A device for extending the position of a light control point using a prism

Abstract

The utility model relates to ion sputtering coating device technical field discloses a device of extending light control point position with prism, including the casing, the inner wall rotation of casing is connected with the pivot, the one end of pivot is equipped with the base sheet in the casing outside, the outer wall of base sheet is closely combined with the lock piece, the outer wall of casing is equipped with the window, the position of window is equipped with the base with corresponding, the outer wall of base is equipped with fixed seat no.

Description

Technical Field

[0001] This utility model relates to the technical field of ion sputtering coating equipment, specifically a device that uses a prism to extend the position of the optical control point. Background Technology

[0002] Ion sputtering is a technique that uses high-energy ions to bombard a target in a vacuum environment, causing its atoms to be sputtered and deposited on the surface of the sample to form an interference film. It is mainly used to enhance the interphase contrast display in the microstructure analysis of materials.

[0003] The diameter of the substrate is usually of a uniform specification, while the monitoring window of the equipment is located at a radius of 110mm on the substrate. The position of this monitoring window is fixed and cannot be moved. Since the coating precision at the monitoring point is relatively high compared to other positions on the substrate, the effective area of ​​the resulting product is mostly concentrated in the area around the radius of 110mm. In addition, the equipment requires airtightness during operation to prevent ion leakage from affecting the coating quality. Therefore, the output of equipment on the market is low and the coating effect is not good. To address this, we propose a device that uses a prism to extend the position of the light control point. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a device for extending the position of light control points using a prism, thus solving the problems mentioned in the background.

[0005] This utility model provides the following technical solution: a device for extending the position of a light control point using a prism, comprising a housing, a rotating shaft rotatably connected to the inner wall of the housing, a substrate located at one end of the rotating shaft outside the housing, a locking piece tightly fitted to the outer wall of the substrate, a window opening on the outer wall of the housing, a base corresponding to the window, a fixing seat one and a fixing seat two respectively on the outer wall of the base, a prism one and a prism two respectively on the outer wall of the fixing seat one and the fixing seat two, an adjustment groove opening in the middle of the fixing seat one and the fixing seat two, a limiting groove opening at the bottom of the inner wall of the adjustment groove, a through groove opening at the top of the inner wall of the adjustment groove, an adjustment block slidably connected to the inner walls of the adjustment groove, the limiting groove and the through groove, a positioning screw and a straight plate respectively fixedly mounted on the top of the adjustment block, a fastening nut threadedly connected to the outer wall of the positioning screw, a clamping plate fixedly mounted on the top of the straight plate, a connecting frame tightly fitted to the outer wall of the clamping plate, a positioning rod fixedly mounted on the inner wall of the connecting frame, and a light source located on the inner wall of the housing.

[0006] As a preferred technical solution of this utility model, the positions of the light source and the window correspond to each other, and the first prism, the second prism and the light source are all located on the same straight line.

[0007] As a preferred embodiment of this utility model, the end of the positioning rod is fixedly assembled with the outer wall of prism one, and there are two connecting frames, with prism one and prism two being fixedly connected to fixing seat one and fixing seat two respectively through the connecting frames.

[0008] As a preferred embodiment of this utility model, the substrate is fixedly connected to the rotating shaft by a locking plate, and the inner wall of the locking plate is threadedly connected to the outer wall of the rotating shaft.

[0009] As a preferred embodiment of this utility model, the number of adjustment blocks is two, and both adjustment blocks are symmetrically distributed along the outer wall of the connecting frame.

[0010] As a preferred technical solution of this utility model, the outer wall of the clamping plate is closely fitted with the outer wall of the connecting frame, and both the clamping plate and the adjusting block are made of galvanized iron metal.

[0011] As a preferred technical solution of this utility model, the bottom end of the fastening nut is tightly fitted with the top end of the fixing seat, and the adjusting block is fixedly connected to the fixing seat through the fastening nut.

[0012] As a preferred embodiment of this utility model, the number of positioning rods is several, and the several positioning rods are evenly distributed along the inner wall of the connecting frame.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. This device for extending the position of the light control point using prisms, through the structure of housing, rotating shaft, substrate, base, locking plate, window, prism one, and prism two, enables the device to use prism one to totally reflect light into prism two during operation, and then perform total reflection again through prism two. This increases the light path and the contact area between the light and ions and the substrate, thereby increasing the output of the device without changing the shape and sealing of the equipment.

[0015] 2. This device for extending the position of the light control point using a prism, through the structure of a positioning rod, connecting frame, limiting groove, adjusting block, positioning screw, and fastening nut, allows the user to adjust the distance between the two adjusting blocks by rotating the fastening nut during use. This facilitates the installation of prisms of different specifications on the device, making it easy to operate and disassemble the prisms, thereby improving the device's range of applications and practicality. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a side view of the structure of this utility model;

[0018] Figure 3 This is a side sectional view of the present invention.

[0019] Figure 4 This is a schematic diagram of the structure of the prism of this utility model;

[0020] Figure 5 This utility model Figure 4 Enlarged structural diagram at point A in the middle.

[0021] In the diagram: 1. Shell; 2. Shaft; 3. Base plate; 4. Fixing seat one; 5. Prism one; 6. Fixing seat two; 7. Base; 8. Locking plate; 9. Light source; 10. Window; 11. Prism two; 12. Adjustment groove; 13. Limiting groove; 14. Connecting frame; 15. Positioning rod; 16. Adjustment block; 17. Positioning screw; 18. Fastening nut; 19. Through groove; 20. Straight plate; 21. Clamping plate. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-5 A device for extending the position of a light control point using a prism includes a housing 1. A rotating shaft 2 is rotatably connected to the inner wall of the housing 1. A substrate 3 is located at one end of the rotating shaft 2 outside the housing 1. A locking piece 8 is tightly fitted to the outer wall of the substrate 3. A window 10 is opened on the outer wall of the housing 1. A base 7 is located at a corresponding position of the window 10. A fixing seat 4 and a fixing seat 6 are respectively provided on the outer wall of the base 7. A prism 5 and a prism 11 are respectively provided on the outer wall of the fixing seat 4 and the fixing seat 6. An adjustment groove 12 is opened in the middle of both the fixing seat 4 and the fixing seat 6 for adjustment. A limiting groove 13 is provided at the bottom of the inner wall of the groove 12, and a through groove 19 is provided at the top of the inner wall of the adjusting groove 12. Adjusting blocks 16 are slidably connected to the inner walls of the adjusting groove 12, the limiting groove 13, and the through groove 19. A positioning screw 17 and a straight plate 20 are fixedly mounted on the top of the adjusting blocks 16, respectively. A fastening nut 18 is threadedly connected to the outer wall of the positioning screw 17. A clamping plate 21 is fixedly mounted on the top of the straight plate 20. A connecting frame 14 is tightly fitted to the outer wall of the clamping plate 21. A positioning rod 15 is fixedly mounted on the inner wall of the connecting frame 14. A light source 9 is provided on the inner wall of the housing 1.

[0024] In the above structure, the housing 1, rotating shaft 2, substrate 3, fixing base 4, prism 5, fixing base 6, base 7, light source 9, window 10, and prism 11 are arranged so that during use, the light source 9 emits light rays, which then enter the prism 11 through the window 10. The light rays undergo total internal reflection through the prism 11, changing the direction of the light rays emitted by the light source 9. Then, the light rays undergo total internal reflection inside the prism 5, thereby increasing the travel distance of the light rays and increasing the contact area between the substrate 3 and the light rays. This extends the radius of the monitoring point's optical path from the original 110mm to 130mm, improving the monitoring effect of the optical path and enhancing the practicality of the device.

[0025] In a preferred embodiment, the positions of the light source 9 and the window 10 correspond to each other, and the first prism 5, the second prism 11, and the light source 9 are all located on the same straight line.

[0026] In the above structure, the prism 1 5, prism 2 11 and light source 9 are designed so that the device will not make too many changes to the overall shape of the housing 1 during operation, thereby ensuring the overall sealing of the housing 1. The light rays enter the prism 2 11 through the window 10 to complete the total internal reflection operation, thus ensuring the normal operation of the device.

[0027] In a preferred embodiment, the end of the positioning rod 15 is fixedly assembled with the outer wall of the first prism 5, and there are two connecting frames 14. The first prism 5 and the second prism 11 are both fixedly connected to the first fixed seat 4 and the second fixed seat 6 respectively through the connecting frames 14.

[0028] In the above structure, the prism 15 and prism 211 are designed to allow light to enter prism 15 through total internal reflection of light rays by prism 211. This allows prism 15 to guide the reflected light to the substrate 3 to complete the ion sputtering coating operation. No adjustment of any components is required to increase the monitoring range, which makes it easier for users to operate and reduces the difficulty of operating the device.

[0029] In a preferred embodiment, the substrate 3 is fixedly connected to the rotating shaft 2 by a locking piece 8, and the inner wall of the locking piece 8 is threadedly connected to the outer wall of the rotating shaft 2.

[0030] In the above structure, the locking plate 8 and the rotating shaft 2 structure enable the user to rotate the substrate 3 by rotating the rotating shaft 2 after completing the ion sputtering coating operation on a certain part of the substrate 3 during use. This allows the user to adjust the position of the substrate 3 that has not been coated to the position corresponding to the prism 5, further facilitating the user's operation.

[0031] In a preferred embodiment, there are two adjustment blocks 16, and both adjustment blocks 16 are symmetrically distributed along the outer wall of the connecting frame 14.

[0032] In the above structure, the two adjusting blocks 16 allow the user to rotate the fastening nut 18 to disengage it from the fixed base 4 during use. This facilitates the user to move the adjusting blocks 16 to place the connecting frame 14 between the two adjusting blocks 16, making it easier for the user to assemble and disassemble the connecting frame 14 and the prism 5. This improves the user's work efficiency and ensures that the device is suitable for different types of lenses, thus expanding the device's application range.

[0033] In a preferred embodiment, the outer wall of the clamp 21 is tightly fitted to the outer wall of the connecting frame 14, and both the clamp 21 and the adjusting block 16 are made of galvanized iron.

[0034] In the above structure, galvanized iron technology has the characteristics of hardness and wear resistance, which can effectively reduce the wear of both during operation and thus extend their service life. The hardness of galvanized iron can also ensure the fixing effect of the adjusting block 16 on the connecting frame 14 and ensure the stability of the connecting frame 14 after installation. In addition, galvanized iron has the characteristic of low cost, thereby reducing the production and maintenance costs of the device.

[0035] In a preferred embodiment, the bottom end of the fastening nut 18 is tightly fitted with the top end of the fixing seat 4, and the adjusting block 16 is fixedly connected to the fixing seat 4 via the fastening nut 18.

[0036] In the above structure, the user can move the adjusting block 16 by rotating the adjusting nut 18, or fix the adjusting block 16 by tightening the adjusting nut 18, thereby ensuring the stability of the clamping plate 21 when clamping the connecting frame 14, thus preventing the connecting frame 14 from becoming loose and improving the stability of the connecting frame 14.

[0037] In a preferred embodiment, there are several positioning rods 15, and the several positioning rods 15 are evenly distributed along the inner wall of the connecting frame 14.

[0038] In the above structure, the presence of several positioning rods 15 allows the user to lift the connecting frame 14 to install the prism 5 onto the mounting base 4 during use. This eliminates the need for the user's fingers to touch the prism 5, preventing impurities and fingerprints from forming on its surface and thus avoiding contamination. Consequently, the light guiding and reflection effects of the prism 5 are not affected, ensuring the normal operation of the device.

[0039] Working principle: First, the user can rotate the fastening nut 18 to disengage it from the fixing seat 4, making it easier to adjust the distance between the two adjusting blocks 16. Then, the user picks up the connecting frame 14 and places it together with the prism 5 between the two adjusting blocks 16. The clamping plate 21 is then used to clamp the connecting frame 14 against its outer wall, making it easy for the user to assemble and disassemble the connecting frame 14. This also ensures that the device is suitable for different types of lenses, thereby improving the practicality and range of use of the device. During operation, the light is totally reflected by the prism 2 11 and then enters the prism 5, thereby increasing the contact area between the substrate 3 and the light and increasing the optical path, extending the radius from the original 110mm to 130mm. This improves the coating effect and coating output of the device without changing the sealing and shape of the equipment.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for extending the position of a light control point using a prism, characterized in that, The enclosure includes a housing (1), with a rotating shaft (2) rotatably connected to the inner wall of the housing (1). A base plate (3) is located at one end of the rotating shaft (2) outside the housing (1). A locking plate (8) is tightly fitted to the outer wall of the base plate (3). A window (10) is opened on the outer wall of the housing (1). A base (7) is located at a corresponding position of the window (10). A fixing seat one (4) and a fixing seat two (6) are respectively provided on the outer wall of the base (7). A prism one (5) and a prism two (11) are respectively provided on the outer walls of the fixing seat one (4) and the fixing seat two (6). An adjustment groove (12) is opened in the middle of both the fixing seat one (4) and the fixing seat two (6). The inner wall of the adjustment groove (12)... A limiting groove (13) is provided at the bottom of the housing (12), and a through groove (19) is provided at the top of the inner wall of the adjusting groove (12). Adjusting blocks (16) are slidably connected to the inner walls of the adjusting groove (12), the limiting groove (13), and the through groove (19). A positioning screw (17) and a straight plate (20) are fixedly mounted on the top of the adjusting block (16). A fastening nut (18) is threadedly connected to the outer wall of the positioning screw (17). A clamping plate (21) is fixedly mounted on the top of the straight plate (20). A connecting frame (14) is tightly fitted to the outer wall of the clamping plate (21). A positioning rod (15) is fixedly mounted on the inner wall of the connecting frame (14). A light source (9) is provided on the inner wall of the housing (1).

2. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The positions of the light source (9) and the window (10) are corresponding, and the first prism (5), the second prism (11) and the light source (9) are all located on the same straight line.

3. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The end of the positioning rod (15) is fixedly assembled with the outer wall of prism one (5). There are two connecting frames (14), and prism one (5) and prism two (11) are fixedly connected to fixing seat one (4) and fixing seat two (6) respectively through the connecting frames (14).

4. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The substrate (3) is fixedly connected to the rotating shaft (2) by a locking piece (8), and the inner wall of the locking piece (8) is threadedly connected to the outer wall of the rotating shaft (2).

5. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The number of adjustment blocks (16) is two, and both adjustment blocks (16) are symmetrically distributed along the outer wall of the connecting frame (14).

6. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The outer wall of the clamp (21) is closely fitted with the outer wall of the connecting frame (14), and both the clamp (21) and the adjusting block (16) are made of galvanized iron.

7. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The bottom end of the fastening nut (18) is tightly fitted to the top end of the fixed seat (4), and the adjusting block (16) is fixedly connected to the fixed seat (4) through the fastening nut (18).

8. The device for extending the position of a light control point using a prism according to claim 1, characterized in that, The number of positioning rods (15) is several, and the several positioning rods (15) are evenly distributed along the inner wall of the connecting frame (14).

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