Target mounting structure and coating apparatus

Abstract

This utility model provides a target mounting structure and coating equipment, belonging to the field of semiconductor manufacturing equipment technology. The target mounting structure includes: a target backplate, which is provided with a plurality of first fastening parts; a target material, which is provided with a plurality of second fastening parts and engages with the first fastening parts through the second fastening parts; and a screw assembly, which connects the target backplate and the target material. This utility model uses the first and second fastening parts between the target material and the target backplate for engagement, and combines them with the screw assembly for locking and fixing. When the target material needs to be replaced, it can be quickly disassembled by simply removing the screw assembly, eliminating the welding process. Therefore, it can solve the application limitations caused by welding materials and avoid problems such as target backplate deformation caused by frequent welding, which is beneficial to extending the service life of the target backplate and improving work efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a target mounting structure and coating equipment. Background Technology

[0002] Magnetron sputtering, as a highly efficient thin film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of an electric field and a magnetic field. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which are then deposited on the substrate to form a film.

[0003] In existing technologies, the target material and the target backplate are fixed by welding, which has the following drawbacks:

[0004] 1. Because the welding material has a low melting point, the target material cannot withstand high-power conditions such as TSV and TGV.

[0005] 2. Due to the high cost of the target backplate, it needs to be reused. During the replacement of the target material, the target backplate is prone to deformation and other abnormalities. Utility Model Content

[0006] The present invention aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, in a first aspect, the present invention provides a target mounting structure that can overcome the shortcomings of welding mounting.

[0007] Secondly, this utility model provides a coating device that applies the above-mentioned target mounting structure.

[0008] The target mounting structure according to the first aspect of the present invention includes:

[0009] The target backplate is provided with a plurality of first fastening parts;

[0010] The target material is provided with a plurality of second fastening parts, and the first fastening part is engaged by the second fastening parts;

[0011] A screw assembly that connects the target backplate and the target material.

[0012] The target mounting structure according to the embodiments of the present utility model has at least the following beneficial effects:

[0013] The target installation structure of this utility model uses a first fastening part and a second fastening part to snap together the target and the target back plate, and locks it in place with a screw assembly. When the target needs to be replaced, it can be quickly disassembled by simply removing the screw assembly, eliminating the welding process. Therefore, it can solve the application limitations caused by welding materials and avoid problems such as target back plate deformation caused by frequent welding. This helps to extend the service life of the target back plate and improve work efficiency.

[0014] According to some embodiments of this utility model, the target backplate and the target material have a first end face and a second end face that fit together, wherein...

[0015] The target backplate has a first flow channel recessed within the first end face, and the first flow channel is covered by the second end face to form a cooling water channel; or...

[0016] The target material has a second flow channel recessed within its second end face, and the second flow channel is covered by the first end face to form a cooling water channel; or...

[0017] The target backplate has a first flow channel recessed in the first end face, and the target material has a second flow channel recessed in the second end face. The first flow channel and the second flow channel are combined to form a cooling water channel.

[0018] According to some embodiments of the present invention, the first fastening part and the second fastening part are disposed in the cooling water channel.

[0019] According to some embodiments of the present invention, the first and second fastening portions are provided in multiple ways along the length of the cooling water channel.

[0020] According to some embodiments of the present invention, the first fastening part includes a first connecting section and a first snap-fit ​​section, the first connecting section is disposed perpendicular to the first end face, and the first snap-fit ​​section is disposed from the end of the first connecting section along a first direction;

[0021] The second fastening part includes a second connecting section and a second snap-fit ​​section. The second connecting section is disposed perpendicular to the second end face, and the second snap-fit ​​section is disposed from the end of the second connecting section in the opposite direction to the first direction.

[0022] The first connecting segment and the second connecting segment can be engaged along a first direction and along a second direction perpendicular to the first direction.

[0023] According to some embodiments of the present invention, the target mounting structure further includes a sealing ring, which is disposed between the first end face and the second end face, the cooling water channel is located in the area surrounded by the sealing ring, and the screw assembly is located outside the area surrounded by the sealing ring.

[0024] According to some embodiments of the present invention, the target material has a second end face that fits against the target back plate, and the second fastening part protrudes from the second end face.

[0025] According to some embodiments of the present invention, the screw assembly includes:

[0026] Nut sleeve, wherein the nut sleeve is detachably disposed on the target back plate;

[0027] The mounting screw passes through the target material and is connected to the nut sleeve.

[0028] According to some embodiments of this utility model, a power interface is provided on the outer side of the target material.

[0029] The coating apparatus according to a second aspect of the present invention includes a target mounting structure with any of the above-described structures.

[0030] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of the invention. Attached Figure Description

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0032] Figure 1 This is a spliced ​​cross-sectional view of the target material and target backplate in this application;

[0033] Figure 2 This is a schematic diagram of one possible connection between the target material and the target backplate in this application;

[0034] Figure 3 This is a top view schematic diagram of the target material and target backplate in this application;

[0035] Figure 4 A schematic diagram of a target backplate;

[0036] Figure 5 A schematic diagram of a structure of the first fastening part in the target backplate;

[0037] Figure 6 This is a schematic diagram of a target material structure.

[0038] Figure 7 This is a schematic diagram of a structure of the second fastening part in the target material. Detailed Implementation

[0039] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0040] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0041] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0042] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0043] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0044] Magnetron sputtering, as a highly efficient thin film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of an electric field and a magnetic field. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which are then deposited on the substrate to form a film.

[0045] In existing technologies, the target material and the target backplate are fixed by welding, which has the following drawbacks:

[0046] 1. Because the welding material has a low melting point, the target material cannot withstand high-power conditions such as TSV and TGV.

[0047] 2. Due to the high cost of the target backplate, it needs to be reused. During the replacement of the target material, the target backplate is prone to deformation and other abnormalities.

[0048] Therefore, embodiments of this utility model propose a target mounting structure that eliminates the welding setup to address the defects caused by welding.

[0049] Reference Figures 1 to 7 In some embodiments of this utility model, the target mounting structure includes a target back plate 200, a target 100, and a screw assembly 300. The target back plate 200 is provided with a plurality of first fastening parts 201, and the target 100 is provided with a plurality of second fastening parts 101. The target 100 is engaged with the first fastening parts 201 through the second fastening parts 101, and the screw assembly 300 is connected between the target back plate 200 and the target 100.

[0050] The target installation structure of this utility model uses a first fastening part 201 and a second fastening part 101 to snap together the target 100 and the target back plate 200, and locks them together with a screw assembly 300. When the target 100 needs to be replaced, it can be quickly disassembled by simply removing the screw assembly 300, eliminating the welding process. Therefore, it can solve the application limitations caused by welding materials and avoid problems such as deformation of the target back plate 200 caused by frequent welding. This helps to extend the service life of the target back plate 200 and improve work efficiency.

[0051] In practical applications, since the sputtering surface of the target 100 is the end face facing away from the target back plate 200, the screw assembly 300 can be set at the periphery of the target 100 to avoid obstructing the sputtering surface or reducing the actual effective area of ​​the sputtering surface.

[0052] The first fastening part 201 and the second fastening part 101 can be evenly distributed between the target material 100 and the target back plate 200 to improve the connection strength between the target material 100 and the target back plate 200, and at the same time strengthen the connection in areas not covered by the screw assembly 300.

[0053] Combination Figure 1 In some embodiments of this utility model, the target back plate 200 and the target material 100 have a first end face and a second end face that fit together. The target back plate 200 and the target material 100 are connected by a first fastening part 201, a second fastening part 101 and a screw assembly 300 to keep the first end face and the second end face fit together. The target back plate 200 provides sufficient support for the target material 100.

[0054] It is understandable that the first end face on the target backplate 200 is the support surface for mounting the target 100. The second end face on the target 100 is the back face opposite to the sputtering surface.

[0055] Combination Figure 4 and Figure 5 In some embodiments of this utility model, the target back plate 200 is recessed in the first end face to form a first flow channel 202, and the first flow channel 202 is covered by the second end face to form a cooling water channel.

[0056] With the structural configuration of this embodiment, when the cooling medium flows through the cooling water channel, it can directly contact the target material 100 to cool the target material 100. Compared with the traditional structure, which uses water channels inside the target back plate 200 for indirect cooling, the cooling effect is greatly improved.

[0057] It is understood that in this embodiment, the first flow channel 202 is recessed into the first end face of the target back plate 200, and then the first end face is covered by the target material 100, so that the cross-section of the first flow channel 202 is complete. The length direction of the first flow channel 202 is the length direction of the cooling water channel.

[0058] Combination Figure 6 In some embodiments of this utility model, the target material 100 is recessed in the second end face to form a second flow channel 103, and the second flow channel 103 is covered by the first end face to form a cooling water channel.

[0059] The difference between this embodiment and the previous embodiment is that the cooling water channel is formed by the second flow channel 103 that is recessed in the target material 100, so that the base area of ​​the cooling medium and the target material 100 is larger and the cooling effect is better.

[0060] It is understood that in this embodiment, the second flow channel 103 is covered by the target back plate 200, so that the cross-section of the second flow channel 103 is complete. The length direction of the second flow channel 103 is the length direction of the cooling water channel.

[0061] Since the side of the target 100 away from the second end face is the sputtering surface, the water inlet and outlet of the cooling water channel can be achieved by opening a hole on the target back plate 200 or by opening a hole on the outer periphery of the target 100, without specific limitations.

[0062] In some embodiments of this utility model, the target back plate 200 is recessed in the first end face to form a first flow channel 202, and the target material 100 is recessed in the second end face to form a second flow channel 103. The first flow channel 202 and the second flow channel 103 are combined to form a cooling water channel.

[0063] In this embodiment, by simultaneously setting a first flow channel 202 on the target backplate 200 and a second flow channel 103 on the target material 100, the cooling water channel is formed by combining the first flow channel 202 and the second flow channel 103. This can reduce the dimensional requirements of the cooling water channel in the thickness direction of the target material 100, and also help to increase the cross-sectional size of the cooling water channel and improve the heat dissipation efficiency.

[0064] It is understandable that since the target 100 provides sputtering material and the target backplate 200 needs to stably support the target 100, the cooling channel is formed by combining the first flow channel 202 and the second flow channel 103, which is beneficial to simultaneously meet the setting requirements of both.

[0065] In some embodiments of this utility model, the first fastening part 201 and the second fastening part 101 are disposed in the cooling water channel.

[0066] Since the cooling water channel requires the flow of cooling medium, the cooling medium exerts pressure on the target 100 and the target backplate 200 as it passes through the channel, especially since the cooling water channel is formed by the target backplate 200 and the target 100 joined together. This embodiment, by placing the first fastening part 201 and the second fastening part 101 within the cooling water channel, effectively eliminates the influence of water pressure, preventing deformation of the target 100 or the target backplate 200. This ensures both the operation of the cooling mechanism of the cooling water channel and the stability of the sputtering surface of the target 100, thus ensuring the smooth progress of the coating operation.

[0067] Furthermore, considering that both the target material 100 and the target back plate 200 have a certain area in the horizontal direction, in order to ensure the overall temperature uniformity of the target material 100, cooling channels are evenly distributed on the first end face and the second end face.

[0068] Based on this, in some embodiments of this utility model, multiple first fastening portions 201 and second fastening portions 101 are provided along the length direction of the cooling water channel. This effectively ensures that the target material 100 or the target back plate 200 will not deform wherever the cooling water channel passes.

[0069] In some embodiments of this utility model, the first fastening part 201 includes a first connecting section 2011 and a first snap-fit ​​section 2012. The first connecting section 2011 is disposed perpendicular to the first end face, and the first snap-fit ​​section 2012 is disposed from the end of the first connecting section 2011 along the first direction.

[0070] The second fastening part 101 includes a second connecting section 1011 and a second snap-fit ​​section 1012. The second connecting section 1011 is disposed perpendicular to the second end face, and the second snap-fit ​​section 1012 is disposed from the end of the second connecting section 1011 in the opposite direction to the first direction.

[0071] The first connecting segment 2011 and the second connecting segment 1011 can be engaged along a first direction and along a second direction perpendicular to the first direction.

[0072] Taking left to right as the first direction, right to left as the opposite direction of the first direction, and front to back as the second direction, in this embodiment, the first latching section 201 of the first latching part 201 extends from left to right, and the second latching section 1012 extends from right to left. Therefore, the first latching part 201 and the second latching part 101 can latch onto each other in the left-right direction. At the same time, since the first latching section 2012 and the second latching section 1012 do not obstruct each other in the front-back direction, the first latching part 201 and the second latching part 101 can also latch onto each other in the front-back direction.

[0073] This embodiment defines the structure of the first fastening part 201 and the second fastening part 101 and the direction of the snap-fit ​​part, so that the target material 100 and the target back plate 200 can be quickly fastened and fixed, which facilitates the assembly and disassembly of the target material 100.

[0074] During the assembly and disassembly of the target 100, simply fasten the target 100 to the first fastening part 201 on the target back plate 200 via the second fastening part 101, then adjust the positions of the two to align, and install the screw assembly 300. The assembly and disassembly are convenient and can improve work efficiency.

[0075] Combination Figure 4 In some embodiments of this utility model, the target mounting structure further includes a sealing ring 400, which is disposed between the first end face and the second end face. The cooling water channel is located in the area surrounded by the sealing ring 400, and the screw assembly 300 is located outside the area surrounded by the sealing ring 400.

[0076] In conjunction with the structural configuration of the aforementioned embodiments, since the cooling medium in the cooling water channel will exert pressure on the target material 100 and the target back plate 200, this embodiment can effectively ensure the sealing performance of the area surrounded by the sealing ring 400 by setting a sealing ring 400 on the outside of the cooling water channel and fixing it with the screw assembly 300, thereby preventing the problem of cooling medium leakage.

[0077] It should be noted that since the first end face and the second end face may not be regular circular or rectangular surfaces, the sealing ring 400 may not be circular; it can be designed to conform to the contours of the first end face and the second end face.

[0078] Furthermore, in order to ensure that the sealing ring 400 is fixed in the installation position, at least one of the target material 100 and the target back plate 200 is provided with a positioning groove to position the sealing ring 400.

[0079] In some embodiments of this invention, the target 100 has a second end face that fits against the target back plate 200, and a second fastening portion 101 protrudes from the second end face. This effectively ensures the thickness of the target 100, avoiding any impact on the sputtering operation.

[0080] In some embodiments of this utility model, a first flow channel 202 is recessed within the first end face of the target back plate 200, and the target material 100 adheres to the first end face to form a cooling channel. A first fastening portion 201 protrudes from the first flow channel 202 within the target back plate 200, and the protrusion height of the first fastening portion 201 is less than or equal to the recess depth of the first flow channel 202, so that the first fastening portion 201 remains flush with the first end face, or is recessed relative to the first end face. A second fastening portion 101 protrudes from the second end face of the target material 100, and the protrusion distance of the second fastening portion 101 is sufficient to fasten the first fastening portion 201.

[0081] By adopting the structural configuration of this embodiment, the second fastening part 101 protrudes from the target material 100 and extends into the first flow channel 202 to fasten the first fastening part 201. This can effectively ensure the size of the target material 100 in the thickness direction and avoid encroaching on the space of the target material 100 in the thickness direction, thus helping to ensure the service life of the target material 100.

[0082] Of course, in actual production, a shallower second flow channel 103 can also be set on the target material 100 to improve the cooling effect of the cooling water channel.

[0083] In some embodiments of this utility model, the screw assembly 300 includes a nut sleeve and a mounting screw, wherein the nut sleeve is detachably disposed on the target back plate 200, and the mounting screw passes through the target material 100 and is connected to the nut sleeve.

[0084] It is understandable that the installation screws need to be removed during the replacement of the target 100. To ensure stable installation, the installation screws must be tightened during installation, which can easily lead to deformation and damage of the screw threads. This embodiment uses a removable nut sleeve, so that whether the threads of the nut sleeve or the threads of the installation screw are damaged, they can be replaced without affecting the service life of the target backplate 200.

[0085] Specifically, the target backplate 200 has a countersunk hole at the end opposite to the target material 100, and the nut sleeve is engaged in the countersunk hole. When the threads are damaged, the nut sleeve can be simply removed from the direction opposite to the target material 100 and replaced.

[0086] Combination Figure 3 and Figure 6In some embodiments of this utility model, a power interface 102 is provided on the outer side of the target 100. The target 100 can be directly powered through this power interface 102. Compared to the traditional method of powering through the target backplate 200, this reduces the material requirements for the target backplate 200, thereby lowering costs.

[0087] An embodiment of this utility model also proposes a coating device, including a target mounting structure of any of the above structures.

[0088] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A target mounting structure, characterized in that, include: The target backplate is provided with a plurality of first fastening parts; The target material is provided with a plurality of second fastening parts, and the first fastening part is engaged by the second fastening parts; A screw assembly that connects the target backplate and the target material.

2. The target mounting structure according to claim 1, characterized in that, The target backplate and the target material have a first end face and a second end face that fit together. The target backplate has a first flow channel recessed within the first end face, and the first flow channel is covered by the second end face to form a cooling water channel; or... The target material has a second flow channel recessed within its second end face, and the second flow channel is covered by the first end face to form a cooling water channel; or... The target backplate has a first flow channel recessed in the first end face, and the target material has a second flow channel recessed in the second end face. The first flow channel and the second flow channel are combined to form a cooling water channel.

3. The target mounting structure according to claim 2, characterized in that, The first and second fastening parts are disposed within the cooling water channel.

4. The target mounting structure according to claim 2, characterized in that, The first and second fastening portions are provided in multiples along the length of the cooling water channel.

5. The target mounting structure according to claim 4, characterized in that, The first fastening part includes a first connecting section and a first snap-fit ​​section. The first connecting section is disposed perpendicular to the first end face, and the first snap-fit ​​section is disposed from the end of the first connecting section along a first direction. The second fastening part includes a second connecting section and a second snap-fit ​​section. The second connecting section is disposed perpendicular to the second end face, and the second snap-fit ​​section is disposed from the end of the second connecting section in the opposite direction to the first direction. The first connecting segment and the second connecting segment can be engaged along a first direction and along a second direction perpendicular to the first direction.

6. The target mounting structure according to claim 2, characterized in that, The target mounting structure also includes a sealing ring, which is disposed between the first end face and the second end face. The cooling water channel is located in the area surrounded by the sealing ring, and the screw assembly is located outside the area surrounded by the sealing ring.

7. The target mounting structure according to claim 1, characterized in that, The target material has a second end face that fits against the target back plate, and the second fastening part protrudes from the second end face.

8. The target mounting structure according to claim 1, characterized in that, The screw assembly includes: Nut sleeve, wherein the nut sleeve is detachably disposed on the target back plate; The mounting screw passes through the target material and is connected to the nut sleeve.

9. The target mounting structure according to claim 1, characterized in that, A power interface is provided on the outer side of the target material.

10. A coating apparatus, characterized in that, Includes the target mounting structure as described in any one of claims 1 to 9.

Images