A vacuum coating apparatus

Abstract

This utility model relates to the field of vacuum coating equipment technology, and discloses a vacuum coating equipment including a first rotating disk, a coating fixture, and a flipping mechanism. The first rotating disk is rotatably disposed around a first axis. The coating fixture includes a connecting rod, a second rotating disk, and a rotating component. The connecting rod is rotatably disposed on the first rotating disk around a second axis. The second rotating disk is connected to the connecting rod and is configured to rotate synchronously with the first rotating disk. The rotating component is rotatably disposed on the second rotating disk around a third axis and is used to place the sheet to be processed. The flipping mechanism is disposed between the rotating component and the first rotating disk. The flipping mechanism is used to drive the rotating component to rotate 180° around the third axis when the second rotating disk rotates one revolution around the second axis. The first axis, the second axis, and the axis of the first rotating disk are parallel to each other. Using the vacuum coating equipment of this application, the coating layer formed on the surface of the sheet to be processed is more uniform, and the sputtering efficiency of the target material is higher.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a vacuum coating equipment. Background Technology

[0002] PVD (Physical Vapor Deposition) coating technology refers to a thin film preparation technology that uses low-voltage, high-current arc discharge technology under vacuum conditions to evaporate the target material and ionize both the evaporated material and the gas. The material is then deposited onto the workpiece by the acceleration effect of the electric field.

[0003] In related technologies, the coating fixture configured in vacuum coating equipment allows the sheet to be processed to rotate simultaneously with a small turntable while the large turntable of the coating fixture rotates, thereby coating the surface of the sheet. However, when using existing vacuum coating equipment to coat sheets that require coating on both sides, the coating formed on the surface of the sheet is not uniform enough, and the sputtering efficiency of the target is low. Utility Model Content

[0004] This utility model discloses a vacuum coating equipment, which forms a relatively uniform coating on the surface of the sheet to be processed, and the sputtering efficiency of the target material is relatively high.

[0005] This utility model discloses a coating fixture, including a first rotating disk, a coating fixture, and a flipping mechanism. The first rotating disk is rotatably disposed around a first axis. The coating fixture includes a connecting rod, a second rotating disk, and a rotating component. The connecting rod is rotatably disposed on the first rotating disk around a second axis. The second rotating disk is connected to the connecting rod and is configured to rotate synchronously with the first rotating disk. The rotating component is rotatably disposed on the second rotating disk around a third axis. The rotating component is used to place the sheet to be processed. The flipping mechanism is disposed between the rotating component and the first rotating disk. The flipping mechanism is used to drive the rotating component to rotate 180° around the third axis when the second rotating disk rotates one revolution around the second axis.

[0006] The first axis, the second axis, and the axis of the first rotating disk are parallel to each other.

[0007] As an optional implementation, in this embodiment of the present invention, the flipping mechanism includes a gear and a meshing member. The gear is sleeved on the rotating member, and the meshing member is disposed on the first rotating disk. The meshing member is used to mesh with the gear to drive the rotating member to rotate 180° around the third axis when the second rotating disk rotates one revolution around the second axis.

[0008] As an optional implementation, in this embodiment of the present invention, the meshing member includes a fixing part and a mating part. The fixing part is disposed on the first rotating disk, and the projection of the fixing part on the first rotating disk is located between the projection of the connecting rod on the first rotating disk and the projection of the gear on the first rotating disk. The mating part is disposed on the side of the fixing part away from the second rotating disk, and the mating part is configured as an arc shape extending around the second axis. The side of the mating part away from the second axis is provided with teeth that match the gear.

[0009] As an optional implementation, in this embodiment of the present invention, the second rotating disk is provided with a first connecting hole, the first connecting hole passing through the second rotating disk along the second axis, the second rotating disk and the first rotating disk being spaced apart, the rotating component including a first rod and a second rod connected to each other, the first rod being rotatably connected to the first connecting hole, the second rod extending from the first rod along the second axis toward the first rotating disk, and the gear being disposed on the second rod.

[0010] As an optional implementation, in this embodiment of the present invention, the coating fixture further includes a third rotating disk, which is connected to the connecting rod and located between the first rotating disk and the second rotating disk. The third rotating disk has a second connecting hole on the side facing the second rotating disk, and the end of the second rod opposite to the first rod is rotatably connected to the second connecting hole.

[0011] As an optional implementation, in this embodiment of the present invention, the second rotating disk is provided with a first connecting hole, and the rotating component includes a first rod and a third rod connected to each other. The first rod is rotatably connected to the first connecting hole, and the third rod extends from the first rod along the second axis away from the first rotating disk. The end of the third rod away from the first rod is used to place the sheet to be processed.

[0012] As an optional implementation, in this embodiment of the present invention, the third rod has a slot at the end opposite to the first rod, the slot being used to place the sheet to be processed, and the coating fixture further includes a clamping member, the clamping member being detachably connected to the end of the connecting rod opposite to the first rotating disk, and the clamping member being used to abut against the sheet to be processed placed in the slot.

[0013] As an optional implementation, in this embodiment of the present invention, the coating fixture further includes a holding mechanism, which is disposed at the rotational connection between the rotating member and the second rotating disk. The holding mechanism is used to maintain the relative angle between the rotating member and the second rotating disk when the flipping mechanism drives the rotating member to rotate 180° around the third axis.

[0014] As an optional implementation, in this embodiment of the present invention, the second rotating disk is provided with a first connecting hole, the rotating member is rotatably disposed in the first connecting hole around the second axis, the circumference of the rotating member is provided with a first groove, and the holding mechanism is disposed in the first groove.

[0015] As an optional implementation, in this embodiment of the present invention, the wall of the first connecting hole is provided with a second groove, the retaining mechanism includes an elastic member and an abutment member, the elastic member is disposed in the first groove, one end of the abutment member is attached to the elastic member, and the other end of the abutment member is used to abut against the second groove when the flipping mechanism drives the rotating member to rotate 180° around the third axis.

[0016] Compared with the prior art, the embodiments of this utility model have at least the following beneficial effects:

[0017] In this embodiment of the invention, a first rotating disk is rotatably mounted around a first axis, and a coating fixture is mounted on the first rotating disk. A connecting rod is rotatably mounted on the first rotating disk around a second axis, and a second rotating disk is connected to the connecting rod, so that the second rotating disk rotates synchronously with the first rotating disk. In this way, the sheet to be processed is placed using a rotating component. When the vacuum coating equipment is coating, the first rotating disk can rotate around the first axis, and at the same time, the second rotating disk rotates synchronously, thereby forming a coating on the surface of the sheet to be processed.

[0018] Furthermore, the rotating component is rotatably mounted on the third axis of the second rotating disk, and a flipping mechanism is located between the rotating component and the first rotating disk. When the second rotating disk rotates around the second axis, the flipping mechanism can drive the rotating component to rotate 180° around the third axis, thereby flipping the sheet to be processed. This results in a more uniform coating on the surface of the sheet to be processed and higher sputtering efficiency of the target material. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1This is a schematic diagram of the structure of a vacuum coating equipment disclosed in Embodiment 1 of this utility model;

[0021] Figure 2 This is an exploded structural diagram of a coating fixture disclosed in Embodiment 1 of this utility model;

[0022] Figure 3 This is an exploded structural diagram of a coating fixture and a flipping mechanism disclosed in Embodiment 1 of this utility model;

[0023] Figure 4 This is an exploded structural diagram of a flipping mechanism disclosed in Embodiment 1 of this utility model;

[0024] Figure 5 This is a cross-sectional structural schematic diagram of a coating fixture disclosed in Embodiment 1 of this utility model.

[0025] Explanation of main figure symbols

[0026] 100. Vacuum coating equipment; 10. First rotating disk; 20. Coating fixture; 21. Connecting rod; 22. Second rotating disk; 22a. First connecting hole; 22b. Second groove; 23. Rotating component; 23a. First groove; 231. First rod; 232. Second rod; 233. Third rod; 233a. Slot; 24. Third rotating disk; 24a. Second connecting hole; 25. Clamping component; 30. Flipping mechanism; 31. Gear; 32. Meshing component; 321. Fixing part; 322. Mating part; 323. Gear; 40. Holding mechanism; 41. Elastic component; 42. Abutting component; α. First axis; β. Second axis; γ. Third axis; a. Sheet to be processed. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0029] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances.

[0030] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0031] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0032] This utility model discloses a vacuum coating equipment, which forms a relatively uniform coating on the surface of the sheet to be processed, and the sputtering efficiency of the target material is relatively high.

[0033] Please see Figures 1 to 3 This is a schematic diagram of the structure of a vacuum coating equipment 100 provided in Embodiment 1 of the present utility model. The vacuum coating equipment 100 includes a first rotating disk 10, a coating fixture 20, and a flipping mechanism 30. The first rotating disk 10 is rotatably disposed around a first axis α. The coating fixture 20 includes a connecting rod 21, a second rotating disk 22, and a rotating component 23. The connecting rod 21 is rotatably disposed on the first rotating disk 10 around a second axis β. The second rotating disk 22 is connected to the connecting rod 21 and is configured to rotate synchronously with the first rotating disk 10. The rotating component 23 is rotatably disposed on the second rotating disk 22 around a third axis γ. The rotating component 23 is used to place the sheet to be processed a. The flipping mechanism 30 is disposed between the rotating component 23 and the first rotating disk 10. The flipping mechanism 30 is used to drive the rotating component 23 to rotate 180° around the third axis γ when the second rotating disk 22 rotates one revolution around the second axis β.

[0034] The first axis α and the second axis β are parallel to the axis of the first rotating disk 10.

[0035] In this example, a first rotating disk 10 is rotatably mounted around a first axis α. A coating fixture 20 is mounted on the first rotating disk 10. A connecting rod 21 is rotatably mounted on the first rotating disk 10 around a second axis β. A second rotating disk 22 is connected to the connecting rod 21, so that the second rotating disk 22 rotates synchronously with the first rotating disk 10. Thus, the sheet to be processed a is placed using a rotating component 23. During the coating process, the first rotating disk 10 can rotate around the first axis, and at the same time, the second rotating disk 22 rotates synchronously, thereby forming a coating on the surface of the sheet to be processed a.

[0036] Furthermore, the rotating component 23 is rotatably mounted on the second rotating disk 22 along the third axis γ. The flipping mechanism 30 is located between the rotating component 23 and the first rotating disk 10. When the second rotating disk 22 rotates around the second axis β, the flipping mechanism 30 can drive the rotating component 23 to rotate 180° around the third axis γ, thereby flipping the sheet a to be processed. This results in a more uniform coating on the surface of the sheet a and higher sputtering efficiency of the target material.

[0037] In some embodiments, such as Figure 3 As shown, the flipping mechanism 30 includes a gear 31 and a meshing member 32. The gear 31 is sleeved on the rotating member 23, and the meshing member 32 is disposed on the first rotating disk 10. The meshing member 32 is used to mesh with the gear 31 to drive the rotating member 23 to rotate 180° around the third axis γ when the second rotating disk 22 rotates around the second axis β. In this way, through the gear 31 sleeved on the rotating member 23, when the second rotating disk 22 rotates around the second axis β, the rotating member 23 can drive the gear 31 to rotate around the second axis β. When the gear 31 passes the meshing member 32, it meshes with the meshing member 32. Thus, when the second rotating disk 22 rotates around the second axis β, the gear 31 and the meshing member 32 mesh once, and drive the rotating member 23 to rotate 180° around the third axis γ, thereby realizing the flipping of the sheet a to be processed.

[0038] For example, such as Figure 3 and Figure 4As shown, the meshing member 32 includes a fixing part 321 and a mating part 322. The fixing part 321 is disposed on the first rotating disk 10, and the projection of the fixing part 321 on the first rotating disk 10 is located between the projection of the connecting rod 21 on the first rotating disk 10 and the projection of the gear 31 on the first rotating disk 10. The mating part 322 is disposed on the side of the fixing part 321 away from the second rotating disk 22, and the mating part 322 is constructed into an arc shape extending around the second axis β. The side of the mating part 322 away from the second axis β is provided with a meshing tooth 323 that matches the gear 31. In this way, on the one hand, by disposing the fixing part 321 of the second meshing member 32 on the first rotating disk 10, and the projection of the fixing part 321 on the first rotating disk 10 being located between the projection of the connecting rod 21 on the first rotating disk 10 and the projection of the gear 31 on the first rotating disk 10, the space occupied by the meshing member 32 can be reduced, so that more coating fixtures 20 can be simultaneously mounted on the first rotating disk 10. On the other hand, since the mating part 322 is provided on the side of the fixing part 321 away from the second rotating disk 22, and the mating part 322 is constructed into an arc shape extending around the second axis β, the meshing provided on the side of the mating part 322 away from the second axis β can cooperate with the gear 31 for transmission.

[0039] In some other embodiments, the projection of the fixing part 321 on the first rotating disk 10 may be located on the side where the projection of the gear 31 on the first rotating disk 10 is far from the projection of the connecting rod 21 on the first rotating disk 10, and the meshing may be provided on the side of the mating part 322 facing the second axis β. Different positions of the fixing part 321 can be selected according to actual conditions to meet different usage requirements, and this embodiment does not specifically limit this.

[0040] For example, the flipping mechanism 30 may include a lever structure (not shown). When the second rotating disk 22 rotates one revolution around the second axis β, the rotating member 23 abuts against the lever. The rotating member 23 continues to rotate with the second rotating disk 22. At this time, the lever moves relative to the rotating member 23, causing the rotating member 23 to flip 180°. Different structures of the flipping mechanism 30 can be selected according to actual conditions to meet different usage requirements. This embodiment does not specifically limit this.

[0041] In some embodiments, such as Figures 2 to 4As shown, the second rotating disk 22 is provided with a first connecting hole 22a, which penetrates the second rotating disk 22 along the second axis β. The second rotating disk 22 and the first rotating disk 10 are spaced apart. The rotating component 23 includes a first rod 231 and a second rod 232 connected to each other. The first rod 231 is rotatably connected to the first connecting hole 22a, and the second rod 232 extends from the first rod 231 along the second axis β toward the first rotating disk 10. A gear 31 is disposed on the second rod 232. In this way, on the one hand, by providing the first connecting hole 22a in the second rotating disk 22 and utilizing the first rod 231 of the rotating rod to be rotatably connected to the first connecting hole 22a, the rotating component 23 can be rotatably disposed on the second rotating disk 22 around the third axis γ. On the other hand, by having the first connecting hole 22a penetrate the second rotating disk 22 along the second axis β and the second rod 232 extending from the first rod 231 along the second axis β toward the first rotating disk 10, the gear 31 can drive the rotating component 23 to rotate.

[0042] For example, the coating fixture 20 also includes a third rotating disk 24, which is connected to the connecting rod 21 and located between the first rotating disk 10 and the second rotating disk 22. The third rotating disk 24 has a second connecting hole 24a on its side facing the second rotating disk 22, and the end of the second rod 232 facing away from the first rod 231 is rotatably connected to the second connecting hole 24a. Thus, by connecting the third rotating disk 24 to the connecting rod 21, using the second connecting hole 24a on the third rotating disk 24, and rotatably connecting the end of the second rod 232 facing away from the first rod 231 to the second connecting hole 24a, the stability of the rotating component 23's rotation can be improved. Simultaneously, the gear 31, located between the second rotating disk 22 and the third rotating disk 24, can protect the gear 31, preventing damage to the gear 31 from affecting the flipping accuracy of the sheet a to be processed.

[0043] For example, the rotating member 23 includes a first rod 231 and a third rod 233 connected to each other. The third rod 233 extends from the first rod 231 along the second axis β away from the first rotating disk 10. The end of the third rod 233 away from the first rod 231 is used to place the sheet to be processed a. In this way, by extending the third rod 233 from the first rod 231 along the second axis β away from the first rotating disk 10, and by using the end of the third rod 233 away from the first rod 231 to place the sheet to be processed a, interference between the sheet to be processed a and the second rotating disk 22 can be avoided.

[0044] In some embodiments, the third rod 233 has a slot 233a at its end opposite to the first rod 231. The slot 233a is used to place the sheet material a to be processed. The coating fixture 20 also includes a clamping member 25, which is detachably connected to the end of the connecting rod 21 opposite to the first rotating disk 10. The clamping member 25 is used to abut against the sheet material a to be processed placed in the slot 233a. In this way, by placing the sheet material a to be processed in the slot 233a and connecting the clamping member 25 to the connecting rod 21, the clamping member 25 abuts against the sheet material a, thereby realizing the loading and fixing of the sheet material a. After the sheet material a is coated, the clamping member 25 is removed from the connecting rod 21, thereby removing the sheet material a from the slot 233a and unloading it.

[0045] In some embodiments, such as Figure 4 and Figure 5 As shown, the coating fixture 20 also includes a holding mechanism 40, which is located at the rotational connection between the rotating member 23 and the second rotating disk 22. The holding mechanism 40 is used to maintain the relative angle between the rotating member 23 and the second rotating disk 22 when the flipping mechanism 30 drives the rotating member 23 to rotate 180° around the third axis γ. In this way, by setting the holding mechanism 40 at the rotational connection between the rotating member 23 and the second rotating disk 22, when the flipping mechanism 30 drives the rotating member 23 to rotate 180° around the third axis γ, the holding mechanism 40 can maintain the relative angle between the rotating member 23 and the second rotating disk 22, thereby preventing the rotating member 23 from continuing to rotate due to inertia, which would cause an error in the flipping angle of the sheet a to be processed. At the same time, the meshing error between the gear 31 and the mating part 322 that causes an error in the flipping angle of the sheet a to be processed is corrected.

[0046] For example, the circumferential side of the rotating member 23 is provided with a first groove 23a, and the holding mechanism 40 is disposed in the first groove 23a. In this way, by setting the holding mechanism 40 in the first groove 23a, the space occupied by the holding mechanism 40 can be reduced, the overall volume of the coating fixture 20 can be reduced, and the first rotating disk 10 can be provided with as many coating fixtures 20 as possible, thereby improving the coating efficiency of the vacuum coating equipment 100.

[0047] In some embodiments, the wall of the first connecting hole 22a is provided with a second groove 22b. The holding mechanism 40 includes an elastic element 41 and an abutment element 42. The elastic element 41 is disposed in the first groove 23a, one end of the abutment element 42 is attached to the elastic element 41, and the other end of the abutment element 42 is used to abut against the second groove 22b when the flipping mechanism 30 drives the rotating element 23 to rotate 180° around the third axis γ. Thus, when the second rotating disk 22 rotates one revolution around the second axis β, and the flipping mechanism 30 drives the rotating element 23 to rotate 180° around the third axis γ, the abutment element 42 abuts against the second groove 22b under the elastic force of the elastic element 41, restricting the rotating element 23 from continuing to rotate relative to the second rotating disk 22 around the third axis. During the process of the flipping mechanism 30 driving the rotating element 23 to rotate around the third axis, the abutment element 42 can compress the elastic element 41 and separate from the second groove 22b, releasing the rotation restriction.

[0048] This utility model provides a coating fixture 20, which is rotatably mounted on a first rotating disk 10 around a first axis α. The first rotating disk 10 is used to mount the coating fixture 20, and a connecting rod 21 is rotatably mounted on the first rotating disk 10 around a second axis β. A second rotating disk 22 is connected to the connecting rod 21, so that the second rotating disk 22 rotates synchronously with the first rotating disk 10. In this way, the sheet to be processed a is placed using a rotating component 23. When the vacuum coating equipment 100 is coating, the first rotating disk 10 can rotate around the first axis, and at the same time, the second rotating disk 22 rotates synchronously, thereby forming a coating on the surface of the sheet to be processed a.

[0049] Furthermore, the rotating component 23 is rotatably mounted on the second rotating disk 22 along the third axis γ. The flipping mechanism 30 is located between the rotating component 23 and the first rotating disk 10. When the second rotating disk 22 rotates around the second axis β, the flipping mechanism 30 can drive the rotating component 23 to rotate 180° around the third axis γ, thereby flipping the sheet a to be processed. This results in a more uniform coating on the surface of the sheet a and higher sputtering efficiency of the target material.

[0050] The above provides a detailed description of a vacuum coating device disclosed in the embodiments of this utility model. This article uses specific examples to illustrate the principle and implementation of this utility model. The description of the above embodiments is only for the purpose of helping to understand the vacuum coating device and its core idea of ​​this utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​this utility model. Therefore, the content of this specification should not be construed as a limitation of this utility model.

Claims

1. A vacuum coating apparatus, characterized by, include: A first rotating disk, which is rotatable about a first axis; A coating fixture includes a connecting rod, a second rotating disk, and a rotating component. The connecting rod is rotatably disposed on the first rotating disk about a second axis. The second rotating disk is connected to the connecting rod and is configured to rotate synchronously with the first rotating disk. The rotating component is rotatably disposed on the second rotating disk about a third axis and is used to place the sheet to be processed. as well as A flipping mechanism is provided between the rotating member and the first rotating disk. The flipping mechanism is used to drive the rotating member to rotate 180° around the third axis when the second rotating disk rotates one revolution around the second axis. The first axis, the second axis, and the axis of the first rotating disk are parallel to each other.

2. The vacuum coating apparatus according to claim 1, wherein The flipping mechanism includes a gear and a meshing component. The gear is sleeved on the rotating component, and the meshing component is disposed on the first rotating disk. The meshing component is used to mesh with the gear to drive the rotating component to rotate 180° around the third axis when the second rotating disk rotates one revolution around the second axis.

3. The vacuum coating apparatus according to claim 2, wherein The meshing component includes a fixing part and a mating part. The fixing part is disposed on the first rotating disk, and the projection of the fixing part on the first rotating disk is located between the projection of the connecting rod on the first rotating disk and the projection of the gear on the first rotating disk. The mating part is disposed on the side of the fixing part away from the second rotating disk, and the mating part is constructed into an arc shape extending around the second axis. The side of the mating part away from the second axis is provided with teeth that match the gear.

4. The vacuum coating apparatus according to claim 2, wherein The second rotating disk is provided with a first connecting hole, which passes through the second rotating disk along the second axis. The second rotating disk and the first rotating disk are spaced apart. The rotating component includes a first rod and a second rod connected to each other. The first rod is rotatably connected to the first connecting hole. The second rod extends from the first rod along the second axis toward the first rotating disk. The gear is provided on the second rod.

5. The vacuum coating apparatus according to claim 4, wherein The coating fixture further includes a third rotating disk, which is connected to the connecting rod and located between the first rotating disk and the second rotating disk. The third rotating disk has a second connecting hole on the side facing the second rotating disk, and the end of the second rod opposite to the first rod is rotatably connected to the second connecting hole.

6. The vacuum coating apparatus according to any one of claims 1 to 3, wherein The second rotating disk is provided with a first connecting hole. The rotating component includes a first rod and a third rod connected to each other. The first rod is rotatably connected to the first connecting hole. The third rod extends from the first rod along the second axis away from the first rotating disk. The end of the third rod away from the first rod is used to place the sheet to be processed.

7. The vacuum coating equipment according to claim 6, characterized in that, The third rod has a slot at the end opposite to the first rod, the slot being used to place the sheet to be processed. The coating fixture also includes a clamping member, which is detachably connected to the end of the connecting rod opposite to the first rotating disk. The clamping member is used to abut against the sheet to be processed placed in the slot.

8. The vacuum coating apparatus according to any one of claims 1 to 3, characterized in that, The coating fixture also includes a holding mechanism, which is located at the rotational connection between the rotating member and the second rotating disk. The holding mechanism is used to maintain the relative angle between the rotating member and the second rotating disk when the flipping mechanism drives the rotating member to rotate 180° around the third axis.

9. The vacuum coating equipment according to claim 8, characterized in that, The second rotating disk is provided with a first connecting hole, the rotating member is rotatably disposed in the first connecting hole around the second axis, the circumference of the rotating member is provided with a first groove, and the holding mechanism is disposed in the first groove.

10. The vacuum coating equipment according to claim 9, characterized in that, The first connecting hole has a second groove on its wall. The retaining mechanism includes an elastic element and an abutment. The elastic element is located in the first groove. One end of the abutment is located in the elastic element. The other end of the abutment is used to abut against the second groove when the flipping mechanism drives the rotating element to rotate 180° around the third axis.

Images