Multistage turbomolecular pump

Abstract

The utility model belongs to vacuum equipment technical field especially for multistage turbine molecular pump, including the casing, the front and back of casing all are equipped with the air inlet of equal distance arrangement, and the left side of casing is provided with the controller, and the inside of casing is provided with multistage turbine molecular pump, refrigeration pipe frame and two heating pipes respectively, and the inner bottom wall of casing is fixedly connected with two temperature sensors, and the right side of casing is provided with refrigeration module, and the output of refrigeration module penetrates casing and is fixedly communicated with the right -hand end of refrigeration pipe frame, and the upper surface of casing is fixedly communicated with two air ducts, and the inside of every air duct is provided with the exhaust fan motor, and the air inlet of equal distance arrangement is set up in the front and back of casing, and cooperate the exhaust fan motor in the air duct to form forced convection heat dissipation channel, thereby can accelerate air flow, effectively promote the heat dissipation efficiency of motor and bearing operation, avoid the overheating protection shutdown problem caused by the environment temperature is too high.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment technology, specifically relating to a multi-stage turbomolecular pump. Background Technology

[0002] A multistage turbomolecular pump is a device that uses the interaction of multistage high-speed rotating turbine rotor blades and stationary blades to achieve high vacuum or ultra-high vacuum pumping by utilizing the momentum transfer between gas molecules and the blade surface. Its core working principle is that the high-speed rotation of the moving impeller causes gas molecules to gain directional momentum after colliding with the blades. Then, guided by the stationary impeller, the gas is pushed from the inlet to the outlet, thereby achieving the purpose of pumping.

[0003] However, during the operation of a multistage turbomolecular pump, the motor and bearings generate a large amount of heat due to high-speed rotation. In particular, during the high-speed rotation of the medium-frequency motor, the copper losses in the windings, the eddy current losses in the iron core, and the wind friction losses generated by the rotor friction with the air are superimposed, which is especially significant under high load or long-term continuous operation. If the ambient temperature is too high, the temperature difference between the pump body and the outside world decreases, the heat dissipation efficiency drops sharply, and heat continues to accumulate, which can easily trigger overheat protection and cause shutdown. In low-temperature environments, the viscosity of the lubricating oil in the mechanical bearings will increase significantly due to the sudden drop in temperature, or even solidify. This not only hinders the normal operation of the bearings, but may also cause starting difficulties or dry friction wear, seriously affecting the service life and operational stability of the equipment.

[0004] To address the aforementioned issues, this application proposes a multi-stage turbomolecular pump. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides a multi-stage turbomolecular pump, which features improved operational stability.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a multi-stage turbomolecular pump, including a housing, with air inlets arranged at equal intervals on both the front and back sides of the housing, a controller on the left side of the housing, a multi-stage turbomolecular pump, a refrigeration tube rack, and two heating tubes respectively disposed inside the housing, two temperature sensors fixedly connected to the inner bottom wall of the housing, a refrigeration module disposed on the right side of the housing, the output end of the refrigeration module penetrating the housing and fixedly connected to the right end of the refrigeration tube rack, two air guide pipes fixedly connected to the upper surface of the housing, each air guide pipe having an exhaust motor disposed inside, and mounting pipes fixedly connected to both the front and upper surfaces of the housing.

[0007] As a preferred embodiment of this utility model, two connecting brackets are fixedly connected to the front and back of the housing, and each connecting bracket is provided with a fixing pin inside.

[0008] As a preferred embodiment of this utility model, the left side of the housing is movably hinged with an opening and closing door, and the left side of the opening and closing door is fixedly connected to the right side of the controller.

[0009] As a preferred embodiment of this utility model, a fixing plate is fixedly connected to the bottom surface of the multi-stage turbomolecular pump, and the bottom surface of the fixing plate is fixedly connected to the inner bottom wall of the shell.

[0010] As a preferred embodiment of this utility model, the outer surface of the refrigeration tube rack is fixedly connected to two fixing brackets, and the two fixing brackets are fixedly connected to the inner wall of the shell on opposite sides.

[0011] As a preferred technical solution of this utility model, a limiting frame is fixedly connected to the outer surface of each heating tube, and the two limiting frames are fixedly connected to the inner wall of the shell on opposite sides.

[0012] As a preferred embodiment of this utility model, a support plate is fixedly connected to the bottom surface of the refrigeration module, and the left side of the support plate is fixedly connected to the right side of the housing.

[0013] As a preferred embodiment of this utility model, each of the exhaust motors is fixedly connected to a connecting seat on its front side, and the front side of each connecting seat is fixedly connected to the inner wall of the air duct.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: by setting air inlets arranged at equal intervals on the front and back of the housing, and forming a forced convection heat dissipation channel with the exhaust motor in the air duct, the air flow can be accelerated, effectively improving the heat dissipation efficiency of the motor and bearings during operation, and avoiding the problem of overheat protection shutdown due to excessively high ambient temperature. At the same time, the linkage design of the refrigeration module and refrigeration pipe rack can provide active cooling in high-temperature environments, reducing the internal temperature of the pump body by circulating cold energy. The cooperation of two heating pipes and temperature sensors can automatically start the preheating function in low-temperature environments, preventing the mechanical bearing lubricating oil from solidifying and affecting operation. This realizes bidirectional regulation of the equipment operating temperature. The overall structure, through intelligent temperature control and heat dissipation system, significantly enhances the operational stability, applicability and service life of the multi-stage turbomolecular pump under different ambient temperatures. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a cross-sectional view of the shell structure in this utility model;

[0018] Figure 3 This is a schematic diagram of the temperature sensor in this utility model;

[0019] Figure 4 This is a right-side structural schematic diagram of the refrigeration module in this utility model;

[0020] Figure 5 This is a schematic diagram of the air duct structure in this utility model;

[0021] Figure 6 This is a schematic diagram of the structure of the exhaust motor in this utility model;

[0022] In the diagram: 1. Housing; 2. Opening / closing door; 3. Controller; 4. Connecting frame; 5. Air inlet; 6. Fixing pin; 7. Multistage turbomolecular pump; 8. Fixing plate; 9. Refrigeration pipe rack; 10. Fixing frame; 11. Temperature sensor; 12. Limiting frame; 13. Heating pipe; 14. Support plate; 15. Refrigeration module; 16. Air duct; 17. Mounting pipe; 18. Exhaust fan motor; 19. Connecting seat. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0024] Please see Figure 1-6 The present invention provides the following technical solution: a multi-stage turbomolecular pump, including a housing 1, with air inlets 5 arranged at equal intervals on the front and back of the housing 1, a controller 3 on the left side of the housing 1, a multi-stage turbomolecular pump 7, a refrigeration tube rack 9 and two heating tubes 13 respectively disposed inside the housing 1, two temperature sensors 11 fixedly connected to the inner bottom wall of the housing 1, a refrigeration module 15 disposed on the right side of the housing 1, the output end of the refrigeration module 15 passing through the housing 1 and fixedly connected to the right end of the refrigeration tube rack 9, two air guide pipes 16 fixedly connected to the upper surface of the housing 1, each air guide pipe 16 having an exhaust motor 18 disposed inside, and an installation pipe 17 fixedly connected to the front and upper surface of the housing 1;

[0025] In this embodiment, the mounting pipes 17 arranged on the front and upper surfaces of the housing 1 can guide the pipes to pass smoothly through the interior of the housing 1 and accurately connect to the inlet and outlet of the multi-stage turbomolecular pump 7. Meanwhile, the temperature sensor 11 is a detection device that can sense temperature and convert it into a usable output signal.

[0026] Specifically, two connecting brackets 4 are fixedly connected to the front and back of the housing 1. Each connecting bracket 4 has a fixing pin 6 inside. In this embodiment, the connecting bracket 4 can be penetrated and fixed in a suitable device by the fixing pin 6, and the device as a whole can be fixed by the fixing of the connecting bracket 4.

[0027] Specifically, the left side of the housing 1 is movably hinged with an opening and closing door 2, and the left side of the opening and closing door 2 is fixedly connected to the right side of the controller 3. In this embodiment, the housing 1 can be opened or closed through the opening and closing door 2. Meanwhile, the controller 3 is a programmable logic controller (PLC), which is a digital computing electronic system designed specifically for industrial automation control. It stores instructions through a programmable memory and can perform functions such as logical operations, sequential control, timing, counting, and arithmetic operations to realize automated control of the equipment.

[0028] Specifically, a fixing plate 8 is fixedly connected to the bottom surface of the multi-stage turbomolecular pump 7. The bottom surface of the fixing plate 8 is fixedly connected to the inner bottom wall of the housing 1. In this embodiment, the multi-stage turbomolecular pump 7 can be fixed to the housing 1 through the fixing plate 8, so that the multi-stage turbomolecular pump 7 can be used stably.

[0029] Specifically, two fixing brackets 10 are fixedly connected to the outer surface of the refrigeration tube rack 9. The two fixing brackets 10 are fixedly connected to the inner wall of the housing 1 on the side that is far away from each other. In this embodiment, the fixing brackets 10 can fix the refrigeration tube rack 9 into the housing 1 and make the refrigeration tube rack 9 stable.

[0030] Specifically, each heating tube 13 is fixedly connected to a limiting frame 12 on its outer surface. The two limiting frames 12 are fixedly connected to the inner wall of the housing 1 on their opposite sides. In this embodiment, the heating tube 13 can be fixed to the housing 1 by the limiting frame 12. At the same time, the heating tube 13 is a tubular heating element that converts electrical energy into heat energy. It is widely used in industrial heating, civil heating, drying, heat preservation and equipment temperature control and other scenarios.

[0031] Specifically, a support plate 14 is fixedly connected to the bottom surface of the refrigeration module 15. The left side of the support plate 14 is fixedly connected to the right side of the housing 1. In this embodiment, the refrigeration module 15 can be fixed to the housing 1 through the support plate 14. At the same time, the bottom surface of the refrigeration module 15 is fixedly connected to the right side of the housing 1 through the support plate 14 to ensure stable installation. The refrigeration module 15 consists of a compressor subsystem, a condenser, an expansion valve, an evaporator, and a control system, etc., to realize the refrigeration function.

[0032] Specifically, each exhaust motor 18 is fixedly connected to a connecting seat 19 on its front side, and the front side of each connecting seat 19 is fixedly connected to the inner wall of the air duct 16. In this embodiment, the exhaust motor 18 can be fixed to the air duct 16 through the connecting seat 19. At the same time, the exhaust motor 18 is an electromechanical device that generates negative pressure airflow by driving the fan blades to rotate, thereby realizing the functions of air extraction, discharge or fluid transportation.

[0033] The working principle and usage process of this utility model are as follows: First, the equipment is securely installed using the connecting frame 4 and the fixing pin 6, ensuring the connecting frame 4 is reliably fixed by the fixing pin 6 to prevent shaking during operation. Then, the vacuum pipeline is connected to the housing 1 through the installation pipe 17, precisely aligning with the inlet and outlet ends of the multi-stage turbomolecular pump 7. Before starting the system, the opening and closing door 2 must be opened to check the stability of the installation of the multi-stage turbomolecular pump 7 through the fixing plate 8, the refrigeration pipe rack 9 through the fixing frame 10, the heating pipe 13 through the limit frame 12, the temperature sensor 11, the refrigeration module 15 through the support plate 14, and the exhaust motor 18 through the connecting seat 19. After confirming that everything is correct, the door is closed. When the door 2 is closed, the power supply of the controller 3 is turned on and the temperature threshold is set. When the temperature sensor 11 detects that the temperature inside the housing 1 reaches the preset high temperature value, the controller 3 automatically starts the exhaust motor 18. Forced convection heat dissipation is formed through the air inlet 5 and the air duct 16. If the temperature continues to rise, the refrigeration module 15 is started. The compressor compresses and liquefies the refrigerant, dissipates heat, and sends it to the refrigeration tube rack 9 through the expansion valve to evaporate and absorb heat, thereby achieving active cooling. When a low temperature is detected, the controller 3 starts the heating tube 13 to preheat, preventing the lubricating oil of the mechanical bearing from solidifying, ensuring the stable operation of the equipment in a wide temperature environment, and significantly improving the environmental adaptability and service life of the multi-stage turbomolecular pump 7.

[0034] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A multi-stage turbomolecular pump, characterized in that: The housing (1) includes a housing (1), on the front and back of which are provided air inlets (5) arranged at equal intervals. A controller (3) is provided on the left side of the housing (1). A multi-stage turbomolecular pump (7), a refrigeration tube rack (9) and two heating tubes (13) are respectively provided inside the housing (1). Two temperature sensors (11) are fixedly connected to the inner bottom wall of the housing (1). A refrigeration module (15) is provided on the right side of the housing (1). The output end of the refrigeration module (15) passes through the housing (1) and is fixedly connected to the right end of the refrigeration tube rack (9). Two air guide pipes (16) are fixedly connected to the upper surface of the housing (1). Each air guide pipe (16) is provided with an exhaust motor (18). An installation pipe (17) is fixedly connected to the front and upper surface of the housing (1).

2. The multi-stage turbomolecular pump according to claim 1, characterized in that: The front and back of the housing (1) are fixedly connected to two connecting brackets (4), and each connecting bracket (4) is provided with a fixing pin (6).

3. The multi-stage turbomolecular pump according to claim 1, characterized in that: The left side of the housing (1) is movably hinged to an opening and closing door (2), and the left side of the opening and closing door (2) is fixedly connected to the right side of the controller (3).

4. The multi-stage turbomolecular pump according to claim 1, characterized in that: The bottom surface of the multi-stage turbomolecular pump (7) is fixedly connected to a fixing plate (8), and the bottom surface of the fixing plate (8) is fixedly connected to the inner bottom wall of the housing (1).

5. The multi-stage turbomolecular pump according to claim 1, characterized in that: Two fixing brackets (10) are fixedly connected to the outer surface of the refrigeration tube rack (9), and the two fixing brackets (10) are fixedly connected to the inner wall of the shell (1) on the side that is far away from each other.

6. The multistage turbomolecular pump according to claim 1, characterized in that: Each of the heating tubes (13) has a limiting bracket (12) fixedly connected to its outer surface, and the two limiting brackets (12) are fixedly connected to the inner wall of the housing (1) on opposite sides.

7. The multistage turbomolecular pump according to claim 1, characterized in that: The bottom surface of the refrigeration module (15) is fixedly connected to a support plate (14), and the left side of the support plate (14) is fixedly connected to the right side of the shell (1).

8. The multistage turbomolecular pump according to claim 1, characterized in that: Each of the exhaust motors (18) has a connecting seat (19) fixedly connected to its front side, and the front side of each connecting seat (19) is fixedly connected to the inner wall of the air duct (16).

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