Split type suction cup

Abstract

The application relates to a split type suction disc, belonging to the field of suction disc clamps, comprising a placing disc and a bottom disc, the placing disc and the bottom disc are both arranged in a disc structure, the placing disc and the bottom disc are coaxially arranged and detachably connected, a plurality of suction holes are formed in the placing disc, a plurality of communication air holes are formed in the bottom disc, a plurality of grooves one are formed in the side surface of the placing disc, the grooves one are concentrically arranged with gradually changed diameters, the grooves one are communicated with the suction holes, a plurality of grooves two are formed in the bottom disc, the grooves two are communicated with the communication air holes, when the placing disc is connected with the bottom disc, the grooves one and the grooves two are positionally corresponding and communicated with each other. The application has the effect of reducing the number of air pipes communicated with air extraction equipment arranged on the suction disc.

Description

Technical Field

[0001] This application relates to the field of suction cup clamps, and more particularly to a split suction cup. Background Technology

[0002] In the field of wafer processing, due to the relatively fragile structure of wafers, chucks are usually used to fix them. By fixing the wafers on the chucks, the wafers can be moved and processed. The chucks cause less damage and scratches to the wafers when adsorbing them, which can reduce production costs.

[0003] Existing suction cups are made of metal discs with multiple suction holes. The length of the suction holes is parallel to the axis of the metal disc, and the suction holes are arranged at intervals along the radial and circumferential sides of the metal disc. One end face of the metal disc is used to place the workpiece, and the other side is connected to the vacuum equipment. When the vacuum equipment vacuums, the suction cup surface generates suction force, which can fix the workpiece on the suction cup surface. At this time, the mechanical equipment can move the wafer by moving the suction cup. The wafer is subjected to less force during the movement, which can reduce the chance of wafer damage.

[0004] The aforementioned technical solutions have the following drawbacks: a large number of air pipes connected to the suction equipment are installed on the metal disc, making the process of installing suction cups and laying air pipes inconvenient. Utility Model Content

[0005] In order to reduce the number of air pipes connected to the suction device on the suction cup, this application provides a split suction cup.

[0006] The split-type suction cup provided in this application adopts the following technical solution:

[0007] A split-type suction cup includes a placement plate and a base plate. Both the placement plate and the base plate are circular and are coaxially arranged and detachably connected. The placement plate has multiple suction holes, and the base plate has multiple connecting air holes. One side surface of the placement plate has multiple grooves I with gradually changing diameters and concentric openings. The grooves I communicate with the multiple suction holes. The base plate has multiple grooves II that communicate with the connecting air holes. When the placement plate and the base plate are connected, the grooves I and grooves II are positioned correspondingly and communicate with each other.

[0008] By adopting the above technical solution, a groove 1 is opened on the placement plate and a groove 2 is opened on the base plate. When the placement plate and the base plate are connected, groove 1 and groove 2 are connected. Groove 1 connects to multiple suction holes in the same circle, and groove 2 connects to the connecting air hole. This allows one connecting air hole to connect to multiple suction holes. By making the placement plate and the base plate detachably connected, the processing difficulty of the suction cup is reduced. A small number of air pipes connected to the air extraction equipment can be set on the suction cup to control the air extraction of multiple suction holes, and the densely distributed suction holes on the suction cup can adsorb the workpiece.

[0009] Optionally, the placement tray is provided with a plurality of support rings 1 on its end face, and the protrusion between two adjacent grooves 1 forms a support ring 1. The chassis is provided with a plurality of support rings 2 on its end face, and the protrusion between two adjacent grooves 2 forms a support ring 2. When the placement tray and the chassis are connected, the support rings 1 and 2 abut against each other.

[0010] By adopting the above technical solution, by setting a support ring one on the placement plate and a support ring two on the chassis, the support ring one and the support ring two can achieve the effect of supporting the stability of the suction cup structure. When the air extraction equipment extracts air, the placement plate and the chassis are subjected to large air pressure, which is prone to deformation after long-term use, causing positional errors during wafer processing. By setting support ring one and support ring two, the suction cup structure is stabilized and the dimensional accuracy is high.

[0011] Optionally, the chassis has multiple connecting slots that connect two adjacent grooves.

[0012] By adopting the above technical solution, by opening a connecting groove on the chassis, adjacent grooves can be connected to each other, further reducing the number of connecting air holes on the chassis, so that one connecting air hole can connect multiple grooves, thereby enabling one connecting air hole to connect with more suction holes.

[0013] Optionally, the placement tray has an inner adsorption area and an outer adsorption area. The inner adsorption area is a circular area at the center of the placement tray, and the outer adsorption area is an annular area outside the inner adsorption area. Connecting air holes are opened on the chassis below the inner adsorption area and below the outer adsorption area.

[0014] By adopting the above technical solution, and by opening an inner adsorption zone and an outer adsorption zone on the placement tray, when the workpiece size is small, the workpiece is placed at the center of the placement tray and covers the suction hole of the inner adsorption zone. At this time, the air extraction device is connected to the connecting air hole below the inner adsorption zone, which can generate suction on the suction hole of the inner adsorption zone. There is no airflow in the suction hole of the outer adsorption zone, reducing the energy consumption of the air extraction device. When the workpiece size is large and can cover the suction holes of the inner and outer adsorption zones, the air extraction device extracts air from all the suction holes on the placement tray, so that the workpiece is subjected to uniform suction and achieves the effect of fixing the workpiece on the placement tray.

[0015] Optionally, an inner sealing ring is provided between the placement tray and the base plate. The inner sealing ring is coaxially disposed between the placement tray and the base plate. The inner sealing ring is disposed between the inner adsorption area and the outer adsorption area and prevents the adsorption holes on the inner adsorption area and the outer adsorption area from communicating with each other.

[0016] By adopting the above technical solution, an inner sealing ring is made of an elastic material. When the placement plate and the base plate are connected to each other, the placement plate and the base plate squeeze the inner sealing ring, thereby sealing the space between the placement plate and the base plate. This isolates the inner adsorption area and the outer adsorption area on the placement plate from each other. When a small workpiece is placed on the placement plate, and the suction device connects to the suction hole of the inner adsorption area and evacuates the air, the probability of the suction device connecting to the suction hole on the outer adsorption area is reduced, thus reducing the power loss of the suction device.

[0017] Optionally, the placement tray has multiple connecting holes equidistantly spaced around its circumference, and the base plate has multiple threaded holes equidistantly spaced around its circumference. Connecting bolts are installed in the connecting holes and connected to the threaded holes.

[0018] By adopting the above technical solution, multiple connection holes are set around the circumference of the placement plate, allowing the connecting bolts to be inserted into the connection holes and threaded holes and connected to the chassis, thereby enabling the placement plate and the chassis to be tightly connected and reducing the chance of air leakage between the placement plate and the chassis.

[0019] Optionally, an outer sealing ring is provided between the chassis and the placement plate, and the outer sealing ring is coaxially arranged with the chassis. The outer sealing ring is located on the outside of the suction hole.

[0020] By adopting the above technical solution, by setting an outer sealing ring between the chassis and the placement plate, when the chassis and the placement plate are connected to each other, the chassis and the placement plate squeeze the outer sealing ring, thereby reducing the probability of air leakage between the placement plate and the chassis. When the air extraction device is connected to the connecting air hole and extracts air, it can reduce the probability of air leakage between the placement plate and the chassis, and make the suction force at the suction hole stronger.

[0021] Optionally, the connecting vents are radially spaced on the chassis.

[0022] By adopting the above technical solution, multiple connecting air holes are opened on the chassis, and these connecting air holes are connected to the same groove 2. When the air extraction device extracts air through the connecting air holes, it can extract the air in the groove 2 more quickly, so that the suction hole generates suction and adsorbs the workpiece, making the connection speed between the workpiece and the placement plate faster. When the air extraction device extracts air, suction can be generated evenly on the workpiece, so that the stress on the workpiece is more uniform.

[0023] In summary, the beneficial technical effects of this application are as follows:

[0024] 1. By creating a groove one on the placement plate and a groove two on the base plate, when the placement plate and the base plate are connected, groove one and groove two are connected. Groove one connects to multiple suction holes in the same circle, and groove two connects to the connecting air hole, so that one connecting air hole can connect to multiple suction holes. By making the placement plate and the base plate detachably connected, the processing difficulty of the suction cup is reduced, and a small number of air pipes connected to the air extraction equipment can be set on the suction cup to control the air extraction of multiple suction holes, so that the densely distributed suction holes on the suction cup can adsorb the workpiece.

[0025] 2. By setting support ring one on the placement plate and support ring two on the base plate, support ring one and support ring two can stabilize the suction cup structure. When the air extraction equipment extracts air, the placement plate and base plate are subjected to large air pressure, which can easily deform after long-term use, causing positional errors during wafer processing. By setting support ring one and support ring two, the suction cup structure is stabilized and the dimensional accuracy is high.

[0026] 3. The inner sealing ring is made of a flexible material. When the placement plate and the base plate are connected, the placement plate and the base plate squeeze the inner sealing ring, thereby sealing the space between the placement plate and the base plate. This isolates the inner adsorption area and the outer adsorption area on the placement plate from each other. When a small workpiece is placed on the placement plate, the suction device connects to the suction hole of the inner adsorption area and evacuates the air, which reduces the probability of the suction device connecting to the suction hole on the outer adsorption area, thus reducing the power loss of the suction device. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0028] Figure 2 This is a schematic diagram showing the location of the connecting air hole in an embodiment of this application.

[0029] Figure 3 This is a schematic diagram showing the position of the groove in an embodiment of this application.

[0030] Figure 4 This is a schematic diagram showing the position of the second groove in an embodiment of this application.

[0031] Reference numerals: 1. Placement tray; 11. Inner adsorption area; 12. Outer adsorption area; 13. Suction hole; 14. Groove one; 15. Support ring one; 16. Connecting hole; 161. Connecting bolt; 2. Base plate; 21. Connecting vent; 22. Groove two; 23. Support ring two; 24. Connecting groove; 25. Inner sealing ring; 26. Outer sealing ring; 27. Threaded hole. Detailed Implementation

[0032] The present application will be further described in detail below with reference to the accompanying drawings.

[0033] This application discloses a split-type suction cup, as shown in the embodiments below. Figure 1 and Figure 2 The device includes a placement tray 1 and a base 2, both of which are circular. The placement tray 1 and base 2 are coaxially aligned and detachably connected. The placement tray 1 has an inner adsorption area 11 and an outer adsorption area 12. The inner adsorption area 11 is a circular region at the center of the placement tray 1, and the outer adsorption area 12 is an annular region surrounding the inner adsorption area 11. The placement tray 1 has multiple suction holes 13, the length of which is parallel to the axis of the placement tray 1. The suction holes 13 are arranged along the circumference and radial direction of the placement tray 1, resulting in a dense distribution of suction holes 13 on the surface of the placement tray 1. The base 2 has multiple connecting air holes 21, which are connected to a vacuum device. When the base 2 is connected to the placement tray 1, the suction holes 13 connect to the connecting air holes 21. At this time, the vacuum device connects to the connecting air holes 21 and vacuums, allowing objects on the surface of the placement tray 1 to be tightly adsorbed onto the surface of the placement tray 1, thereby achieving the effect of keeping the workpiece tightly connected to the suction cup. When the workpiece is small, it is placed at the center of the placement plate 1. At this time, the inner adsorption zone 11 adsorbs the workpiece, and there is no airflow in the suction hole 13 on the outer adsorption zone 12. When the workpiece is large, it is placed on the placement plate 1 and covers the surface of the suction hole 13 on the inner adsorption zone 11 and the outer adsorption zone 12. The extraction device connects the connecting air hole 21 at the bottom of the inner adsorption zone 11 and the outer adsorption zone 12, so that the inner adsorption zone 11 and the outer adsorption zone 12 jointly adsorb the workpiece, making the workpiece more stable on the placement plate 1.

[0034] Reference Figure 3 and Figure 4The bottom of the placement tray 1 has multiple annular grooves 14, which are concentrically arranged with the placement tray 1. The diameters of the grooves 14 gradually change, thus forming multiple concentric grooves on the bottom of the placement tray 1. Multiple support rings 15 are provided on the bottom of the placement tray 1, with protrusions between adjacent grooves 14 forming support rings 15. Each groove 14 coincides with a ring of suction holes 13. The base 2 has multiple concentric grooves 22, which also gradually change in diameter. Support rings 23 are formed between adjacent grooves 22. When the placement tray 1 and the base 2 are connected, the positions of support rings 15 and 23 correspond one-to-one, and the positions of grooves 14 and 22 correspond to each other. A connecting vent 21 communicates with the grooves 22. When the suction device draws air through the connecting air hole 21, it draws out the air between the first groove 14 and the second groove 22, resulting in a lower air pressure at the end of the suction hole 13. When the workpiece is placed on the surface of the placement plate 1, it can be sucked onto the surface of the placement plate 1. The first support ring 15 and the second support ring 23 play a supporting role. When the power of the suction device is high and the suction force at the suction hole 13 is large, the air pressure in the first groove 14 and the second groove 22 is low, and the pressure on the placement plate 1 and the base plate 2 is large. The first support ring 15 and the second support ring 23 play a supporting role, which can reduce the probability of deformation of the placement plate 1 and the base plate 2.

[0035] Reference Figure 3 and Figure 4 The placement tray 1 has multiple connecting holes 16 at equal intervals along its circumference. Connecting bolts 161 are installed within each connecting hole 16. The base 2 has multiple threaded holes 27 corresponding to the connecting holes 16, and the connecting bolts 161 are threaded into the threaded holes 27. The placement tray 1 and base 2 are detachably connected via connecting bolts 161, facilitating the assembly of the suction cup by the user.

[0036] Reference Figure 3 and Figure 4 The chassis 2 has multiple connecting grooves 24, which connect two adjacent grooves 22. When the air extraction device extracts air through the connecting air hole 21, the grooves 22 are connected to each other through the connecting grooves 24, so that a small number of connecting air holes 21 can be opened on the chassis 2, and then the small number of connecting air holes 21 can be connected to a large number of suction holes 13.

[0037] Reference Figure 3 and Figure 4An inner sealing ring 25 and an outer sealing ring 26 are installed on the chassis 2. The diameter of the inner sealing ring 25 is smaller than that of the outer sealing ring 26. Both the inner sealing ring 25 and the outer sealing ring 26 are made of elastic materials such as rubber. The inner sealing ring 25 and the outer sealing ring 26 are coaxially connected to the chassis 2. When the placement plate 1 is connected to the chassis 2, the chassis 2 and the placement plate 1 together compress the inner sealing ring 25 and the outer sealing ring 26, thereby preventing the suction holes 13 on the inner adsorption area 11 and the outer adsorption area 12 from communicating with each other. When the workpiece size is small, the suction device communicates with the communicating air hole 21 below the inner adsorption area 11 and suctions air. At this time, no air pressure difference is generated on the surface of the suction hole 13 on the outer adsorption area 12, thereby improving the energy conversion efficiency of the suction device, reducing the probability of air leakage between the placement plate 1 and the chassis 2, and increasing the suction force of the placement plate 1 on the workpiece.

[0038] Reference Figure 2 The connecting air holes 21 on the chassis 2 are equidistantly spaced along the radial direction of the chassis 2. When the air extraction device connects with the connecting air holes 21 and extracts air, the air extraction device extracts air through multiple connecting air holes 21, thereby making the air extraction speed in the first groove 14 and the second groove 22 faster, and the workpiece can be quickly adsorbed on the surface of the placement plate 1. The suction force provided by the placement plate 1 to the workpiece is more uniform.

[0039] The implementation principle of this application embodiment is as follows: by opening multiple suction holes 13 on the placement plate 1, the base plate 2 is connected to the air extraction device. When the air extraction device is connected to the connecting air hole 21 and extracts air, the connecting air hole 21 is connected to the multiple suction holes 13 through the groove 22 and the connecting groove 24. At this time, a pressure difference is generated at the opening of the multiple suction holes 13. When the workpiece is placed on the placement plate 1, the workpiece can be uniformly subjected to suction force, so that the suction cup can fix the workpiece.

[0040] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A split chuck, characterized by: It includes a placement plate (1) and a base plate (2). Both the placement plate (1) and the base plate (2) are set as a disc structure. The placement plate (1) and the base plate (2) are coaxially arranged and detachably connected. The placement plate (1) has multiple suction holes (13) and the base plate (2) has multiple connecting air holes (21). The surface of one side of the placement plate (1) has multiple grooves (14). The grooves (14) have gradually changing diameters and are concentrically opened. The grooves (14) are connected to the multiple suction holes (13). The base plate (2) has multiple grooves (22). The grooves (22) are connected to the connecting air holes (21). When the placement plate (1) and the base plate (2) are connected, the grooves (14) and the grooves (22) are in corresponding positions and connected to each other.

2. The split chuck of claim 1, wherein: Multiple support rings (15) are provided on the end face of the placement plate (1), and the protrusion between two adjacent grooves (14) forms the support ring (15). Multiple support rings (23) are provided on the end face of the chassis (2), and the protrusion between two adjacent grooves (22) forms the support ring (23). When the placement plate (1) and the chassis (2) are connected, the support rings (15) and the support rings (23) abut against each other.

3. A split chuck as claimed in claim 2, characterized in that: The chassis (2) has multiple connecting slots (24) that connect two adjacent grooves (22).

4. The split chuck of claim 3 wherein: The placement plate (1) is provided with an inner adsorption area (11) and an outer adsorption area (12). The inner adsorption area (11) is a circular area at the center of the placement plate (1), and the outer adsorption area (12) is an annular area outside the inner adsorption area (11). The chassis (2) is provided with connecting air holes (21) below the inner adsorption area (11) and below the outer adsorption area (12).

5. A split chuck as claimed in claim 4, wherein: An inner sealing ring (25) is provided between the placement plate (1) and the base plate (2). The inner sealing ring (25) is coaxially disposed between the placement plate (1) and the base plate (2). The inner sealing ring (25) is disposed between the inner adsorption area (11) and the outer adsorption area (12) and blocks the adsorption holes (13) on the inner adsorption area (11) and the outer adsorption area (12) from communicating with each other.

6. The split chuck of claim 1 wherein: The placement plate (1) has multiple connecting holes (16) equidistantly spaced around its circumference, and the base plate (2) has multiple threaded holes (27) equidistantly spaced around its circumference. Connecting bolts (161) are provided in the connecting holes (16) and are connected to the threaded holes (27).

7. A split chuck as claimed in claim 6, characterized in that: An outer sealing ring (26) is provided between the chassis (2) and the placement plate (1). The outer sealing ring (26) is coaxially arranged with the chassis (2) and is located outside the suction hole (13).

8. A split-type suction cup according to claim 1, characterized in that: The connecting vents (21) are radially spaced on the chassis (2).

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