A high-power microwave generator for MPCVD

Abstract

This utility model discloses a high-power microwave generator for MPCVD, including a microwave pipeline. A mounting base is fixedly installed on the upper surface of the microwave pipeline, and a connecting base is fixedly installed on the upper surface of the mounting base. A pin is provided inside the connecting base, and a retaining ring is provided on the outside of the pin. An inlet pipe is fixedly installed on one side of the retaining ring, and an accelerated cooling component is provided at one end of the inlet pipe. This utility model, by setting up an accelerated cooling component, introduces a cooling medium into the connecting pipe. The cooling medium flows from the connecting pipe into the accelerating head, and is sprayed through multiple nozzles to form a vortex. The cooling medium in the vortex state is accelerated and then flows into the flow tank. The conical flow tank further accelerates the cooling medium. The cooling medium, subjected to secondary acceleration, flows from the inlet pipe to the retaining ring, and then from one of the sealed cavities of the retaining ring to the cooling channel, cooling the pin and preventing uneven temperature distribution inside the pin.

Description

Technical Field

[0001] This utility model relates to the field of microwave generator technology, and in particular to a high-power microwave generator for MPCVD. Background Technology

[0002] With the continuous development of technology, the application fields of microwaves are becoming increasingly widespread. For example, the microwave oven used in daily life uses microwaves to heat food. The prerequisite for using microwaves is to construct a specific microwave source, that is, to generate specific microwaves as needed. In traditional methods, magnetrons are usually used to generate specific microwaves. A magnetron-based microwave generator includes a power supply, a magnetron, a control circuit, and a resonant cavity. The power supply outputs voltage to the magnetron, the magnetron oscillates to generate microwaves, and then the microwaves are output through a waveguide system.

[0003] A search revealed a Chinese utility model patent with authorization announcement number CN220235285U, which discloses a cooling device for high-power microwave transmission. The device includes a flow channel inside a pin, and a connecting structure on the outside of the pin that communicates with the flow channel. An inlet pipe and an outlet pipe are respectively connected to both sides of the connecting structure. A cooling medium is introduced through the inlet pipe, and after entering the flow channel through the connecting structure, the cooling medium is discharged from the outlet pipe, thereby cooling the pin. In this application, the cooling medium directly enters the pin to cool it, improving the cooling effect on the pin.

[0004] Although its spiral flow channel extends the medium flow path, the cooling medium still flows smoothly towards the pin. Under high microwave power, the pin may still overheat locally, resulting in uneven temperature distribution. Therefore, this application proposes a high-power microwave generator for MPCVD based on the above technical problems. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a high-power microwave generator for MPCVD.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A high-power microwave generator for MPCVD includes a microwave pipe, a mounting base fixedly mounted on the upper surface of the microwave pipe, a connecting base fixedly mounted on the upper surface of the mounting base, a pin disposed inside the connecting base, a retaining ring disposed outside the pin, a liquid inlet pipe fixedly mounted on one side of the retaining ring, and an accelerated cooling component disposed at one end of the liquid inlet pipe.

[0008] The accelerated cooling assembly includes a flow tank, a lid at the top of the flow tank, an acceleration head fixedly mounted on the lower surface of the lid, the acceleration head located inside the flow tank, a cavity inside the acceleration head, and several inclined grooves arranged in a ring array on the outside of the acceleration head. Spray holes are opened on the inclined grooves and are connected to the cavity.

[0009] A connecting pipe for receiving cooling medium is fixedly installed on the upper surface of the barrel lid. Two symmetrical sealing cavities are provided inside the retaining ring. The liquid inlet pipe is connected to the sealing cavity. A cooling channel is provided inside the pin. A liquid outlet pipe is fixedly installed on one side of the retaining ring. The liquid outlet pipe is connected to the cooling channel.

[0010] Furthermore, the cooling channel is provided in two sets and is spiral in shape, the inlet pipe and the outlet pipe are flush, and the bottom of the cooling channel is lower than the inlet pipe and the outlet pipe.

[0011] Furthermore, a shape memory metal is fixedly installed at the bottom end of the pin, and a clearance groove for accommodating the shape memory metal is provided on the inner side of the top end of the microwave pipe.

[0012] Furthermore, the flow container is configured as a cone with a bottom area smaller than its top area.

[0013] Furthermore, the upper surface of the pin is provided with an indicator arrow, the upper surface of the connecting seat is provided with an alignment line, the inside of the connecting seat is provided with a sliding groove, a locking block is slidably installed in the sliding groove, a spring is fixedly installed between the locking block and the sliding groove, and the outside of the pin is provided with a locking groove that matches the locking block.

[0014] Furthermore, the connecting pipe, inlet pipe, and outlet pipe are all metal corrugated pipes.

[0015] Furthermore, the pin is made of copper-diamond composite material and has an outer layer coated with aluminum nitride ceramic.

[0016] Furthermore, a support rod is fixedly installed between the liquid outlet pipe and the connecting seat.

[0017] The beneficial effects of this utility model are as follows:

[0018] 1. This utility model, by setting up an accelerated cooling component, introduces the cooling medium into the connecting pipe. The cooling medium flows from the connecting pipe into the acceleration head. The cooling medium is sprayed through multiple nozzles to form a vortex. The cooling medium in the vortex state is accelerated and then flows into the flow tank. The cone-shaped flow tank accelerates the cooling medium again. The cooling medium, which is accelerated twice, flows from the inlet pipe to the retaining ring, and then from one of the sealing cavities of the retaining ring to the cooling channel and cools the pin, thus avoiding uneven temperature distribution inside the pin.

[0019] 2. This utility model uses a locking block, a locking slot, an indicator arrow, and an alignment line. When the indicator arrow on the pin points to the alignment line and is rotated several times, the pin will press against the locking block, causing the locking block to slide into the groove. The spring is compressed, and the pin is rotated further until the locking slot connects with the locking block. The spring then returns to its original position, at which point the indicator arrow points to the alignment line again. The bottom end of the pin is flush with the inner wall of the microwave pipe and will not extend into the microwave pipe, thus avoiding interference with the microwave.

[0020] 3. By setting up shape memory metal and clearance groove, the microwave pipe will heat up rapidly when the microwave device is working. At this time, the shape memory metal will deform and increase in volume due to heat, and gradually fill the clearance groove. As the temperature rises, it will automatically fill the sealing surface. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of a high-power microwave generator for MPCVD proposed in this utility model.

[0022] Figure 2 This is a schematic diagram of the installation of the accelerator head of a high-power microwave generator for MPCVD on the barrel lid, as proposed in this utility model.

[0023] Figure 3 This is a schematic diagram of the accelerator head structure of a high-power microwave generator for MPCVD proposed in this utility model;

[0024] Figure 4 This is a schematic diagram of the nozzle structure of a high-power microwave generator for MPCVD proposed in this utility model;

[0025] Figure 5 This is a schematic diagram of the pin and retaining ring assembly of a high-power microwave generator for MPCVD proposed in this utility model.

[0026] Figure 6 This is a cross-sectional schematic diagram of a mounting base for a high-power microwave generator for MPCVD proposed in this utility model;

[0027] Figure 7 This is a schematic diagram of a pin structure for a high-power microwave generator for MPCVD proposed in this utility model.

[0028] Figure 8 This is a schematic diagram of the cooling channel of a high-power microwave generator for MPCVD proposed in this utility model;

[0029] Figure 9 This is a schematic diagram of a retaining ring for a high-power microwave generator for MPCVD proposed in this utility model;

[0030] Figure 10This is a cross-sectional schematic diagram of a microwave pipeline for a high-power microwave generator used in MPCVD, as proposed in this utility model.

[0031] In the diagram: 1. Microwave pipe; 2. Mounting base; 3. Connecting base; 4. Pin; 5. Snap ring; 6. Liquid inlet pipe; 7. Flow container; 8. Lid; 9. Accelerator head; 10. Cavity; 11. Inclined groove; 12. Nozzle; 13. Sealing cavity; 14. Cooling channel; 15. Liquid outlet pipe; 16. Shape memory metal; 17. Clearance groove; 18. Indicator arrow; 19. Alignment line; 20. Slide groove; 21. Locking block; 22. Spring; 23. Slot; 24. Support rod; 25. Connecting pipe. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0033] Reference Figures 1-5 , Figures 8-9 A high-power microwave generator for MPCVD includes a microwave pipe 1, a mounting base 2 fixedly installed on the upper surface of the microwave pipe 1, a connecting base 3 fixedly installed on the upper surface of the mounting base 2, a pin 4 provided inside the connecting base 3, a retaining ring 5 provided outside the pin 4, a liquid inlet pipe 6 fixedly installed on one side of the retaining ring 5, and an accelerated cooling component provided at one end of the liquid inlet pipe 6.

[0034] The accelerated cooling assembly includes a flow tank 7, a tank cover 8 at the top of the flow tank 7, an acceleration head 9 fixedly installed on the lower surface of the tank cover 8, the acceleration head 9 being located inside the flow tank 7, a cavity 10 being provided inside the acceleration head 9, and a plurality of inclined grooves 11 arranged in a ring array being provided on the outer side of the acceleration head 9, and spray holes 12 being provided on the inclined grooves 11, the spray holes 12 being connected to the cavity 10.

[0035] A connecting pipe 25 for receiving cooling medium is fixedly installed on the upper surface of the barrel cover 8. Two symmetrical sealing cavities 13 are provided inside the retaining ring 5. The liquid inlet pipe 6 is connected to the sealing cavity 13. A cooling channel 14 is provided inside the pin 4. A liquid outlet pipe 15 is fixedly installed on one side of the retaining ring 5. The liquid outlet pipe 15 is connected to the cooling channel 14.

[0036] Cooling medium is introduced into connecting pipe 25. Cooling medium flows from connecting pipe 25 into acceleration head 9. Cooling medium forms a vortex through multiple nozzles 12. Cooling medium in vortex form is accelerated and flows into flow tank 7. Accelerated cooling medium flows from inlet pipe 6 to retaining ring 5, and then from one of the sealing chambers 13 of retaining ring 5 to cooling channel 14 and cools pin 4 to avoid uneven temperature distribution inside pin 4.

[0037] Reference Figure 5 , Figure 7 , Figure 8 Specifically, the present invention includes: two sets of spiral cooling channels 14; the inlet pipe 6 and the outlet pipe 15 are flush; and the bottom of the cooling channel 14 is lower than the inlet pipe 6 and the outlet pipe 15. The spiral cooling channel 14 can increase the flow distance of the cooling medium in the pin 4, thereby enhancing the cooling effect on the pin 4. The cooling medium after heat exchange with the pin 4 flows out from the outlet pipe 15.

[0038] Reference Figure 7 , Figure 10 Specifically, the bottom end of the pin 4 is fixedly installed with a memory metal 16, and the inner side of the top end of the microwave pipe 1 is provided with a relief groove 17 to accommodate the memory metal 16. When the microwave device is working, the microwave pipe 1 will heat up rapidly. At this time, the memory metal 16 will deform and increase in volume due to heat, and gradually fill the relief groove 17. As the temperature rises, it will automatically fill the sealing surface.

[0039] Reference Figure 2 Specifically, in this utility model, the flow tank 7 is configured as a cone with a bottom area smaller than the top area; and the cone-shaped flow tank 7 accelerates the cooling medium again, thus playing a secondary acceleration role in the flow of the cooling medium.

[0040] Reference Figure 1 , Figure 6 , Figure 7 Specifically, the present invention features: an indicator arrow 18 on the upper surface of the pin 4, an alignment line 19 on the upper surface of the connecting seat 3, a sliding groove 20 inside the connecting seat 3, a locking block 21 slidably installed in the sliding groove 20, a spring 22 fixedly installed between the locking block 21 and the sliding groove 20, and a locking groove 23 matching the locking block 21 on the outer side of the pin 4. When installing the pin 4, first point the indicator arrow 18 on the pin 4 to the alignment line 19. After rotating several times, the pin 4 will press against the locking block 21, causing the locking block 21 to slide into the sliding groove 20, compressing the spring 22. Continue rotating the pin 4 until the locking groove 23 connects with the locking block 21, and the spring 22 returns to its original position. At this point, the indicator arrow 18 points to the alignment line 19 again, and the bottom end of the pin 4 is flush with the inner wall of the microwave pipe 1, preventing it from extending into the microwave pipe 1 and thus avoiding disturbance to the microwave circuit.

[0041] Specifically, in this invention, the connecting pipe 25, the inlet pipe 6, and the outlet pipe 15 are all metal corrugated pipes, which improve tensile strength.

[0042] Specifically, the pin 4 is made of copper-diamond composite material and has an outer layer coated with aluminum nitride ceramic.

[0043] Reference Figure 1 Specifically, in this utility model, a support rod 24 is fixedly installed between the liquid outlet pipe 15 and the connecting seat 3.

[0044] Working principle: Cooling medium is introduced into connecting pipe 25 and flows into acceleration head 9 from connecting pipe 25. Cooling medium forms a vortex through multiple nozzles 12. Cooling medium in vortex form is accelerated and flows into flow tank 7. The conical flow tank 7 accelerates the cooling medium again. Cooling medium that has been accelerated twice flows from liquid inlet pipe 6 to retaining ring 5, and then from one of the sealing chambers 13 of retaining ring 5 to cooling channel 14 and cools pin 4. This prevents uneven temperature distribution inside pin 4. The spiral cooling channel 14 can increase the flow distance of cooling medium in pin 4, thereby enhancing the cooling effect on pin 4. Cooling medium that has exchanged heat with pin 4 flows out from liquid outlet pipe 15.

[0045] When installing pin 4, first point the indicator arrow 18 on pin 4 to the alignment line 19. After rotating several times, pin 4 will press the locking block 21, and the locking block 21 will slide into the slide groove 20. The spring 22 will be compressed. Continue to rotate pin 4 until the slot 23 connects with the locking block 21. The spring 22 will return to its original position. At this time, the indicator arrow 18 will point to the alignment line 19 again, and the bottom end of pin 4 will be flush with the inner wall of microwave pipe 1. It will not extend into the microwave pipe 1 and thus avoid disturbing the microwave.

[0046] When the microwave device is working, the microwave pipe 1 will heat up rapidly. At this time, the shape memory metal 16 will deform and increase in volume due to the heat, and gradually fill the relief groove 17. As the temperature rises, it will automatically fill the sealing surface.

[0047] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

[0048] In the description of this patent, it should be understood that the terms “center,” “upper,” “lower,” “front,” “back,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this patent and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this patent.

Claims

1. A high-power microwave generator for MPCVD, characterized in that, The microwave pipe (1) is provided with a mounting base (2) fixedly installed on the upper surface of the microwave pipe (1), and a connecting base (3) fixedly installed on the upper surface of the mounting base (2). A pin (4) is provided inside the connecting base (3), and a retaining ring (5) is provided outside the pin (4). An inlet pipe (6) is fixedly installed on one side of the retaining ring (5), and an accelerated cooling component is provided at one end of the inlet pipe (6). The accelerated cooling assembly includes a flow tank (7), a lid (8) is provided at the top of the flow tank (7), an acceleration head (9) is fixedly installed on the lower surface of the lid (8), the acceleration head (9) is located inside the flow tank (7), a cavity (10) is provided inside the acceleration head (9), and a number of inclined grooves (11) arranged in a ring array are provided on the outside of the acceleration head (9). Spray holes (12) are opened on the inclined grooves (11), and the spray holes (12) are connected to the cavity (10). A connecting pipe (25) for connecting to the cooling medium is fixedly installed on the upper surface of the bucket lid (8). Two symmetrical sealing cavities (13) are provided inside the retaining ring (5). The liquid inlet pipe (6) is connected to the sealing cavity (13). A cooling channel (14) is provided inside the pin (4). A liquid outlet pipe (15) is fixedly installed on one side of the retaining ring (5). The liquid outlet pipe (15) is connected to the cooling channel (14).

2. The high-power microwave generator for MPCVD according to claim 1, characterized in that, The cooling channel (14) is provided in two sets and is spiral in shape. The liquid inlet pipe (6) and the liquid outlet pipe (15) are flush. The bottom of the cooling channel (14) is lower than the liquid inlet pipe (6) and the liquid outlet pipe (15).

3. A high-power microwave generator for MPCVD according to claim 1, characterized in that, The bottom end of the pin (4) is fixedly installed with memory metal (16), and the inner side of the top end of the microwave pipe (1) is provided with a relief groove (17) to accommodate the memory metal (16).

4. A high-power microwave generator for MPCVD according to claim 1, characterized in that, The circulation barrel (7) is configured as a cone with a bottom area smaller than the top area.

5. A high-power microwave generator for MPCVD according to claim 1, characterized in that, The pin (4) has an indicator arrow (18) on its upper surface, the connector (3) has an alignment line (19) on its upper surface, the connector (3) has a sliding groove (20) inside, a locking block (21) is slidably installed in the sliding groove (20), a spring (22) is fixedly installed between the locking block (21) and the sliding groove (20), and the pin (4) has a locking groove (23) on its outer side that matches the locking block (21).

6. A high-power microwave generator for MPCVD according to claim 1, characterized in that, The connecting pipe (25), the inlet pipe (6), and the outlet pipe (15) are all metal corrugated pipes.

7. A high-power microwave generator for MPCVD according to claim 1, characterized in that, The pin (4) is made of copper-diamond composite material and coated with aluminum nitride ceramic on the outer layer.

8. A high-power microwave generator for MPCVD according to claim 1, characterized in that, A support rod (24) is fixedly installed between the liquid outlet pipe (15) and the connecting seat (3).

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