A device for directional evaporation for a vacuum coating apparatus

Abstract

The utility model discloses a kind of for the evaporation device of vacuum coating equipment, including spare main body and be set in the multiple evaporation sources of independently controllable heating power and evaporation rate in coating cavity inside and the sealing door of interface in equipment main body side, multiple evaporation sources are evenly distributed respectively on the inner side wall or top wall of coating cavity inside equipment main body, one side of multiple evaporation sources is connected with swing mechanism, one side of multiple swing mechanisms is commonly provided with driving mechanism, driving mechanism swing in the control corresponding evaporation source within specified angle with swing mechanism;The utility model is by setting multiple evaporation sources corresponding to the different direction of product in the cavity of product coating, swing mechanism and driving structure can be controlled each coating material sprayed from evaporation source evenly towards product surface swing, and each evaporation source can independently control heating power and evaporation rate, to better control the uniformity of film thickness in coating process, also improve the production efficiency of product.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating machine technology, specifically to an anisotropic evaporation device for vacuum coating equipment. Background Technology

[0002] Vacuum coating technology is widely used in the fields of material surface treatment and device manufacturing. However, traditional vacuum coating technology has many limitations. While evaporation coating has the advantages of large evaporation capacity and rapid coating, its evaporation source is unidirectional. The coating process is mainly carried out under vacuum conditions, heating the evaporation coating material to sublimate it into vapor. The sublimated gas molecules directly hit the substrate and then condense on the substrate at a lower temperature. This results in uneven film thickness when coating substrates with complex shapes, affecting product performance and appearance. In addition, when coating large areas, it is difficult to ensure the consistency of the film layer across the entire area with a unidirectional evaporation source. Furthermore, to improve uniformity, the substrate position needs to be adjusted or shielding measures need to be adopted, which increases costs, extends the cycle time, and reduces product yield.

[0003] Therefore, an anisotropic evaporation device for vacuum coating equipment is proposed. Utility Model Content

[0004] The purpose of this invention is to provide an anisotropic evaporation device for vacuum coating equipment to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an anisotropic evaporation device for a vacuum coating equipment, comprising a main body of the equipment, multiple evaporation sources with independently controllable heating power and evaporation rate disposed inside the coating cavity, and a sealing door connected to one side of the main body of the equipment. The multiple evaporation sources are evenly distributed on the inner side wall or top wall of the coating cavity inside the main body of the equipment. One side of each of the multiple evaporation sources is connected to a swing mechanism, and one side of each of the multiple swing mechanisms is provided with a driving mechanism. The driving mechanism cooperates with the swing mechanism to control the corresponding evaporation source to swing within a specified angle, thereby changing the spray direction of the vaporized coating material and improving the uniformity of the film layer. The outer sides of the swing mechanism and the driving mechanism are jointly provided with a sealing cover that isolates the coating cavity from the outside.

[0006] Preferably, the main body of the device includes a vacuum tube connected to the interior of the coating cavity for evacuation, a control unit is provided on one side of the sealed door, a film thickness detector for detecting changes in film thickness is provided in the coating cavity inside the main body of the device and connected to the control unit, and a handle is installed on one side of the sealed door.

[0007] Preferably, the main body of the equipment further includes a mold platform disposed therein for placing the base product. The bottom of the mold platform is connected to a drive shaft and is rotatably mounted inside the main body of the equipment. The lower end of the drive shaft passes through the lower part of the inner wall of the main body of the equipment and is connected to a first motor.

[0008] Preferably, the oscillation mechanism includes multiple fixed shafts rotatably connected to the inner sidewall of the coating cavity, and each of the fixed shafts is equipped with an oscillation table and a driven wheel, and the multiple evaporation sources are respectively fixed on the corresponding oscillation table.

[0009] Preferably, the main body of the device has multiple swing ports that are all connected to the inside of the sealing cover, and multiple fixed shafts are rotatably installed inside the corresponding swing ports.

[0010] Preferably, the drive mechanism includes a connecting shaft fixedly connected to the upper end of a corresponding fixed shaft. The upper end of the connecting shaft passes through the main body of the equipment and extends to the outside. A worm gear is meshed with one side of the driven wheel above. The worm gear is rotatably installed inside the main body of the equipment. Both the worm gear and the upper end of the connecting shaft are equipped with driving wheels. The two driving wheels are rotatably connected together through a transmission chain. A toothed ring is meshed with one side of a set of driven wheels below and is rotatably installed inside a sealing cover. The lower and upper ends of a set of fixed shafts are interconnected through a transmission shaft.

[0011] Preferably, the drive mechanism further includes a mounting platform fixedly installed on the top of the device body, and a second motor is mounted on the top of the mounting platform. The output end of the second motor is fixed to the top of the right-side drive wheel.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model sets up multiple evaporation sources corresponding to different directions of the product in the cavity of the product coating. At the same time, with the help of the swing mechanism and the drive structure, it can simultaneously control the coating material sprayed from each evaporation source to swing evenly toward the product surface. Each evaporation source can independently control the heating power and evaporation rate, thereby better controlling the uniformity of the film thickness during the coating process and improving the production efficiency of the product.

[0014] 2. This utility model, through the setting of control unit and film thickness detector, controls the first motor to drive the mold stage to work in coordination with the drive mechanism and swing mechanism. At the same time, the control unit monitors the film thickness change in real time and feeds the data back to the evaporation source control system. The control unit automatically adjusts the parameters of each evaporation source according to the feedback data to maintain the uniformity and consistency of film thickness. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the cross-sectional connection structure of the swing mechanism and the drive mechanism of this utility model;

[0017] Figure 3 This is a schematic diagram of the rear view structure of this utility model.

[0018] In the diagram: 1. Main body of the equipment; 2. Sealed door; 3. Control unit; 4. Sealed cover; 5. Swinging table; 6. Evaporation source; 7. Mold table; 8. Drive shaft; 9. First motor; 10. Vacuum tube; 11. Swinging port; 12. Driven wheel; 13. Fixed shaft; 14. Gear ring; 15. Connecting shaft; 16. Worm gear; 17. Driving wheel; 18. Transmission chain; 19. Second motor; 20. Mounting platform; 21. Handle. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Example 1: Please refer to Figure 1-3 This utility model provides a technical solution: the main body 1 is a frame structure of the entire device, with a coating cavity inside for accommodating the substrate product and coating material. A sealing door 2 is provided on one side of the main body 1 to facilitate the operator to place the substrate product into the coating cavity. A control unit 3 is provided on one side of the sealing door 2 to control the operation of the entire device, including the heating power of the evaporation source 6, the evaporation rate, and the swing angle of the swing mechanism. A handle 21 is also installed on one side of the sealing door 2 to facilitate the operator to open and close the sealing door 2. Multiple evaporation sources 6 are provided inside the coating cavity, which are evenly distributed on the inner side wall or top wall of the coating cavity inside the main body 1. The heating power and evaporation rate of each evaporation source 6 can be independently controlled to meet the evaporation requirements of different coating materials. A swing mechanism is connected to one side of each evaporation source 6. The swing mechanism changes the spray direction of the coating material. Before coating, the inside of the device needs to be evacuated through a vacuum tube 10.

[0021] In this embodiment, the swing mechanism includes multiple fixed shafts 13 that are rotatably connected to the inner sidewall of the coating cavity. Each fixed shaft 13 has a swing table 5 and a driven wheel 12 mounted on its shaft wall. Multiple evaporation sources 6 are fixed on their respective swing tables 5. The swing of the swing tables 5 drives the evaporation sources 6 to swing within a specified angle. The main body 1 of the equipment has multiple swing ports 11 that are connected to the inside of the sealing cover 4. The multiple fixed shafts 13 are rotatably installed inside the corresponding swing ports 11 to ensure the stable operation of the swing mechanism.

[0022] In this embodiment, the drive mechanism includes a connecting shaft 15 fixedly connected to the upper end of a corresponding fixed shaft 13. The upper end of the connecting shaft 15 passes through the main body 1 of the equipment and extends to the outside. A worm gear 16 is meshed with one side of the driven wheel 12 above. The worm gear 16 is rotatably installed inside the main body 1 of the equipment. Both the upper ends of the worm gear 16 and the connecting shaft 15 are equipped with driving wheels 17. The two driving wheels 17 are rotatably connected through a transmission chain 18 to realize the transmission of power. A gear ring 14 is meshed with one side of a set of driven wheels 12 below and is rotatably installed inside the sealing cover 4. The lower and upper ends of a set of fixed shafts 13 are connected to each other through a transmission shaft to ensure the synchronous operation of the swing mechanism. The drive mechanism also includes a mounting platform 20 fixedly installed on the top of the main body 1 of the equipment. A second motor 19 is installed on the top of the mounting platform 20. The output end of the second motor 19 is fixed to the top of the right driving wheel 17. The rotation of the second motor 19 drives the driving wheel 17 to rotate, thereby driving the swing mechanism to swing.

[0023] In this embodiment, the outer sides of the swing mechanism and the drive mechanism are jointly provided with a sealing cover 4 to isolate the coating cavity from the outside, so as to prevent the coating material from leaking to the outside during the evaporation process, while maintaining the vacuum environment inside the coating cavity.

[0024] In this embodiment, the main body 1 of the equipment is also provided with a mold platform 7 for placing the substrate product. The bottom of the mold platform 7 is connected to a drive shaft 8 and is rotatably installed inside the main body 1 of the equipment. The lower end of the drive shaft 8 passes through the lower part of the inner wall of the main body 1 of the equipment and is connected to a first motor 9. By rotating the first motor 9, the mold platform 7 is driven to rotate, so that the substrate product can receive the coating material evenly during the coating process, thereby further improving the uniformity of the coating layer.

[0025] A film thickness detector is installed in the coating cavity to detect changes in film thickness. It is connected to the control unit 3. The film thickness detector monitors the thickness of the coating layer in real time and feeds the data back to the control unit 3. The control unit 3 adjusts the heating power, evaporation rate and swing angle of the oscillation mechanism of the evaporation source 6 according to the film thickness data to ensure that the thickness of the coating layer is uniform.

[0026] The working principle is as follows: During the vacuum coating process, the substrate product is first placed on the mold table 7 through the sealing door 2, and the sealing door 2 is closed. Then, the vacuum system is turned on, and the air in the coating cavity is extracted through the vacuum tube 10 to form a high vacuum environment to ensure the purity and uniformity of the evaporating material during the coating process. The control unit 3 starts the evaporation source 6 and independently controls the heating power and evaporation rate to vaporize the coating material in the evaporation source. At this time, the drive mechanism (including the second motor 19, the driving wheel 17, the driven wheel 12, and the worm gear 16, etc.) starts to work, driving the swing table in the swing mechanism. 5. The evaporation source 6 is fixed on the swing table 5 within a specified angle. As the swing table moves, the spray direction of the vaporized coating material changes continuously, thereby covering a wider area. At the same time, the mold table 7 rotates under the drive of the first motor 9, so that the substrate product receives the coating material from different directions in all directions. The film thickness detector monitors the thickness of the coating layer in real time and feeds the data back to the control unit 3. The control unit 3 dynamically adjusts the heating power of the evaporation source, the evaporation rate and the swing angle of the swing mechanism according to the film thickness data to ensure that the thickness of the coating layer is uniform throughout the entire substrate surface.

[0027] Finally, when the film thickness reaches the preset value, the system automatically shuts off the evaporation source and drive mechanism, stops vacuuming, and waits for the coating cavity to return to atmospheric pressure before removing the coated substrate product through the sealed door 2. This method, which combines the oscillation of the evaporation source with the rotation of the substrate, effectively solves the problem of uneven film layer when coating complex-shaped substrates and large areas, and significantly improves the quality and efficiency of vacuum coating.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An anisotropic evaporation device for a vacuum coating equipment, comprising a main body (1) and multiple evaporation sources (6) disposed inside the coating cavity, each with independently controllable heating power and evaporation rate, and a sealing door (2) connected to one side of the main body (1), characterized in that: Multiple evaporation sources (6) are evenly distributed on the inner sidewall or top wall of the coating cavity inside the main body (1) of the equipment. Each of the multiple evaporation sources (6) is connected to a swing mechanism on one side. Each of the multiple swing mechanisms is provided with a driving mechanism on one side. The driving mechanism works with the swing mechanism to control the corresponding evaporation source (6) to swing within a specified angle, change the spray direction of the vaporized coating material, and improve the uniformity of the film layer. The swing mechanism and the driving mechanism are provided with a sealing cover (4) that isolates the coating cavity from the outside.

2. The anisotropic evaporation device for vacuum coating equipment according to claim 1, characterized in that: The main body of the device (1) includes a vacuum tube (10) connected to the inside of the coating cavity for evacuation. A control unit (3) is provided on one side of the sealing door (2). A film thickness detector for detecting changes in film thickness is provided in the coating cavity inside the main body of the device (1) and is connected to the control unit (3). A handle (21) is installed on one side of the sealing door (2).

3. The anisotropic evaporation device for vacuum coating equipment according to claim 2, characterized in that: The main body of the equipment (1) also includes a mold platform (7) set inside it for placing the base product. The bottom of the mold platform (7) is connected to a drive shaft (8) and is rotatably installed inside the main body of the equipment (1). The lower end of the drive shaft (8) passes through the lower part of the inner wall of the main body of the equipment (1) and is connected to a first motor (9).

4. The counter-current evaporation apparatus for vacuum coating equipment according to claim 1, characterized in that: The swing mechanism includes multiple fixed shafts (13) that are rotatably connected to the inner sidewall of the coating cavity. Each of the fixed shafts (13) has a swing table (5) and a driven wheel (12) mounted on its shaft wall. The multiple evaporation sources (6) are respectively fixed on the corresponding swing table (5).

5. The counter-current evaporation apparatus for vacuum coating equipment according to claim 4, characterized in that: The main body (1) of the equipment has multiple swing ports (11) that are connected to the inside of the sealing cover (4), and multiple fixed shafts (13) are respectively rotatably installed inside the corresponding swing ports (11).

6. The anisotropic evaporation apparatus for vacuum coating equipment according to claim 4, characterized in that: The drive mechanism includes a connecting shaft (15) fixedly connected to the upper end of the corresponding fixed shaft (13). The upper end of the connecting shaft (15) passes through the main body of the equipment (1) and extends to the outside. A worm (16) is meshed with one side of the driven wheel (12) above. The worm (16) is rotatably installed inside the main body of the equipment (1). Both the upper ends of the worm (16) and the connecting shaft (15) are equipped with driving wheels (17). The two driving wheels (17) are rotatably connected through a transmission chain (18). A toothed ring (14) is meshed with one side of the corresponding set of driven wheels (12) below and is rotatably installed inside the sealing cover (4). The lower and upper ends of the corresponding set of fixed shafts (13) are connected to each other through a transmission shaft.

7. The counter-current evaporation apparatus for vacuum coating equipment according to claim 6, characterized in that: The drive mechanism also includes a mounting platform (20) fixedly installed on the top of the equipment body (1). A second motor (19) is installed on the top of the mounting platform (20), and the output end of the second motor (19) is fixed to the top of the right drive wheel (17).

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