A heat preservation cylinder

Abstract

The utility model relates to a heat preservation cylinder for the heat preservation of the circumference of a single crystal furnace, comprising a heat preservation cylinder main body and a heat preservation piece. The heat preservation cylinder main body comprises at least two spliced segments, which are arranged coaxially in a ring shape. The spliced segments are arranged in sequence along the axial direction, and the axial end faces of adjacent spliced segments abut against each other. The heat preservation piece comprises alumina cloth and a filler. The thermal conductivity of the filler is less than that of the heat preservation cylinder. The alumina cloth is wrapped around the outer periphery of the filler to form a deformable strip-shaped or ring-shaped heat preservation piece. The abutment positions between the spliced segments are covered with the heat preservation piece. In this scheme, the heat preservation piece is wrapped with alumina cloth as the outer layer and is stacked with the filler with low thermal conductivity as the inner layer. The abutment positions are covered with the heat preservation piece, which effectively enhances the heat preservation performance of the thermal field to improve the material melting rate of the single crystal furnace and the crystal growth rate of the single crystal silicon rod.

Description

Technical Field

[0001] This utility model relates to the technical field of single crystal furnaces, and in particular to a heat preservation cylinder. Background Technology

[0002] As a core piece of equipment in the semiconductor materials and photovoltaic industries, the single crystal furnace's thermal stability and energy efficiency directly affect the crystal quality and production cost of single-crystal silicon rods. In the Czochralski single crystal growth process, the insulation cylinder, as a core component of the thermal system, plays a crucial role in isolating external thermal interference, maintaining the axial temperature gradient, and reducing radiative heat loss. Traditional insulation cylinders are mostly made of high-purity carbon fiber composite materials or graphite matrices, manufactured through high-temperature sintering or integrated molding processes to achieve a combination of high thermal stability and low thermal conductivity.

[0003] However, with the increasing demand for the fabrication of large-size monocrystalline silicon (such as 12-inch semiconductor-grade silicon rods or G12 photovoltaic silicon rods), the radial dimension of insulation cylinders has exceeded the Φ1000mm level, and their manufacturing process faces significant technical bottlenecks. Specifically, if an integral sintering process is adopted, the nonlinear characteristics of the material shrinkage rate (typically 15%–20%) during the sintering process, limited by the volume of the industrial-grade high-temperature furnace cavity, easily lead to problems such as circumferential stress concentration, microcracks on the inner wall, and out-of-tolerance geometric deformation in the finished product, resulting in deterioration of thermal uniformity (local temperature difference exceeding ±3℃). In addition, the stress-relief annealing treatment of ultra-large integral components requires an extremely long cycle (200 hours) and gradient temperature control equipment, significantly increasing manufacturing costs.

[0004] To address the technological challenges of manufacturing an integral insulation cylinder, existing technology employs a multi-segment annular structure along the axial direction, which is then assembled into the entire insulation cylinder through axial splicing. This multi-segment splicing structure alleviates the manufacturing difficulties to some extent, enabling the manufacture of the insulation cylinder to be achieved under existing technological conditions.

[0005] However, this type of spliced ​​insulation cylinder also brings new problems. Due to the gaps at the joints, despite sealing measures during assembly, these joints can still easily become channels for heat loss during actual use. When the single crystal furnace operates at high temperatures, internal heat continuously dissipates into the external environment through these joints. This not only wastes heat but also makes it difficult to maintain the furnace's internal temperature within the ideal operating range. To compensate for this heat loss, more energy is needed to maintain the furnace temperature, leading to reduced internal heating efficiency and increased production costs. Simultaneously, the unstable internal temperature negatively impacts the growth quality of single crystal silicon, potentially causing inconsistent crystal growth rates and increased crystal defects. Utility Model Content

[0006] Based on this, an insulation cylinder is provided to solve the problem that heat is easily lost at the splicing points of the splicing sections of the insulation cylinder in the prior art.

[0007] On one hand, this utility model provides a heat insulation cylinder for circumferential heat insulation of a single crystal furnace, the heat insulation cylinder comprising:

[0008] The insulation cylinder body includes at least two splicing sections. The splicing sections are annular and their center lines are coaxial. The splicing sections are arranged sequentially along the axial direction, and the axial end faces of adjacent splicing sections abut against each other.

[0009] The insulation component includes alumina cloth and filler. The thermal conductivity of the filler is less than that of the insulation cylinder. The alumina cloth is wrapped around the filler to form a deformable strip or ring-shaped insulation component.

[0010] The outer perimeter of the joint between the splicing sections is covered with insulation.

[0011] Based on the above technical solution, the present invention can be further improved as follows.

[0012] In one implementation, the splicing segment is divided into a first splicing segment and a second splicing segment.

[0013] The first splicing segment has at least two segments that abut against each other in sequence along the axial direction to form a structure of equal diameter on the outer wall;

[0014] The outer diameter of the second splicing segment is smaller than that of the first splicing segment. The second splicing segment abuts against the first splicing segment and forms a diameter-reducing structure on the outer wall.

[0015] In one implementation, the insulation component is divided into a first insulation component and a second insulation component.

[0016] The first insulation component surrounds the outer periphery of the contact position between adjacent first splicing segments;

[0017] The second insulation component surrounds the outer periphery of the abutment position between the first and second splicing sections;

[0018] The equal-diameter structure is located at the lower part of the insulation cylinder body, while the reduced-diameter structure is located at the upper part of the insulation cylinder body.

[0019] In one implementation, the first splice segment includes:

[0020] The receiving part is a ring-shaped recessed structure opened on the outer periphery of the first splicing segment, and the receiving part is located at the axial end of the first splicing segment;

[0021] The receiving parts of adjacent first splicing segments are attached and merged to form a receiving groove;

[0022] At any two abutting positions of the first splicing segments, the corresponding two first splicing segments are provided with receiving parts;

[0023] The first insulation component includes:

[0024] The snap-fit ​​part is used to snap into the receiving groove and fit tightly.

[0025] In one implementation, the first insulation component is elongated, and the snap-fit ​​portion protrudes along the middle of the width direction of the first insulation component and extends through the length direction of the first insulation component. The cross-sectional profile of the first insulation component in the width direction is convex.

[0026] In one implementation, the second insulation component includes:

[0027] The first surrounding portion is annular and is used to surround the end of the first splicing segment of the reduced diameter structure;

[0028] The second surrounding portion is annular and is used to surround the end of the second splicing segment of the reduced diameter structure;

[0029] The connecting part extends radially along the body of the insulation cylinder and is used to connect the first surrounding part and the second surrounding part.

[0030] In one implementation, the inner wall of the second insulation component has a stepped annular structure, and the inner wall of the second insulation component is closely fitted with the contact position of the first splicing segment and the second splicing segment corresponding to the diameter reduction structure.

[0031] In one implementation, the insulation cylinder also includes:

[0032] The insulation component is tightly attached to the outer wall of the insulation cylinder body by a binding structure set along its outer periphery.

[0033] In one implementation, the insulation cylinder also includes:

[0034] The binding element is wrapped around the outer wall of the insulation component and is used to press the insulation component tightly against the joint between the splicing sections.

[0035] Buckles, multiple buckles are provided and connected to the insulation component. Buckles are used to bind the component through. Buckles are distributed along the length of the strip insulation component or along the circumference of the ring insulation component.

[0036] In one implementation, when the insulation component surrounds the insulation cylinder body, the buckles are evenly spaced along the circumference of the insulation cylinder body and are arranged in at least two rows along the axial direction of the insulation cylinder body, with each row of buckles allowing a binding component to pass through.

[0037] The beneficial effects of this utility model are as follows:

[0038] Alumina cloth has excellent thermal insulation properties. It has a low thermal conductivity and can effectively hinder heat conduction. Alumina cloth has high elasticity and high temperature resistance. When alumina cloth is used as the outer wrapping material and layered with a low thermal conductivity filler, it effectively enhances the thermal insulation effect of the entire insulation component and improves its thermal insulation performance.

[0039] Therefore, in response to the problem that heat from the single crystal furnace can easily escape from the joint gap at the joint position between the splicing sections, this application provides an insulation component to cover the joint position between the splicing sections, thereby shielding the joint gap and reducing heat loss from the gap. In addition, the insulation component is designed as a strip or ring-shaped deformable structure, which allows the insulation component to be adjusted to fit tightly against the joint position between the splicing sections, and also makes it convenient for the insulation component to wrap around the ring-shaped joint position between the splicing sections.

[0040] In summary, this application improves the heat insulation effect, enhances the thermal insulation performance of the hot zone, increases the melting rate of the single crystal furnace, increases the crystallization rate of the single crystal silicon rod, reduces the power during the silicon rod pulling process, increases the melting rate and reduces the reaction amplitude between the quartz crucible and the silicon liquid, reduces oxygen generation, and further improves the quality of the single crystal silicon rod. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the structure of the insulation cylinder in one embodiment of the prior art;

[0042] Figure 2 This is a schematic diagram of the structure of the insulation cylinder in one embodiment of this application;

[0043] Figure 3 This is a schematic diagram of the structure of the first thermal insulation element in one embodiment of this application;

[0044] Figure 4 This is a schematic diagram of the cross-sectional structure of the first thermal insulation component in one embodiment of this application;

[0045] Figure 5 This is a schematic diagram of the structure of the second insulation component in one embodiment of this application;

[0046] Figure 6 This is a schematic diagram of the cross-sectional structure of the second insulation component in one embodiment of this application.

[0047] In the attached diagram, the components represented by each number are as follows:

[0048] 10. First splicing segment; 20. Second splicing segment;

[0049] 30. First insulation component; 31. Snap-fit ​​part;

[0050] 40. Second insulation component; 41. First surrounding part; 42. Second surrounding part; 43. Connecting part;

[0051] 50. Bundle; 60. Buckle. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit its scope. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components relevant to this utility model and are not drawn according to the actual number, shape, and size of the components. In actual implementation, the form, quantity, and proportion of each component can be arbitrarily changed. Without affecting the effects and objectives achieved by this utility model, all such changes should still fall within the scope of the technical content disclosed in this utility model.

[0053] In one embodiment of the prior art, see Figure 1 The total height of the insulation cylinder body is 1.2m to 1.5m, and the height of a single spliced ​​section is 400mm to 450mm or 200mm to 300mm. The temperature inside the furnace reaches 1800°C to 2000°C. Under high temperature conditions, significant deformation is likely to occur. A structure divided into multiple spliced ​​sections can effectively reduce deformation. Because it is difficult to process an excessively tall or large insulation cylinder body as a whole, and also difficult to perform overall stress relief, a multi-segment spliced ​​section structure is adopted. However, gaps will exist between adjacent spliced ​​sections, leading to heat loss.

[0054] Based on the above, this utility model embodiment provides a heat-insulating cylinder for circumferential heat insulation of a single crystal furnace. (See also...) Figure 2 The insulation cylinder includes an insulation cylinder body and insulation components. The insulation cylinder body includes at least two splicing sections, which are annular and their center lines are coaxial. The splicing sections are arranged sequentially along the axial direction, and the axial end faces of adjacent splicing sections abut against each other. The insulation components include alumina cloth and filler. The thermal conductivity of the filler is less than that of the insulation cylinder. The alumina cloth is wrapped around the filler to form a deformable strip or annular insulation component. The outer periphery of the abutment position between the splicing sections is covered with insulation components.

[0055] Using this solution, alumina cloth exhibits excellent thermal insulation performance. Its low thermal conductivity effectively hinders heat conduction. Furthermore, alumina cloth possesses high elasticity and high-temperature resistance. When alumina cloth is used as the outer layer and layered with an inner layer of low-thermal-conductivity filler, the overall thermal insulation effect of the insulation component is effectively enhanced, improving its performance. Therefore, addressing the issue of heat loss from the single-crystal furnace due to gaps at the joints between spliced ​​sections, this application utilizes insulation to cover these joints, effectively shielding the gaps. This design reduces heat loss through gaps. Furthermore, the insulation component is designed as a strip or ring-shaped deformable structure, allowing it to be adjusted to fit snugly against the contact points between the splicing sections. It also facilitates the insulation component wrapping around the ring-shaped contact points between the splicing sections. In summary, this application improves the thermal insulation effect while enhancing the thermal insulation performance of the thermal field, increasing the melting rate of the single crystal furnace, increasing the crystallization rate of the single crystal silicon rod, reducing the power consumption during the silicon rod pulling process, increasing the melting rate, reducing the reaction amplitude between the quartz crucible and the silicon melt, reducing oxygen production, and further improving the quality of the single crystal silicon rod.

[0056] In this embodiment, the filler material must meet two conditions: low thermal conductivity and softness / deformability. It must also be able to withstand the high-temperature environment during the single-crystal silicon pulling process. For example, the filler can be ceramic fiber (e.g., pitch-based carbon fiber, Serra cotton, or Serra zirconia-containing cotton) or aerogel (e.g., alumina aerogel or silicon carbide aerogel).

[0057] In some embodiments, see Figure 2 The splicing section is divided into a first splicing section 10 and a second splicing section 20. The first splicing section 10 has at least two sections that abut against each other along the axial direction to form a uniform diameter structure on the outer wall. The outer diameter of the second splicing section 20 is smaller than that of the first splicing section 10. The second splicing section 20 abuts against the first splicing section 10 to form a reduced diameter structure on the outer wall. Thus, since the first splicing section 10 and the second splicing section 20 are essentially the outer periphery of the insulation cylinder body, and in the actual use of the single crystal furnace, when the internal reaction space enclosed by the insulation cylinder body is too large, this application reduces the furnace space of the single crystal furnace by setting a structure with a locally reduced inner wall diameter, thereby reducing the heating volume and heat loss. When the inner wall diameter is reduced, it is basically accompanied by a reduction in the outer wall diameter of the insulation cylinder body, thus forming a reduced diameter structure on the outer wall, resulting in two different outer wall structures for the first splicing section 10 and the second splicing section 20.

[0058] In some embodiments, see Figure 2The insulation component is divided into a first insulation component 30 and a second insulation component 40. The first insulation component 30 surrounds the outer periphery of the abutment position between adjacent first splicing sections 10; the second insulation component 40 surrounds the outer periphery of the abutment position between the first splicing section 10 and the second splicing section 20; the equal diameter structure is located at the lower part of the insulation cylinder body, and the reduced diameter structure is located at the upper part of the insulation cylinder body. Thus, since the outer periphery of the insulation cylinder body is formed by the abutment of two different radially sized first splicing segments 10 and second splicing segments 20, the abutment positions on the insulation cylinder body are divided into abutment at the equal diameter structure and abutment at the reduced diameter structure. Therefore, two different first insulation components 30 and second insulation components 40 need to be set. The first insulation component 30 abuts the corresponding position at the equal diameter structure, and the second insulation component 40 abuts the corresponding position at the reduced diameter structure. In addition, since the crucible in the single crystal furnace is located in the lower middle part of the insulation cylinder body, the reduced diameter structure is set in the upper part of the insulation cylinder body, that is, the ineffective space in the upper part is reduced, thereby reducing the volume in the single crystal furnace, reducing the air heating volume, thereby reducing heat loss and improving heating efficiency.

[0059] In the embodiments, see Figure 2 Since the crucible and heater are located in the lower middle part of the single crystal furnace, the upper space of the furnace can be appropriately reduced. Therefore, the diameter-reduction structure is set on the upper side of the insulation cylinder body. This diameter-reduction structure corresponds to the reduction of the inner diameter at the second splicing section 20, thereby reducing the furnace space and heat loss. This is particularly suitable for single crystal growth processes requiring high-precision temperature control, effectively reducing ineffective heat transfer within the furnace. Furthermore, the diameter-reduction structure offers other advantages: it allows for more concentrated heat transfer to the growth area, reducing ineffective heat circulation within the furnace, significantly improving heating efficiency, reducing energy consumption, improving the quality of single crystal growth, optimizing the thermal field distribution within the furnace, resulting in more uniform temperature, and effectively reducing defects during crystal growth.

[0060] In the embodiments, see Figure 2 The first splicing section 10 is located at the lower part of the main body of the heat preservation cylinder and is provided in three parts. The second splicing section 20 abuts against the first splicing section 10 at the top and has one part.

[0061] In some embodiments, see Figure 2 , Figure 3 and Figure 4The first splicing segment 10 includes a receiving portion, which is a ring-shaped recessed structure formed on the outer periphery of the first splicing segment 10 and located at the axial end of the first splicing segment 10. The receiving portions of adjacent first splicing segments 10 are fitted together to form a receiving groove. At any two abutting positions of the first splicing segments 10, the corresponding two first splicing segments 10 are provided with receiving portions. The first thermal insulation member 30 includes a snap-fit ​​portion 31, which is used to snap into the receiving groove and fit tightly. In this way, the surrounding position of the first thermal insulation member 30 is the abutting position of any two adjacent first splicing segments 10. Therefore, receiving portions are provided at the ends of the two first splicing segments 10 located at this position. The two receiving portions form a receiving groove and are used for the insertion of the snap-fit ​​portion 31, so that the first thermal insulation member 30 fits more tightly with the first splicing segment 10, thereby effectively improving the sealing effect of the thermal insulation member at the abutting position of adjacent first splicing segments 10.

[0062] In the embodiments, see Figure 2 The fitting method between the snap-fit ​​part 31 and the snap-fit ​​groove can be a tight fit. The sealing effect after the snap-fit ​​part 31 is inserted into the snap-fit ​​groove is enhanced by the deformation of the snap-fit ​​part 31 and the snap-fit ​​groove at the same time.

[0063] In the embodiments, see Figure 2 The main body of the insulation cylinder is made of soft felt + graphite / carbon-carbon material. The graphite / carbon-carbon material is a composite material of graphite and carbon-carbon, and serves as the inner layer structure of the insulation cylinder, providing high-temperature resistance. The outer layer of the insulation cylinder is formed by multiple layers of soft felt, each layer of soft felt being approximately 1 cm thick. The thickness of the insulation cylinder formed after the soft felt is 160 mm to 190 mm, which is equivalent to the thickness of each first splicing segment 10 being 160 mm to 190 mm. The receiving part is equivalent to the material removal structure on the first splicing segment 10. The material removal structure only applies to the soft felt, that is, removing 3-4 layers of wrapped soft felt from the outer wall of the corresponding axial end of the first splicing segment 10.

[0064] In some embodiments, see Figure 3 and Figure 4The first insulation component 30 is elongated, with a snap-fit ​​portion 31 protruding along the middle of its width and extending through its length. The cross-sectional profile of the first insulation component 30 in its width direction is U-shaped. Because the first insulation component 30 is snapped into the snap-fit ​​groove in a tight fit, using a strip-shaped first insulation component 30 makes it easier for it to snap into the corresponding groove, thus improving the tightness of the connection and enhancing the insulation effect, resulting in energy saving and power reduction. The cross-sectional profile of the first insulation component 30 in its width direction is U-shaped, and the protruding structure at the top of the U-shape is the snap-fit ​​portion 31, which presses and seals the snap-fit ​​groove radially. The structures extending towards both ends at the bottom of the U-shape are used to overlap the outer walls of the two abutting first splicing sections 10, thereby extending a distance axially and effectively improving the heat insulation effect.

[0065] In some embodiments, see Figure 5 and Figure 6 The second insulation component 40 includes a first surrounding portion 41, a second surrounding portion 42, and a connecting portion 43. The first surrounding portion 41 is annular and is used to surround the end of the first splicing segment 10 of the reduced diameter structure; the second surrounding portion 42 is annular and is used to surround the end of the second splicing segment 20 of the reduced diameter structure; the connecting portion 43 extends radially along the body of the insulation cylinder and is used to connect the first surrounding portion 41 and the second surrounding portion 42. In this way, the annular second insulation component 40 is used to be positioned at the location of the reduced diameter structure and to insulate the abutting first splicing segment 10 and the second splicing segment 20.

[0066] In some embodiments, see Figure 5 and Figure 6 The inner wall of the second insulation component 40 has a stepped annular structure, and the inner wall of the second insulation component 40 is tightly fitted to the contact points of the first splicing segment 10 and the second splicing segment 20 corresponding to the diameter reduction structure. In this way, the second insulation component 40 surrounds and fits the two splicing segments corresponding to the diameter reduction structure, thereby enhancing the heat insulation effect of the second insulation component 40 on the diameter reduction structure.

[0067] In the embodiments, see Figure 1 One section of the reduced-diameter structure is formed by the coaxial abutment of a first splicing segment 10 and a second splicing segment 20. Therefore, the installation of the second insulation component 40 includes the following two methods:

[0068] The first method involves first fitting the second insulation component 40 onto either of the two splicing sections corresponding to the reduced diameter structure, and then extending the other splicing section into the second insulation component 40 to complete the installation of the second insulation component 40 at the reduced diameter structure.

[0069] The second method involves first stacking the second splicing segment 20 on top of the first splicing segment 10, and then inserting the second insulation component 40 along the upper end of the second splicing segment 20 into the contact position between the second splicing segment 20 and the first splicing segment 10 to complete the installation of the second insulation component 40 at the diameter reduction structure.

[0070] In some embodiments, the insulation component is tightly attached to the outer wall of the insulation cylinder body by a binding structure provided along its outer periphery. In this way, the insulation component can be fixed by a binding structure, that is, the insulation component is radially pressed against the insulation cylinder body by the binding structure provided on the outer periphery of the insulation component, so as to achieve the coverage and heat insulation of the contact position between the splicing sections.

[0071] In some embodiments, see Figure 4 and Figure 6 The insulation cylinder also includes a binding member 50, which surrounds the outer wall of the insulation component and is used to press the insulation component tightly against the joint between the splicing sections. In this way, by setting the binding member 50 to surround the outer periphery of the insulation component and press it tightly against the joint between the splicing sections, the insulation component can better shield the joint where heat is easily lost, thereby improving the heating efficiency of the single crystal furnace and reducing energy loss.

[0072] In some embodiments, see Figure 4 and Figure 6 The insulation cylinder also includes multiple clips 60 connected to the insulation component. The clips 60 are used for the binding members 50 to pass through. The clips 60 are distributed along the length of the strip-shaped insulation component or along the circumference of the annular insulation component. Thus, by setting up the clips 60 and having the binding members 50 pass through them, the position of the insulation component is fixed, and the insulation component is pressed tightly against the insulation cylinder body, thereby improving the stability of the insulation component after installation.

[0073] In other embodiments, see Figure 4 and Figure 6 There are at least two buckles 60 in the same circumferential direction. When there are two buckles 60, the two buckles 60 are evenly distributed in the circumferential direction. In addition, there may be three, four or five buckles 60 in the same circumferential direction, etc. It is preferred that the buckles 60 are evenly distributed in the circumferential direction.

[0074] In some embodiments, see Figure 4 and Figure 6 When the insulation component is wrapped around the outside of the insulation cylinder body, the buckles 60 are evenly spaced along the circumference of the insulation cylinder body and arranged in at least two rows along the axial direction of the insulation cylinder body. Each row of buckles 60 allows one binding member 50 to pass through. In this way, multiple rows of buckles 60 are arranged along the axial direction of the insulation cylinder body, and each row of buckles 60 passes through one binding member 50, thereby improving the clamping effect of the binding member 50 on the insulation component. Using at least two binding members 50 can effectively reduce the movement of the insulation component after it is fixed and improve the stability of use.

[0075] In the embodiments, see Figure 1 , Figure 4 and Figure 6 The buckles 60 are arranged in three rows along the axial direction of the insulation cylinder body. The three rows of buckles 60 are used in conjunction with the corresponding three binding parts 50 to facilitate a tight fit between the insulation parts and the insulation cylinder body.

[0076] In this embodiment, the binding member 50 is an adjustable structure, such as a cable tie, backpack strap, or waist buckle.

[0077] In one embodiment, see Figure 1 The main body of the insulation cylinder includes three first splicing sections 10 and one second splicing section 20. The first splicing sections 10 and the second splicing sections 20 are coaxial and sequentially attached. The three first splicing sections 10 are located at the bottom, and the second splicing section 20 is located at the top. The outer periphery of the abutment between adjacent first splicing sections 10 is covered with a strip-shaped first insulation element 30. The cross-section of the first insulation element 30 in the width direction is convex. The outer periphery of the abutment between adjacent first splicing sections 10 and second splicing sections 20 is covered with an annular second insulation element 40. After installation, the first insulation element 30 and the second insulation element 40 respectively surround the corresponding position of the insulation cylinder main body. The outer walls of the first insulation element 30 and the second insulation element 40 are connected with buckles 60. The buckles 60 of both are arranged in three rows along the axial direction of the insulation cylinder main body. Each row has multiple buckles 60 evenly spaced along the circumference. Each row of buckles 60 allows a binding piece 50 to pass through.

[0078] In the description of this utility model, it should be understood that the terms "length," "width," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. The term "connection" should be interpreted broadly, for example, it can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two elements or an interaction relationship between two elements, unless otherwise explicitly specified. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0079] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0080] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A heat-insulating cylinder, characterized in that, The insulation cylinder is used for circumferential insulation of a single crystal furnace and includes: The insulation cylinder body includes at least two splicing sections, the splicing sections are annular and their center lines are coaxially arranged, the splicing sections are arranged sequentially along the axial direction, and the axial end faces of adjacent splicing sections abut against each other; The insulation component includes an alumina cloth and a filler, wherein the thermal conductivity of the filler is less than that of the insulation cylinder, and the alumina cloth is wrapped around the filler to form a deformable strip or ring-shaped insulation component. The outer periphery of the contact points between the splicing segments is covered with the insulation component.

2. The heat-insulating cylinder according to claim 1, characterized in that, The splicing segment is divided into a first splicing segment (10) and a second splicing segment (20). The first splicing segment (10) has at least two segments that abut against each other in sequence along the axial direction to form a structure of equal diameter on the outer wall; The outer diameter of the second splicing segment (20) is smaller than the outer diameter of the first splicing segment (10). The second splicing segment (20) abuts against the first splicing segment (10) and forms a diameter-reducing structure on the outer wall.

3. The heat-insulating cylinder according to claim 2, characterized in that, The insulation component is divided into a first insulation component (30) and a second insulation component (40). The first insulation element (30) surrounds the outer periphery of the abutment position between adjacent first splicing segments (10); The second insulation component (40) surrounds the outer periphery of the abutment position between the first splicing segment (10) and the second splicing segment (20); The equal-diameter structure is located at the lower part of the insulation cylinder body, and the reduced-diameter structure is located at the upper part of the insulation cylinder body.

4. The heat-insulating cylinder according to claim 3, characterized in that, The first splicing segment (10) includes: The receiving part is formed on the outer periphery of the first splicing segment (10) and is a ring-shaped recessed structure. The receiving part is located at the axial end of the first splicing segment (10). The receiving portions of adjacent first splicing segments (10) are attached and merged to form a receiving groove; At any two abutting positions of the first splicing segments (10), the corresponding two first splicing segments (10) are provided with the receiving portion; The first insulation component (30) includes: The snap-fit ​​part (31) is used to snap into the receiving groove and fit tightly.

5. The heat-insulating cylinder according to claim 4, characterized in that, The first insulation component (30) is long and narrow. The snap-fit ​​part (31) protrudes along the middle of the width direction of the first insulation component (30) and extends through the length direction of the first insulation component (30). The cross-sectional profile of the first insulation component (30) in the width direction is convex.

6. The heat-insulating cylinder according to claim 3, characterized in that, The second insulation component (40) includes: The first surrounding portion (41) is annular and is used to surround the end of the first splice segment (10) of the reduced diameter structure; The second surrounding portion (42) is annular and is used to surround the end of the second splice segment (20) of the reduced diameter structure; A connecting part (43) extends radially along the body of the heat-insulating cylinder and is used to connect the first surrounding part (41) and the second surrounding part (42).

7. The heat-insulating cylinder according to claim 6, characterized in that, The inner wall of the second insulation component (40) has a stepped annular structure, and the inner wall of the second insulation component (40) is closely fitted with the contact position of the first splicing section (10) and the second splicing section (20) corresponding to the diameter reduction structure.

8. The heat-insulating cylinder according to any one of claims 1-7, characterized in that, The insulation component is tightly attached to the outer wall of the insulation cylinder body by a binding structure provided along its outer periphery.

9. The heat-insulating cylinder according to claim 8, characterized in that, The insulation cylinder also includes: A binding member (50) surrounds the outer wall of the insulation member and is used to press the insulation member tightly at the abutment between the splicing sections. Buckles (60), multiple buckles (60) are provided and connected to the insulation component, the buckles (60) are used for the binding component (50) to pass through, and the buckles (60) are distributed along the length of the strip-shaped insulation component or along the circumference of the ring-shaped insulation component.

10. The heat-insulating cylinder according to claim 9, characterized in that, When the insulation component surrounds the body of the insulation cylinder, the buckles (60) are evenly spaced along the circumference of the body of the insulation cylinder and are arranged in at least two rows along the axial direction of the body of the insulation cylinder, with each row of buckles (60) allowing one of the binding components (50) to pass through.

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