A crystal bar rounding device

Abstract

This utility model relates to the field of semiconductor processing technology and discloses a crystal ingot grinding device, including a vacuum chuck, a linear module, and a cutting mechanism. The vacuum chuck is used to adsorb and fix a vertically arranged crystal ingot. The linear module is used to drive the cutting mechanism to move in the vertical direction. The cutting mechanism includes a rotating platform, a connecting frame, and two cutting blade assemblies. The rotating platform is coaxially arranged with the vacuum chuck and connected to the output end of the linear module. The connecting frame is located at the output end of the rotating platform and has a cutting cavity. The cutting edges of the two cutting blade assemblies are arranged opposite each other and can contact the sidewall of the crystal ingot in the cutting cavity. The cutting blade assemblies are fixedly connected to the connecting frame. The beneficial effects of this utility model are: reducing the difficulty of loading and unloading crystal ingots, reducing the load, reducing production costs, and improving grinding efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a crystal rod grinding device. Background Technology

[0002] After the crystal rod is formed, it is cut into wafers after processes such as exposure and cleaning. In order to ensure the precision, uniformity and purity of the cutting process, the crystal rod needs to be rounded to remove impurities on the surface of the crystal rod, reduce the difficulty of polishing and cleaning processes, improve the flatness of the wafer surface, facilitate the maintenance of uniform thickness during wafer cutting, reduce edge loss and improve yield.

[0003] In the existing technology, when grinding crystal rods, the crystal rods need to be placed horizontally. After the grinding device clamps the crystal rods, the driving mechanism drives the crystal rods to rotate, and the cutting blade cuts the surface of the crystal rods. Since the overall weight of the crystal rods is large, the load on the grinding device is large. A high-power driving mechanism is required to drive the crystal rods to rotate to meet the grinding requirements. The crystal rod loading and unloading process is complicated and the production cost is high. At the same time, generally only a single cutting blade is set to adjust the cutting feed of the crystal rods, resulting in low grinding efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a crystal rod grinding device that reduces the difficulty of loading and unloading crystal rods, reduces the load, lowers production costs, and improves grinding efficiency.

[0005] To achieve the above objectives, this utility model provides a crystal rod grinding device, including a vacuum chuck, a linear module, and a cutting mechanism;

[0006] The vacuum suction cup is used to adsorb and fix the vertically arranged crystal rod;

[0007] The linear module is used to drive the cutting mechanism to move in the vertical direction;

[0008] The cutting mechanism includes a rotating platform, a connecting frame, and two cutting blade assemblies. The rotating platform is coaxially arranged with the vacuum suction cup and is connected to the output end of the linear module.

[0009] The connecting frame is mounted on the output end of the rotary platform, and the connecting frame is provided with a cutting cavity;

[0010] The cutting edges of the two cutting assemblies are arranged opposite each other and can contact the sidewall of the crystal rod in the cutting cavity. The cutting assemblies are fixedly connected to the connecting frame.

[0011] Furthermore, the connecting frame includes a first ring body, a second ring body, and multiple connecting plates;

[0012] The first ring body and the second ring body are coaxially arranged;

[0013] The second ring body is located below the first ring body, and two of the aforementioned cutting blade assemblies are fixedly connected to the second ring body;

[0014] Multiple connecting plates are arranged around the axis of the first ring body. The top of the connecting plate is connected to the first ring body, and the bottom of the connecting plate is connected to the second ring body. The connecting plate has a liquid flow channel inside, and the connecting plate has a liquid inlet and a nozzle communicating with the liquid flow channel. The axis of the nozzle is perpendicular to the axis of the first ring body.

[0015] The first ring body, the second ring body, and the plurality of connecting plates cooperate to form the cutting cavity.

[0016] Furthermore, the cutter assembly includes a fixed plate, a first motor, a first guide rail, and a cutter. The fixed plate is fixed to the second ring body, the motor is connected to the fixed plate, the output shaft of the motor has a threaded section, the cutter is sleeved on the threaded section and threadedly connected to the threaded section, and the cutter is fixedly connected to the slider of the first guide rail.

[0017] Furthermore, the cutter includes a blade body and a connecting seat, the blade body being fixedly connected to the connecting seat, the connecting seat being sleeved on the threaded section and fixedly connected to the slider of the first guide rail.

[0018] Furthermore, the number of the nozzles is at least one.

[0019] Furthermore, the connecting plate is fixedly connected to both the first ring body and the second ring body by screws.

[0020] Furthermore, the linear module includes a base, a second motor, a lead screw, a slide, and a mounting plate. The second motor is connected to the base, and the output end of the second motor is drivenly connected to the lead screw. The lead screw is rotatably connected to the base. The slide is sleeved outside the lead screw and threadedly connected to the lead screw. The mounting plate is fixedly connected to the slide and also fixedly connected to the rotating platform.

[0021] Furthermore, the projection of the mounting plate onto the vertical plane is L-shaped. The mounting plate includes a vertically arranged first plate and a horizontally arranged second plate. The first plate is fixedly connected to the slide, and the second plate is fixedly connected to the rotating platform.

[0022] Compared with existing technologies, the crystal rod grinding device of this embodiment has the following advantages: It uses a vacuum chuck to fix and adsorb vertically arranged crystal rods, eliminating the need for clamping and reducing the difficulty of loading and unloading. A linear module drives the cutting mechanism to move vertically. The cutting mechanism includes a rotating platform, a connecting frame, and two cutting blade assemblies. The rotating platform is coaxially arranged with the vacuum chuck and connected to the output end of the linear module. The connecting frame is located at the output end of the rotating platform and has a cutting cavity. The cutting edges of the two cutting blade assemblies are arranged opposite each other and can contact the sidewall of the crystal rod in the cutting cavity. The cutting blade assemblies are fixedly connected to the connecting frame. When cutting the crystal rod, the crystal rod is vertical and fixed, eliminating the need to rotate it, reducing the load on the grinding device and lowering production costs. Simultaneously, the linear module drives the rotating platform downwards, which in turn drives the connecting frame, causing the two cutting blade assemblies to rotate synchronously. The two cutting blade assemblies adjust the cutting feed of the crystal rod, improving grinding efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the crystal rod grinding device according to an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the cutting mechanism of the crystal rod grinding device according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the cutting assembly of the crystal rod grinding device according to an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the linear module of the crystal rod grinding device according to an embodiment of the present invention;

[0027] Figure 5 This is a cross-sectional view of the linear module of the crystal rod grinding device according to an embodiment of this utility model.

[0028] In the diagram, 1. Vacuum suction cup; 2. Linear module; 21. Base; 22. Second motor; 23. Lead screw; 24. Slide; 241. Limiting boss; 25. Mounting plate; 251. First plate; 252. Second plate; 3. Cutting mechanism; 31. Rotating platform; 32. Connecting frame; 320. Cutting cavity; 321. First ring; 322. Second ring; 323. Connecting plate; 3231. Liquid inlet; 3232. Nozzle; 33. Cutter assembly; 331. Fixing plate; 332. First motor; 3321. Threaded section; 333. First guide rail; 334. Cutter; 3341. Cutter body; 3342. Connecting seat; a. Crystal rod. Detailed Implementation

[0029] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0030] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "inner", "outer" and other terms used in this utility model to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device and element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0031] In the description of this utility model, it should be understood that the terms "first," "second," etc., are used to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information.

[0032] like Figures 1 to 5 As shown, a preferred embodiment of the present invention provides a crystal rod grinding device for fixing a crystal rod and grinding the sidewall of the crystal rod. The device includes a vacuum chuck 1, a linear module 2, and a cutting mechanism 3. The vacuum chuck 1 is used to adsorb and fix a vertically positioned crystal rod a. The linear module 2 drives the cutting mechanism 3 to move vertically, thereby grinding the sidewall of the crystal rod a axially. Specifically, the cutting mechanism 3 includes a rotating platform 31, a connecting frame 32, and two cutting blade assemblies 33. The rotating platform 31 is coaxially arranged with the vacuum chuck 1 and connected to the output end of the linear module 2. The connecting frame 32 is located at the output end of the rotating platform 31 and has a cutting cavity 320. The cutting edges of the two cutting blade assemblies 33 are arranged opposite each other and can contact the sidewall of the crystal rod a within the cutting cavity 320. The cutting blade assemblies 33 are fixedly connected to the connecting frame 32.

[0033] When grinding crystal rod a is required, it is first placed vertically on the vacuum chuck 1 for adsorption and fixation, eliminating the need to rotate the crystal rod a, thus reducing the load on the grinding device and lowering production costs. Subsequently, the linear module 2 moves downward with the cutting mechanism 3, i.e., the rotating platform 31 drives the connecting frame 32 and the two cutting blade assemblies 33 to rotate. Once the crystal rod a is inserted into the cutting cavity 320, the two cutting blade assemblies 33 cut the sidewalls of the crystal rod a according to the preset feed rate, improving grinding efficiency. After the grinding operation is completed, the linear module 2 moves the cutting mechanism 3 upward to disengage the crystal rod a from the cutting cavity 320.

[0034] In this novel crystal rod grinding device, to simplify the design, both the vacuum chuck 1 and the rotating platform 31 are standard components. In this embodiment, the vacuum chuck 1 is a ZNC80-S-CVS model supplied by SMC. The specific model of the vacuum chuck 1 can be selected according to the actual weight and size of the crystal rod. The rotating platform 31 is a DG200R series rotating platform. The rotating platform 31 can be selected according to actual design requirements. Therefore, the specific structures of the vacuum chuck 1 and the rotating platform 31 will not be described in detail.

[0035] Furthermore, to facilitate the configuration of the connecting frame 32, simplify its structure, reduce processing difficulty, and decrease production costs, in this embodiment, refer to... Figure 2 The connecting frame 32 includes a first ring body 321, a second ring body 322, and multiple connecting plates 323; wherein the first ring body 321, the second ring body 322, and the multiple connecting plates 323 cooperate to form the cutting cavity 320. Specifically, the first ring body 321 and the second ring body 322 are coaxially arranged; the second ring body 322 is located below the first ring body 321, and two cutting blade assemblies 33 are fixedly connected to the second ring body 322. The multiple connecting plates 323 are arranged around the axis of the first ring body 321, with the top of the connecting plates 323 connected to the first ring body 321 and the bottom of the connecting plates 323 connected to the second ring body 322. Specifically, in this embodiment, in order to achieve quick assembly and disassembly between the connecting plates 323 and the first ring body 321 and the second ring body 322, the connecting plates 323 are fixedly connected to the first ring body 321 and the second ring body 322 by screws.

[0036] Furthermore, to facilitate cooling of the cutting edge of the cutter assembly 33 and simultaneously flushing away waste material from the sidewall of the crystal rod, the connecting plate 323 has a liquid flow channel (not shown in the figure) inside. The connecting plate 323 has a liquid inlet 3231 and a nozzle 3232 communicating with the liquid flow channel. The axis of the nozzle 3232 is perpendicular to the axis of the first ring body 321, so that the liquid sprayed from the nozzle 3232 can reach the sidewall of the crystal rod. The liquid inlet 3231 is connected to an external cooling medium via a rotary joint (standard part) to provide cooling medium when the connecting frame 32 rotates. In this embodiment, water is used as the cooling medium to reduce costs. Furthermore, the connecting plate 323 has at least one nozzle 3232, positioned close to the cutter assembly 33. The number of nozzles 3232 can be adjusted according to actual rounding requirements to meet the cooling needs of the cutter 334 and the flushing needs of the crystal rod waste.

[0037] Furthermore, to facilitate the adjustment of the feed rate of the cutter 334, such as Figure 3As shown, the cutter assembly 33 includes a fixed plate 331, a first motor 332, a first guide rail 333, and a cutter 334. The fixed plate 331 is fixed to the second ring 322, the motor is connected to the fixed plate 331, and the motor's output shaft has a threaded section 3321. The cutter 334 is sleeved on and threadedly connected to the threaded section 3321. The cutter 334 is fixedly connected to the slider of the first guide rail 333. That is, when the first motor 332 operates, it drives the cutter 334 to move axially along the threaded section 3321, causing the cutting edge of the cutter 334 to approach or move away from the crystal rod.

[0038] Furthermore, in order to reduce the machining difficulty of the cutter 334 and to avoid interference between the cutter body 3341 and the threaded section 3321 during installation, such as Figure 3 As shown, the cutter 334 includes a cutter body 3341 and a connecting seat 3342. The cutter body 3341 is fixedly connected to the connecting seat 3342. The connecting seat 3342 is sleeved on the threaded section 3321 and is fixedly connected to the slider of the first guide rail 333.

[0039] When processing the crystal rod, the crystal rod is first vertically fixed on the vacuum chuck 1, and the nozzle 3232 sprays water. The rotating platform 31 drives the connecting frame 32 and the two cutting blade assemblies 33 to rotate. The linear module 2 drives the rotating platform 31 to move downward. The first motor 332 in the two cutting blade assemblies 33 drives the cutting blade 334 to move relative to each other, so that the cutting edge of the cutting blade 334 contacts the side wall of the crystal rod to perform cutting and rounding. After the rotating platform 31 descends to the lower limit position, the crystal rod completes the rounding operation, and the linear module 2 drives the rotating platform 31 to move upward and reset.

[0040] Furthermore, to simplify the structure of the linear module 2, in this embodiment, as follows: Figure 1 , Figure 4 , Figure 5 As shown, the linear module 2 includes a base 21, a second motor 22, a lead screw 23, a slide 24, and a mounting plate 25. The second motor 22 is connected to the base 21, which is installed vertically. The output end of the second motor 22 is connected to the lead screw 23, which is rotatably connected to the base 21. The slide 24 is sleeved on the lead screw 23 and threadedly connected to it. The mounting plate 25 is fixedly connected to the slide 24 and to the rotating platform 31. That is, when the second motor 22 works, it drives the lead screw 23 to rotate, so that the slide 24 drives the mounting plate 25 to move synchronously in the vertical direction, thereby driving the rotating platform 31 to rise and fall.

[0041] Specifically, in this embodiment, the lead screw 23 and the base 21 are generally rotatably connected by bearings, and the output shaft of the second motor 22 is connected to the lead screw 23 by a coupling. Furthermore, to facilitate guiding and limiting the movement of the slide 24, the slide 24 is provided with limiting bosses 241 at both ends in the width direction, and the base 21 is provided with limiting grooves corresponding to the limiting bosses 241. Even further, to facilitate the processing of the mounting plate and reduce its weight, such as... Figure 2 As shown, the projection of the mounting plate 25 on the vertical plane is L-shaped. The mounting plate 25 includes a vertically arranged first plate 251 and a horizontally arranged second plate 252. The first plate 251 is fixedly connected to the slide 24, and the second plate 252 is fixedly connected to the rotating platform 31. The first plate 251 and the second plate 252 can be integrally formed.

[0042] In summary, this utility model embodiment provides a crystal rod rounding device, which uses a vacuum chuck 1 to fix and adsorb vertically arranged crystal rods, eliminating the need for clamping the crystal rods and reducing the difficulty of loading and unloading them; the linear module 2 is used to drive the cutting mechanism 3 to move in the vertical direction. The cutting mechanism 3 includes a rotating platform 31, a connecting frame 32, and two cutting blade assemblies 33. The rotating platform 31 is coaxially arranged with the vacuum chuck 1 and is connected to the output end of the linear module 2; the connecting frame 32 is located at the output end of the rotating platform 31 and has a cutting cavity 320; the blades of the two cutting blade assemblies 33 are arranged opposite each other and can contact the side wall of the crystal rod in the cutting cavity 320, and the cutting blade assemblies 33 are fixedly connected to the connecting frame 32. When cutting the crystal rod, the crystal rod is vertical and fixed, so there is no need to drive the crystal rod to rotate, which reduces the load on the grinding device and reduces production costs. At the same time, the linear module 2 drives the rotating platform 31 to move downward, and the rotating platform 31 drives the connecting frame 32 to make the two cutting blade assemblies 33 rotate synchronously. The two cutting blade assemblies 33 are set to adjust the cutting feed of the crystal rod, thereby improving the grinding efficiency.

[0043] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A crystal rod grinding device, characterized in that: Includes vacuum chucks, linear modules, and cutting mechanisms; The vacuum suction cup is used to adsorb and fix the vertically arranged crystal rod; The linear module is used to drive the cutting mechanism to move in the vertical direction; The cutting mechanism includes a rotating platform, a connecting frame, and two cutting blade assemblies. The rotating platform is coaxially arranged with the vacuum suction cup and is connected to the output end of the linear module. The connecting frame is mounted on the output end of the rotary platform, and the connecting frame is provided with a cutting cavity; The cutting edges of the two cutting assemblies are arranged opposite each other and can contact the sidewall of the crystal rod in the cutting cavity. The cutting assemblies are fixedly connected to the connecting frame.

2. The crystal rod grinding apparatus as described in claim 1, characterized in that: The connecting frame includes a first ring body, a second ring body, and multiple connecting plates; The first ring body and the second ring body are coaxially arranged; The second ring body is located below the first ring body, and two of the aforementioned cutting blade assemblies are fixedly connected to the second ring body; Multiple connecting plates are arranged around the axis of the first ring body. The top of the connecting plate is connected to the first ring body, and the bottom of the connecting plate is connected to the second ring body. The connecting plate has a liquid flow channel inside, and the connecting plate has a liquid inlet and a nozzle communicating with the liquid flow channel. The axis of the nozzle is perpendicular to the axis of the first ring body. The first ring body, the second ring body, and the plurality of connecting plates cooperate to form the cutting cavity.

3. The crystal rod grinding apparatus as described in claim 2, characterized in that: The cutter assembly includes a fixed plate, a first motor, a first guide rail, and a cutter. The fixed plate is fixed to the second ring body, the motor is connected to the fixed plate, the output shaft of the motor has a threaded section, the cutter is sleeved on the threaded section and threadedly connected to the threaded section, and the cutter is fixedly connected to the slider of the first guide rail.

4. The crystal rod grinding apparatus as described in claim 3, characterized in that: The cutter includes a blade body and a connecting seat. The blade body is fixedly connected to the connecting seat, and the connecting seat is sleeved on the threaded section and fixedly connected to the slider of the first guide rail.

5. The crystal rod grinding apparatus as described in claim 2, characterized in that: The number of nozzles is at least one.

6. The crystal rod grinding apparatus as described in claim 2, characterized in that: The connecting plate is fixedly connected to the first ring body and the second ring body by screws.

7. The crystal rod grinding apparatus as described in claim 1, characterized in that: The linear module includes a base, a second motor, a lead screw, a slide, and a mounting plate. The second motor is connected to the base, and the output end of the second motor is drivenly connected to the lead screw. The lead screw is rotatably connected to the base. The slide is sleeved on the lead screw and threadedly connected to the lead screw. The mounting plate is fixedly connected to the slide and also fixedly connected to the rotating platform.

8. The crystal rod grinding apparatus as described in claim 7, characterized in that: The projection of the mounting plate on the vertical plane is L-shaped. The mounting plate includes a vertically arranged first plate and a horizontally arranged second plate. The first plate is fixedly connected to the slide, and the second plate is fixedly connected to the rotating platform.

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