A storage device and test equipment

Abstract

The application relates to a storage device and test equipment. The storage device comprises a support frame, a first storage assembly, a first support table and a first storage disc, the first support table is installed on the support frame, the first storage disc is arranged on the first support table and is used for storing elements waiting for retesting and / or elements needing to be warmed up, and a second storage assembly, a second support table and a second storage disc, the second support table is installed on the support frame, the second storage disc is arranged on the second support table and is used for storing defective elements. Thus, the first storage disc is used for receiving elements waiting for retesting and / or elements needing to be warmed up transferred by a transfer manipulator, and the second storage disc is used for receiving defective elements transferred by the transfer manipulator, so that classified storage of the elements waiting for retesting and / or the elements needing to be warmed up and the defective elements is realized, one storage device needs to be arranged for each kind of element, the number of the storage devices is greatly reduced, and the required occupied space is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, specifically a material storage device and a testing device. Background Technology

[0002] During chip manufacturing, the chip needs to undergo three-temperature testing, which involves heating or cooling the chip to place it in a low-temperature state, a normal-temperature state, or a high-temperature state, and then performing performance tests on the chip to obtain performance data under different operating environments.

[0003] Traditionally, when performing batch testing on chips, testing equipment needs to be configured with multiple storage devices, such as a defective product storage device for storing defective products, a retest storage device for storing products that need to be retested, and a reheat storage device for storing products that need to be reheated. This occupies a large amount of internal space in the testing equipment and greatly reduces space utilization. Utility Model Content

[0004] Therefore, it is necessary to provide a storage device and testing equipment that can reduce the space required and improve space utilization to address the above problems.

[0005] A material storage device, comprising:

[0006] Support frame;

[0007] A first material storage assembly includes a first support platform and a first material storage tray. The first support platform is mounted on the support frame, and the first material storage tray is disposed on the first support platform for storing components awaiting retesting and / or components requiring reheating.

[0008] The second storage assembly includes a second support platform and a second storage tray. The second support platform is mounted on the support frame, and the second storage tray is disposed on the second support platform for storing defective components.

[0009] In some embodiments, the first storage assembly further includes a heating element disposed on the first support platform.

[0010] In some embodiments, the first support platform has a mounting hole, and the heating element is disposed in the mounting hole.

[0011] In some embodiments, the second storage assembly further includes a third storage tray, the second support platform has a first support area and a second support area, the second storage tray is disposed on the first support area, and the third storage tray is disposed on the second support area and is used to store dummy films.

[0012] In some embodiments, the first storage tray, the second storage tray, and the third storage tray are arranged sequentially along a first preset direction; or

[0013] The first storage tray, the third storage tray, and the second storage tray are arranged sequentially along a first preset direction.

[0014] In some embodiments, the storage device further includes a motion component, on which the support frame is mounted, and the motion component can controllably move the support frame.

[0015] In some embodiments, the motion component can controllably drive the support frame to move along a first preset direction, and the first support platform and the second support platform are arranged along the first preset direction.

[0016] In some embodiments, the motion component includes a fixed base, a lead screw, a rotary drive, and a lead screw nut;

[0017] The lead screw is rotatably connected to the fixed base, the rotation drive is mounted on the fixed base and driven by the lead screw; the support frame is movably connected to the fixed base, the lead screw nut is threadedly connected to the lead screw and connected to the support frame.

[0018] In some embodiments, the motion component further includes a first support rail and a second support rail mounted on the fixed base, the first support rail and the second support rail being parallel to each other, the support frame being slidably connected to the first support rail and the second support rail, and the lead screw being located between the first support rail and the second support rail.

[0019] In some embodiments, the support frame includes a base plate and two side plates. The base plate is mounted on the motion assembly. Each side plate extends along the movement direction of the base plate, and the two ends of each side plate in the length direction are a connecting end and a free end, respectively. The connecting end of each side plate is fixedly connected to the base plate. The first support platform and the second support platform are mounted on the free ends of the two side plates.

[0020] A testing apparatus includes a testing device, a transfer robot, and a storage device as described in any of the above embodiments, wherein the testing device is used to test components, and the transfer robot is used to transfer components between the testing device and the storage device.

[0021] The aforementioned storage device and testing equipment utilize a first storage tray to receive components awaiting retesting and / or components requiring reheating transferred by a transfer robot, and a second storage tray to receive defective components transferred by the transfer robot. This achieves classified storage of components awaiting retesting and / or components requiring reheating, as well as defective components. It eliminates the need for a separate storage device for each type of component, greatly reducing the number of storage devices, the space required, and significantly improving space utilization. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the material storage device in one embodiment of this application;

[0023] Figure 2 for Figure 1 The front view of the storage device shown;

[0024] Figure 3 for Figure 1 Rear view of the storage device shown (baffle omitted);

[0025] Figure 4 for Figure 1 The diagram shows the structure of the moving components of the material storage device. Detailed Implementation

[0026] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0027] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0029] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0030] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0031] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0032] This application provides a testing device, including a testing unit, a transfer robot, and a storage device. The testing unit is used for batch testing of components. During the batch testing process, components that need temporary storage are generated, such as components awaiting retesting, components requiring reheating, and defective components. The transfer robot is used to transfer components between the testing unit and the storage device. The storage device receives the components transferred by the transfer robot that need temporary storage. In other words, the storage device categorizes and stores various types of components, such as components awaiting retesting, components requiring reheating, and defective components, eliminating the need for a separate storage device for each type of component. This significantly reduces the number of storage devices, reduces the space required, and greatly improves space utilization. It should be noted that the components mentioned herein can be chips, or other components requiring performance testing; this is not limited to these specific components.

[0033] Please see Figures 1 to 4 In embodiments of this application, the storage device includes a support frame 10, a first storage assembly 20, and a second storage assembly 30. The first storage assembly 20 includes a first support platform 21 and a first storage tray 23. The first support platform 21 is mounted on the support frame 10. The first storage tray 23 is disposed on the first support platform 21 and is used to store components awaiting retesting and / or components requiring reheating, transferred by a transfer robot. The second storage assembly 30 includes a second support platform 31 and a second storage tray 33. The second support platform 31 is mounted on the support frame 10. The second storage tray 33 is disposed on the second support platform 31 and is used to store defective components transferred by the transfer robot.

[0034] In this way, the storage device uses the first storage tray 23 to receive components waiting for retesting and / or components that need to be reheated transferred by the transfer robot, and uses the second storage tray 33 to receive defective components transferred by the transfer robot. This realizes the classification and storage of components waiting for retesting and / or components that need to be reheated, as well as defective components. It is not necessary to configure a storage device for each type of component, which greatly reduces the number of storage devices, reduces the space required, and greatly improves the space utilization rate.

[0035] It should be noted that the first support platform 21 supports the first storage tray 23 to facilitate replacement of the first storage tray 23 when the component under test changes. Similarly, the second support platform 31 supports the second storage tray 33 to facilitate replacement of the second storage tray 33 when the component under test changes.

[0036] It should also be noted that the components requiring rewarming refer to those that have completed the low-temperature test and are in a low-temperature state. Therefore, these components need to be heated to bring them to room temperature. To achieve this heating, in some embodiments, the first storage assembly 20 further includes a heating element 25 disposed on the first support platform 21. Thus, the heat generated by the heating element 25 is transferred through the first support platform 21 to the first storage tray 23, thereby heating the components stored on the first storage tray 23 that require rewarming, bringing them to room temperature.

[0037] Specifically, in this embodiment, the top surface of the first storage tray 23 has multiple first storage slots, each for storing a component awaiting retesting or a component requiring reheating. The top surface of the second storage tray 33 has multiple second storage slots, each for storing a defective component.

[0038] It should be noted that when the first storage tray 23 needs to store both components waiting to be retested and components that need to be reheated, the first storage tray 23 can be divided into two areas. The first storage slots in one area are used to store components waiting to be retested, while the first storage slots in the other area are used to store components that need to be reheated.

[0039] Optionally, the first support platform 21 has mounting holes. The heating element 25 can be an electric heating rod or heating plate, etc., and is inserted into the mounting hole. Further, the first support platform 21 has multiple mounting holes. The number of heating elements 25 is also multiple, and each heating element 25 is respectively disposed in a different mounting hole. Thus, using multiple heating elements 25 to generate heat simultaneously improves the uniformity and efficiency of heating multiple components.

[0040] In the embodiments of this application, the second storage assembly 30 further includes a third storage tray 35. The second support platform 31 has a first support area and a second support area. The second storage tray 33 is disposed on the first support area of ​​the second support platform 31 and is used to store defective components. The third storage tray 35 is disposed on the second support area of ​​the second support platform 31 and is used to store dummy wafers. In this way, the storage device uses the first storage tray 23 to receive components awaiting retest and / or components requiring reheating transferred by the transfer robot, uses the second storage tray 33 to receive defective components transferred by the transfer robot, and uses the third storage tray 35 to receive dummy wafers transferred by the transfer robot. This achieves classified storage of components awaiting retest and / or components requiring reheating, defective components, and dummy wafers, eliminating the need for a separate storage device for each type of component, greatly reducing the number of storage devices, reducing the space required, and improving space utilization.

[0041] It should be noted that the testing device includes a test tray, which is used to load and adsorb components. During the batch testing of components by the testing device, if some adsorption holes on the test tray are not needed, dummy components are used to replace real components and placed on the unwanted adsorption holes; when dummy components are not needed, they can be temporarily stored on the third storage tray 35.

[0042] It should be noted that the first storage tray 23, the second storage tray 33, and the third storage tray 35 can be arranged in various ways. In some embodiments, the first support platform 21 and the second support platform 31 are arranged along a first preset direction X1. The first storage tray 23, the second storage tray 33, and the third storage tray 35 are arranged sequentially along the first preset direction X1. In other embodiments, the first storage tray 23, the third storage tray 35, and the second storage tray 33 can also be arranged sequentially along the first preset direction X1.

[0043] In a specific embodiment, the top surface of the third storage tray 35 has a plurality of third storage slots, each of which is used to store a dummy film.

[0044] In embodiments of this application, the storage device further includes a motion component 40, on which a support frame 10 is mounted. The motion component 40 can controllably drive the support frame 10 to move along a first preset direction X1. Thus, when it is necessary to receive components transferred by a transfer robot, the motion component 40 drives the support frame 10 to a preset position, ensuring that the transfer robot can transfer the components to the first storage tray 23, the second storage tray 33, or the third storage tray 35.

[0045] It should be noted that in other embodiments, the motion component 40 can controllably drive the support frame 10 to move in other directions, as long as it can ensure that the transfer robot accurately transfers the components to the first storage tray 23, the second storage tray 33, or the third storage tray 35, and no limitation is made here. For ease of understanding, this article uses the example of the motion component 40 controllably driving the support frame 10 to move along the first preset direction X1 for explanation.

[0046] It should also be noted that the movement of the support frame 10 is driven by the motion component 40, thereby realizing the movement of the first storage tray 23, the second storage tray 33 and the third storage tray 35. On the one hand, this simplifies the movement of the transfer robot, thereby simplifying the structure of the transfer robot; on the other hand, it makes the maintenance of the storage device and the replacement of the first storage tray 23, the second storage tray 33 and the third storage tray 35 more convenient.

[0047] Specifically, in this embodiment, the motion component 40 includes a fixed base 41, a lead screw 43, a rotary drive component 45, and a lead screw nut 44. The lead screw 43 is rotatably connected to the fixed base 41. The rotary drive component 45 is mounted on the fixed base 41 and is drivenly connected to the lead screw 43, enabling the rotary drive component 45 to drive the lead screw 43 to rotate. The support frame 10 is movably connected to the fixed base 41 along a first preset direction X1. The lead screw nut 44 is threadedly connected to the lead screw 43, so that when the lead screw 43 rotates, it can drive the lead screw nut 44 to move along the axial direction of the lead screw 43 (i.e., the aforementioned first preset direction X1). The lead screw nut 44 is fixedly connected to the support frame 10, so that the lead screw nut 44 can drive the support frame 10 to move together along the first preset direction X1. Thus, when it is necessary to move the first storage tray 23, the second storage tray 33, and the third storage tray 35, the rotary drive 45 drives the lead screw 43 to rotate, thereby driving the lead screw nut 44 to move along the first preset direction X1. The lead screw nut 44 drives the support frame 10 and the first storage tray 23, the second storage tray 33, and the third storage tray 35 on the support frame 10 to move along the first preset direction X1. Optionally, the rotary drive 45 can be a motor.

[0048] Specifically, in this embodiment, the motion component 40 further includes a first support rail 47 and a second support rail mounted on the fixed base 41. The first support rail 47 and the second support rail are parallel to each other and are spaced apart along a second preset direction X2 that is perpendicular to the first preset direction X1. Both the first support rail 47 and the second support rail extend longitudinally along the first preset direction X1. The support frame 10 is slidably connected to the first support rail 47 and the second support rail. On the one hand, the first support rail 47 and the second support rail jointly support the support frame 10, making the support frame 10 and the first support platform 21 and the second support platform 31 on the support frame 10 more stable; on the other hand, the first support rail 47 and the second support rail guide the movement of the support frame 10.

[0049] Furthermore, the aforementioned lead screw 43 is located between the first support guide rail 47 and the second support guide rail, that is, the lead screw 43 is installed using the space between the first support guide rail 47 and the second support guide rail, which makes the structure of the storage device more compact and helps to reduce the space required by the storage device.

[0050] It should be noted that the aforementioned second support rail is not mandatory. For other embodiments, please refer to... Figure 4As shown, only the first support guide rail 47 is installed on the fixed base 41, and no second support guide rail is installed. The first support guide rail 47 and the lead screw 43 are parallel and both extend longitudinally along the first preset direction X1. The support frame 10 is slidably connected to the first support guide rail 47 and fixedly connected to the lead screw nut 44, thereby using the first support guide rail 47 and the lead screw 43 to jointly support the support frame 10. As long as the smooth movement of the support frame 10 can be achieved, it is not limited here. Further, the moving component 40 also includes a baffle 49 fixedly connected to the fixed base 41. The baffle 49 is located on one side of the fixed base 41 in the second preset direction X2, and the first support guide rail 47 is located on the other side of the fixed base 41 in the second preset direction X2. The lead screw 43 is located between the first support guide rail 47 and the baffle 49, that is, the space between the first support guide rail 47 and the baffle 49 is used to install the lead screw 43, making the structure of the storage device more compact and helping to reduce the space occupied by the storage device.

[0051] In a specific embodiment, the support frame 10 includes a base plate 11 and two side plates 13. The base plate 11 is slidably connected to the first support guide rail 47 and fixedly connected to the lead screw nut 44, so that the base plate 11 can move along the first support guide rail 47 following the lead screw nut 44. The two ends of each side plate 13 in the length direction are a connecting end a1 and a free end a2, respectively. The connecting end a1 of each side plate 13 is fixedly connected to the base plate 11. The length direction of both side plates 13 is parallel to the first preset direction X1 (i.e., the direction of movement of the base plate 11), and the two side plates 13 are spaced apart along the second preset direction X2. The first support platform 21 and the second support platform 31 are installed on the free ends a2 of the two side plates 13. Thus, when the base plate 11 moves to the limit position along the first support guide rail 47, the free ends a2 of the two side plates 13 and the aforementioned first storage tray 23, second storage tray 33 and third storage tray 35 can reach a position outside the first support guide rail 47 (i.e., reach a position outside the first support guide rail 47). Figure 2 The position (outside the right end of the first support guide rail 47) is conducive to extending the working range of the material storage device.

[0052] In a specific embodiment, the testing equipment also includes a controller, which is communicatively connected to the transfer robot and the rotary drive 45. Under the control of the controller, the rotary drive 45 drives the lead screw 43 to rotate, thereby controlling the movement of the support frame 10. The transfer robot transfers components under the control of the controller. When the transfer robot transfers components, the controller sends position signals to the transfer robot and the rotary drive 45 according to the type of component being transferred (i.e., components awaiting retesting, defective components, or spurious components). The rotary drive 45 drives the lead screw 43 to rotate according to the received position signals until the support frame 10 moves to the target position. The transfer robot accurately releases the picked-up components onto the first storage tray 23, the second storage tray 33, or the third storage tray 35 according to the received position signals.

[0053] Furthermore, the testing equipment also includes an alarm device that is communicatively connected to the controller. If the controller detects that the support frame 10 has not moved to the target position, the controller controls the transfer robot to stop moving and controls the alarm device to issue an alarm (e.g., sound an alarm).

[0054] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A material storage device, characterized in that, include: Support frame (10); The first storage assembly (20) includes a first support platform (21) and a first storage tray (23). The first support platform (21) is mounted on the support frame (10), and the first storage tray (23) is disposed on the first support platform (21) for storing components awaiting retesting and / or components requiring reheating. The second storage assembly (30) includes a second support platform (31) and a second storage tray (33). The second support platform (31) is mounted on the support frame (10), and the second storage tray (33) is disposed on the second support platform (31) for storing defective components.

2. The material storage device according to claim 1, characterized in that, The first material storage assembly (20) also includes a heating element (25) disposed on the first support platform (21).

3. The material storage device according to claim 2, characterized in that, The first support platform (21) has a mounting hole, and the heating element (25) is disposed in the mounting hole.

4. The material storage device according to claim 1, characterized in that, The second storage component (30) further includes a third storage tray (35), the second support platform (31) has a first support area and a second support area, the second storage tray (33) is disposed on the first support area, and the third storage tray (35) is disposed on the second support area and is used to store dummy films.

5. The material storage device according to claim 4, characterized in that, The first storage tray (23), the second storage tray (33), and the third storage tray (35) are arranged sequentially along a first preset direction (X1); or The first storage tray (23), the third storage tray (35) and the second storage tray (33) are arranged sequentially along the first preset direction (X1).

6. The material storage device according to any one of claims 1 to 5, characterized in that, The storage device also includes a motion component (40), and the support frame (10) is mounted on the motion component (40). The motion component (40) can controllably drive the support frame (10) to move.

7. The material storage device according to claim 6, characterized in that, The motion component (40) includes a fixed base (41), a lead screw (43), a rotary drive component (45), and a lead screw nut (44); The lead screw (43) is rotatably connected to the fixed base (41), the rotary drive (45) is mounted on the fixed base (41) and is drivenly connected to the lead screw (43); the support frame (10) is movably connected to the fixed base (41), the lead screw nut (44) is threadedly connected to the lead screw (43) and is connected to the support frame (10).

8. The material storage device according to claim 7, characterized in that, The motion component (40) further includes a first support rail (47) and a second support rail mounted on the fixed base (41). The first support rail (47) and the second support rail are parallel to each other. The support frame (10) is slidably connected to the first support rail (47) and the second support rail. The lead screw (43) is located between the first support rail (47) and the second support rail.

9. The material storage device according to claim 6, characterized in that, The support frame (10) includes a base plate (11) and two side plates (13). The base plate (11) is mounted on the motion assembly (40). Each side plate (13) extends along the moving direction of the base plate (11), and the two ends of each side plate (13) in the length direction are a connecting end (a1) and a free end (a2), respectively. The connecting end (a1) of each side plate (13) is fixedly connected to the base plate (11). The first support platform (21) and the second support platform (31) are mounted on the free ends (a2) of the two side plates (13).

10. A testing device, characterized in that, The device includes a testing apparatus, a transfer robot, and a storage device as described in any one of claims 1 to 9, wherein the testing apparatus is used to test components, and the transfer robot is used to transfer components between the testing apparatus and the storage device.

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