A feed system for mixing a plurality of gaseous feed materials and a reduction furnace

Abstract

The utility model provides a kind of feed system of mixed multiple gas raw materials and reduction furnace, and the purpose is to solve the technical problem that raw materials are not fully mixed in existing equipment, leading to inconsistent silicon rod growth rate.The feed system includes: multiple gas inlet pipes;Curved pipe, one end is communicated with the one end of all gas inlet pipes, and multiple blades are arranged inside curved pipe;Gas distribution pipe, which is annular structure, is communicated with the other end of curved pipe;Multiple exhaust pipes are arranged on gas distribution pipe, and all exhaust pipes are arranged in inclined manner, and exhaust pipe and curved pipe are located on both sides of gas distribution pipe respectively.The reduction furnace is installed with the feed system.The gas inlet pipe is communicated with curved pipe, and the flow rule of raw material gas is disturbed by multiple blades arranged in curved pipe, and the mixing degree is improved.The raw material gas is evenly distributed in the reduction furnace by setting gas distribution pipe and multiple exhaust pipes, so that sufficient mixing is realized, and the problem that product quality uniformity is affected by inconsistent silicon rod growth rate is avoided.

Description

Technical Field

[0001] This utility model relates to the field of polycrystalline silicon production technology, specifically to a feeding system and reduction furnace for mixing multiple gaseous raw materials. Background Technology

[0002] In the polysilicon production process, the reduction furnace is the core equipment for realizing the reduction reaction between trichlorosilane and hydrogen to produce high-purity silicon. The performance of the feeding device directly affects product quality and production efficiency. With the photovoltaic and semiconductor industries' ever-increasing demands for polysilicon purity and yield, the limitations of traditional feeding devices are becoming increasingly apparent.

[0003] Existing equipment often uses a simple pipeline connection method to introduce trichlorosilane and hydrogen. The two raw materials are mixed by natural diffusion before entering the reduction furnace, resulting in uneven mixing and significant local concentration differences. This mixing defect prevents the reduction reaction from proceeding fully.

[0004] In large-scale polysilicon production, insufficient mixing of raw materials can lead to inconsistent growth rates of silicon rods, affecting the uniformity of product quality. Utility Model Content

[0005] To address the technical problem of inconsistent silicon rod growth rates caused by insufficient mixing of raw materials in existing equipment, this invention provides a feeding system that mixes multiple gaseous raw materials. By using multiple blades inside a curved tube, and then through a gas distribution pipe and multiple exhaust pipes set on the gas distribution pipe, the various raw material gases are fully mixed, thereby avoiding the problem of inconsistent silicon rod growth rates and affecting product quality uniformity.

[0006] The technical solution of this utility model is:

[0007] A feeding system for mixing multiple gaseous feedstocks, comprising:

[0008] Multiple air intake pipes;

[0009] A curved tube, one end of which is connected to one end of all the aforementioned intake pipes, and the curved tube is provided with multiple blades inside;

[0010] The air distribution pipe has a ring structure and is connected to the other end of the curved pipe;

[0011] Multiple exhaust pipes are provided on the air distribution pipe, and all the exhaust pipes are arranged at an angle. The exhaust pipes and the curved pipe are located on both sides of the air distribution pipe.

[0012] Optionally, it also includes:

[0013] The connecting pipe has a U-shaped structure, with both ends connected to the air distribution pipe, and the middle part of the connecting pipe connected to the end of the curved pipe away from the air intake pipe.

[0014] Optionally, the connecting pipe may also have a plurality of blades inside.

[0015] Optionally, it also includes:

[0016] An installation cylinder is disposed between the curved pipe and the intake pipe;

[0017] A mixing component is disposed on the mounting cylinder.

[0018] Optionally, the mounting cylinder has a cylindrical structure;

[0019] The hybrid component includes:

[0020] The main shaft is rotatably disposed inside the mounting cylinder and is coaxially arranged with the mounting cylinder. One end of the main shaft extends out of the mounting cylinder, and a mechanical seal is provided between the main shaft and the mounting cylinder.

[0021] Multiple paddle plates are disposed on a section of the main shaft located inside the mounting cylinder;

[0022] The motor is located outside the mounting cylinder, and the output shaft of the motor is poweredly connected to the end of the main shaft.

[0023] Optionally, the intake pipe has two sections, which are symmetrically arranged on both sides of the mounting cylinder.

[0024] Optionally, all the blades are staggered within the curved tube and the connecting tube.

[0025] Optionally, there is an angle of 60° or greater between the extending direction of the exhaust pipe and the axial plane of the air distribution pipe;

[0026] The projection L of the exhaust pipe on the axial plane extends in an inclined direction toward the axis of the air distribution pipe, and the angle between the projection L and the horizontal X direction is less than or equal to 60°.

[0027] A reduction furnace using the feeding system described above, wherein the gas distribution pipe and the exhaust pipe are both located at the top inside the reduction furnace.

[0028] Optionally, the air distribution pipe is located on a horizontal plane, and all the exhaust pipes are inclined downwards.

[0029] Compared with the prior art, the beneficial effects of this utility model are:

[0030] All raw material gas inlet pipes are connected to the same curved pipe, and all raw material gases flow within the curved pipe. Multiple blades within the curved pipe disrupt the flow pattern of the raw material gases, thereby improving the degree of mixing. Furthermore, by incorporating a gas distribution pipe and multiple exhaust pipes attached to the distribution pipe, the various raw material gases are evenly distributed within the reduction furnace, achieving thorough mixing and thus avoiding inconsistent silicon rod growth rates that could affect product quality uniformity. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0033] Figure 2 This is a schematic diagram showing the distribution of the exhaust pipe on the air distribution pipe.

[0034] Figure 3 A schematic diagram of the internal structure of the curved tube and mounting cylinder;

[0035] Figure 4 This is a bottom view of the present invention;

[0036] Figure 5 for Figure 4 Enlarged view of point A in the middle;

[0037] Figure 6 This is a schematic diagram of the axial plane. Detailed Implementation

[0038] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0039] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0041] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0042] Example 1:

[0043] See Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 This embodiment discloses a feeding system for mixing multiple gaseous raw materials, including an inlet pipe 10, a curved pipe 20, blades 30, a gas distribution pipe 40, and an exhaust pipe 50. The inlet pipe 10 is installed on the curved pipe 20, the blades 30 are installed inside the curved pipe 20, the gas distribution pipe 40 is connected to the curved pipe 20, and the exhaust pipe 50 is disposed on the gas distribution pipe 40.

[0044] During operation, multiple blades 30 are used inside the curved tube 20, and then the gas is fully mixed through the gas distribution pipe 40 and multiple exhaust pipes 50 set on the gas distribution pipe 40, thereby avoiding the problem of inconsistent silicon rod growth rate and affecting product quality uniformity.

[0045] Specifically, multiple air inlet pipes 10 are installed on the curved pipe 20, and each air inlet pipe 10 is connected to a raw material gas supply device, so that all the raw material gases can meet inside the curved pipe 20. The curved pipe 20 has a U-shaped structure and multiple blades 30 are installed inside the curved pipe 20.

[0046] The air distribution pipe 40 has a ring structure. One end of the curved pipe 20 is connected to the air intake pipe 10, and the other end of the curved pipe 20 is connected to the air distribution pipe 40. Multiple exhaust pipes 50 are also provided on the air distribution pipe 40. All exhaust pipes 50 are arranged at an angle on the side of the air distribution pipe 40 away from the curved pipe 20.

[0047] In this embodiment, all the raw material gas inlet pipes 10 are connected to the same curved pipe 20. All the raw material gases then flow within the curved pipe 20. Multiple blades 30 installed within the curved pipe 20 disrupt the flow pattern of the raw material gases, thereby improving the mixing degree. Furthermore, by installing a gas distribution pipe 40 and multiple exhaust pipes 50 on the gas distribution pipe 40, the various raw material gases are evenly distributed within the reduction furnace, achieving thorough mixing and thus avoiding the problem of inconsistent silicon rod growth rates affecting product quality uniformity.

[0048] In one specific embodiment:

[0049] The feeding system also includes a connecting pipe 60, which is U-shaped. Both ends of the connecting pipe 60 are connected to the air distribution pipe 40, and the middle part of the connecting pipe 60 is connected to the end of the curved pipe 20 away from the air inlet pipe 10. The distance between the two ends of the connecting pipe 60 is greater than the inner diameter of the air distribution pipe 40 and less than the outer diameter of the air distribution pipe 40, so that the two ends of the connecting pipe 60 can deliver the raw material gas into the air distribution pipe 40 with the maximum span.

[0050] By setting the connecting pipe 60, the raw material gas in the curved pipe 20 can enter the interior of the gas distribution pipe 40 from both sides, so that the gas distribution pipe 40 can evenly distribute all the raw material gas in the reduction furnace.

[0051] Preferably, multiple blades 30 are also provided inside the connecting pipe 60. The blades 30 inside the connecting pipe 60 are also used to disrupt the flow pattern of the raw material gas to enhance the mixing degree.

[0052] In addition, the blades 30 are staggered in both the curved tube 20 and the connecting tube 60.

[0053] In another specific embodiment:

[0054] The feeding system also includes an installation cylinder 70 and a mixing component 80. The installation cylinder 70 is positioned between the curved pipe 20 and the air inlet pipe 10, and the mixing component 80 is mounted on the installation cylinder 70. Specifically, the top of the installation cylinder 70 is connected to the air inlet pipe 10, and the bottom of the installation cylinder 70 is connected to the curved pipe 20. Within the installation cylinder 70, various raw material gases can be initially mixed.

[0055] By providing a mixing component 80 on the mounting cylinder 70, the mixing degree of the raw material gas inside the mounting cylinder 70 can be improved.

[0056] Specifically, the mixing assembly 80 includes a main shaft 81, a paddle plate 82, and a motor 83. The mounting cylinder 70 is a cylindrical structure. The main shaft 81 is rotatably mounted on the mounting cylinder 70 and is coaxial with the mounting cylinder 70. One end of the main shaft 81 passes through the mounting cylinder 70 and a mechanical seal is provided between it and the mounting cylinder 70. By providing a mechanical seal structure, the sealing of the inside of the mounting cylinder 70 can be ensured.

[0057] The motor 83 is located outside the mounting cylinder 70, and the output shaft of the motor 83 is coaxially connected to one end of the main shaft 81 that extends out of the mounting cylinder 70, and can drive the main shaft 81 to rotate continuously through the motor 83.

[0058] Multiple paddle plates 82 are installed on a section of the main shaft 81 inside the mounting cylinder 70, and all paddle plates 82 are evenly distributed in a ring around the main shaft 81.

[0059] In this embodiment, the motor 83 drives the main shaft 81 to rotate, and the main shaft 81 drives the paddle plate 82 to rotate inside the mounting cylinder 70. This disrupts the distribution pattern of various raw material gases inside the mounting cylinder 70 through the paddle plate 82, thereby accelerating the mixing of various raw material gases.

[0060] In another specific embodiment:

[0061] In this embodiment, the raw material gas in the reduction furnace is mainly trichlorosilane and hydrogen. Therefore, an inlet pipe 10 is provided on each side of the mounting cylinder 70 to meet the requirements. Generally, the two inlet pipes 10 and the curved pipe 20 are distributed in a Y-shape on the mounting cylinder 70.

[0062] In another specific embodiment:

[0063] Take an exhaust pipe 50 on the air distribution pipe 40 as an example:

[0064] The extension direction of the exhaust pipe 50 forms an angle of greater than or equal to 60° with the axial plane P of the air distribution pipe 40. The axial plane P of the air distribution pipe 40 is as follows: Figure 6 As shown, it is a plane perpendicular to the annular air distribution pipe 40, and this axial plane P is also the plane of symmetry of the air distribution pipe 40.

[0065] The projection vector of the exhaust pipe 50 on the axial plane is L. This vector L is set in an inclined direction and extends towards the axis of the air distribution pipe 40. The angle between this vector L and the horizontal X direction is α, and the angle α is less than or equal to 60°.

[0066] All the exhaust pipes 50 described above are based on one exhaust pipe 50 in this embodiment and are evenly distributed around the axis of the air distribution pipe 40.

[0067] Traditional gas distribution methods are not conducive to complete gas reaction within the reduction furnace. Conventional gas distribution rings often have vertical or horizontal inlets, causing the raw material gas to flow in a straight line after entering the furnace, resulting in a short residence time and incomplete reaction. Especially when processing high-flow-rate raw materials, the rapid escape of gas leads to low reaction efficiency, making it difficult to meet the requirements of high-efficiency production.

[0068] In this embodiment, by making a special angle design on the exhaust pipe 50 on the gas distribution pipe 40, the raw material gas moves in a rotating manner in the reduction furnace after entering the reduction furnace, thereby increasing the residence time of the raw material gas in the reduction furnace and achieving a full reaction.

[0069] Example 2:

[0070] This embodiment discloses a reduction furnace equipped with the feeding system described in Embodiment 1. Inside this reduction furnace, both the gas distribution pipe 40 and the exhaust pipe 50 are located at the top of the furnace.

[0071] Preferably, the air distribution pipe 40 is located on a horizontal plane, and all exhaust pipes 50 are inclined downwards.

[0072] In this embodiment, by setting the feeding system described in Embodiment 1 inside the reduction furnace, the reaction efficiency can be improved, meeting the needs of high-efficiency production.

[0073] The embodiments described above merely illustrate specific implementations of this utility model, and while the descriptions are detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A feeding system for mixing multiple gaseous raw materials, characterized in that, include: Multiple air intake pipes; A curved tube, one end of which is connected to one end of all the aforementioned intake pipes, and the curved tube is provided with multiple blades inside; The air distribution pipe has a ring structure and is connected to the other end of the curved pipe; Multiple exhaust pipes are provided on the air distribution pipe, and all the exhaust pipes are arranged at an angle. The exhaust pipes and the curved pipe are located on both sides of the air distribution pipe.

2. The feeding system for mixing multiple gaseous raw materials according to claim 1, characterized in that, Also includes: The connecting pipe has a U-shaped structure, with both ends connected to the air distribution pipe, and the middle part of the connecting pipe connected to the end of the curved pipe away from the air intake pipe.

3. The feeding system for mixing multiple gaseous raw materials according to claim 2, characterized in that, The connecting pipe also has multiple blades inside.

4. The feeding system for mixing multiple gaseous raw materials according to claim 2, characterized in that, Also includes: An installation cylinder is disposed between the curved pipe and the intake pipe; A mixing component is disposed on the mounting cylinder.

5. The feeding system for mixing multiple gaseous raw materials according to claim 4, characterized in that, The mounting cylinder has a cylindrical structure; The hybrid component includes: The main shaft is rotatably disposed inside the mounting cylinder and is coaxially arranged with the mounting cylinder. One end of the main shaft extends out of the mounting cylinder, and a mechanical seal is provided between the main shaft and the mounting cylinder. Multiple paddle plates are disposed on a section of the main shaft located inside the mounting cylinder; The motor is located outside the mounting cylinder, and the output shaft of the motor is poweredly connected to the end of the main shaft.

6. The feeding system for mixing multiple gaseous raw materials according to claim 5, characterized in that, The air intake pipe has two sections, which are symmetrically arranged on both sides of the mounting cylinder.

7. The feeding system for mixing multiple gaseous raw materials according to claim 2, characterized in that, All the blades are staggered within the curved tube and the connecting tube.

8. The feeding system for mixing multiple gaseous raw materials according to claim 2, characterized in that: There is an angle of 60° or greater between the extending direction of the exhaust pipe and the axial plane of the air distribution pipe. The projection L of the exhaust pipe on the axial plane extends in an inclined direction toward the axis of the air distribution pipe, and the angle between the projection L and the horizontal X direction is less than or equal to 60°.

9. A reduction furnace using the feeding system described in any one of claims 1-8, characterized in that, Both the gas distribution pipe and the exhaust pipe are located at the top of the reduction furnace.

10. The reduction furnace according to claim 9, characterized in that, The air distribution pipe is located on a horizontal plane, and all the exhaust pipes are inclined downwards.

Images