electric hoists, the transfer device in this embodiment integrates gripping, multiple lifting and translation mechanisms to realize the automatic loading and unloading of workpieces, so that the workpiece is accurately installed in the substrate holder, which greatly saves labor costs, simplifies the workpiece transfer steps, improves the workpiece transportation efficiency, reduces the equipment space occupied, reduces production costs and accident risks, and improves the stability of product quality.

[0035] In this embodiment, the transfer device can be applied to the transportation of heavy workpieces in different fields. The transfer device can be installed in the corresponding production line or configured with a separate walking device for independent operation. This embodiment does not make specific limitations. For example, the transfer device can be applied to a vacuum coating production line for the transportation of heavy workpieces. The transfer device may also include a feeding mechanism 2 located on one side of the main platform 1. The feeding mechanism 2 includes a receiving space for fixing the workpiece, and the gripping mechanism 4 is located between the driving mechanism 3 and the feeding mechanism 2. In practical applications, the workpiece can be loaded first through the feeding mechanism 2, and then the driving mechanism 3 can drive the gripping mechanism 4 to move longitudinally up and down and laterally forward and backward relative to the main platform 1, so that the gripping mechanism 4 can grab the workpiece from the receiving space and transport the workpiece. Through the coordinated operation of the feeding mechanism 2, the gripping mechanism 4 and the driving mechanism 3, the workpiece can be fed into the substrate holder and automatically transported to the substrate holder.

[0036] In this embodiment, the main platform 1 can be configured as a cuboid frame made of carbon steel profiles through welding and CNC machining to ensure the stability and accuracy of the main platform 1 as the main frame of the equipment. The main platform 1 is provided with a motion space for the drive mechanism 3 and the gripping mechanism 4 to move. The drive mechanism 3 is connected to the main platform 1 and located in the motion space. The motion space provides sufficient movement space for the drive mechanism 3 and the gripping mechanism 4 to move up and down and back and forth, so as to reduce the size of the equipment and thus reduce the space occupied by the equipment.

[0037] like Figure 1 and Figure 2As shown, in this embodiment, the driving mechanism 3 includes a first lifting device 31 disposed on the main platform 1, a lifting platform 32 connected to the first lifting device 31, a forward and backward moving device 33 disposed on the lifting platform 32, and a secondary platform 34 passing through the lifting platform 32 and connected to the forward and backward moving device 33. The gripping mechanism 4 is disposed in the secondary platform 34 and connected to the forward and backward moving device 33 through the secondary platform 34. The first lifting device 31 drives the lifting platform 32 to move relative to the main platform 1 along the first movement direction, and drives the secondary platform 34 and the gripping device 4. Mechanism 4 moves along the first direction of motion; the forward and backward moving device 33 drives the sub-platform 34 to move relative to the lifting platform 32 along the second direction of motion, and drives the gripping mechanism 4 to move along the second direction of motion; in this embodiment, the sub-platform 34 is set as a cuboid frame similar to the main platform 1. It should be noted that the volume of the sub-platform 34 is smaller than the volume of the main platform 1. The lifting platform 32 is set as a planar rectangular frame similar to the main platform 1; the first lifting device 31 is provided on the left and right sides of the main platform 1, and the lifting platform 32 is sleeved on the... The outer side of the auxiliary platform 34 is connected to the first lifting device 31. The short sides of both sides of the lifting platform 32 are equipped with the forward and backward moving devices 33 to ensure the motion balance of the lifting platform 32 and the auxiliary platform 34, thereby ensuring the normal movement of the gripping mechanism 4. In this embodiment, the lifting platform 32 is connected to the first lifting device 31, and the auxiliary platform 34 passes through the lifting platform 32. The forward and backward moving devices 33 allow the auxiliary platform 34 to be slidably connected to the lifting platform 32, thus enabling the lifting platform 32, the auxiliary platform 34, and the gripping mechanism 4 to move normally through the first lifting device 31. The gripping mechanism 4 moves longitudinally up and down within the main platform 1, and the secondary platform 34 and the gripping mechanism 4 move laterally forward and backward within the main platform 1 via the forward and backward moving device 33. This enables the gripping mechanism 4 to translate in different directions. The motion pattern is simple, which helps to reduce the difficulty of transporting heavy workpieces and protect the safety of transporting heavy workpieces. Furthermore, no additional lifting platform or translation mechanism is required during the transport of workpieces, which can shorten the cycle time. In addition, the coordinated motion of longitudinal lifting and lateral translation enables the gripping mechanism 4 to achieve a continuous "pick-up-transport-place" action, reducing idle waiting time and further improving the transport efficiency of workpieces.

[0038] In some alternative embodiments, such as Figure 3As shown, the first lifting device 31 includes a first active lifting module 311, which includes a first motor 3111, a first guide rail 3112 connected to the first motor 3111, and a first transmission slider 3113 movably connected to the first guide rail 3112. The first motor 3111 is located at the top of the main platform 1, and the first guide rail 3112 is located within the left and right side frames of the main platform 1. The lifting platform 32 is fixedly connected to the first transmission slider 3113. The first motor 3111 drives the first guide rail 3112 and the first transmission slider 3113. 13. The first transmission slider 3113 moves up and down along the first guide rail 3112, and drives the lifting platform 32 to move up and down through the first transmission slider 3113. Optionally, the first motor 3111 can be a servo motor or a hydraulic motor, and the first guide rail 3112 and the first transmission slider 3113 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. Preferably, the first motor 3111 is a servo motor, which improves the lifting efficiency and lifting accuracy of the lifting platform 32 through servo control, and helps to reduce electrical connections, thereby simplifying the equipment structure.

[0039] Further optional, such as Figure 3 As shown, the first lifting device 31 further includes a first auxiliary lifting module 312. The first auxiliary lifting module 312 includes a second guide rail 3121 at least located on one side of the first guide rail 3112 and a first driven slider 3122 movably connected to the second guide rail 3121. The second guide rail 3121 is located within the left and right side frames of the main platform 1. The lifting platform 32 is connected to the first driven slider 3122. When the lifting platform 32 moves up and down along the first guide rail 3112 via the first transmission slider 3113, the first driven slider 3122 is simultaneously driven to move up and down along the second guide rail 3121 via the lifting platform 32, thereby improving the movement stability of the lifting platform 32 and meeting the driving requirements for lifting heavy workpieces. Alternatively, the second guide rail 3121 and the second transmission slider 3123 may be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment.

[0040] In some alternative embodiments, such as Figure 4As shown, the forward and backward moving device 33 includes an active translation module 331. The active translation module 331 includes a second motor 3311, a third guide rail 3312 connected to the second motor 3311, and a second transmission slider 3313 movably connected to the third guide rail 3312. The third guide rail 3312 is located at the lower part of the short sides on both sides of the lifting platform 32. The second motor 3311 is located on the long side of the back of the lifting platform 32, that is, the second motor 3311 is away from the feeding mechanism 2 to avoid interfering with the normal operation of the feeding mechanism 2 and the gripping mechanism 4. The sub-platform 34 is fixedly connected to the second transmission slider 3313 and drives the third guide rail 3312 and the second transmission slider 3313 through the second motor 3311. The movable slider 3313 operates in coordination, causing the second transmission slider 3313 to move back and forth along the third guide rail 3312, and driving the sub-platform 34 to move back and forth along the third guide rail 3312 via the second transmission slider 3313. Optionally, the active translation module 331 can adopt a structure similar to the first active lifting module 311, the second motor 3311 can be a servo motor or a hydraulic motor, and the third guide rail 3312 and the second transmission slider 3313 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. Preferably, the second motor 3311 is a servo motor, which improves the lifting efficiency and lifting accuracy of the lifting platform 32 through servo control, and helps to reduce electrical connections, thereby simplifying the equipment structure.

[0041] In other alternative embodiments, such as Figure 4 As shown, a belt drive module 332 is provided between the second motor 3311 and the third guide rail 3312. The belt drive module 332 is used to transfer the kinetic energy of the second motor 3311 to the third guide rail 3312 to drive the third guide rail 3312 axially, and drive the second transmission slider 3313 to move through the third guide rail 3312, thereby realizing the back-and-forth movement of the sub-platform 34 relative to the lifting platform 32. The belt drive module 332 can absorb impact loads, realize buffering and shock absorption, and achieve the purpose of protecting the transfer device.

[0042] In some alternative embodiments, the forward and backward moving device 33 further includes an auxiliary translation module 333. The auxiliary translation module 333 includes a fourth guide rail 3331 disposed on the upper part of the lifting platform 32 and a second driven slider 3332 movably disposed on the fourth guide rail 3331. The fourth guide rail 3331 is disposed on the upper part of the short sides on the left and right sides of the lifting platform 32. The sub-platform 34 is connected to the second driven slider 3332. When the sub-platform 34 moves forward and backward along the third guide rail 3312 via the second transmission slider 3313, it simultaneously drives the second driven slider 3332 to move forward and backward along the fourth guide rail 3331, which helps to improve the stability and accuracy of the forward and backward movement of the sub-platform 34. Furthermore, by mounting the second motor 3311 on the long side of the back of the lifting platform 32, it is beneficial to increase the movable distance of the third guide rail 3312 and the fourth guide rail 3331, thereby increasing the forward and backward movement stroke of the sub-platform 34 and the gripping mechanism 4. Optionally, the fourth guide rail 3331 and the second driven slider 3332 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. In addition, the number of the second driven sliders 3332 can be selected according to the bottom length of the connecting seat 341 to further improve the stability and reliability of the auxiliary translation module 333 driving the sub-platform 34 to move forward and backward. The number of the second driven sliders 3332 is not specifically limited in this embodiment.

[0043] like Figure 5As shown in Figure 7, in this embodiment, the gripping mechanism 4 includes a second lifting device 41 disposed on the sub-platform 34, a first gripper assembly 42 and a second gripper assembly 43 disposed opposite to the second lifting device 41. The second lifting device 41 drives the first gripper assembly 42 and the second gripper assembly 43 to move towards or away from each other to clamp or release the workpiece. The first gripper assembly 42 and the second gripper assembly 43 are respectively provided with opposing first clamping grooves 420 and second clamping grooves 430, which together form a clamping space for fixing the workpiece. Specifically, the first gripper assembly 42 includes a first gripper frame 421 and first grippers 422 connected to the first gripper frame 421. There are a plurality of first grippers 422, each of which is spaced apart along the length direction of the first gripper frame 421, and each of the first grippers 422 is provided with a first clamping groove 420 facing the second gripper assembly 43. 3 includes a second gripper frame 431 and second grippers 432 connected to the second gripper frame 431. Multiple second grippers 432 are provided, each spaced apart along the length of the second gripper frame 431, and each second gripper 432 has a second clamping groove 430 facing the first gripper assembly 42. Each first clamping groove 420 and each second clamping groove 430 is arranged in a one-to-one correspondence. When each first gripper 422 and each second gripper 432 moves towards each other via the second lifting device 41, the clamping space can be formed by the first clamping groove 420 and each second clamping groove 430. The structure is simple and can reduce the contact area between each first gripper 422 and each second gripper 432 and the workpiece, which is beneficial for protecting the workpiece. Furthermore, by providing multiple first grippers 422 and second grippers 432, the gripping stability and transport stability of the gripping mechanism 4 for heavy workpieces are improved, thereby ensuring the safe transport of heavy workpieces.

[0044] Further optional, such as Figure 7As shown, the second lifting device 41 is disposed between the first gripper frame 421, the second gripper frame 431 and the sub-platform 34, and the second lifting device 41 is provided on both the front and rear sides of the sub-platform 34 to improve the moving stability of the gripping mechanism 4; specifically, the second lifting device 41 includes a second active lifting module 411, the second active lifting module 411 including a third motor 4111, a fifth guide rail 4112 connected to the third motor 4111, a third transmission slider 4113 movably disposed on the fifth guide rail 4112 and a third... The fourth transmission slider 4114 has a third motor 4111 located at the top of the sub-platform 34. The first gripper frame 421 is fixedly connected to the third transmission slider 4113, and the second gripper frame 431 is fixedly connected to the fourth transmission slider 4114. The third motor 4111 drives the fifth guide rail 4112, the third transmission slider 4113, and the fourth transmission slider 4114 to operate in coordination, causing the third transmission slider 4113 and the fourth transmission slider 4114 to move up and down along the fifth guide rail 4112, thereby achieving the desired motion through the third transmission slider. The movable slider 4113 drives the first gripper frame 421 to move up and down along the fifth guide rail 4112, and the fourth transmission slider 4114 drives the second gripper frame 431 to move up and down along the fifth guide rail 4112. The third transmission slider 4113 and the fourth transmission slider 4114 move in opposite directions to achieve opposite or reciprocating movement of the first gripper frame 421 and the second gripper frame 431. Furthermore, the first gripper frame 421 and the second gripper frame 431 drive the first gripper 422 and the second gripper 432 respectively. The first gripper assembly 42 and the second gripper assembly 43 move towards or away from each other, thereby clamping or releasing the workpiece. Optionally, the third motor 4111 can be a servo motor or a hydraulic motor, and the fifth guide rail 4112, the third transmission slider 4113, and the fourth transmission slider 4114 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. Preferably, the third motor 4111 is a servo motor, which improves the lifting efficiency and accuracy of the lifting platform 32 through servo control, and helps to reduce electrical connections, thereby simplifying the equipment structure. In addition, since the main platform 1 is set as a cuboid frame, when the auxiliary platform 34 moves up and down within the main platform 1 through the first lifting device 31, the top frame of the main platform 1 can make way for the third motor 4111.

[0045] Further optional, such as Figure 7As shown, the second lifting device 41 further includes a second auxiliary lifting module 412. The second auxiliary lifting module 412 includes at least one sixth guide rail 4121 disposed on the main platform 1 and located on one side of the fifth guide rail 4112, a third driven slider 4122 and a fourth driven slider 4123 movably connected to the sixth guide rail 4121. The third driven slider 4122 is fixedly connected to the first gripper frame 421, and the fourth driven slider 4123 is fixedly connected to the second gripper frame 431. When the first gripper frame 421 and the second gripper frame 431 move up and down along the fifth guide rail 4112 via the third drive slider 4113 and the fourth drive slider 4114 respectively, the third drive slider 4113 and the fourth drive slider 4114 move up and down along the fifth guide rail 4112. Driven slider 4122 and fourth driven slider 4123 drive the first gripper frame 421 and the second gripper frame 431 to move up and down along the sixth guide rail 4121. The third driven slider 4122 and fourth driven slider 4123 move in opposite directions to ensure that the first gripper assembly 42 and the second gripper assembly 43 move towards and away from each other. By setting the second auxiliary lifting module 412, the stability and accuracy of the first gripper assembly 42 and the second gripper assembly 43 moving towards or away from each other are improved. Optionally, the sixth guide rail 4121 and the third driven slider 4122 and the fourth driven slider 4123 can be roller slider modules or lead screw slider modules, etc., and this embodiment does not make specific limitations.

[0046] In other alternative embodiments, such as Figure 5 As shown, the front and rear sides of the first gripper frame 421 and the second gripper frame 431 are connected to the sub-platform 34 through the second active lifting module 411 and the second auxiliary lifting module 412, so as to further improve the stability and movement accuracy of the first gripper assembly 42 and the second gripper assembly 43 moving towards or away from each other.

[0047] In other alternative embodiments, such as Figure 6 As shown, the outer side of the sub-platform 34 is provided with a connecting seat 341 that is connected to the front and rear moving device 33. That is, both the left and right sides of the sub-platform 34 are fixedly connected to the second driven slider 3332 through the connecting seat 341, so as to eliminate assembly problems caused by processing errors and reduce assembly difficulty.

[0048] To improve the operational accuracy of the transfer device, such as Figure 8 and Figure 9As shown, the transfer device further includes a first detection device 5 and a second detection device 6. The lifting platform 32 has a first detection device 5 connected to the connecting seat 341 and a second detection device 6 connected to the main platform 1 on its outer side. The first detection device 5 is used to detect the forward and backward translational position of the auxiliary platform 34 relative to the lifting platform 32, and the second detection device 6 is used to detect the lifting position of the lifting platform 32 relative to the main platform 1. Optionally, the first detection device 5 and the second detection device 6 can be photoelectric detection modules. Specifically, the first detection device 5 includes a first detection contact 51 disposed on the connecting seat 341 and a first sensor 52 disposed on the lifting platform 32. The first sensor 52 has a first coupling area 53 through which the first detection contact 51 can pass. The first detection contact 51 can move relative to the first sensor 52 through the forward and backward moving device 33. When the first detection contact 51 moves through the connecting seat 341 into the first coupling area 53, the first detection... The contact piece 51 is coupled to the first sensor 52 to detect the position of the sub-platform 34 relative to the lifting platform 32. This indirectly detects the position of the gripping mechanism 4, which is beneficial for precise control of the gripping mechanism 4. In addition, the second detection device 6 can adopt a structure similar to the first detection device 5. Specifically, the second detection device 6 includes a second detection contact piece 61 disposed on the lifting platform 32 and a second sensor 62 disposed on the main platform 1. The second sensor 62 has a second coupling area 63 through which the second detection contact piece 61 passes. When the second detection contact piece 61 moves through the lifting platform 32 into the second coupling area 63, the second detection contact piece 61 is coupled to the second sensor 62 to detect the position of the lifting platform 32 relative to the main platform 1. This indirectly detects the position of the sub-platform 34 and the gripping mechanism 4 relative to the main platform 1, which is beneficial for precise control of the gripping mechanism 4.

[0049] In this embodiment, as Figure 8As shown, the detection mechanism further includes a third detection device 7 disposed between the gripping mechanism 4 and the sub-platform 34. The third detection device 7 is used to detect the lifting position of the first gripper assembly 42 and / or the second gripper assembly 43 relative to the sub-platform 34. The third detection device 7 may be disposed between the first gripper assembly 42 and the main platform 1, or between the second gripper assembly 43 and the main platform 1. Alternatively, two third detection devices 7 may be provided, with the first gripper assembly 42, the second gripper assembly 43, and the main platform 1 all provided with the third detection device 7. This embodiment does not impose specific limitations. The following describes the third detection device disposed between the first gripper assembly 42 and the main platform 1. The device 7 is described below. The third detection device 7 can adopt a structure similar to that of the first detection device 5. Specifically, the third detection device 7 includes a third detection contact 71 disposed on the first gripper frame 421 and a third sensor 72 disposed on the sub-platform 34. The third sensor 72 has a third coupling area 73 through which the third detection contact 71 passes. When the third detection contact 71 moves into the third coupling area 73 through the first gripper assembly 42, the third detection contact 71 couples with the third sensor 72 to detect the position of the first gripper assembly 42 relative to the sub-platform 34, which is beneficial for further precise control of the lifting and lowering movement of the gripping mechanism 4. It should be noted that when the transfer device is only equipped with a third detection device 7 to detect the lifting status of the first gripper assembly 42 or the second gripper assembly 43 relative to the sub-platform 34, the second lifting device 41 can be configured using existing technology so that the second lifting device 41 jointly controls the first gripper assembly 42 and the second gripper assembly 43, thereby enabling the first gripper assembly 42 and the second gripper assembly 43 to move the same distance towards or away from each other.

[0050] Based on any of the above embodiments of the workpiece transfer device, the control method of the workpiece transfer device is as follows:

[0051] The gripping mechanism 4 is operated as follows: Figure 1The contact point shown is such that, via the second lifting device 41, the first gripper assembly 42 and the second gripper assembly 43 move in opposite directions, causing the first gripper assembly 42 and the second gripper assembly 43 to open. The movement of the first gripper assembly 42 and the second gripper assembly 43 in opposite directions stops when the third detection contact 71 couples with the third sensor 72. At this point, the distance between the first gripper assembly 42 and the second gripper assembly 43 is greater than the height of the workpiece. Then, via the forward and backward moving device 33, the sub-platform 34 moves forward relative to the lifting platform 32 along the second movement direction, and the sub-platform 34... The gripping mechanism 4 extends forward, causing each of the first grippers 422 and each of the second grippers 432 to insert into the receiving space, thereby aligning the first clamping groove 420 of each of the first grippers 422 and the second clamping groove 430 of each of the second grippers 432 with the top and bottom of the workpiece, respectively. Subsequently, the second lifting device 41 drives the first gripper assembly 42 and the second gripper assembly 43 to move towards each other, and clamps the workpiece through the first clamping groove 420 and the second clamping groove 430, fixing the workpiece in the clamping space, thereby completing the action of the gripping mechanism 4 in gripping the workpiece.

[0052] After the gripping mechanism 4 grips the workpiece, the first lifting device 31 drives the lifting platform 32 to move relative to the main platform 1 along the first movement direction, raising the workpiece until it is released from the fourth clamping groove 231, thereby releasing the workpiece from the feeding mechanism 2. During this upward movement, the feeding mechanism 2 makes way for the gripping mechanism 4 to avoid collision and interference between the gripping mechanism 4 and the feeding mechanism 2. The lifting platform 32 stops when the second detection contact 61 is coupled with the second sensor 62, so that the workpiece is transported to the feeding position and aligned with the target position (such as the workpiece placement position of the substrate holder in a vacuum coating production line). It should be noted that in some optional embodiments, the feeding mechanism 2 includes a first feeding module 2 that is vertically mounted on the main platform 1. 2. Relative to the second feeding module 23 located below the first feeding module 22, the first feeding module 22 and the second feeding module respectively include a third clamping groove 221 and a fourth clamping groove 231. The third clamping groove 221 and the fourth clamping groove 231 enclose a receiving space for fixing the workpiece. When the gripping mechanism 4 moves the workpiece upward relative to the main platform 1, the first feeding module 22 can rise in advance to make way for the gripping mechanism 4, thereby avoiding collision and interference between the gripping mechanism 4 and the feeding mechanism 2 and protecting the equipment safety. In addition, the first feeding module 22 and the gripping mechanism 4 can be controlled to move upward simultaneously by a corresponding control system, or the first feeding module 22 and the gripping mechanism 4 can be controlled to move upward sequentially by individual control. This utility model does not make specific limitations.

[0053] Subsequently, after the gripping mechanism 4 lifts the workpiece to the second detection device 6, the forward and backward moving device 33 drives the auxiliary platform 34 to continue moving forward relative to the lifting platform 32 along the second movement direction. The auxiliary platform 34 also drives the gripping mechanism 4 to move further forward. The auxiliary platform 34 stops moving forward when the first detection contact 51 couples with the first sensor 52, indicating that the gripping mechanism 4 has continued to move forward to the correct position. At this time, the workpiece is placed in the target position (such as the workpiece placement position of the substrate holder in a vacuum coating production line). Then, the second lifting device 41 drives the first gripper assembly 42 and the second... The two gripper assemblies 43 move in opposite directions, causing the first gripper assembly 42 and the second gripper assembly 43 to open and release the workpiece. The first gripper assembly 42 and the second gripper assembly 43 move in opposite directions until the third detection contact 71 couples with the third sensor 72, at which point they stop. This causes the transfer device to move from the receiving state to the delivery state corresponding to the target position, thereby completing the transfer of the workpiece from the transfer device to the target position. It should be noted that the clamping and releasing actions of the target position (such as the substrate holder) on the workpiece can refer to the feeding mechanism 2, or can be achieved through existing technology. This utility model does not make any specific limitations.

[0054] It should be noted that, based on the above control method, the specific installation positions and specific detection positions of the first detection device 5, the second detection device 6, and the third detection device 7 can be set according to the specific application of the transfer device, and this utility model does not impose specific limitations.

[0055] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A workpiece transfer device, characterized in that, include: Main platform (1), wherein the main platform (1) is provided with a motion space; The gripping mechanism (4) is connected to the main platform (1) through the drive mechanism (3). The drive mechanism (3) is located in the motion space. The gripping mechanism (4) moves relative to the main platform (1) along the first motion direction and the second motion direction through the drive mechanism (3). The gripping mechanism (4) includes a second lifting device (41) connected to the drive mechanism (3), a first gripper assembly (42) and a second gripper assembly (43) disposed opposite to the second lifting device (41). The second lifting device (41) drives the first gripper assembly (42) and the second gripper assembly (43) to move towards or away from the drive mechanism (3) to clamp or release the workpiece.

2. A workpiece transfer apparatus as claimed in claim 1, wherein The first gripper assembly (42) includes a first gripper frame (421) connected to the drive mechanism (3) and a plurality of first grippers (422) disposed on one side of the first gripper frame (421). Each first gripper (422) is spaced apart along the length direction of the first gripper frame (421), and each first gripper (422) is provided with a first clamping groove (420). The second gripper assembly (43) includes a second gripper frame (431) connected to the drive mechanism and a plurality of second grippers (432) disposed on one side of the second gripper frame (431). Each second gripper (432) is spaced apart along the length direction of the second gripper frame (431), and each second gripper (432) is provided with a second clamping groove (430). The clamping space for fixing the workpiece is formed by the first clamping groove (420) and the second clamping groove (430).

3. A workpiece transfer apparatus as claimed in claim 1, wherein, The second lifting device (41) includes a second active lifting module (411), which includes a third motor (4111), a fifth guide rail (4112) connected to the third motor (4111), a third transmission slider (4113) and a fourth transmission slider (4114) slidably disposed on the fifth guide rail (4112). The first gripper assembly (42) is connected to the third transmission slider (4113), and the second gripper assembly (43) is connected to the fourth transmission slider (4114). The sliding directions of the third transmission slider (4113) and the fourth transmission slider (4114) are opposite.

4. A workpiece transfer apparatus as claimed in claim 3, wherein The second lifting device (41) further includes a second auxiliary lifting module (412), which includes at least one sixth guide rail (4121) disposed on the main platform (1) and located on one side of the fifth guide rail (4112), a third driven slider (4122) and a fourth driven slider (4123) slidably connected to the sixth guide rail (4121), the third driven slider (4122) being connected to the first gripper assembly (42), the fourth driven slider (4123) being connected to the second gripper assembly (43), and the sliding directions of the third driven slider (4122) and the fourth driven slider (4123) being opposite.

5. A workpiece transfer apparatus as claimed in claim 1, wherein, It also includes a third detection device (7) disposed between the gripping mechanism (4) and the driving mechanism (3), the third detection device (7) being used to detect the moving position of the first gripper assembly (42) and / or the second gripper assembly (43) relative to the driving mechanism (3).

6. A workpiece transfer apparatus as claimed in claim 1, wherein, The drive mechanism (3) includes a first lifting device (31) disposed on the main platform (1), a lifting platform (32) connected to the first lifting device (31), a front-to-back moving device (33) disposed on the lifting platform (32), and a sub-platform (34) passing through the lifting platform (32) and connected to the front-to-back moving device (33). The gripping mechanism (4) is disposed in the sub-platform (34) and connected to the front-to-back moving device (33) through the sub-platform (34). The first lifting device (31) is used to drive the gripping mechanism (4) to move along the first direction of movement, and the front-to-back moving device (33) is used to drive the gripping mechanism (4) to move along the second direction of movement. The lifting platform (32) is also provided with a connecting seat (341) for connecting with the front and rear moving device (33) on the outside. A first detection device (5) is provided between the lifting platform (32) and the connecting seat (341), and a second detection device (6) is provided between the lifting platform (32) and the main platform (1).

7. A workpiece transfer apparatus as claimed in claim 6, wherein The first lifting device (31) includes a first active lifting module (311), which includes a first motor (3111) disposed on the main platform (1), a first guide rail (3112) connected to the first motor (3111), and a first transmission slider (3113) slidably connected to the first guide rail (3112). The lifting platform (32) is connected to the first transmission slider (3113).

8. The workpiece transfer device as described in claim 7, characterized in that, The first lifting device (31) further includes a first auxiliary lifting module (312), the first auxiliary lifting module (312) includes at least one second guide rail (3121) disposed on one side of the first guide rail (3112) and a first driven slider (3122) slidably connected to the second guide rail (3121), and the lifting platform (32) is connected to the first driven slider (3122).

9. A workpiece transfer device as described in claim 6, characterized in that, The forward and backward moving device (33) includes an active translation module (331), which includes a second motor (3311), a belt drive module (332) connected to the second motor (3311), a third guide rail (3312) connected to the belt drive module (332), and a second transmission slider (3313) slidably connected to the third guide rail (3312). The belt drive module (332) is located on the side of the main platform (1) away from the gripping mechanism (4), the second motor (3311) is located on the side of the belt drive module (332), and the sub-platform (34) is connected to the second transmission slider (3313).

10. A workpiece transfer device as described in claim 9, characterized in that, The forward and backward moving device (33) further includes an auxiliary translation module (333), which includes a fourth guide rail (3331) located on the side of the lifting platform (32) away from the third guide rail (3312) and a second driven slider (3332) slidably located on the fourth guide rail (3331). The sub-platform (34) is connected to the second driven slider (3332).

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