An auxiliary heating device for a single crystal furnace

Abstract

This utility model relates to the field of single crystal furnace heating technology, and in particular to an auxiliary heating device for a single crystal furnace. It includes a heating coil fitted inside the outer shell of the single crystal furnace, located above the crucible. The heating coil is composed of at least one layer of ring-shaped, nested tubes, spirally wound along the central axis to form a multi-layered, ring-shaped stack with a central cavity. This utility model enables heat to be uniformly transferred from multiple directions to the area above the crucible, avoiding localized overheating or undercooling. By changing the structure of the heating coil, the problem of uneven temperature distribution is solved. Compared to traditional heating components, it can heat the silicon material more efficiently and uniformly, improving the melting effect of the silicon material and the quality of single crystal growth.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace heating technology, and more specifically, to an auxiliary heating device for a single crystal furnace. Background Technology

[0002] In the field of single crystal production, the single crystal furnace is the core equipment for crystal growth, and the heating device, as a key component of the single crystal furnace, directly determines the quality and efficiency of single crystal growth. Currently, traditional single crystal furnace heating devices mostly use a main heater and a bottom heater to heat the molten metal.

[0003] In the prior art, such as in document CN218404499U, an auxiliary heating device for a single crystal furnace and a single crystal furnace are specifically disclosed. The device in this document uses a heating component that enters or exits the single crystal furnace through the furnace wall inlet. When the heating component enters the furnace, at least a portion of it is positioned above the crucible, eliminating the need for structural disassembly and preventing changes in the thermal field structure. This reduces the risk of heater damage due to human error during disassembly. Furthermore, it can replace the bottom heater in the single crystal furnace or heat it together with the main heater and bottom heater. This not only increases the heat exchange area, accelerating melting efficiency and saving melting time, but also reduces the burden on existing heaters, making them more durable.

[0004] However, the spiral structure of the heater in this heating assembly causes differences in the amount of heat generated in different parts when the power is applied, resulting in uneven temperature distribution in the heating area above the crucible, which in turn affects the melting effect of the silicon material and the quality of single crystal growth. Utility Model Content

[0005] This invention proposes an auxiliary heating device for a single crystal furnace, which solves the technical problem that in existing heating components, the spiral structure heater causes differences in heat generation in different parts when energized, resulting in uneven temperature distribution in the heating area above the crucible, which in turn affects the melting effect of silicon and the quality of single crystal growth.

[0006] The present invention proposes an auxiliary heating device for a single crystal furnace, comprising a single crystal furnace shell, a heating coil sleeved inside the single crystal furnace shell, a first electrode post, and a second electrode post;

[0007] The heating ring is located above the crucible of the single crystal furnace. The heating ring is composed of at least one layer of tubes nested in a ring. The tubes are spirally wound along the central axis to form a multi-layered ring-shaped stacked structure with a central cavity.

[0008] The first electrode post is fixedly connected to the upper end of the heating coil. The end of the first electrode post penetrates the shell of the single crystal furnace and extends to its outer side. The outer end of the first electrode post is fixedly connected to a first electrode head.

[0009] The second electrode post is fixedly connected to the lower end of the heating coil. The end of the second electrode post penetrates the outer shell of the single crystal furnace and extends to its outer side. The outer end of the second electrode post is fixedly connected to a second electrode head.

[0010] Preferably, a first fixing sleeve is fixedly connected to the inner wall of the single crystal furnace shell, and the end of the first electrode post passes through the first fixing sleeve and extends to its outer side.

[0011] Preferably, a second fixing sleeve is fixedly connected to the inner wall of the single crystal furnace shell, and the end of the second electrode post passes through the first fixing sleeve and extends to its outer side.

[0012] Preferably, a first support rod and a second support rod are fixedly connected to the inner wall of the single crystal furnace shell, and the inner ends of the first support rod and the second support rod are respectively fixedly connected to the heating coil.

[0013] Preferably, the outer wall of the single crystal furnace shell is fixedly connected with a plurality of first positioning posts, and the outer wall of the single crystal furnace shell is fixedly connected with two second positioning posts.

[0014] Preferably, the auxiliary heating device of the single crystal furnace further includes two clamping assemblies, each clamping assembly including an arc plate, the end of the second positioning post passing through the arc plate and slidably connected thereto, both ends of the arc plate being fixedly connected to an elastic band, the outer wall of the elastic band being provided with a sliding hole, the end of the first positioning post passing through the sliding hole and slidably connected thereto, and both ends of the elastic band being fixedly connected to a connecting plate.

[0015] Preferably, a bolt is inserted between two adjacent connecting plates, and a nut is threaded onto the end of the bolt.

[0016] Preferably, the inner sidewalls of both arc plates are provided with connecting grooves, and mounting plates are fixedly connected to the inner walls of the connecting grooves. The outer wall of the mounting plate is provided with positioning holes, and the end of the second positioning post passes through the positioning holes and is slidably connected to them. One of the mounting plates is fixedly connected to the first support rod and the second support rod, and the other mounting plate is fixedly connected to the first fixing sleeve and the second fixing sleeve.

[0017] The beneficial effects of this utility model, achieved through the above technical solution, are as follows:

[0018] 1. In this device, the heating coil adopts at least one layer of ring-shaped nested tubes, and the tubes are spirally coiled along the central axis to form a multi-layer ring-shaped stack. This structure increases the heating area, so that heat can be evenly transferred from multiple directions to the area above the crucible, avoiding local overheating or undercooling. By changing the structure of the heating coil, the problem of uneven temperature distribution is solved. Compared with traditional heating components, it can heat silicon material more efficiently and evenly, improving the melting effect of silicon material and the quality of single crystal growth.

[0019] 2. The first and second support rods are directly and fixedly connected to the heating coil to provide support for the heating coil, securely install the heating coil inside the single crystal furnace shell, prevent the heating coil from shifting during use, and ensure the accuracy of the heating position.

[0020] 3. The components of the clamp assembly, such as the arc plate, elastic band, and connecting plate, work together to secure the single crystal furnace shell according to actual needs. The elastic band's elasticity adapts to different installation environments. The cooperation of the first and second positioning posts enables rapid installation and disassembly, improving installation efficiency while ensuring the stability of the device after installation. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a schematic diagram of the installation structure of the heating coil of this utility model;

[0023] Figure 3 This is a schematic diagram of the installation structure of the arc plate of this utility model;

[0024] Figure 4 This is a schematic diagram of the installation structure of the first and second support rods of this utility model.

[0025] In the diagram: 1. Heating coil; 2. First electrode post; 3. Second electrode post; 4. First fixing sleeve; 5. Second fixing sleeve; 6. First electrode head; 7. Second electrode head; 8. Arc plate; 9. Connecting groove; 10. Mounting plate; 11. Positioning hole; 12. Elastic band; 13. Sliding hole; 14. First positioning post; 15. Connecting plate; 16. Bolt; 17. Nut; 18. Second positioning post; 19. First support rod; 20. Second support rod; 21. Single crystal furnace shell. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0027] like Figure 1 and Figure 2 As shown, an auxiliary heating device for a single crystal furnace includes a single crystal furnace shell 21, a heating coil 1 fitted inside the single crystal furnace shell 21, a first electrode post 2, and a second electrode post 3.

[0028] Heating ring 1 is located above the crucible of the single crystal furnace. Heating ring 1 is composed of at least one layer of tubes nested in a ring. The tubes are spirally wound along the central axis to form a multi-layered ring-shaped stacked form with a central cavity. The size of the spiral openings on both sides of heating ring 1 can be designed according to the actual use of the single crystal furnace to avoid the heating ring 1 affecting the use of the single crystal furnace.

[0029] The first electrode post 2 is fixedly connected to the upper end of the heating coil 1. The end of the first electrode post 2 penetrates the single crystal furnace shell 21 and extends to its outer side. The outer end of the first electrode post 2 is fixedly connected to the first electrode head 6.

[0030] The second electrode post 3 is fixedly connected to the lower end of the heating coil 1. The end of the second electrode post 3 penetrates through the single crystal furnace shell 21 and extends to its outer side. The outer end of the second electrode post 3 is fixedly connected to the second electrode head 7.

[0031] The unique multi-layered, ring-shaped, and spirally coiled structure of heating coil 1 increases the heating area compared to traditional spiral heaters, resulting in more uniform heat distribution. This solves the problem of uneven temperature distribution in the heating area in existing technologies, thereby improving the melting effect of silicon and the quality of single crystal growth. The first electrode post 2, the first electrode head 6, the second electrode post 3, and the second electrode head 7 constitute the circuit connection, ensuring a stable connection between heating coil 1 and the power supply, and guaranteeing that heating coil 1 generates heat when energized.

[0032] In this embodiment, as Figure 1 and Figure 2 As shown, a first fixing sleeve 4 is fixedly connected to the inner wall of the single crystal furnace shell 21. The end of the first electrode post 2 passes through the first fixing sleeve 4 and extends to its outer side. A second fixing sleeve 5 is fixedly connected to the inner wall of the single crystal furnace shell 21. The end of the second electrode post 3 passes through the first fixing sleeve 4 and extends to its outer side.

[0033] The first fixing sleeve 4 and the second fixing sleeve 5 provide positioning and support for the first electrode post 2, restricting the movement of the first electrode post 2 within the single crystal furnace shell 21. At the same time, the first fixing sleeve 4 and the second fixing sleeve 5 ensure the stability of the connection between the first electrode post 2 and the heating coil 1.

[0034] In this embodiment, as Figure 1 and Figure 4 As shown, a first support rod 19 and a second support rod 20 are fixedly connected to the inner wall of the single crystal furnace shell 21, and the inner ends of the first support rod 19 and the second support rod 20 are fixedly connected to the heating coil 1 respectively.

[0035] The first support rod 19 and the second support rod 20 are directly fixedly connected to the heating coil 1, providing support for the heating coil 1 and firmly installing the heating coil 1 inside the single crystal furnace shell 21, preventing the heating coil 1 from shifting during use and ensuring the accuracy of the heating position.

[0036] In this embodiment, as Figure 3 As shown, a plurality of first positioning posts 14 are fixedly connected to the outer wall of the single crystal furnace shell 21, and two second positioning posts 18 are fixedly connected to the outer wall of the single crystal furnace shell 21.

[0037] The auxiliary heating device of the single crystal furnace also includes two clamp assemblies. Each clamp assembly includes an arc plate 8. The end of the second positioning post 18 passes through the arc plate 8 and is slidably connected to it. Both ends of the arc plate 8 are fixedly connected to an elastic band 12. The outer wall of the elastic band 12 is provided with a sliding hole 13. The end of the first positioning post 14 passes through the sliding hole 13 and is slidably connected to it. Both ends of the elastic band 12 are fixedly connected to a connecting plate 15.

[0038] A bolt 16 is inserted between two adjacent connecting plates 15, and a nut 17 is threaded onto the end of the bolt 16.

[0039] The components of the clamp assembly, such as the arc plate 8, elastic band 12, and connecting plate 15, work together to secure the single crystal furnace shell 21 according to actual needs. The elastic band 12 is flexible enough to adapt to different installation environments. Through the cooperation of the first positioning post 14 and the second positioning post 18, it enables quick installation and disassembly, improving installation efficiency while ensuring the stability of the device after installation.

[0040] In this embodiment, as Figure 4 As shown, the inner walls of the two arc plates 8 are provided with connecting grooves 9, and the inner walls of the connecting grooves 9 are fixedly connected with mounting plates 10. The outer walls of the mounting plates 10 are provided with positioning holes 11. The end of the second positioning post 18 passes through the positioning hole 11 and is slidably connected to it. One mounting plate 10 is fixedly connected to the first support rod 19 and the second support rod 20, and the other mounting plate 10 is fixedly connected to the first fixing sleeve 4 and the second fixing sleeve 5.

[0041] The connection groove 9, mounting plate 10 and positioning hole 11 make the connection between the arc plate 8 and components such as the first support rod 19, the second support rod 20, the first fixing sleeve 4 and the second fixing sleeve 5 more stable.

[0042] A heat-insulating coating is provided between the contact surface of the first fixing sleeve 4 and the first electrode post 2, between the contact surface of the second fixing sleeve 5 and the second electrode post 3, and between the contact surface of the first support rod 19 and the second support rod 20 and the heating coil 1. The heat-insulating coating is zirconium oxide, which is used to block heat conduction and ensure that the temperature of the external structure is below the safe threshold.

[0043] Working principle: When installing the auxiliary heating device for the single crystal furnace, the heating coil 1 is first placed inside the single crystal furnace shell 21. The heating coil 1 is fixed by the first support rod 19 and the second support rod 20, so that the heating coil 1 is stably positioned above the crucible of the single crystal furnace. The first electrode post 2 passes through the first fixing sleeve 4, and the second electrode post 3 passes through the second fixing sleeve 5, thereby achieving the positioning and support of the electrode posts and ensuring that the positions of the electrode posts are fixed.

[0044] Next, a clamp assembly is used for further fixation. The arc plate 8 is fitted onto the single crystal furnace shell 21 through the positioning hole 11 via the second positioning post 18. The elastic band 12 passes through the first positioning post 14, so that the two arc plates 8 surround the outside of the single crystal furnace shell 21. Adjacent connecting plates 15 are connected by bolts 16 and nuts 17. Tightening the nuts 17 stretches the elastic band 12, causing the arc plates 8 to clamp the single crystal furnace shell 21, thus ensuring the heating device is securely installed.

[0045] After the device is installed, the first electrode head 6 and the second electrode head 7 are connected to the power supply. The current is conducted to the heating coil 1 through the first electrode post 2 and the second electrode post 3. The heating coil 1 is composed of multiple layers of ring-shaped, nested, and spirally wound tubes. Heat is generated when the current passes through the tubes. The multi-layered, ring-shaped stacked tubes heat the area above the crucible from multiple angles, uniformly raising the temperature of this area and achieving auxiliary heating of the silicon material in the single crystal furnace.

[0046] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.

Claims

1. An auxiliary heating device for a single crystal furnace, characterized in that, include: Single crystal furnace shell (21); A heating ring (1) is fitted inside the shell (21) of the single crystal furnace. The heating ring (1) is located above the crucible of the single crystal furnace. The heating ring (1) is composed of at least one layer of tubes nested in a ring. The tubes are spirally coiled along the central axis to form a multi-layer ring-shaped stacked form with a central cavity. The first electrode post (2) is fixedly connected to the upper end of the heating coil (1). The end of the first electrode post (2) penetrates through the shell (21) of the single crystal furnace and extends to its outer side. The outer end of the first electrode post (2) is fixedly connected to the first electrode head (6). The second electrode post (3) is fixedly connected to the lower end of the heating coil (1). The end of the second electrode post (3) penetrates through the shell (21) of the single crystal furnace and extends to its outer side. The outer end of the second electrode post (3) is fixedly connected to the second electrode head (7).

2. The auxiliary heating device for a single crystal furnace according to claim 1, characterized in that: The inner wall of the single crystal furnace shell (21) is fixedly connected to a first fixing sleeve (4), and the end of the first electrode post (2) passes through the first fixing sleeve (4) and extends to its outer side.

3. The auxiliary heating device for a single crystal furnace according to claim 2, characterized in that: The inner wall of the single crystal furnace shell (21) is fixedly connected to a second fixing sleeve (5), and the end of the second electrode post (3) passes through the first fixing sleeve (4) and extends to its outer side.

4. The auxiliary heating device for a single crystal furnace according to claim 3, characterized in that: The inner wall of the single crystal furnace shell (21) is fixedly connected with a first support rod (19) and a second support rod (20), and the inner ends of the first support rod (19) and the second support rod (20) are fixedly connected to the heating coil (1) respectively.

5. The auxiliary heating device for a single crystal furnace according to claim 4, characterized in that: The outer wall of the single crystal furnace shell (21) is fixedly connected with a plurality of first positioning posts (14), and the outer wall of the single crystal furnace shell (21) is fixedly connected with two second positioning posts (18).

6. The auxiliary heating device for a single crystal furnace according to claim 5, characterized in that: It also includes two clamp assemblies, each of which includes an arc plate (8). The end of the second positioning post (18) passes through the arc plate (8) and is slidably connected to it. Both ends of the arc plate (8) are fixedly connected to an elastic band (12). The outer wall of the elastic band (12) is provided with a sliding hole (13). The end of the first positioning post (14) passes through the sliding hole (13) and is slidably connected to it. The end of the elastic band (12) is fixedly connected to a connecting plate (15).

7. The auxiliary heating device for a single crystal furnace according to claim 6, characterized in that: A bolt (16) is inserted between two adjacent connecting plates (15), and a nut (17) is threaded onto the end of the bolt (16).

8. The auxiliary heating device for a single crystal furnace according to claim 7, characterized in that: Both of the arc plates (8) have connecting grooves (9) on their inner sidewalls. Each connecting groove (9) has a mounting plate (10) fixedly connected to its inner wall. The mounting plate (10) has a positioning hole (11) on its outer wall. The end of the second positioning post (18) passes through the positioning hole (11) and is slidably connected to it. One of the mounting plates (10) is fixedly connected to the first support rod (19) and the second support rod (20). The other mounting plate (10) is fixedly connected to the first fixing sleeve (4) and the second fixing sleeve (5).

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