Ion plating vacuum chamber baffle plate

Abstract

The utility model discloses a kind of ion plating vacuum cavity baffle, belong to baffle technical field, including guiding main body board, its technical solution key point is through the mutual cooperation between the adjustment assembly each part, can be adjusted guiding direction by the multiple guiding strips of rotation, when the process parameter such as gas flow, pressure, temperature of ion plating changes, adjustable guiding angle can timely adapt these changes, optimize airflow direction and distribution, guarantee the stability of plating process, help to realize high quality plating under different process conditions, improve the adaptability of equipment to multiple plating process, through the mutual cooperation between the filter assembly each part, dust, metal particles and other impurities in the gas entering vacuum cavity can be effectively filtered out, prevent these impurities mix in plating material and adhere to workpiece surface, to reduce the defect such as flaw, pitting of plating surface.

Description

Technical Field

[0001] This utility model relates to the field of flow guide plate technology, and more specifically, to a flow guide plate for an ion-plated vacuum cavity. Background Technology

[0002] In ion plating processes, vacuum chamber guide plates play a crucial role, directly affecting the quality and efficiency of the coating. Traditional ion plating vacuum chamber guide plates often have many defects. On the one hand, their guiding angle is usually fixed, making it difficult to adapt to the diverse requirements of different coating processes for airflow direction and distribution.

[0003] However, traditional guide vanes have a fixed guiding angle, which cannot flexibly change the airflow direction and distribution according to the needs of different ion plating processes. When faced with diverse workpiece shapes, sizes, and coating material characteristics, they cannot accurately guide the airflow, easily causing uneven coating thickness. For example, for workpieces with complex curved surfaces, a fixed-angle guide vane cannot ensure that the airflow evenly covers all parts, resulting in some areas being coated too thickly, while some recessed or hidden areas are under-coated, seriously affecting product quality. Most traditional guide vanes are not equipped with dedicated filtration components, and cannot filter impurities from the gas entering the vacuum chamber. Dust, metal particles, and other impurities in the gas will mix into the coating material during the coating process, adhering to the workpiece surface, causing defects such as blemishes and pitting, reducing the product's aesthetics. Traditional guide vanes are usually a single, integral structure, without modular adjustment and filtration components like newer guide vanes, making it difficult to make targeted improvements and optimizations. When it is necessary to improve the coating process effect or meet new process requirements, the entire guide vane must be replaced, which is costly and inconvenient.

[0004] Therefore, an ion-plated vacuum chamber guide plate is needed. Summary of the Invention

[0005] This utility model addresses the technical problems existing in the prior art by providing an ion-plated vacuum cavity guide plate.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: an ion plating vacuum cavity guide plate includes a guide body plate, an adjustment component is provided at the lower end of the guide body plate, and a filter component is provided at the upper end of the guide body plate; the adjustment component includes a circular guide ring fixedly connected inside the guide body plate, and a drive housing is provided at the lower end of the circular guide ring, and the drive housing is fixedly connected to the lower end of the circular guide ring through multiple connecting rods.

[0007] Furthermore, a rotating shaft is rotatably connected inside the drive housing, a worm gear is fixedly connected to the middle of the rotating shaft, a servo motor is fixedly connected inside the drive housing, and a worm is fixedly connected to the output end of the servo motor, with the worm meshing with the worm gear.

[0008] Furthermore, a rotating plate is fixedly connected to the upper end of the rotating shaft, and multiple guide strips are fixedly connected to the upper end of the rotating plate. The rotating plate is rotatably connected to the inside of the circular guide ring.

[0009] Furthermore, the filter assembly includes a mounting housing, which is fixedly connected to the upper end of the flow guide body plate by bolts. A large filter plate and a small filter plate are fixedly connected inside the mounting housing, and the large filter plate and the small filter plate are arranged from top to bottom.

[0010] Furthermore, the flow guide plate has a circular hole in the middle for mounting a circular flow guide ring, and multiple ventilation holes in the middle of the flow guide plate. One end of the flow guide plate has two pairs of symmetrical grooves, and the other end of the flow guide plate is fixedly connected to two pairs of symmetrical protrusions.

[0011] Furthermore, the circular guide ring has multiple circular holes in its center.

[0012] The beneficial effects of this utility model are:

[0013] (1) This solution adjusts the direction of flow by adjusting the cooperation between the various parts of the component and the multiple rotating guide strips. When the process parameters of ion plating, such as gas flow rate, pressure, and temperature, change, the adjustable guide angle can adapt to these changes in time, optimize the airflow direction and distribution, ensure the stability of the plating process, help achieve high-quality plating under different process conditions, and improve the adaptability of the equipment to various plating processes.

[0014] (2) This solution can effectively filter out impurities such as dust and metal particles in the gas entering the vacuum chamber through the cooperation between the various parts of the filter assembly, preventing these impurities from mixing into the coating material and adhering to the workpiece surface, thereby reducing defects such as blemishes and pits on the coating surface, improving the surface quality and smoothness of the coating, enhancing the appearance quality of the product, reducing the deposition and accumulation of impurities inside the vacuum chamber and on related equipment parts, reducing the frequency of equipment cleaning and maintenance, reducing equipment failures and damage caused by impurity accumulation, thereby reducing equipment maintenance costs and downtime, and improving equipment operating efficiency and service life. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure in this embodiment;

[0016] Figure 2 This is a schematic diagram of the overall disassembled structure in this embodiment;

[0017] Figure 3 This is a schematic diagram of the cross-sectional structure of the circular guide ring in this embodiment;

[0018] Figure 4 This is a schematic cross-sectional view of the drive housing in this embodiment;

[0019] Figure 5 This is a schematic diagram of the main structure of the circular guide ring in this embodiment;

[0020] Figure 6 This is a schematic diagram of the breakdown structure of the filtering component in this embodiment.

[0021] The attached diagram lists the components represented by each number as follows:

[0022] 1. Flow guide main plate, 2. Adjustment component, 3. Filter component, 201. Circular flow guide ring, 202. Drive housing, 203. Connecting rod, 204. Rotating shaft, 205. Worm gear, 206. Servo motor, 207. Worm, 208. Rotating plate, 209. Flow guide strip, 301. Mounting housing, 302. Large filter plate, 303. Small filter plate. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0025] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0026] Example 1

[0027] An ion plating vacuum chamber guide plate includes a guide plate 1, an adjustment component 2 at the lower end of the guide plate 1, and a filter component 3 at the upper end of the guide plate 1.

[0028] The adjustment component 2 includes a circular guide ring 201 fixedly connected inside the guide body plate 1. The lower end of the circular guide ring 201 is provided with a drive housing 202, and the drive housing 202 is fixedly connected to the lower end of the circular guide ring 201 through multiple connecting rods 203.

[0029] Example 2

[0030] A rotating shaft 204 is rotatably connected inside the drive housing 202. A worm gear 205 is fixedly connected to the middle of the rotating shaft 204. A servo motor 206 is fixedly connected inside the drive housing 202. A worm 207 is fixedly connected to the output end of the servo motor 206. The worm 207 is meshed with the worm gear 205.

[0031] A rotating plate 208 is fixedly connected to the upper end of the rotating shaft 204, and multiple guide strips 209 are fixedly connected to the upper end of the rotating plate 208. The rotating plate 208 is rotatably connected to the inside of the circular guide ring 201.

[0032] The filter assembly 3 includes a mounting housing 301, which is fixedly connected to the upper end of the flow guide plate 1 by bolts. A large filter plate 302 and a small filter plate 303 are fixedly connected inside the mounting housing 301, and the large filter plate 302 and the small filter plate 303 are arranged from top to bottom.

[0033] The flow guide plate 1 has a circular hole in the middle for mounting the circular flow guide ring 201. The flow guide plate 1 also has multiple ventilation holes in the middle. One end of the flow guide plate 1 has two pairs of symmetrical grooves, and the other end of the flow guide plate 1 is fixedly connected to two pairs of symmetrical protrusions.

[0034] The circular guide ring 201 has multiple circular holes in its center.

[0035] Please see Figures 3-5 , Figures 3-5 This is a schematic diagram of an embodiment of the adjustment component 2 provided in this utility model. (See attached diagram.) Figures 3-5 As shown, this utility model embodiment provides an ion plating vacuum chamber guide plate, including a guide plate 1, an adjustment component 2 at the lower end of the guide plate 1, and a filter component 3 at the upper end of the guide plate 1.

[0036] The adjustment component 2 includes a circular guide ring 201 fixedly connected inside the guide body plate 1. The lower end of the circular guide ring 201 is provided with a drive housing 202. The drive housing 202 is fixedly connected to the lower end of the circular guide ring 201 through multiple connecting rods 203. A rotating shaft 204 is rotatably connected inside the drive housing 202. A worm gear 205 is fixedly connected to the middle of the rotating shaft 204. A servo motor 206 is fixedly connected inside the drive housing 202. A worm 207 is fixedly connected to the output end of the servo motor 206. The worm 207 meshes with the worm gear 205. A rotating plate 208 is fixedly connected to the upper end of the rotating shaft 204. Multiple guide strips 209 are fixedly connected to the upper end of the rotating plate 208. The rotating plate 208 is rotatably connected to the interior of the circular guide ring 201.

[0037] This solution utilizes a rotating plate 208 at the upper end of the rotating shaft 204 and multiple guide strips 209 fixed thereon to rotate synchronously with the rotating shaft. This allows the angle of the guide strips 209 to be flexibly changed according to changes in ion plating process parameters such as gas flow rate, pressure, temperature fluctuations, or different workpiece shapes. This enables precise guidance of airflow direction, optimization of airflow distribution, ensuring the stability of the plating process, improving the equipment's adaptability to various plating processes, and achieving high-quality plating under different conditions.

[0038] Please see Figure 6 , Figure 6 This is a schematic diagram of an embodiment of the filter component 3 provided in this utility model. (See attached diagram.) Figure 6 As shown, this embodiment provides a filter assembly 3 including a mounting housing 301. The mounting housing 301 is fixedly connected to the upper end of the flow guide body plate 1 by bolts. A large filter plate 302 and a small filter plate 303 are fixedly connected inside the mounting housing 301. The large filter plate 302 and the small filter plate 303 are arranged from top to bottom.

[0039] This solution utilizes a large filter plate 302 and a small filter plate 303 arranged from top to bottom internally, working in tandem. The large filter plate 302, with its relatively large pore size, first intercepts larger impurity particles in the gas for coarse filtration, preventing large particles from clogging or damaging subsequent fine filtration components. Then, the gas that has undergone preliminary filtration passes through the small filter plate 303, which, with its smaller pore size, filters out tiny impurities, ensuring the purity of the gas entering the subsequent areas of the vacuum chamber. This effectively prevents impurities from mixing into the coating material and adhering to the workpiece surface, reducing coating defects, pitting, and other appearance defects, improving the surface quality and smoothness of the coating, while also reducing the frequency of cleaning and maintenance and the risk of malfunctions caused by impurity accumulation, reducing downtime, and extending the operating efficiency and service life of the equipment.

[0040] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0041] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A flow guide plate for an ion-plating vacuum cavity, comprising a flow guide body plate (1), characterized in that: The lower end of the flow guide plate (1) is provided with an adjustment component (2), and the upper end of the flow guide plate (1) is provided with a filter component (3). The adjustment component (2) includes a circular guide ring (201) fixedly connected inside the guide body plate (1). The lower end of the circular guide ring (201) is provided with a drive housing (202). The drive housing (202) is fixedly connected to the lower end of the circular guide ring (201) through multiple connecting rods (203).

2. The flow guide plate for an ion-plating vacuum cavity according to claim 1, characterized in that: The drive housing (202) is rotatably connected to a rotating shaft (204), and a worm gear (205) is fixedly connected to the middle of the rotating shaft (204). A servo motor (206) is fixedly connected to the inside of the drive housing (202), and a worm (207) is fixedly connected to the output end of the servo motor (206). The worm (207) meshes with the worm gear (205).

3. The flow guide plate for an ion-plating vacuum cavity according to claim 2, characterized in that: A rotating plate (208) is fixedly connected to the upper end of the rotating shaft (204), and a plurality of guide strips (209) are fixedly connected to the upper end of the rotating plate (208). The rotating plate (208) is rotatably connected to the inside of the circular guide ring (201).

4. The flow guide plate for an ion-plating vacuum cavity according to claim 1, characterized in that: The filter assembly (3) includes a mounting housing (301), which is fixedly connected to the upper end of the flow guide plate (1) by bolts. A large filter plate (302) and a small filter plate (303) are fixedly connected inside the mounting housing (301), and the large filter plate (302) and the small filter plate (303) are arranged from top to bottom.

5. The flow guide plate for an ion-plating vacuum cavity according to claim 1, characterized in that: The flow guide plate (1) has a circular hole in the middle for mounting a circular flow guide ring (201), and a plurality of ventilation holes in the middle. One end of the flow guide plate (1) has two pairs of symmetrical grooves, and the other end of the flow guide plate (1) is fixedly connected to two pairs of symmetrical protrusions.

6. The flow guide plate for an ion-plating vacuum cavity according to claim 1, characterized in that: The circular guide ring (201) has multiple circular holes in its center.

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