Pulsed airflow beam splitter

Abstract

The utility model relates to a kind of pulse airflow beam beam splitter, belong to beam splitter technical field, including beam splitter body, the outer wall of beam splitter body is equipped with thread groove, the beam splitter body is connected with thread ring by thread groove thread, the outer wall of thread ring is fixedly connected with baffle, the outer wall of baffle is fixedly connected with shell, there is vent in baffle.In pulse airflow beam when passing through beam splitter, when airflow enters from the smallest aperture, only distribution concentrated cluster can pass through smoothly, so that part of argon atom is excluded, so that neutral cluster particle and another part of argon atom can pass through beam splitter, the cluster after passing still maintains conical, and with the central axis of subsequent ionizer coincides, simultaneously, argon atom without passing will flow into other position under the cooperation of baffle, vent, communicating block and shell, to avoid the mutual interference between neutral cluster particle and part of argon atom in this way.

Description

Technical Field

[0001] This utility model relates to the field of beam splitter technology, and specifically to a pulsed airflow beam splitter. Background Technology

[0002] In modern materials science, surface treatment, ion beam processing and many cutting-edge scientific research fields, extremely high requirements are placed on the precise control and efficient separation of specific particle beams. As a key device that can generate particle beams with unique properties, the performance of gas cluster ion sources directly affects the development and application of related technologies. Pulsed gas flow beam splitters play a crucial role in the generation of gas cluster ion sources, and their performance is related to whether the entire ion source system can operate stably and efficiently.

[0003] In the traditional gas cluster ion source generation process, the pulsed gas flow output from the gas source is a mixture of various particles, including neutral cluster particles and argon atoms. If these particles are not mixed evenly or effectively separated when they are subsequently ionized and used in various applications, it will seriously affect the quality and performance of the ion beam. Ordinary filtration devices have difficulty distinguishing between neutral cluster particles and single atoms. While blocking some particles, they are also prone to damaging or trapping the target cluster particles, reducing the throughput and integrity of the cluster particles. Early splitting structure designs were too crude and could not accurately control the airflow direction, causing neutral cluster particles and single atoms to continuously interfere with each other during the splitting process, making it difficult to achieve high-purity particle separation.

[0004] To address the aforementioned issues, this application proposes a pulsed airflow beam splitter. Utility Model Content

[0005] This invention addresses the technical problems existing in the prior art by providing a pulsed airflow beam splitter.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A pulsed airflow beam splitter includes a beam splitter body. The outer wall of the beam splitter body is provided with a threaded groove. A threaded ring is threadedly connected to the beam splitter body through the threaded groove. A baffle is fixedly connected to the outer wall of the threaded ring. A shell is fixedly connected to the outer wall of the baffle. An air vent is opened on the baffle. A connecting block is fixedly connected to the baffle through the air vent. An air collecting ring is fixedly connected to the inner wall of the shell. The outer wall of the air collecting ring is in contact with the outer wall of the beam splitter body. One side of the air collecting ring is fixedly connected to the end of the connecting block away from the baffle.

[0007] A threaded block is fixedly connected to the outer wall of the outer shell away from the baffle. A groove is provided on the outer shell. An arc-shaped plate is movably connected to the outer shell through the groove. A bolt is rotatably connected to the outer wall of the arc-shaped plate. The bolt is threadedly connected to the threaded block. By setting the threaded block, groove, arc-shaped plate and bolt, the air inlet end of the beam splitter body can be quickly inspected and repaired.

[0008] A ring plate is fixedly connected to the outer wall of the beam splitter body. One side of the ring plate is engaged with one side of the threaded ring. By setting the ring plate, the threaded ring is blocked.

[0009] A sealing gasket is fixedly connected to the arc-shaped plate. By setting the sealing gasket, the joint between the two arc-shaped plates is sealed.

[0010] The baffle is equipped with a guide pad through the vent, which enables unidirectional flow of argon atoms.

[0011] A support plate is fixedly connected to the inner wall of the outer shell, and one end of the support plate is attached to the outer wall of the outer shell. By setting the support plate, further support is provided for the outer shell.

[0012] The beam splitter body is made of pure aluminum, and the surface of the beam splitter body is coated with Ni. By setting the beam splitter body to pure aluminum and coating the surface, its performance and durability are further improved, thereby increasing the service life of the beam splitter.

[0013] The beneficial effects of this utility model are:

[0014] When the pulsed gas stream passes through the splitter, only the concentrated clusters can pass through smoothly when the gas enters from the smallest aperture, thus excluding some argon atoms. This allows neutral cluster particles and other argon atoms to pass through the splitter. The clusters that have passed through still maintain a conical shape and coincide with the central axis of the subsequent ionizer. Meanwhile, the argon atoms that did not pass through will flow to other positions with the cooperation of baffles, vents, connecting blocks, and the outer shell, thereby avoiding mutual interference between neutral cluster particles and some argon atoms.

[0015] By setting threaded blocks, grooves, arc plates, and bolts, the air intake end of the beam splitter body can be quickly inspected and repaired. When the beam splitter body is damaged during long-term use, the outer shell and arc plate can be separated by separating the bolts and threaded blocks. This allows the staff to perform maintenance on the beam splitter body without disassembling it, thus avoiding affecting the use of the beam splitter body. Attached Figure Description

[0016] Figure 1 This is a schematic diagram illustrating the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram illustrating the structure of the outer shell and related parts of this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the display baffle and its related parts in this utility model;

[0019] Figure 4 This utility model is a schematic diagram illustrating the structure of an arc-shaped plate and its related parts.

[0020] The attached diagram lists the components represented by each number as follows:

[0021] 1. Bundle splitter body; 2. Threaded groove; 3. Threaded ring; 4. Baffle; 5. Vent; 6. Connecting block; 7. Outer shell; 8. Ring plate; 9. Air collecting ring; 10. Threaded block; 11. Groove; 12. Arc plate; 13. Bolt; 14. Sealing gasket; 15. Guide gasket; 16. Support plate. Detailed Implementation

[0022] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0023] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0024] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0025] Reference Figure 1-3 A pulsed gas stream splitter includes a splitter body 1 for splitting a pulsed gas stream. The outer wall of the splitter body 1 has a threaded groove 2. A threaded ring 3 is threadedly connected to the splitter body 1 through the threaded groove 2. The threaded groove 2 connects the threaded ring 3 to the splitter body 1. A baffle 4 is fixedly connected to the outer wall of the threaded ring 3. A housing 7 is fixedly connected to the outer wall of the baffle 4. A vent 5 is opened on the baffle 4 to seal one end of the space formed between the housing 7 and the splitter body 1. The vent 5 facilitates the transport of argon atoms remaining after the pulsed gas stream is split. A connecting block 6 is fixedly connected to the baffle 4 through the vent 5. A gas collecting ring 9 is fixedly connected to the inner wall of the housing 7 to collect argon atoms, thus preventing leakage. The outer wall of the gas collecting ring 9 fits against the outer wall of the splitter body 1, and one side of the gas collecting ring 9 is fixedly connected to the end of the connecting block 6 away from the baffle 4.

[0026] Reference Figure 2 and Figure 4 A threaded block 10 is fixedly connected to the outer wall of the outer shell 7 away from the baffle 4. A groove 11 is provided on the outer shell 7. An arc plate 12 is movably connected to the outer shell 7 through the groove 11. The groove 11 is used to initially position the arc plate 12. A bolt 13 is rotatably connected to the outer wall of the arc plate 12. The bolt 13 is threadedly connected to the threaded block 10. The bolt 13 and the threaded block 10 are used to connect the arc plate 12 to the outer shell 7.

[0027] Reference Figure 2 A ring plate 8 is fixedly connected to the outer wall of the beam splitter body 1. One side of the ring plate 8 is engaged with one side of the threaded ring 3. The ring plate 8 is used to block the threaded ring 3, so as to avoid the installation position deviation when the operator installs the outer shell 7 and its related components onto the beam splitter body 1, thereby avoiding affecting the use of the beam splitter.

[0028] Reference Figure 4 A sealing gasket 14 is fixedly connected to the arc plate 12. The sealing gasket 14 is used to seal the joint of the two arc plates 12 to prevent argon atoms from leaking when passing through, thereby preventing the leakage of argon atoms from affecting the overall use of the device.

[0029] Reference Figure 2 The baffle 4 is equipped with a guide pad 15 through the vent 5. The guide pad 15 is used to achieve unidirectional flow of argon atoms. When argon atoms pass through the beam splitter, the impact generated will open the guide pad 15, thereby allowing argon atoms to flow out of the beam splitter. After the argon atoms flow out of the beam splitter, a backflow phenomenon occurs. At this time, the impact of argon atoms will be blocked by the guide pad 15, thereby effectively preventing the argon atoms from flowing back.

[0030] Reference Figure 3 A support plate 16 is fixedly connected to the inner wall of the outer shell 7. One end of the support plate 16 is attached to the outer wall of the outer shell 7. The support plate 16 is used to further support the outer shell 7 and prevent the outer shell 7 from being impacted by argon atoms when passing through it, thus avoiding affecting the use of the beam splitter.

[0031] Reference Figure 1 The beam splitter body 1 is made of pure aluminum and the surface of the beam splitter body 1 is coated with Ni. By setting the beam splitter body 1 to pure aluminum and coating the surface, its performance and durability are further improved, thereby increasing the service life of the beam splitter.

[0032] Working principle:

[0033] This pulsed gas flow beam splitter, when the pulsed gas flow beam enters from the smallest aperture, only the concentrated clusters can pass through smoothly, thus excluding some argon atoms. This allows neutral cluster particles and other argon atoms to pass through the splitter. The clusters that have passed through remain conical and coincide with the central axis of the subsequent ionizer. Meanwhile, the argon atoms that did not pass through will flow to other positions with the cooperation of baffle 4, vent 5, connecting block 6, and outer shell 7, thereby avoiding mutual interference between neutral cluster particles and some argon atoms. When the splitter is damaged after use at one end, the outer shell 7 and arc plate 12 can be separated by the bolt 13 and threaded block 10. This allows the operator to perform maintenance on the splitter body 1 without disassembling it, thus avoiding affecting the use of the splitter body 1.

[0034] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0035] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A pulsed airflow beam splitter, comprising a beam splitter body (1), characterized in that, The outer wall of the beam splitter body (1) is provided with a threaded groove (2). The beam splitter body (1) is threadedly connected to a threaded ring (3) through the threaded groove (2). A baffle (4) is fixedly connected to the outer wall of the threaded ring (3). A shell (7) is fixedly connected to the outer wall of the baffle (4). A vent (5) is opened on the baffle (4). A connecting block (6) is fixedly connected to the baffle (4) through the vent (5). A gas collecting ring (9) is fixedly connected to the inner wall of the shell (7). The outer wall of the gas collecting ring (9) is in contact with the outer wall of the beam splitter body (1). One side of the gas collecting ring (9) is fixedly connected to the end of the connecting block (6) away from the baffle (4).

2. The pulsed airflow beam splitter according to claim 1, characterized in that, A threaded block (10) is fixedly connected to the outer wall of the outer shell (7) away from the baffle (4). A groove (11) is provided on the outer shell (7). An arc plate (12) is movably connected to the outer shell (7) through the groove (11). A bolt (13) is rotatably connected to the outer wall of the arc plate (12). The bolt (13) is threadedly connected to the threaded block (10).

3. The pulsed airflow beam splitter according to claim 1, characterized in that, The outer wall of the beam splitter body (1) is fixedly connected to a ring plate (8), one side of the ring plate (8) is combined with one side of the threaded ring (3).

4. A pulsed airflow beam splitter according to claim 2, characterized in that, A sealing gasket (14) is fixedly connected to the arc-shaped plate (12).

5. A pulsed airflow beam splitter according to claim 1, characterized in that, The baffle (4) is provided with a guide pad (15) through the vent (5).

6. A pulsed airflow beam splitter according to claim 1, characterized in that, A support plate (16) is fixedly connected to the inner wall of the outer shell (7), and one end of the support plate (16) is attached to the outer wall of the outer shell (7).

7. A pulsed airflow beam splitter according to claim 1, characterized in that, The beam splitter body (1) is made of pure aluminum, and the surface coating of the beam splitter body (1) is Ni.

Images