An organic ceramic evaporation source for high vacuum coating equipment

Abstract

This utility model relates to the field of high vacuum coating equipment technology, and in particular to an organic ceramic evaporation source for high vacuum coating equipment. It includes an evaporation source mechanism for vaporizing organic materials and depositing them onto a substrate to form a thin film. The evaporation source mechanism includes: a main component, including a vacuum flange mounted on a high vacuum coating machine; a connecting seat fixed to the top of the vacuum flange; a connecting frame connected to the upper end of the connecting seat; an evaporation source base fixed to the upper end of the connecting frame; an outer insulation tube fixed to the upper end of the evaporation source base; and a ceramic heating tube installed inside the outer insulation tube. By using a ceramic heating tube instead of a metal heating wire, it possesses high temperature resistance and corrosion resistance; the integrated design simplifies the installation process; the mirror-polished insulation tube improves thermal efficiency and achieves precise temperature control; a swing cylinder adjusts the baffle angle to ensure uniform vapor distribution; the entire system adapts to a high vacuum environment, significantly improving coating quality and equipment reliability.

Description

Technical Field

[0001] This utility model relates to the field of high vacuum coating equipment technology, specifically to an organic ceramic evaporation source for high vacuum coating equipment. Background Technology

[0002] Organic evaporation sources are core equipment for fabricating organic electronic devices (such as OLEDs, organic solar cells, and organic semiconductors). Their function is to vaporize organic materials (small molecules, polymers, etc.) and deposit them onto a substrate to form a thin film using thermal evaporation or vacuum deposition techniques. This technology is widely used in displays, lighting, flexible electronics, and other fields.

[0003] According to CN204727990U, an ultra-high vacuum molecular beam epitaxial evaporation device is disclosed. This technology discloses "an ultra-high vacuum molecular beam epitaxial evaporation device. The ultra-high vacuum molecular beam epitaxial evaporation device includes: a water cooling device, which has mounting holes and an annular cooling cavity surrounding the mounting holes. The annular cooling cavity includes multiple layers of water-containing cavities arranged along the axial direction of the mounting holes, and adjacent layers of water-containing cavities are connected by connecting holes; a heating device, which includes a heating structure installed inside the mounting holes." This technology achieves the technical effect of "uniform cooling of the ultra-high vacuum molecular beam epitaxial evaporation device, thereby ensuring the heating uniformity of the heating device."

[0004] The above-mentioned evaporation source uses metal heating wire as the heating element. In practical applications, the metal heating wire will undergo oxidation under long-term high-temperature working environment, which will change the resistance characteristics. At the same time, the corrosive effect of organic vapor on metal materials will accelerate the deterioration of the heating wire surface. With the accumulation of use time, the metal heating wire will experience material embrittlement or even breakage. This not only directly affects the stability of the heating system, but also reduces the purity of the coating material due to the volatilization of metal elements. In addition, the traditional metal heating wire adopts a spiral winding structure design, which requires additional complex insulation and fixing devices, making the overall structure bulky and the installation and maintenance process cumbersome. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides an organic ceramic evaporation source for high-vacuum coating equipment. By using a ceramic heating tube instead of a metal heating wire, it features high temperature resistance and corrosion resistance. The integrated design simplifies the installation process. The mirror-polished insulation tube improves thermal efficiency and achieves precise temperature control. The swing cylinder adjusts the baffle angle to ensure uniform steam distribution. The entire system is adaptable to high-vacuum environments, significantly improving coating quality and equipment reliability.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an organic ceramic evaporation source for a high-vacuum coating equipment, comprising an evaporation source mechanism for vaporizing organic materials and depositing them onto a substrate to form a thin film, the evaporation source mechanism comprising:

[0007] The main components include a vacuum flange mounted on a high vacuum coating machine, a connecting seat fixed to the top of the vacuum flange, a connecting frame connected to the upper end of the connecting seat, an evaporation source base fixed to the upper end of the connecting frame, an outer insulation tube fixed to the upper end of the evaporation source base, a ceramic heating tube installed inside the outer insulation tube, the ceramic heating tube being fixed to the evaporation source base by an insulation pad, and the insulation pad being used to insulate the temperature of the ceramic heating tube, a glass crucible placed above the inner part of the outer insulation tube for holding organic materials, and a temperature probe fixed inside the insulation pad;

[0008] The adjustment assembly includes a rotating shaft mounted on the outer wall of the evaporation source base, with an evaporation baffle fixed to the upper end of the shaft.

[0009] Preferably, the adjustment assembly further includes a mounting bracket fixed to the bottom of the vacuum flange, and a swing cylinder is mounted on the bottom of the mounting bracket.

[0010] Preferably, a magnetohydrodynamic seal is installed at the bottom of the vacuum flange, and the output end of the swing cylinder is connected to the lower end of the rotating shaft through the magnetohydrodynamic seal.

[0011] Preferably, the outer insulation pipe is made of stainless steel and its inner surface is mirror polished.

[0012] Preferably, the bottom of the glass crucible is in contact with the top of the temperature probe and is used to monitor the temperature of the organic evaporation material in real time.

[0013] Preferably, the vacuum flange is fixed to the vacuum chamber of the high vacuum coating machine and is vacuum sealed by a sealing ring. Beneficial effects

[0014] This invention provides an organic ceramic evaporation source for high vacuum coating equipment. Compared with the prior art, it has the following advantages:

[0015] 1. The ceramic heating tube replaces the traditional metal heating wire structure. Compared to the oxidation, embrittlement, and even melting problems that easily occur with metal heating wires under long-term high-temperature conditions, the ceramic heating tube has excellent high-temperature stability and chemical inertness, effectively resisting organic vapor corrosion and high-temperature oxidation. Furthermore, the ceramic heating tube adopts an integrated molding technology, eliminating the need for the complex insulation and fixing devices required by traditional metal heating wires. During installation, it only needs to be placed in the positioning groove of the insulation pad to complete the fixing, greatly simplifying the assembly process. Due to the excellent thermal radiation characteristics of ceramic materials, heat transfer is more uniform and efficient, providing a reliable heat source for the stable evaporation of organic materials. At the same time, the simple overall structural design also facilitates later maintenance and replacement, significantly reducing the operating and maintenance costs of the equipment.

[0016] 2. In a high vacuum environment, due to the sparse gas molecules, heat conduction mainly occurs through radiation. By polishing the inner surface of the outer insulation tube to a mirror finish, the heat radiation generated by the heating element can be effectively reflected, significantly reducing heat loss and allowing heat energy to be more concentrated on the evaporation material. This not only improves thermal efficiency but, more importantly, enables precise control of the evaporation temperature, providing a reliable guarantee for obtaining uniform and stable coating quality.

[0017] 3. By controlling the opening and closing angle of the evaporation baffle through the swing cylinder, the steam flow can be precisely controlled during the coating process. The steam flow can be adjusted in real time according to the process requirements, which is conducive to obtaining a uniform film deposition effect. Furthermore, the adjustment component is fully adaptable to the high vacuum working environment. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the front of this utility model;

[0019] Figure 2 This is a three-dimensional structural diagram of the back of the present invention;

[0020] Figure 3 This is a cross-sectional view of the present invention;

[0021] Figure 4 This utility model Figure 3 A schematic diagram of the structure of part A in the middle.

[0022] In the diagram: 1. Evaporation source mechanism; 11. Main component; 111. Vacuum flange; 112. Connecting seat; 113. Connecting frame; 114. Evaporation source base; 115. Outer insulation pipe; 116. Insulation pad; 117. Ceramic heating tube; 118. Glass crucible; 119. Temperature probe; 12. Adjustment component; 121. Rotating shaft; 122. Evaporation baffle; 123. Mounting bracket; 124. Swing cylinder; 125. Magnetohydrodynamic seal. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figure 1 - Figure 4 This utility model provides a technical solution: an organic ceramic evaporation source for a high-vacuum coating equipment, including an evaporation source mechanism 1 for vaporizing organic materials and depositing them on a substrate to form a thin film. The evaporation source mechanism 1 includes:

[0025] The main component 11 includes a vacuum flange 111 mounted on a high vacuum coating machine. A connecting seat 112 is fixed to the top of the vacuum flange 111. A connecting frame 113 is connected to the upper end of the connecting seat 112. An evaporation source base 114 is fixed to the upper end of the connecting frame 113. An outer insulation tube 115 is fixed to the upper end of the evaporation source base 114. A ceramic heating tube 117 is installed inside the outer insulation tube 115. The ceramic heating tube 117 is fixed to the evaporation source base 114 by an insulation pad 116, which is used to insulate the temperature of the ceramic heating tube 117. A glass crucible 118 is placed inside the outer insulation tube 115 and is used to hold organic materials. A temperature probe 119 is fixed inside the insulation pad 116.

[0026] The adjustment assembly 12 includes a rotating shaft 121 that is rotatably mounted on the outer wall of the evaporation source base 114, and an evaporation baffle 122 is fixed at the upper end of the rotating shaft 121.

[0027] In this embodiment, a ceramic heating tube 117 replaces the traditional metal heating wire structure. Compared with the oxidation, embrittlement, and even melting problems that easily occur in metal heating wires under long-term high-temperature conditions, the ceramic heating tube 117 has excellent high-temperature stability and chemical inertness, and can effectively resist organic vapor corrosion and high-temperature oxidation. Furthermore, the ceramic heating tube 117 adopts an integrated molding technology, eliminating the need for the complex insulation and fixing devices required by traditional metal heating wires. During installation, it only needs to be placed in the positioning groove of the insulation pad 116 to complete the fixing, which greatly simplifies the assembly process. Due to the excellent thermal radiation characteristics of ceramic materials, heat transfer is more uniform and efficient, providing a reliable heat source guarantee for the stable evaporation of organic materials. At the same time, the simple overall structural design also facilitates later maintenance and replacement, significantly reducing the operating and maintenance costs of the equipment.

[0028] Specifically, the adjustment assembly 12 also includes a mounting bracket 123 fixed to the bottom of the vacuum flange 111, and a swing cylinder 124 is mounted on the bottom of the mounting bracket 123.

[0029] In this embodiment, the opening and closing angle of the evaporation baffle 122 is controlled by the swing cylinder 124, so as to achieve precise control of the steam flow during the coating process. The steam flow can be adjusted in real time according to the process requirements, which is conducive to obtaining a uniform film deposition effect. Furthermore, the adjustment component 12 is fully adaptable to the high vacuum working environment.

[0030] Specifically, a magnetic fluid seal 125 is installed at the bottom of the vacuum flange 111, and the output end of the swing cylinder 124 is connected to the lower end of the rotating shaft 121 through the magnetic fluid seal 125.

[0031] In this embodiment, the outer shell of the magnetic fluid seal 125 is rigidly fixed to the bottom mounting surface of the vacuum flange 111 by flange bolts. The seal has a precision magnetic fluid chamber inside, which is filled with a special high-temperature stable magnetic fluid. The lower extension of the rotating shaft 121 passes through the central through hole of the magnetic fluid seal 125 and forms a rotational fit with the dynamic sealing assembly in the inner cavity of the seal. The dynamic sealing assembly is made of wear-resistant silicon carbide material to ensure sealing reliability under long-term operation. The output shaft of the swing cylinder 124 is connected to the external drive end of the magnetic fluid seal 125 through a coupling, which converts the reciprocating swing motion of the cylinder into the rotational motion of the rotating shaft 121. At the same time, the magnetic fluid forms a dynamic sealing barrier under the action of the magnetic field, effectively blocking the gas exchange between the atmosphere and the vacuum chamber.

[0032] Specifically, the outer insulation pipe 115 is made of stainless steel, and its inner surface is mirror-polished.

[0033] In this embodiment, in a high vacuum environment, due to the sparse gas molecules, heat conduction mainly occurs through radiation. By polishing the inner surface of the outer insulation tube 115 to a mirror finish, the heat radiation generated by the heating element can be effectively reflected, significantly reducing heat loss and allowing heat energy to be applied more concentratedly to the evaporation material. This not only improves thermal efficiency but, more importantly, enables precise control of the evaporation temperature, providing a reliable guarantee for obtaining uniform and stable coating quality.

[0034] Specifically, the bottom of the glass crucible 118 contacts the top of the temperature probe 119 and is used to monitor the temperature of the organic evaporation material in real time.

[0035] In this embodiment, the temperature probe 119, through full contact with the glass crucible 118, can quickly respond to temperature changes of the organic evaporating material; the probe signal line uses a high-temperature shielded wire, which passes through the insulating sleeve inside the insulation pad 116 and is led out to connect to the external temperature control system, forming a complete temperature monitoring loop; furthermore, the installation position of the temperature probe 119 avoids the direct radiation area of ​​the heating tube 117, avoids temperature measurement interference, and ensures that temperature data that truly reflects the evaporation state of the organic material is obtained.

[0036] Specifically, the vacuum flange 111 is fixed on the vacuum chamber of the high vacuum coating machine and is vacuum sealed by a sealing ring.

[0037] The working principle and usage process of this utility model are as follows: First, after the system is started, the ceramic heating tube 117 is energized and heats up. Its integrated ceramic structure ensures that the heat is evenly conducted to the glass crucible 118. The organic material in the crucible gradually vaporizes after being heated. During this process, the temperature probe 119 monitors the evaporation temperature in real time through full-contact temperature measurement and feeds the data back to the control system. The mirrored inner wall of the outer insulation tube 115 reflects the heat radiation back to the heating area, thereby improving the thermal efficiency.

[0038] Then, the swing cylinder 124 drives the rotating shaft 121 to rotate through the magnetohydrodynamic seal 125, precisely controlling the opening and closing angle of the evaporation baffle 122; the organic vapor flow is uniformly deposited on the substrate surface through the precisely controlled baffle opening.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An organic ceramic evaporation source for high vacuum coating equipment, characterized in that: The evaporation source mechanism (1) includes an evaporation source mechanism (1) for vaporizing organic materials and depositing them onto a substrate to form a thin film. The evaporation source mechanism (1) includes: The main component (11) includes a vacuum flange (111) installed on a high vacuum coating machine. A connecting seat (112) is fixed on the top of the vacuum flange (111). A connecting frame (113) is connected to the upper end of the connecting seat (112). An evaporation source base (114) is fixed to the upper end of the connecting frame (113). An outer heat insulation tube (115) is fixed to the upper end of the evaporation source base (114). A ceramic heating tube (117) is installed inside the outer heat insulation tube (115). The ceramic heating tube (117) is fixed to the evaporation source base (114) by a heat insulation pad (116). The heat insulation pad (116) is used to insulate the temperature of the ceramic heating tube (117). A glass crucible (118) is placed inside the outer heat insulation tube (115) and is used to hold organic materials. A temperature probe (119) is fixed inside the heat insulation pad (116). The adjustment assembly (12) includes a rotating shaft (121) that is rotatably mounted on the outer wall of the evaporation source base (114), and an evaporation baffle (122) is fixed at the upper end of the rotating shaft (121).

2. The organic ceramic evaporation source for high vacuum coating equipment according to claim 1, characterized in that: The adjustment assembly (12) also includes a mounting bracket (123) fixed to the bottom of the vacuum flange (111), and a swing cylinder (124) is mounted on the bottom of the mounting bracket (123).

3. The organic ceramic evaporation source for high vacuum coating equipment according to claim 2, characterized in that: The vacuum flange (111) is equipped with a magnetic fluid seal (125) at the bottom, and the output end of the swing cylinder (124) is connected to the lower end of the rotating shaft (121) through the magnetic fluid seal (125).

4. The organic ceramic evaporation source for high vacuum coating equipment according to claim 1, characterized in that: The outer insulation pipe (115) is made of stainless steel and its inner surface is mirror polished.

5. An organic ceramic evaporation source for a high-vacuum coating equipment according to claim 1, characterized in that: The bottom of the glass crucible (118) is in contact with the top of the temperature probe (119) and is used to monitor the temperature of the organic evaporation material in real time.

6. The organic ceramic evaporation source for high vacuum coating equipment according to claim 1, characterized in that: The vacuum flange (111) is fixed on the vacuum chamber of the high vacuum coating machine and is vacuum sealed by a sealing ring.

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