Sputtering target processing fixing mechanism

Abstract

The utility model relates to target material processing technical field, and disclose a kind of sputtering target material processing fixing mechanism, including workbench, the top middle end of workbench is equipped with placing groove, the inner wall bottom of workbench is placed with sputtering target material body at placing groove, the left side wall surface middle end of workbench is provided with first movable fixed clamping mechanism, the right side wall surface middle end of workbench is provided with second movable fixed clamping mechanism, and the structure of second movable fixed clamping mechanism is identical with first movable fixed clamping mechanism, the top front end of workbench is provided with first auxiliary clamping mechanism, by the setting of first movable fixed clamping mechanism and second movable fixed clamping mechanism, electric push rod can promote installation frame to move, servo motor can drive screw rod to rotate, screw rod can drive first clamping block to move in installation frame, to facilitate the position adjustment of first clamping block, without repeatedly manual adjustment the position of first clamping block, improve the efficiency and precision of sputtering target material processing.

Description

Technical Field

[0001] This utility model relates to the field of target processing technology, and in particular to a sputtering target processing fixing mechanism. Background Technology

[0002] With the advent of information technology, chips have become an indispensable part of life. In chip manufacturing, the core consumable for the Physical Vapor Deposition (PVD) process is the "ultra-high purity sputtering target." Sputtering targets are manufactured using traditional CNC lathes and machining centers. The target is processed after being clamped by a pressure plate, and the clamping force and position of the pressure plate are typically adjusted manually.

[0003] Because sputtering targets require extremely high precision and their structure runs the entire plane, the position of the pressure plate needs to be repeatedly adjusted manually during machining to avoid interference between the tool and the pressure plate. This results in low machining efficiency and the product may move during the adjustment process, leading to abnormal precision.

[0004] Therefore, we propose a sputtering target processing fixing mechanism. Utility Model Content

[0005] The present invention aims to solve the technical problems existing in the prior art and provide a sputtering target processing and fixing mechanism.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a sputtering target processing and fixing mechanism, comprising a worktable, wherein a placement groove is provided at the top center of the worktable, and a sputtering target body is placed at the placement groove on the bottom of the inner wall of the worktable; a first movable fixing clamping mechanism is provided at the center of the left side wall of the worktable, and a second movable fixing clamping mechanism is provided at the center of the right side wall of the worktable, the structure of the second movable fixing clamping mechanism being the same as that of the first movable fixing clamping mechanism; a first auxiliary clamping mechanism is provided at the top front end of the worktable, and a second auxiliary clamping mechanism is provided at the top rear end of the worktable, the structure of the second auxiliary clamping mechanism being the same as that of the first auxiliary clamping mechanism; the first movable fixing clamping mechanism includes a mounting base, and the right side wall of the mounting base is fixedly connected to the center of the left side wall of the worktable; the first auxiliary clamping mechanism includes a mounting block, and the bottom of the mounting block is fixedly connected to the top front end of the worktable.

[0007] Preferably, a limiting groove is provided at the bottom of the inner wall of the mounting base, and an electric push rod is fixedly installed on the left side of the inner wall of the mounting base, with a mounting frame fixedly installed at the output end of the electric push rod.

[0008] Preferably, a threaded rod is threaded to the middle of the inner wall of the mounting block, and a second clamping block is movably mounted on the back of the threaded rod.

[0009] Preferably, a limiting slider is fixedly installed at the bottom of the mounting frame, and the bottom of the mounting frame is movably connected to the inner wall of the mounting base at the limiting groove through the limiting slider.

[0010] Preferably, a servo motor is fixedly mounted on the top of the mounting frame, and the output end of the servo motor moves through the top of the inner wall of the mounting frame.

[0011] Preferably, a lead screw is fixedly installed at the output end of the servo motor, and the bottom of the lead screw is movably connected to the bottom of the inner wall of the mounting frame.

[0012] Preferably, the outer wall of the lead screw is threadedly connected to a first clamping block, and the left side of the outer wall of the first clamping block is movably connected to the inner wall of the mounting frame, and the bottom right side of the first clamping block is movably in contact with the top of the sputtering target body.

[0013] Preferably, a limiting guide rod is fixedly installed on the front of the second clamping block, and the front of the limiting guide rod moves through the front of the mounting block.

[0014] Preferably, a rubber pad is fixedly installed on the back of the second clamping block, and the back of the rubber pad is in active contact with the front of the sputtering target body.

[0015] This utility model provides a sputtering target processing and fixing mechanism. It has the following beneficial effects:

[0016] 1. The sputtering target processing fixing mechanism, through the setting of a first movable fixing clamping mechanism and a second movable fixing clamping mechanism, allows an electric push rod to push the mounting frame to move, a servo motor to drive the lead screw to rotate, and the lead screw to drive the first clamping block to move within the mounting frame, thereby facilitating the position adjustment of the first clamping block without the need for repeated manual adjustment of the position of the first clamping block, thus improving the efficiency and accuracy of sputtering target processing.

[0017] 2. This sputtering target processing and fixing mechanism includes a first auxiliary clamping mechanism and a second auxiliary clamping mechanism. By manually rotating the threaded rod, the second clamping block can be moved within the mounting block towards the sputtering target body. The second clamping block clamps and fixes the front of the sputtering target body through a rubber pad, ensuring that the sputtering target body will not move when the position of the first clamping block is adjusted by the first movable fixing clamping mechanism and the second movable fixing clamping mechanism, thereby further improving the processing accuracy.

[0018] 3. The sputtering target processing and fixing mechanism, through the setting of the first auxiliary clamping mechanism and the second auxiliary clamping mechanism, can also make the sputtering target body fully fixed during the processing, avoiding the precision abnormality caused by vibration or movement during the processing, and improving the processing quality of the product. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall front structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the right wall structure of the first movable fixed clamping mechanism of this utility model;

[0021] Figure 3 This is a front view of the first auxiliary clamping mechanism of this utility model.

[0022] Legend: 10. Workbench; 11. Placement slot; 12. Sputtering target body; 13. First movable fixed clamping mechanism; 14. Second movable fixed clamping mechanism; 15. First auxiliary clamping mechanism; 16. Second auxiliary clamping mechanism; 17. Mounting base; 18. Limiting slide; 19. Electric push rod; 20. Mounting frame; 21. Servo motor; 22. Lead screw; 23. First clamping block; 24. Mounting block; 25. Threaded rod; 26. Second clamping block; 27. Limiting guide rod; 28. Rubber pad. Detailed Implementation

[0023] To more clearly illustrate the embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0024] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0025] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0026] In the description of the embodiments of this utility model, it should be noted that the terms "center," "upper," "lower," "inner," "outer," and "side," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0027] In the description of the embodiments of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Example 1: A sputtering target processing and fixing mechanism, such as Figure 1As shown, the workbench 10 includes a placement slot 11 at the top center of the workbench 10. A sputtering target body 12 is placed at the placement slot 11 on the bottom inner wall of the workbench 10. A first movable fixing clamping mechanism 13 is provided at the center of the left side wall of the workbench 10, and a second movable fixing clamping mechanism 14 is provided at the center of the right side wall of the workbench 10. The structure of the second movable fixing clamping mechanism 14 is the same as that of the first movable fixing clamping mechanism 13. A first auxiliary clamping mechanism 15 is provided at the front end of the top of the workbench 10. A second auxiliary clamping mechanism 16 is provided at the rear end, and the structure of the second auxiliary clamping mechanism 16 is the same as that of the first auxiliary clamping mechanism 15. With the setting of the first movable fixed clamping mechanism 13 and the second movable fixed clamping mechanism 14, the electric push rod 19 can push the mounting frame 20 to move, the servo motor 21 can drive the lead screw 22 to rotate, and the lead screw 22 can drive the first clamping block 23 to move within the mounting frame 20, thereby facilitating the position adjustment of the first clamping block 23 without having to manually adjust the position of the first clamping block 23 repeatedly, thus improving the efficiency and accuracy of sputtering target processing.

[0030] Example 2: Based on Example 1, as follows Figure 2 As shown, the first movable fixed clamping mechanism 13 includes a mounting base 17, and the right side wall of the mounting base 17 is fixedly connected to the middle of the left side wall of the worktable 10. A limiting groove 18 is formed at the bottom of the inner wall of the mounting base 17. An electric push rod 19 is fixedly installed on the left side of the inner wall of the mounting base 17. A mounting frame 20 is fixedly installed at the output end of the electric push rod 19. A limiting slider is fixedly installed at the bottom of the mounting frame 20, and the bottom of the mounting frame 20 is movably connected to the inner wall of the mounting base 17 at the limiting groove 18 through the limiting slider. A servo motor 21 is fixedly installed at the top of the mounting frame 20, and the output end of the servo motor 21 movably passes through the top of the inner wall of the mounting frame 20. A lead screw 22 is fixedly installed at the output end of the servo motor 21, and the bottom of the lead screw 22 is connected to the mounting frame 20. The inner wall bottom is movably connected, and the outer wall of the lead screw 22 is threadedly connected to the first clamping block 23. The left side of the outer wall of the first clamping block 23 is movably connected to the inner wall of the mounting frame 20, and the bottom right side of the first clamping block 23 is movably in contact with the top of the sputtering target body 12. By setting the first auxiliary clamping mechanism 15 and the second auxiliary clamping mechanism 16, the second clamping block 26 can be moved in the direction of the sputtering target body 12 within the mounting block 24 by manually rotating the threaded rod 25. The second clamping block 26 clamps and fixes the front of the sputtering target body 12 through the rubber pad 28, ensuring that the sputtering target body 12 will not move when the position of the first clamping block 23 is adjusted by the first movable fixed clamping mechanism 13 and the second movable fixed clamping mechanism 14, thereby further improving the processing accuracy.

[0031] Example 3: Based on Examples 1 and 2, as follows... Figure 3As shown, the first auxiliary clamping mechanism 15 includes a mounting block 24, the bottom of which is fixedly connected to the top front end of the worktable 10. A threaded rod 25 is threadedly connected to the middle of the inner wall of the mounting block 24. A second clamping block 26 is movably mounted on the back of the threaded rod 25. A limiting guide rod 27 is fixedly mounted on the front of the second clamping block 26, and the front of the limiting guide rod 27 moves through the front of the mounting block 24. A rubber pad 28 is fixedly mounted on the back of the second clamping block 26, and the back of the rubber pad 28 makes movable contact with the front of the sputtering target body 12. Through the setting of the first auxiliary clamping mechanism 15 and the second auxiliary clamping mechanism 16, the sputtering target body 12 can be fully fixed during the processing, avoiding the abnormality of precision caused by vibration or movement during the processing, and improving the processing quality of the product.

[0032] The working principle of this utility model:

[0033] When adjusting the position of the first clamping block 23 to avoid interference between the tool and the pressure plate during use, first manually rotate the threaded rod 25 on the first auxiliary clamping mechanism 15 and the second auxiliary clamping mechanism 16. The threaded rod 25 drives the second clamping block 26 to move towards the sputtering target body 12 within the mounting block 24. The second clamping block 26 clamps and fixes the front of the sputtering target body 12 through the rubber pad 28. The first auxiliary clamping mechanism 15 and the second auxiliary clamping mechanism 16 clamp and fix the front and back of the sputtering target body 12. Then, activate the servo motors on the first movable fixed clamping mechanism 13 and the second movable fixed clamping mechanism 14. The servo motor 21 reverses, causing the lead screw 22 to reverse. The lead screw 22 then moves the first clamping block 23 upward within the mounting frame 20, releasing the sputtering target body 12. Next, the retraction switch of the electric push rod 19 on the first movable fixed clamping mechanism 13 and the second movable fixed clamping mechanism 14 is activated. The electric push rod 19 moves the first clamping block 23 away from directly above the sputtering target body 12 through the mounting frame 20, avoiding interference between the machining tool and the first clamping block 23. This eliminates the need for repeated manual adjustments to the position of the first clamping block 23, which could cause the sputtering target body 12 to move, thus improving the efficiency and accuracy of sputtering target processing.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A sputtering target processing and fixing mechanism, comprising a worktable (10), characterized in that: The workbench (10) has a placement slot (11) at the top center. A sputtering target body (12) is placed at the bottom of the inner wall of the workbench (10) in the placement slot (11). A first movable fixing clamping mechanism (13) is provided at the middle of the left side wall of the workbench (10), and a second movable fixing clamping mechanism (14) is provided at the middle of the right side wall of the workbench (10). The structure of the second movable fixing clamping mechanism (14) is the same as that of the first movable fixing clamping mechanism (13). A first [missing information - likely a design feature] is provided at the top front end of the workbench (10). The auxiliary clamping mechanism (15) is provided at the top rear end of the worktable (10) and the structure of the second auxiliary clamping mechanism (16) is the same as that of the first auxiliary clamping mechanism (15). The first movable fixed clamping mechanism (13) includes a mounting base (17) and the right side wall of the mounting base (17) is fixedly connected to the middle of the left side wall of the worktable (10). The first auxiliary clamping mechanism (15) includes a mounting block (24) and the bottom of the mounting block (24) is fixedly connected to the top front end of the worktable (10).

2. The sputtering target processing and fixing mechanism according to claim 1, characterized in that: The bottom of the inner wall of the mounting base (17) is provided with a limiting groove (18), and an electric push rod (19) is fixedly installed on the left side of the inner wall of the mounting base (17). An installation frame (20) is fixedly installed on the output end of the electric push rod (19).

3. The sputtering target processing and fixing mechanism according to claim 1, characterized in that: The inner wall of the mounting block (24) is threaded with a threaded rod (25) at the middle, and a second clamping block (26) is movably mounted on the back of the threaded rod (25).

4. The sputtering target processing and fixing mechanism according to claim 2, characterized in that: The bottom of the mounting frame (20) is fixedly installed with a limiting slider, and the bottom of the mounting frame (20) is movably connected to the inner wall of the mounting base (17) at the limiting groove (18) through the limiting slider.

5. The sputtering target processing and fixing mechanism according to claim 2, characterized in that: A servo motor (21) is fixedly installed on the top of the mounting frame (20), and the output end of the servo motor (21) moves through the top of the inner wall of the mounting frame (20).

6. The sputtering target processing and fixing mechanism according to claim 5, characterized in that: The output end of the servo motor (21) is fixedly mounted with a lead screw (22), and the bottom of the lead screw (22) is movably connected to the bottom of the inner wall of the mounting frame (20).

7. The sputtering target processing and fixing mechanism according to claim 6, characterized in that: The outer wall of the lead screw (22) is threadedly connected to a first clamping block (23), and the left side of the outer wall of the first clamping block (23) is movably connected to the inner wall of the mounting frame (20), and the bottom right side of the first clamping block (23) is in movable contact with the top of the sputtering target body (12).

8. The sputtering target processing and fixing mechanism according to claim 3, characterized in that: The front of the second clamping block (26) is fixedly installed with a limiting guide rod (27), and the front of the limiting guide rod (27) moves through the front of the mounting block (24).

9. The sputtering target processing and fixing mechanism according to claim 3, characterized in that: A rubber pad (28) is fixedly installed on the back of the second clamping block (26), and the back of the rubber pad (28) is in active contact with the front of the sputtering target body (12).

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