Metal probe corrosion device
By designing a metal probe corrosion device, an oxide is generated on a tungsten wire using an electrolytic solution and a power supply to form the probe tip. This solves the problem of probe dulling or contamination, enables low-cost probe repair and fabrication, improves testing accuracy, and reduces production costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 江苏新顺微电子股份有限公司
- Filing Date
- 2025-04-15
- Publication Date
- 2026-05-26
AI Technical Summary
In existing technologies, blunting, bending, or contamination of probe tips leads to inaccurate electrical characteristic testing, and replacing probes is costly.
Design a metal probe corrosion device that uses an electrolytic solution and a power supply to cause an electrolytic reaction in a tungsten wire, generating oxides that form probe tips. This device can both repair old probes and produce new probes at low cost.
It enables convenient repair and fabrication of probes, reduces production costs, and improves the accuracy and efficiency of electrical characteristic testing.
Smart Images
Figure CN224280543U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a metal probe etching device, belonging to the field of integrated circuit or discrete device manufacturing technology. Background Technology
[0002] In semiconductor device manufacturing processes, once the internal PN junction has formed, windows are typically created on the surface of the doped region of each die to verify that the electrical characteristics of the PN junction meet the design requirements using a curve tracer. This is because if contamination exists on the silicon surface during ion doping to form the PN junction, mobile ions can enter the vicinity of the PN junction along with the high-temperature atmosphere, causing the device's electrical characteristics to fail. Therefore, in semiconductor manufacturing lines, cleanliness control of the work area and the surface cleaning capability of the silicon wafer cleaning process play a crucial role in improving the final device yield.
[0003] Electrical characteristic testing requires a curve tracer and a probe station. First, select the appropriate test setting on the curve tracer according to the test conditions. Then, insert the probe into the test window area and rotate the scanning power knob to read the value and observe the characteristic curve on the curve tracer screen. However, with increased probe insertions, the probe tip may become dull, bent, deformed, or contaminated with burrs. A dull or bent tip will not be able to be accurately inserted into the test window area, while a contaminated or burred tip can cause short circuits and burn out the die. In such cases, the common practice on the production line is to replace the purchased probe. Simply loosen the fastening screw, remove the old probe, replace it with a new one, and tighten it again. The old probe will not be reused. Over time, this leads to high probe usage costs. Summary of the Invention
[0004] The technical problem to be solved by this utility model is to provide a metal probe corrosion device that is easy to operate, can repair old probes, and can make probes for online use using extremely low-cost tungsten wire, thereby reducing costs.
[0005] The technical solution adopted by this utility model to solve the above problems is as follows: a metal probe corrosion device, including a base, a support frame on the base, and a lifting connecting frame on the side of the support frame, the lifting connecting frame being able to move up and down along the support frame; a graphite block is provided at one end of the lifting connecting frame, and a workpiece to be corroded is provided at the other end; a container containing an electrolyte solution is provided on the base, the graphite block and the workpiece to be corroded are positioned above the container, and an electric wire is embedded in the lifting connecting frame, the electric wire connecting the graphite block and the workpiece to be corroded, and the electric wire is also electrically connected to a power supply device to form an electrical circuit; when the lifting connecting frame descends, it causes the graphite block and the workpiece to be corroded to be partially immersed in the electrolyte solution, the power supply device provides voltage, the circuit is connected, and the workpiece to be corroded undergoes an electrolytic reaction in the electrolyte solution.
[0006] The support frame contains a vertically arranged screw, on which a lifting block is screwed. The lifting block passes through the support frame and is fixedly connected to the lifting connecting frame. A lifting worm gear is provided at the top of the screw, and a horizontally arranged handle passes through the support frame. A lifting worm is provided on the handle's rotating shaft, and the lifting worm meshes with the lifting worm gear. Rotating the handle drives the lifting worm and lifting worm gear to rotate, causing the screw to rotate and the lifting block to rise and fall along the screw.
[0007] A sliding groove is formed in the lifting connecting frame at one end of the workpiece to be corroded. A sliding block is engaged in the sliding groove. A vertically arranged fine-tuning rack is provided on the side of the sliding block. A duckbill clamp is provided at the bottom of the fine-tuning rack, and the workpiece to be corroded is clamped in the duckbill clamp. A fine-tuning knob is provided on the lifting connecting frame. The rotating shaft of the fine-tuning knob passes through the lifting connecting frame, and a fine-tuning gear is provided on the rotating shaft of the fine-tuning knob. The fine-tuning gear meshes with the fine-tuning rack. Rotating the fine-tuning knob drives the fine-tuning gear to rotate, so that the fine-tuning rack and the sliding block move slightly along the sliding groove, realizing the slight lifting and lowering of the workpiece to be corroded.
[0008] The power supply device is equipped with a power switch, an indicator light, a display screen, and an output voltage knob, and is electrically connected to a contact switch.
[0009] The container is made of TFL material.
[0010] Compared with the prior art, the advantages of this utility model are: a metal probe corrosion device with ingenious structure and convenient operation, suitable for corrosion of metal needles on production lines; it can repair discarded old probes to form new probes; and it can use extremely low-cost tungsten wire to corrode and produce probes for online use, which is cost-effective and saves production costs. Attached Figure Description
[0011] Figure 1 This is a schematic diagram of a metal probe corrosion device according to an embodiment of the present invention;
[0012] Figure 2 A schematic diagram showing a graphite block and a metal probe placed inside a container;
[0013] Figure 3 This is a schematic diagram of the lifting worm gear and the lifting worm.
[0014] Figure 4 This is a schematic diagram of a fine-tuning rack and fine-tuning gear.
[0015] In the diagram: 1. Base; 2. Graphite block; 3. Lifting connecting frame; 4. Support frame; 5. Handle; 6. Duckbill clamp; 7. Tungsten wire; 8. Wire; 9. Power supply; 10. Power indicator light; 11. Power switch; 12. Display screen; 13. Output voltage knob; 14. Contact switch; 15. Container; 16. Electrolyte solution; 17. Lifting worm gear; 18. Lifting worm; 19. Lifting block; 20. Screw; 21. Sliding block; 22. Fine-tuning rack; 23. Fine-tuning gear; 24. Fine-tuning knob. Detailed Implementation
[0016] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.
[0017] like Figure 1-4 As shown, a metal probe corrosion device in this embodiment includes a base 1, on which a vertically arranged support frame 4 is fixed. A vertically arranged screw 20 is provided inside the support frame 4, with both ends of the screw 20 fixed to the top and bottom ends of the support frame 4 via bearings. A lifting block 19 is sleeved on the screw 20, and the lifting block 19 is threadedly connected to the screw 20. A lifting connecting frame 3 is provided on the side of the support frame 4, through which the lifting block 19 passes, and is fixedly connected to the lifting connecting frame 3. A lifting worm gear 17 is provided at the top of the screw 20, and a handle 5 is provided at the top of the support frame 4. The rotating shaft of the handle 5 passes horizontally through the support frame 4, and a lifting worm gear 18 is fixedly connected to the end of the rotating shaft of the handle 5. The central axis of the lifting worm gear 18 and the central axis of the lifting worm gear 17 are at 90° and mesh with each other. A graphite block 2 is located at one bottom of the lifting connecting frame 3, and a tungsten wire 7 is clamped at the other bottom of the lifting connecting frame 3. An electric wire 8 is embedded inside the lifting connecting frame 3. The graphite block 2 and the tungsten wire 7 are electrically connected via the electric wire 8, which is also electrically connected to the power supply device 9, thus forming an electrical circuit. A TFL container 15 is located on the base 1, containing an electrolyte solution 16, which is a 40% pure sodium hydroxide solution. Rotating the handle 5 drives the lifting worm gear 18 and the lifting worm wheel 17 to rotate, causing the screw 20 to rotate and the lifting block 19 to move up and down along the lifting worm gear 18, thus achieving the lifting motion of the lifting connecting frame. When the lifting connecting frame descends, it immerses the graphite block and the tungsten wire into the container, meaning they are partially immersed in the electrolyte solution. The power supply device provides voltage, the circuit is connected, and the graphite block and the tungsten wire are energized (the graphite block is the cathode, and the tungsten wire is the anode). The tungsten wire, acting as the anode, oxidizes on its surface to form oxides, which react with hydroxide ions in the solution to generate soluble tungstate ions. As the corrosion process progresses, the tungsten wire gradually becomes thinner, turning into a needle-like shape, thus becoming a probe.
[0018] A sliding groove is formed inside the lifting connecting frame 3, which has a tungsten wire at one end. A sliding block 21 is engaged in the sliding groove. A vertically arranged fine-tuning rack 22 is fixedly connected to the side of the sliding block 21. A duckbill clip 6 is set at the bottom of the fine-tuning rack 22, and the tungsten wire 7 is clamped in the duckbill clip 6. A fine-tuning knob 24 is provided on the lifting connecting frame 3. The rotating shaft of the fine-tuning knob 24 passes through the lifting connecting frame 3, and a fine-tuning gear 23 is set on the rotating shaft of the fine-tuning knob 24. The fine-tuning gear 23 meshes with the fine-tuning rack 22. Rotating the fine-tuning knob 24 drives the fine-tuning gear 23 to rotate, so that the fine-tuning rack 22 and the sliding block 21 move up and down slightly along the sliding groove, thereby realizing the slight lifting and lowering of the tungsten wire.
[0019] The power supply unit 9 is equipped with a power switch 11, an indicator light 10, a display screen 12, and an output voltage knob 13. The power supply unit 9 is electrically connected to the contact switch 14.
[0020] A metal probe etching device, the etching process includes the following steps:
[0021] Step 1: Turn the handle counterclockwise to raise the lifting block and lifting connecting frame to a certain height.
[0022] Step 2: Cut a section of tungsten wire, press the duckbill clamp to clamp the tungsten wire into the duckbill clamp, and fix the tungsten wire in the lifting connecting frame.
[0023] Step 3: Prepare a TFL container and pour in a 40% sodium hydroxide solution. Place the container on the base under the graphite block and tungsten filament.
[0024] Step 4: Turn on the power switch; the indicator light will illuminate.
[0025] Step 5: Rotate the output voltage knob to adjust the output voltage, and confirm the appropriate voltage value on the display screen.
[0026] Step Six: Turn the handle in the opposite direction to lower the lifting block and lifting frame. The bottom part of the graphite block is immersed in a 40% sodium hydroxide solution. The tungsten wire is set to a certain height using the fine-tuning knob, and one end of the tungsten wire is also immersed in a 40% sodium hydroxide solution.
[0027] Step 7: Press the contact switch to connect the circuit. The tungsten filament and graphite block will undergo an electrolytic reaction in a 40% sodium hydroxide solution according to the output voltage setting.
[0028] When a tungsten wire is used as the anode, its surface oxidizes to form oxides, which react with hydroxide ions in the electrolyte solution to form soluble tungstate ions. As corrosion progresses, the tungsten wire gradually thins, becoming a needle-like shape. The reaction equation is:
[0029]
[0030] The graphite block serves as the cathode, primarily initiating the electrolysis of water. The reaction equation is as follows:
[0031]
[0032] Step 8: After corrosion for a period of time, release the contact switch to disconnect the circuit. Adjust the fine-tuning knob to raise or lower the tungsten wire a certain distance, ensuring that one end of the tungsten wire is always partially immersed in a 40% sodium hydroxide solution. Then continue pressing the contact switch to continue corrosion. Raising or lowering the wire a certain distance ensures that the tungsten wire is corroded to form a cone-shaped needle tip, thus forming a tungsten wire needle.
[0033] Step 9: After the tungsten wire etching is complete, return the output voltage knob to zero and turn off the power switch. Turn the handle counterclockwise to remove the graphite block and tungsten wire needle from the surface of the 40% sodium hydroxide solution, and let it stand for 1-2 minutes.
[0034] Step 10: Use long-legged tweezers to hold the tungsten wire needle, press the duckbill clamp to remove the tungsten wire needle, rinse it in pure water for 15-30 seconds, then wipe it clean and use it as a probe.
[0035] The tungsten wire mentioned above can also be replaced with an old probe. The old probe is clipped into a duckbill clip and then immersed in an electrolyte solution to undergo an electrolytic reaction, thereby forming a new probe.
[0036] This application features a clever structure and convenient operation, making it suitable for the etching of metal needles on production lines. It can both repair discarded old probes to form new probes and use extremely low-cost tungsten wire to etch and manufacture probes for online use, offering high cost-effectiveness and saving production costs.
[0037] In addition to the above embodiments, this utility model also includes other implementation methods. All technical solutions formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of this utility model.
Claims
1. A metal probe etching device, characterized in that: The system includes a base, on which a support frame is mounted, and a lifting connecting frame is provided on the side of the support frame, the lifting connecting frame being able to move up and down along the support frame; The lifting connecting frame has a graphite block at one end and a workpiece to be etched at the other end. A container filled with an electrolyte solution is placed on the base. The graphite block and the workpiece to be etched are positioned above the container. An electrical wire is embedded in the lifting connecting frame, connecting the graphite block and the workpiece to be etched. The wire is also electrically connected to a power supply device, forming an electrical circuit. When the lifting connecting frame descends, it partially immerses the graphite block and the workpiece to be etched in the electrolyte solution. The power supply device provides voltage, the circuit is connected, and the workpiece to be etched undergoes an electrolytic reaction in the electrolyte solution.
2. The metal probe corrosion device according to claim 1, characterized in that: The support frame contains a vertically arranged screw, on which a lifting block is screwed. The lifting block passes through the support frame and is fixedly connected to the lifting connecting frame. A lifting worm gear is provided at the top of the screw, and a horizontally arranged handle passes through the support frame. A lifting worm is provided on the handle's rotating shaft, and the lifting worm meshes with the lifting worm gear. Rotating the handle drives the lifting worm and lifting worm gear to rotate, causing the screw to rotate and the lifting block to rise and fall along the screw.
3. The metal probe corrosion device according to claim 1, characterized in that: A sliding groove is formed in the lifting connecting frame at one end of the workpiece to be corroded. A sliding block is engaged in the sliding groove. A vertically arranged fine-tuning rack is provided on the side of the sliding block. A duckbill clamp is provided at the bottom of the fine-tuning rack, and the workpiece to be corroded is clamped in the duckbill clamp. A fine-tuning knob is provided on the lifting connecting frame. The rotating shaft of the fine-tuning knob passes through the lifting connecting frame, and a fine-tuning gear is provided on the rotating shaft of the fine-tuning knob. The fine-tuning gear meshes with the fine-tuning rack. Rotating the fine-tuning knob drives the fine-tuning gear to rotate, so that the fine-tuning rack and the sliding block move slightly along the sliding groove, realizing the slight lifting and lowering of the workpiece to be corroded.
4. The metal probe corrosion device according to claim 1, characterized in that: The power supply device is equipped with a power switch, an indicator light, a display screen, and an output voltage knob, and is electrically connected to a contact switch.
5. The metal probe corrosion device according to claim 1, characterized in that: The container is made of TFL material.