A sealing surface leakage detection jig

Abstract

The utility model discloses a sealed surface leak detection fixture, include: the fixture cover plate and fixture base of superposition installation, and test piece is set up between fixture cover plate and fixture base, the detachable installation of fixture cover plate top has vacuum joint, and vacuum joint is used for the communication of exhaust end or detection end. The utility model discloses in this paper, the dovetail groove cooperation sealing ring is formed to the sealed surface through the dovetail groove cooperation sealing ring of corresponding opening on fixture cover plate and fixture base, and the sealed fixing of ceramic test piece is realized through detachable connecting piece, and the sealed surface is also formed through the dovetail groove cooperation sealing ring of corresponding opening of fixture cover plate top, and is communicated with the exhaust equipment or detection equipment through the pipeline, and after the vacuumization, the inert gas is passed into and monitors whether the sealed surface of test piece appears gas leak phenomenon, does not cause the damage of test piece while effectively improving the detection accuracy.

Description

Technical Field

[0001] This utility model relates to the field of sealing detection equipment technology, specifically to a sealing surface leakage detection fixture. Background Technology

[0002] In semiconductor equipment, ceramic components, with their excellent high-temperature resistance, corrosion resistance, insulation, and extremely low impurity release rate, can maintain stable performance in extreme temperature, high vacuum, and highly corrosive plasma environments, effectively preventing wafer contamination. They are widely used in critical locations such as wafer stages, vacuum chambers, ion implantation components, and radio frequency electrodes. Since semiconductor manufacturing requires ultra-clean, stable vacuum or specific gas environments, leaks at the sealing surfaces can allow moisture and impurities in the air to infiltrate and contaminate the wafer, leading to chip defects. Leaks in process gases can also disrupt the mixing accuracy, affecting etching, deposition, and other process effects. Therefore, it is necessary to perform leak detection on the sealing surfaces of ceramic components in semiconductor equipment to ensure product quality, process stability, and production safety.

[0003] The existing testing method involves precisely aligning and securing ceramic components with upper and lower fixtures, continuously supplying air to the sealing surface via an upper air supply device to pressurize it, and then using testing instruments to detect the amount of gas leakage to determine the sealing performance. However, due to the high brittleness of ceramic materials and the difficulty in achieving a completely uniform stress distribution between the fixture and the ceramic component, the pressure generated when air is introduced can cause the ceramic component to bear additional loads locally. This can easily lead to the formation of micro-cracks on the surface or inside the ceramic component that are difficult to detect with the naked eye. Consequently, the leakage detected during testing includes not only the actual leakage of the sealing surface itself but also the additional leakage caused by the cracks, resulting in reduced accuracy of the test results. Utility Model Content

[0004] The purpose of this utility model is to provide a sealing surface leakage detection fixture to solve the above problems.

[0005] To achieve the above objectives, this utility model specifically adopts the following technical solution, including:

[0006] A jig cover plate and a jig base are stacked and installed together, and the test piece is placed between the jig cover plate and the jig base;

[0007] A vacuum connector is detachably installed on the top of the fixture cover plate, and the vacuum connector is used to connect the air extraction end or the detection end.

[0008] The fixture cover plate and the vacuum connector form a first sealing surface through a first sealing ring, the fixture cover plate and the test piece form a second sealing surface through a second sealing ring, and the fixture base and the test piece form a third sealing surface through a third sealing ring.

[0009] As a further description of the above technical solution, the fixture cover plate has a detection cavity inside, and the top of the detection cavity has a fixture opening.

[0010] As a further description of the above technical solution, a first dovetail groove is provided on the outer side of the top of the fixture opening, and a first sealing ring is fitted into the first dovetail groove.

[0011] As a further description of the above technical solution, a first threaded hole is provided on the outer side of the first dovetail groove, and a first connecting member is installed in the first threaded hole.

[0012] As a further description of the above technical solution, a second dovetail groove is provided on the outer side of the bottom of the fixture cover plate, and a second sealing ring is fitted into the second dovetail groove.

[0013] As a further description of the above technical solution, the edge of the fixture cover plate is provided with a first countersunk hole, and a second connector is installed in the first countersunk hole.

[0014] As a further description of the above technical solution, a third dovetail groove is provided on the outer side of the top of the fixture base, and a third sealing ring is fitted into the third dovetail groove.

[0015] As a further description of the above technical solution, the jig base is provided with a second threaded hole, and a second connector is installed in the second threaded hole.

[0016] As a further description of the above technical solution, the vacuum connector has a through hole in the middle, a second countersunk hole on the outside of the through hole, and an angle edge on the top outer side of the vacuum connector.

[0017] As a further description of the above technical solution, the vacuum connector is connected to an adapter, and the adapter is connected to a vacuum pump or detector through a flexible air tube.

[0018] The beneficial effects of this utility model are as follows:

[0019] This invention utilizes dovetail grooves on the fixture cover and base to form a sealing surface with a sealing ring. A detachable connector secures the ceramic test piece. The top of the fixture cover also forms a sealing surface with a dovetail groove and sealing ring. The fixture is connected to a vacuuming or testing device via a pipeline. After vacuuming, inert gas is introduced to monitor for gas leakage on the sealing surface of the test piece. This design effectively improves testing accuracy without damaging the test piece.

[0020] To more clearly illustrate the structural features and functions of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the sealing surface leakage detection fixture of this utility model;

[0022] Figure 2 This is an exploded schematic diagram of the sealing surface leakage detection fixture of this utility model;

[0023] Figure 3 This is a cross-sectional schematic diagram of the sealing surface leakage detection fixture of this utility model;

[0024] Figure 4 yes Figure 3 Cross-sectional view of the cover plate of the central fixture;

[0025] Figure 5 yes Figure 4 Schematic diagram of the cross section at point I;

[0026] Figure 6 yes Figure 4 Schematic diagram of the cross section at point II;

[0027] Figure 7 yes Figure 3 A cross-sectional view of the base of the central fixture;

[0028] Figure 8 yes Figure 7 Schematic diagram of the cross-section at point III;

[0029] Figure 9 yes Figure 3 Cross-sectional schematic diagram of the vacuum connector;

[0030] Figure 10 This is a schematic diagram of a helium leak test curve.

[0031] Figure label:

[0032] 1. Fixture cover plate; 101. Testing cavity; 102. Fixture orifice; 103. First dovetail groove; 104. Second dovetail groove; 105. First threaded hole; 106. First countersunk hole; 2. Fixture base; 201. Third dovetail groove; 202. Second threaded hole; 3. Test piece; 4. Vacuum connector; 401. Through hole; 402. Second countersunk hole; 403. Angle edge; 5. First sealing ring; 6. Second sealing ring; 7. Third sealing ring; 8. First connector; 9. Second connector; 10. Adapter connector; 11. Flexible air tube; 12. Detector. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0034] like Figures 1-9 As shown, in one embodiment, a sealing surface leakage detection fixture includes: a fixture cover plate 1 and a fixture base 2 stacked on a workbench, with a test cavity reserved between them to accommodate a test piece 3, and the test piece 3 is disposed between the fixture cover plate 1 and the fixture base 2; correspondingly, a vacuum connector 4 is detachably installed on the top of the fixture cover plate 1, so that the vacuum connector 4 can be connected to the gas extraction end (e.g., a gas pump) or the detection end (e.g., a helium mass spectrometer 12) through a pipeline, providing a path for gas flow and status monitoring during the detection process.

[0035] It should be explained in detail that the fixture cover plate 1 and the vacuum connector 4 form a first sealing surface through the first sealing ring 5, the fixture cover plate 1 and the test piece 3 form a second sealing surface through the second sealing ring 6, and the fixture base 2 and the test piece 3 form a third sealing surface through the third sealing ring 7.

[0036] Understandably, the dovetail grooves on the fixture cover plate 1 and fixture base 2, in conjunction with the sealing ring, form a sealing surface. The ceramic test piece 3 is sealed and fixed through a detachable connector. During assembly, the clamping force can be controlled by adjusting the tightness of the connector to avoid excessive compression of the test piece 3. Furthermore, the top of the fixture cover plate 1 also forms a sealing surface through the dovetail grooves and sealing ring, and is connected to the vacuuming equipment or testing equipment through a pipeline. After vacuuming, inert gas is introduced to monitor whether there is any gas leakage on the sealing surface of the test piece 3. This effectively improves the accuracy of the test without damaging the test piece.

[0037] Please continue reading. Figures 3-9 In this embodiment, the fixture cover plate 1 has a detection cavity 101 inside, which can provide a closed detection cavity to ensure that the gas is concentrated on the sealing surface area of ​​the test piece 3 during the test; and the top of the detection cavity 101 has a fixture orifice 102, which serves as a channel for gas to enter and exit the detection cavity 101.

[0038] For example, multiple sets of first dovetail grooves 103 are provided on the outer side of the top of the fixture orifice 102, and a first sealing ring 5 is fitted inside the first dovetail groove 103 to form a seal with the bottom of the vacuum connector 4; correspondingly, multiple sets of second dovetail grooves 104 are provided on the outer side of the bottom of the fixture cover plate 1, and a second sealing ring 6 is fitted inside the second dovetail groove 104 to form a seal with the top of the test piece 3; in addition, multiple sets of third dovetail grooves 201 are provided on the outer side of the top of the fixture base 2, and a third sealing ring 7 is fitted inside the third dovetail groove 201 to form a seal with the bottom of the test piece 3.

[0039] Furthermore, a first threaded hole 105 is provided on the outer side of the first dovetail groove 103, and a first connector 8 is installed in the first threaded hole 105; correspondingly, a first countersunk hole 106 is provided on the edge of the fixture cover plate 1, and a second connector 9 is installed in the first countersunk hole 106; in addition, a second threaded hole 202 is provided on the edge of the fixture base 2, and a second connector 9 is installed in the second threaded hole 202.

[0040] Specifically, the first connector 8 and the second connector 9 can be socket head cap screws, etc., with their tops recessed into the holes so as not to protrude from the surface and affect the fit of the parts. They also provide uniform force during tightening, which can reduce assembly stress.

[0041] Please continue reading. Figures 3-9 In this embodiment, a through hole 401 is provided in the middle of the vacuum connector 4 as the main channel for gas flow. Its diameter is adapted to the size of the detection cavity 101 to ensure smooth gas flow. A second countersunk hole 402 is provided on the outside of the through hole 401. A second connector 9 is installed in the second countersunk hole 402, which corresponds to the position of the first threaded hole 105 on the top of the fixture cover plate 1. The second connector 9 passes through the countersunk hole and is screwed into the first threaded hole 105 to firmly fix the vacuum connector 4 to the top of the fixture cover plate 1.

[0042] Furthermore, the top outer side of the vacuum connector 4 is provided with an angle edge 403, which not only enhances the structural strength of the top of the vacuum connector 4, but also plays a positioning role when connecting the adapter 10, ensuring accurate docking.

[0043] For example, the vacuum connector 4 is connected to an adapter 10, which is connected to a vacuum pump (not shown in the figure as prior art) or a helium mass spectrometer 12 via a flexible gas tube 11. The flexible gas tube 11, made of metal, has good flexibility, which can reduce the impact of pipeline vibration on the sealing surface of the fixture. At the same time, it has the characteristics of high pressure resistance and not easy aging, ensuring the stability of the gas transmission process.

[0044] Installation process:

[0045] Two sets of first sealing rings 5 ​​are fitted inside and outside the first dovetail groove 103 at the top of the fixture cover plate 1. Then, the top of the fixture cover plate 1 is threaded to the bottom of the vacuum connector 4 using hexagon socket screws. Two sets of second sealing rings 6 are fitted inside and outside the second dovetail groove 104 at the bottom of the fixture cover plate 1. Then, a third sealing ring 7 is fitted inside the third dovetail groove 201 at the top of the fixture base 2. The fixture cover plate 1, the test piece, and the fixture base 2 are stacked in sequence. Then, the bottom of the fixture cover plate 1 is threaded to the top of the fixture base 2 using hexagon socket screws. Then, the top of the vacuum connector 4 is connected to the flexible air tube 11 through the adapter 10.

[0046] Working principle:

[0047] After the test piece and fixture are assembled, the detection parameters of the helium mass spectrometer 12 are set (including detection time and detection pressure, etc.). Then, a vacuum is applied to the internal cavity of the test fixture using a vacuum pump. Once the vacuum reaches the set pressure peak, the valve is closed, and then inert gas (helium in this application) is added. The helium mass spectrometer 12 is then used for detection to determine whether the ceramic test piece 3 is a leak-free, qualified product or a leak-prone, unqualified product (refer to...). Figure 10 The sensitivity of vacuum helium leak detection can reach 10. -12 Pa·m 3 / s.

[0048] Through the above technical solution, the sealing surface leakage detection fixture of this application can effectively improve the detection accuracy without damaging the ceramic test piece.

[0049] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A leak detection fixture for a sealing surface, characterized in that, include: A jig cover plate (1) and a jig base (2) are stacked and installed together, and a test piece (3) is disposed between the jig cover plate (1) and the jig base (2); The top of the fixture cover plate (1) is detachably equipped with a vacuum connector (4), which is used to connect the suction end or the detection end; The fixture cover plate (1) and the vacuum connector (4) form a first sealing surface through the first sealing ring (5), the fixture cover plate (1) and the test piece (3) form a second sealing surface through the second sealing ring (6), and the fixture base (2) and the test piece (3) form a third sealing surface through the third sealing ring (7).

2. The sealing surface leakage detection fixture according to claim 1, characterized in that, The fixture cover plate (1) has a detection cavity (101) inside, and a fixture opening (102) is provided at the top of the detection cavity (101).

3. The sealing surface leakage detection fixture according to claim 2, characterized in that, The top outer side of the fixture opening (102) is provided with a first dovetail groove (103), and a first sealing ring (5) is fitted on the first dovetail groove (103).

4. The sealing surface leakage detection fixture according to claim 3, characterized in that, The first dovetail groove (103) has a first threaded hole (105) on its outer side, and a first connector (8) is installed in the first threaded hole (105).

5. The sealing surface leakage detection fixture according to claim 2, characterized in that, The fixture cover plate (1) has a second dovetail groove (104) on the outer side of its bottom, and a second sealing ring (6) is fitted into the second dovetail groove (104).

6. The sealing surface leakage detection fixture according to claim 2, characterized in that, The fixture cover plate (1) has a first countersunk hole (106) on its edge, and a second connector (9) is installed in the first countersunk hole (106).

7. The sealing surface leakage detection fixture according to claim 1, characterized in that, The jig base (2) has a third dovetail groove (201) on the outer side of the top, and a third sealing ring (7) is fitted on the third dovetail groove (201).

8. The sealing surface leakage detection fixture according to claim 7, characterized in that, The fixture base (2) has a second threaded hole (202) on its edge, and a second connector (9) is installed in the second threaded hole (202).

9. The sealing surface leakage detection fixture according to claim 1, characterized in that, The vacuum connector (4) has a through hole (401) in the middle, a second countersunk hole (402) on the outside of the through hole (401), and an angle edge (403) on the top outside of the vacuum connector (4).

10. The sealing surface leakage detection fixture according to claim 9, characterized in that, The vacuum connector (4) is connected to an adapter (10), which is connected to a vacuum pump or a detector (12) via a flexible air tube (11).

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