A corrugated tube with a sealed electrostatic chuck pin

Abstract

This utility model discloses an electrostatic chuck pin bellows with a sealing structure, comprising a housing, a pin body, a fixing seat, and a bellows body. The pin body is positioned at the center of the housing via a spring sleeve, with its top end extending to the outside of the housing. A fixing seat is located at the top of the housing, and the bellows body is housed inside the fixing seat, fitting over the top end of the pin body. A sealing element is located inside the fixing seat, pressing tightly against the outer wall of the bellows body. A pre-drilled groove is formed on the inner side of the fixing seat, and pressure plates are evenly arranged inside the groove via return springs. This utility model, by installing the housing, spring sleeve, pin body, fixing seat, bellows body, pre-drilled groove, return spring, pressure plates, pressure blocks, and sealing element, provides additional elastic cushioning for the pin body while maintaining stability after sealing.

Description

Technical Field

[0001] This utility model relates to the field of ejector pin corrugated tube technology, specifically an electrostatic chuck ejector pin corrugated tube with a sealing structure. Background Technology

[0002] An electrostatic chuck is a device used to fix and support wafers in the semiconductor manufacturing process. The chuck body generates an adsorption force through an electrostatic field to fix the wafer on the chuck. The ejector pin is an auxiliary component of the electrostatic chuck, used to further support and fix the wafer. By precisely controlling the lifting and pressure of the ejector pin, the stability and reliability of the wafer during the processing can be ensured.

[0003] The bellows is an auxiliary component of the electrostatic chuck pin. By setting the bellows outside the pin, it can provide additional elastic cushioning. When the pin is subjected to external pressure or impact, the bellows can absorb and disperse these forces, providing additional protection for the pin. However, ordinary bellows lack a corresponding sealing structure, and external contaminants can easily enter the interior through the connection between the bellows and the pin, affecting the normal operation of the electrostatic chuck pin. Utility Model Content

[0004] The purpose of this invention is to provide an electrostatic chuck pin corrugated tube with a sealed structure to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a corrugated tube with a sealed electrostatic chuck pin, comprising a housing, a pin body, a fixing seat, and a corrugated tube body. The pin body is provided at the center of the housing via a spring sleeve, and the top end of the pin body extends to the outside of the housing. A fixing seat is provided at the top of the housing, and the corrugated tube body is provided inside the fixing seat. The corrugated tube body is sleeved on the top end of the pin body. A sealing element is provided inside the fixing seat, and the sealing element is pressed tightly against the outer wall of the corrugated tube body. A reserved groove is provided on the inner side of the fixing seat, and a pressure plate is uniformly provided inside the reserved groove via a return spring. The side of the pressure plate near the sealing element is uniformly connected to the sealing element via a pressure block.

[0006] Preferably, both ends of the top of the ejector pin body are provided with connecting plates, and the bottom ends of the connecting plates are connected to the corrugated pipe body.

[0007] Preferably, a sealing ring is provided at the bottom of the interior of the fixing seat, and the inner wall of the sealing ring is tightly fitted with the outer wall of the corrugated pipe body.

[0008] Preferably, the sidewall of the corrugated pipe body is composed of concave and convex portions, and each of the convex portions is provided with an anti-compression ring.

[0009] Preferably, a steel strip is provided inside the side wall of the corrugated pipe body, and a polyethylene outer layer is provided outside the steel strip.

[0010] Preferably, guide blocks are provided at both ends of the pressure plate, and guide grooves matching the guide blocks are provided at both ends of the reserved groove.

[0011] Preferably, the seal is made of rubber, and the seal has cavities on both sides inside.

[0012] Preferably, all the pressure-resistant rings are made of rubber, and each pressure-resistant ring has a buffer cavity inside, with a buffer spring at both ends inside the buffer cavity.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: The electrostatic chuck pin bellows with a sealing structure is equipped with a housing, spring sleeve, pin body, fixing seat, bellows body, reserved groove, return spring, pressure plate, pressure block and sealing element. The fixing seat is set on the top of the housing, the bellows body is set inside the fixing seat and is sleeved on the outside of the top of the pin body, providing additional elastic buffer for the pin body. When the pin body is subjected to external pressure or impact, the bellows body can absorb and disperse these forces. The inside of the fixing seat is tightly connected to the outer wall of the bellows body through the sealing element. The sealing element is made of rubber, which effectively prevents external contaminants from entering the housing. A reserved groove is opened on the inner side of the fixing seat. The reserved groove is evenly arranged with a pressure plate through the return spring. One end of the pressure plate is connected to the sealing element through the pressure block. Under the action of the return spring, the sealing element is always tightly fitted to the outer wall of the bellows body, which helps to maintain the stability after sealing. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a front view cross-sectional structural diagram of the present invention;

[0016] Figure 2 For the present utility model Figure 1 Enlarged structural diagram at point A in the middle;

[0017] Figure 3 This is a partial cross-sectional structural diagram of the corrugated pipe body of this utility model.

[0018] Figure 4This is a schematic diagram of the cross-sectional structure of the compression ring of this utility model;

[0019] Figure 5 This is a schematic diagram of the cross-sectional structure of the side wall of the corrugated pipe body of this utility model.

[0020] In the diagram: 1. Housing; 2. Spring sleeve; 3. Ejector pin body; 4. Fixing seat; 5. Connecting plate; 6. Bellows body; 7. Sealing ring; 8. Reserved groove; 9. Return spring; 10. Pressure block; 11. Pressure plate; 12. Seal; 13. Chamber; 14. Protrusion; 15. Pressure-resistant ring; 16. Buffer chamber; 17. Buffer spring; 18. Steel strip; 19. Polyethylene outer layer; 20. Guide block. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0022] Please see Figure 1-5 The present invention provides an embodiment of an electrostatic chuck pin corrugated tube with a sealed structure, comprising a housing 1, a pin body 3, a fixing seat 4, and a corrugated tube body 6. The pin body 3 is provided at the center of the housing 1 via a spring sleeve 2. The chuck body generates an adsorption force through an electrostatic field to fix and adsorb the wafer. The pin body 3 is provided with lifting and pressure by an external driving device. The spring sleeve 2 is compressed and deformed to form an upward supporting force, which further supports and fixes the wafer through the pin body 3.

[0023] The top of the ejector body 3 extends to the outside of the housing 1. A fixing seat 4 is provided on the top of the housing 1, and a bellows body 6 is provided inside the fixing seat 4.

[0024] The corrugated tube body 6 is sleeved on the top of the ejector body 3. Both ends of the top of the ejector body 3 are provided with connecting plates 5, and the bottom ends of the connecting plates 5 are connected to the corrugated tube body 6.

[0025] The fixing seat 4 is located on the top of the housing 1, the bellows body 6 is located inside the fixing seat 4, and the bellows body 6 is sleeved on the outside of the top of the ejector pin body 3, providing additional elastic buffer for the ejector pin body 3, which can absorb and disperse the impact force and vibration generated during the lifting and lowering of the ejector pin body 3, thereby protecting the ejector pin body 3 and wafers and other components from damage.

[0026] The fixing seat 4 is provided with a sealing element 12, and the sealing element 12 is pressed tightly against the outer wall of the bellows body 6, effectively preventing external pollutants from entering the interior of the housing 1;

[0027] The seal 12 is made of rubber, and there are chambers 13 on both sides inside the seal 12. The chambers 13 provide a certain elastic reserve for the seal 12. When subjected to external force compression or stretching, the chambers 13 can absorb some deformation energy, thereby reducing stress concentration and plastic deformation of the seal 12, which helps to extend the service life of the seal 12.

[0028] The inner side of the fixed base 4 is provided with a reserved groove 8, and the interior of the reserved groove 8 is uniformly provided with a pressure plate 11 through a reset spring 9. The side of the pressure plate 11 near the seal 12 is uniformly connected to the seal 12 through a pressure block 10.

[0029] Under the action of the return spring 9, the seal 12 is always in close contact with the outer wall of the bellows body 6, which helps to maintain the stability after sealing;

[0030] Guide blocks 20 are provided at both ends of the pressure plate 11, and guide grooves matching the guide blocks 20 are opened at both ends of the reserved groove 8 to limit the range of motion of the reset spring 9 and make it less prone to twisting.

[0031] A sealing ring 7 is provided at the bottom of the interior of the fixing seat 4, and the inner wall of the sealing ring 7 is tightly fitted with the outer wall of the bellows body 6, further improving the sealing performance between the bellows body 6 and the fixing seat 4.

[0032] The sidewall of the corrugated pipe body 6 is composed of a concave portion 21 and a convex portion 14, and each convex portion 14 is provided with a pressure-resistant ring 15.

[0033] All compression rings 15 are made of rubber, and each compression ring 15 has a buffer cavity 16 inside, with buffer springs 17 at both ends inside the buffer cavity 16.

[0034] The elastic characteristics of the anti-compression ring 15 and the buffer spring 17 make the bellows body 6 less prone to damage when subjected to external pressure and impact.

[0035] The corrugated pipe body 6 has a steel strip 18 inside its side wall, and a polyethylene outer layer 19 is provided on the outside of the steel strip 18. It has high strength and a long service life.

[0036] Working Principle: In this embodiment, the suction cup body generates an adsorption force through an electrostatic field to fix and adsorb the wafer. The ejector pin body 3 inside the housing 1 is used to further support and fix the wafer. The fixing seat 4 is set at the top of the housing 1, and the bellows body 6 is set inside the fixing seat 4. The bellows body 6 is sleeved on the outside of the top of the ejector pin body 3, providing additional elastic buffer for the ejector pin body 3. It can absorb and disperse the impact force and vibration generated during the lifting and lowering of the ejector pin body 3, thereby protecting the ejector pin body 3 and wafer and other components from damage. The inside of the fixing seat 4 is tightly connected to the outer wall of the bellows body 6 through a sealing element 12. The sealing element 12 is made of rubber, which effectively prevents external contaminants from entering the inside of the housing 1. The inner side of the fixing seat 4 is opened There is a reserved groove 8, and pressure plates 11 are evenly arranged inside the reserved groove 8 through return springs 9. One end of the pressure plate 11 is connected to the sealing element 12 through a pressure block 10. Under the action of the return spring 9, the sealing element 12 is always tightly fitted to the outer wall of the bellows body 6, which helps to maintain the stability after sealing. A pressure-resistant ring 15 is provided in the protrusion 14 of the bellows body 6. A buffer cavity 16 is provided inside the pressure-resistant ring 15. Buffer springs 17 are evenly arranged at both ends inside the buffer cavity 16. Through the elastic characteristics of the pressure-resistant ring 15 and the buffer springs 17, the bellows body 6 is not easily damaged when subjected to external pressure and collision. At the same time, the bellows body 6 is composed of a steel strip 18 and a polyethylene outer layer 19, which has high strength and long service life.

[0037] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0038] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0039] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0040] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An electrostatic chuck top pin bellows with a seal structure, characterized by, The assembly includes a housing (1), a ejector body (3), a fixing seat (4), and a bellows body (6). The ejector body (3) is located at the center of the housing (1) via a spring sleeve (2), and the top of the ejector body (3) extends to the outside of the housing (1). The fixing seat (4) is located at the top of the housing (1), and the bellows body (6) is located inside the fixing seat (4). The bellows body (6) is fitted onto the top of the ejector body (3). A sealing element (12) is located inside the fixing seat (4), and the sealing element (12) is pressed tightly against the outer wall of the bellows body (6). A reserved groove (8) is provided on the inner side of the fixing seat (4), and a pressure plate (11) is evenly provided inside the reserved groove (8) via a return spring (9). The side of the pressure plate (11) near the sealing element (12) is evenly connected to the sealing element (12) via a pressure block (10).

2. The electrostatic chuck top pin bellows with seal structure of claim 1, wherein: Both ends of the top of the ejector pin body (3) are provided with connecting plates (5), and the bottom ends of the connecting plates (5) are connected to the corrugated pipe body (6).

3. The electrostatic chuck top pin bellows with seal structure of claim 1, wherein: A sealing ring (7) is provided at the bottom of the fixed seat (4), and the inner wall of the sealing ring (7) is tightly fitted with the outer wall of the bellows body (6).

4. The electrostatic chuck pin bellows with a sealing structure according to claim 1, characterized in that: The sidewall of the corrugated pipe body (6) is composed of a concave part (21) and a convex part (14), and each convex part (14) is provided with a pressure-resistant ring (15).

5. The electrostatic chuck pin bellows with a sealing structure according to claim 1, characterized in that: The corrugated pipe body (6) has a steel strip (18) inside its side wall, and a polyethylene outer layer (19) is provided on the outside of the steel strip (18).

6. The electrostatic chuck pin bellows with a sealing structure according to claim 1, characterized in that: Both ends of the pressure plate (11) are provided with guide blocks (20), and both ends of the reserved groove (8) are provided with guide grooves that match the guide blocks (20).

7. The electrostatic chuck pin bellows with a sealing structure according to claim 1, characterized in that: The sealing element (12) is made of rubber, and chambers (13) are provided on both sides inside the sealing element (12).

8. The electrostatic chuck pin bellows with a sealing structure according to claim 4, characterized in that: The pressure-resistant rings (15) are all made of rubber, and each pressure-resistant ring (15) has a buffer cavity (16) inside, and a buffer spring (17) is provided at both ends inside the buffer cavity (16).

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