A double-sided positioning structure for a eutectic machine

Abstract

This invention provides a double-sided positioning structure for a eutectic crystallizer, belonging to the field of semiconductor processing technology. The invention features guide rails with carriages on both sides of the radial lifting plate of the eutectic stage, with axial positioning blocks mounted on the carriages. Sliding actuators, corresponding one-to-one with the two carriages, are also provided on both sides of the radial lifting plate. This ensures that each axial positioning block has an independent sliding actuator. While maintaining the same clamping force on the axial positioning blocks, compared to a sliding actuator that simultaneously moves two positioning blocks, the power of the sliding actuator can be appropriately reduced, allowing for a smaller size for installation on the eutectic stage. Furthermore, the sliding actuators located on both sides of the radial lifting plate avoid occupying the axial space of the eutectic stage on the tube seat, thus avoiding the problem of structural stacking, effectively reducing the thickness of the eutectic crystallizer, facilitating its arrangement on the production line, and also simplifying later maintenance and repair.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a double-sided positioning structure for a eutectic machine. Background Technology

[0002] Eutectic bonding machines are typically used in semiconductor manufacturing processes to bond chips to sockets using eutectic bonding. They are core equipment for packaging and improving chip performance. Therefore, ensuring the processing performance of eutectic bonding machines is crucial for demonstrating the quality of semiconductor manufacturing.

[0003] Currently, the structure of existing eutectic machines on the market is typically similar to the clamping and positioning eutectic device for the tube seat of a eutectic machine disclosed in patent CN217788342U. This device has a tube seat radial positioning mechanism, which includes a radial positioning fixed plate and a radial positioning sliding plate. The radial positioning sliding plate is slidably mounted on the radial positioning fixed plate in a vertical direction and has a horizontally arranged first mounting surface. The tube seat axial positioning mechanism includes an axial positioning slider, and the axial positioning slide plate is slidably disposed on the first mounting surface. An axial positioning block is mounted on the axial positioning slide plate. Furthermore, an axial positioning drive component is mounted on the radial positioning sliding plate and located at one end of the axial positioning slide plate. Simultaneously, the movement direction of the axial positioning drive component is consistent with the sliding direction of the axial positioning slide plate and is connected to the axial positioning slide plate, allowing the axial positioning drive component to drive the axial positioning slide plate to slide, thereby realizing the movement of the axial positioning block. This axial positioning block then axially presses the tube seat onto the tube seat positioning base. Furthermore, since the tube seat requires radial positioning and the positioning structure is usually located on the central axis of the tube seat, two axial positioning blocks are typically symmetrically arranged and simultaneously installed on the axial positioning slide plate to ensure axial clamping of the tube seat. Although the above structure can meet the requirement of axially positioning the tube seat on the tube seat positioning base, it drives the two axial positioning blocks to move simultaneously through one axial positioning drive component. Therefore, to ensure clamping stability, a high-power axial positioning drive component needs to be selected, resulting in a large size. In addition, to ensure that the two axial positioning blocks are subjected to the same force, the axial positioning drive component needs to be placed between the two axial positioning blocks, resulting in the axial positioning drive component being arranged in the axial direction of the tube seat. This occupies a large amount of space of the eutectic set in the axial direction of the tube seat. Moreover, since the eutectic set also needs to install air supply structure, heating structure, and air extraction structure in the axial direction of the tube seat, there will be a problem of mutual stacking with the axial positioning drive component, which increases the thickness of the eutectic set and is not conducive to the arrangement on the processing line. In addition, the mutually stacked space structure also causes inconvenience for subsequent maintenance and repair. Summary of the Invention

[0004] To address the aforementioned problems in the existing technology, this paper aims to provide a double-sided positioning structure for a eutectic machine. Guide rails are respectively provided on both sides of the radial lifting plate of the eutectic stage. Each guide rail is equipped with a carriage, and each carriage is fitted with an axial positioning block. Furthermore, sliding actuators are respectively provided on both sides of the radial lifting plate and connected one-to-one with the two carriages. This ensures that each axial positioning block has an independent sliding actuator, thereby enabling low-power selection of the sliding actuators while maintaining the same clamping force on the axial positioning blocks. This reduces the volume of a single sliding actuator. Additionally, placing the two sliding actuators on both sides of the radial lifting plate allows for axial distribution on both sides of the tube seat on the eutectic stage, without occupying the axial space of the eutectic stage on the tube seat. This meets the requirements for a distributed structural arrangement, reduces the thickness of the eutectic machine, facilitates its placement on the processing line, and also facilitates subsequent maintenance and repair.

[0005] The specific technical solution is as follows:

[0006] A double-sided positioning structure for a eutectic machine includes a radial lifting plate, an axial positioning block, and a sliding actuator. The radial lifting plate moves vertically, and guide rails are provided on both sides of the radial lifting plate. The two guide rails are parallel, spaced apart, and arranged axially along the tube seat. A carriage is slidably mounted on each guide rail, and an axial positioning block is fixedly mounted on each carriage. A sliding actuator is provided on both sides of the radial lifting plate, on the side opposite to the two guide rails, and the sliding actuator is connected to the carriage on the corresponding side of the guide rail.

[0007] The aforementioned dual-side positioning structure of a eutectic machine further includes an expansion stage, which comprises a central connecting part and a side mounting part. The central connecting part is fixedly mounted on a radial lifting plate, and two side mounting parts are symmetrically arranged on both sides of the central connecting part. Two sliding actuators are respectively mounted on the side mounting parts.

[0008] In the aforementioned double-sided positioning structure of a eutectic machine, the middle connecting part is arranged in a U-shape, and one end of the radial lifting plate is inserted into the cavity of the middle connecting part.

[0009] In the aforementioned double-sided positioning structure of a eutectic machine, a first mounting groove is provided on both sides of the radial lifting plate, and a guide rail is installed in the corresponding first mounting groove.

[0010] In the aforementioned double-sided positioning structure of a eutectic machine, one side of each first mounting slot on the radial lifting plate penetrates the side wall of the corresponding side of the radial lifting plate, the upper surface of the intermediate connecting part protrudes from the bottom of the first mounting slot, and one side of the cavity of the intermediate connecting part constitutes one side wall of the first mounting slot.

[0011] In the aforementioned double-sided positioning structure of a eutectic machine, a plurality of hollow holes are provided on the radial lifting plate, and the plurality of hollow holes are symmetrically arranged on the radial lifting plate.

[0012] The above-mentioned double-sided positioning structure of a eutectic machine includes a mounting base on each carriage. The mounting base includes a connecting plate and a side bracket. The side bracket is located on one side of the connecting plate. The connecting plate and the side bracket are arranged perpendicular to each other. The connecting plate is mounted on the carriage.

[0013] In the aforementioned double-sided positioning structure of a eutectic machine, a second mounting groove is provided on the side support along the vertical direction. The upper end of the second mounting groove penetrates the top surface of the side support. The lower end of the axial positioning block is inserted into the second mounting groove, and the upper end of the axial positioning block continues to extend upward from the part where the second mounting groove penetrates the top surface of the side support.

[0014] The above-mentioned double-sided positioning structure of a eutectic machine includes a plurality of first connecting holes on the side bracket and located in the second mounting groove. At the same time, a plurality of second connecting holes corresponding one-to-one with the first connecting holes are provided at the lower end of the axial positioning block. Each second connecting hole is a strip-shaped hole, and the length direction of the second connecting hole is the arrangement direction of the second mounting groove.

[0015] The positive effects of the above technical solution are:

[0016] The aforementioned dual-side positioning structure of the eutectic machine features guide rails on both sides of the radial lifting plate of the eutectic stage. Each guide rail has a sliding carriage, and each carriage is equipped with an axial positioning block. Simultaneously, sliding actuators are located on both sides of the radial lifting plate, with the two actuators positioned on opposite sides of the guide rails. One actuator connects to the corresponding carriage, ensuring that each axial positioning block is driven independently. Compared to existing systems where two axial positioning blocks are driven by a single actuator, this reduces the power and size of the actuators, facilitating their installation on the eutectic stage. Furthermore, positioning the two actuators on both sides of the radial lifting plate avoids obstructing the axial space of the eutectic stage on the tube seat, preventing structural stacking. This reduces the thickness of the eutectic machine, facilitating its placement on the production line and simplifying future maintenance. Attached Figure Description

[0017] Figure 1 This is a structural diagram of an embodiment of a double-sided positioning structure for a eutectic machine according to the present invention;

[0018] Figure 2 This is a structural diagram of the radial lifting plate of a preferred embodiment of the present invention;

[0019] Figure 3This is a structural diagram of the expansion platform according to a preferred embodiment of the present invention;

[0020] Figure 4 This is a structural diagram of the mounting base according to a preferred embodiment of the present utility model.

[0021] In the attached diagram: 1. Radial lifting plate; 11. First mounting groove; 12. Hollow hole; 2. Axial positioning block; 21. Second connecting hole; 3. Sliding drive; 4. Guide rail; 5. Carriage; 6. Extension platform; 61. Intermediate connecting part; 62. Side mounting part; 611. Cavity; 7. Mounting base; 71. Connecting plate; 72. Side bracket; 721. Second mounting groove; 722. First connecting hole. Detailed Implementation

[0022] To make the technical means, creative features, objectives, and effects of this utility model easier to understand, the following embodiments are provided in conjunction with the appendix. Figure 1 To be continued Figure 4 The technical solution provided by this utility model is described in detail, but the following content is not intended to limit this utility model.

[0023] Figure 1 This is a structural diagram of an embodiment of a double-sided positioning structure for a eutectic machine according to this utility model. Figure 1 As shown, the dual-side positioning structure of the eutectic machine provided in this embodiment includes: a radial lifting plate 1, an axial positioning block 2, a sliding driver 3, an expansion stage 6, and a mounting base 7.

[0024] Specifically, the radial lifting plate 1 of the eutectic stage moves vertically up and down, aligning its movement with the radial direction of the tube seat to be positioned. This provides the conditions for subsequent radial positioning of the tube seat on the tube seat positioning seat. Guide rails 4 are provided on both sides of the radial lifting plate 1, arranged parallel and spaced apart, and both along the axial direction of the tube seat. This allows the tube seat to be positioned on either side of the tube seat positioning seat on the eutectic stage, and vertically offset from the tube seat positioning seat, resulting in more efficient space utilization and effectively reducing the overall height of the eutectic machine. Furthermore, a slide 5 is slidably mounted on each guide rail 4, and an axial positioning block 2 is fixedly installed on each slide 5. This allows the slide 5 to move along the guide rail 4, enabling the axial positioning block 2 to move, thus providing the conditions for the axial positioning block 2 to press the tube seat onto the tube seat positioning seat from the axial direction. Furthermore, a sliding drive 3 is provided on both sides of the radial lifting plate 1 and on the side where the two guide rails 4 are opposite to each other. The sliding drive 3 is connected to the slide 5 on the corresponding side of the guide rail 4, so that the sliding drive 3 can independently drive the corresponding slide 5 to slide on the guide rail 4. That is, each axial positioning block 2 is independently associated with a sliding drive 3. Compared with the existing situation where two axial positioning blocks 2 are moved simultaneously by a sliding drive 3, the power of the sliding drive 3 can be appropriately reduced while ensuring the clamping force of each axial positioning block 2, thereby appropriately reducing the size of each sliding drive 3. In addition, the sliding drive 3 and the guide rail 4 can be arranged side by side, avoiding the axial arrangement of the sliding drive 3 on the tube seat of the eutectic stage, and avoiding the occupation of the space of the eutectic stage on the tube seat in the axial direction. This allows the sliding drive 3 to be staggered with the gas supply structure, heating structure and gas extraction structure on the eutectic stage, making more reasonable use of space. It can not only reduce the thickness of the eutectic machine and facilitate the arrangement of the eutectic machine on the processing line, but also avoid the problem of inconvenience in subsequent maintenance and repair caused by structural accumulation. The structural design is more reasonable.

[0025] Figure 2 This is a structural diagram of the radial lifting plate of a preferred embodiment of the present invention; Figure 3 This is a structural diagram of an expansion platform according to a preferred embodiment of the present invention. Figures 1 to 3As shown, the expansion platform 6 includes a central connecting portion 61 and side mounting portions 62. The central connecting portion 61 is fixedly mounted on the radial lifting plate 1, connecting the expansion platform 6 and the radial lifting plate 1 to form an integral structure. Furthermore, two side mounting portions 62 are symmetrically arranged on both sides of the central connecting portion 61, expanding the radial lifting plate 1 on both sides and providing a larger mounting surface. Two sliding actuators 3 are respectively mounted on the two side mounting portions 62, providing a larger mounting surface for the two sliding actuators 3 on both sides of the radial lifting plate 1, thus improving the stability of the sliding actuators 3 installation. It is worth noting that the central connecting portion 61 and the two side mounting portions 62 are an integrated structure, making the expansion platform 6 a single, integral structure with higher structural strength and stronger load-bearing capacity.

[0026] More specifically, such as Figure 3 As shown, the intermediate connecting part 61 of the expansion stage 6 is arranged in a U-shape, so that a recessed cavity 611 can be formed in the middle of the intermediate connecting part 61. At this time, one end of the radial lifting plate 1 is inserted into the cavity 611 of the intermediate connecting part 61, realizing the fitting installation of the intermediate connecting part 61 and the radial lifting plate 1. This can not only meet the installation requirements of the intermediate connecting part 61 on the radial lifting plate 1, but also avoid excessive increase in the length of the radial lifting plate 1, thereby reducing the volume of the eutectic stage in the axial direction of the tube seat, which fits the design concept of reducing the thickness of the eutectic machine, and the structural design is more reasonable.

[0027] More specifically, first mounting slots 11 are provided on both sides of the radial lifting plate 1, and the guide rail 4 is installed in the corresponding first mounting slots 11. The first mounting slots 11 provide embedded installation for the guide rail 4 on the radial lifting plate 1, reducing the height of the guide rail 4 protruding from the radial lifting plate 1, thereby reducing the overall height of the eutectic stage, which is conducive to the miniaturization design of the eutectic machine. At the same time, the first sliding groove also provides positioning for the installation of the guide rail 4, which facilitates the quick and accurate installation of the guide rail 4 on the radial lifting plate 1, which is conducive to assembly.

[0028] More specifically, on the radial lifting plate 1, one side of each first mounting groove 11 penetrates the corresponding side wall of the radial lifting plate 1, making the first mounting groove 11 an open groove, which facilitates the processing of the first mounting groove 11. In addition, the upper surface of the intermediate connecting part 61 protrudes from the bottom of the first mounting groove 11, so that one side of the cavity 611 of the intermediate connecting part 61 can form one side of the groove wall of the first mounting groove 11. That is, through the installation of the intermediate connecting part 61 on the radial lifting plate 1, the first mounting groove 11 can be made into a closed groove, so that the guide rail 4 can be positioned in multiple directions when installed in the first mounting groove 11, further improving the accuracy of the installation position of the guide rail 4 and the quick assembly and disassembly of the guide rail 4 on the radial lifting plate 1.

[0029] More specifically, a number of perforated holes 12 are also provided on the radial lifting plate 1. The arrangement of these perforated holes 12 reduces the weight of the radial lifting plate 1, thereby reducing the burden on the lifting drive that drives the radial lifting plate 1 to perform lifting and lowering movements. Furthermore, the perforated holes 12 are symmetrically arranged on the radial lifting plate 1, making the structure of the radial lifting plate 1 more uniform and ensuring that the subsequent lifting and lowering of the radial lifting plate 1 is more stable, resulting in a more reasonable structural design.

[0030] More specifically, each slide 5 is also equipped with a mounting base 7, which provides a connecting carrier for the installation of the axial positioning block 2 on the slide 5. The mounting base 7 includes a connecting plate 71 and a side bracket 72. The side bracket 72 is located on one side of the connecting plate 71, and the connecting plate 71 and the side bracket 72 are arranged perpendicular to each other. This allows the side bracket 72 to be arranged vertically when the connecting plate 71 is installed flat on the slide 5. The connecting plate 71 provides a larger contact area between the mounting base 7 and the slide 5, improving the stability of the mounting base 7 after installation on the slide 5. The side bracket 72 accommodates the assembly requirement that the axial positioning block 2 needs to be installed facing upwards, allowing for a larger contact area between the axial positioning block 2 and the side bracket 72, improving the stability of the axial positioning block 2 after installation, and making the clamping of the axial positioning block 2 onto the pipe seat more reliable.

[0031] More specifically, a second mounting groove 721 is vertically formed on the side bracket 72 of the mounting base 7. The upper end of the second mounting groove 721 penetrates the top surface of the side bracket 72, allowing the upper end of the second mounting groove 721 to be unrestricted. Simultaneously, the lower end of the axial positioning block 2 is inserted into the second mounting groove 721, and the upper end of the axial positioning block 2 continues upward from the portion of the second mounting groove 721 that penetrates the top surface of the side bracket 72. This provides a condition for the upper end of the axial positioning block 2 to contact and press against the pipe seat on the pipe seat positioning seat. Furthermore, the second mounting groove 721 provides positioning for the axial positioning block 2 on the side bracket 72, ensuring the accuracy of the axial positioning block 2's installation position and facilitating quick assembly and disassembly of the axial positioning block 2 on the side bracket 72.

[0032] Figure 4 This is a structural diagram of the mounting base according to a preferred embodiment of the present invention. Figure 1 and Figure 4As shown, the side bracket 72 of the mounting base 7 has several first connecting holes 722 located within the second mounting groove 721. Simultaneously, the lower end of the axial positioning block 2 has several second connecting holes 21 corresponding to the first connecting holes 722. This allows the axial positioning block 2 to be assembled by bolts passing through the second connecting holes 21 and connecting to the first connecting holes 722 when it is mounted on the side bracket 72. Furthermore, each second connecting hole 21 is a strip-shaped hole, and the length direction of the second connecting hole 21 is the same as the arrangement direction of the second mounting groove 721. This ensures that even when the axial positioning block 2 can slide within the second mounting groove 721 for fine-tuning, the second connecting holes 21 still correspond to the first connecting holes 722. This allows the axial positioning block 2 to be height-adjusted on the side bracket 72, meeting the clamping requirements of different pipe seats.

[0033] The dual-side positioning structure of the eutectic machine provided in this embodiment includes a radial lifting plate 1, an axial positioning block 2, and a sliding driver 3. Guide rails 4 with carriages 5 are respectively provided on both sides of the radial lifting plate 1 of the eutectic stage. Each carriage 5 is equipped with an axial positioning block 2. Simultaneously, a sliding driver 3 connected to the corresponding carriage 5 is provided on both sides of the radial lifting plate 1, on the opposite side of the two guide rails 4. This ensures that each axial positioning block 2 is independently associated with a sliding driver 3. While maintaining the same clamping force on the axial positioning blocks 2, compared to a sliding driver 3 that simultaneously moves two positioning blocks, the power of the sliding driver 3 can be appropriately reduced, thus reducing its size for installation on the eutectic stage. Furthermore, the sliding drivers 3 located on both sides of the radial lifting plate 1 avoid occupying the axial space of the eutectic stage on the tube seat, thereby avoiding the problem of structural stacking and achieving distributed installation of the structure. This effectively reduces the thickness of the eutectic machine, facilitates its arrangement on the production line, and also facilitates later maintenance and repair of the equipment.

[0034] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A double-sided positioning structure for a eutectic machine, comprising a radial lifting plate, an axial positioning block, and a sliding actuator, characterized in that, The radial lifting plate moves vertically up and down. Guide rails are provided on both sides of the radial lifting plate. The two guide rails are parallel and spaced apart and are arranged along the axial direction of the tube seat. A slide is slidably mounted on each guide rail. An axial positioning block is fixedly installed on each slide. A sliding driver is provided on both sides of the radial lifting plate and on the side where the two guide rails are opposite to each other. The sliding driver is connected to the slide on the corresponding side of the guide rail.

2. The double-sided positioning structure of the eutectic machine according to claim 1, characterized in that, It also includes an extension platform, which includes a central connecting part and a side mounting part. The central connecting part is fixedly mounted on the radial lifting plate, and two side mounting parts are symmetrically arranged on both sides of the central connecting part. Two sliding drives are respectively mounted on the two side mounting parts.

3. The double-sided positioning structure of the eutectic machine according to claim 2, characterized in that, The intermediate connecting part is arranged in a U-shape, and one end of the radial lifting plate is inserted into the cavity of the intermediate connecting part.

4. The double-sided positioning structure of the eutectic machine according to claim 3, characterized in that, The radial lifting plate has a first mounting groove on both sides, and the guide rail is installed in the corresponding first mounting groove.

5. The double-sided positioning structure of the eutectic machine according to claim 4, characterized in that, On the radial lifting plate, one side of each of the first mounting slots penetrates the side wall of the corresponding side of the radial lifting plate. The upper surface of the intermediate connecting part protrudes from the bottom of the first mounting slot, and one side of the cavity of the intermediate connecting part constitutes one side wall of the first mounting slot.

6. The double-sided positioning structure of the eutectic machine according to claim 1, characterized in that, The radial lifting plate has several hollow holes, and the hollow holes are symmetrically arranged on the radial lifting plate.

7. The double-sided positioning structure of the eutectic machine according to claim 1, characterized in that, Each of the carriages is provided with a mounting base, which includes a connecting plate and a side bracket. The side bracket is disposed on one side of the connecting plate, and the connecting plate and the side bracket are arranged perpendicular to each other. The connecting plate is mounted on the carriage.

8. The double-sided positioning structure of the eutectic machine according to claim 7, characterized in that, The side bracket has a second mounting groove in the vertical direction. The upper end of the second mounting groove penetrates the top surface of the side bracket. The lower end of the axial positioning block is inserted into the second mounting groove. The upper end of the axial positioning block extends upward from the part where the second mounting groove penetrates the top surface of the side bracket.

9. The double-sided positioning structure of the eutectic machine according to claim 8, characterized in that, The side bracket has a plurality of first connecting holes located in the second mounting groove. At the same time, the lower end of the axial positioning block has a plurality of second connecting holes corresponding one-to-one with the first connecting holes. Each second connecting hole is a strip-shaped hole, and the length direction of the second connecting hole is the arrangement direction of the second mounting groove.

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