A film removing device for semiconductor refrigeration sheet production

By designing a film removal device for semiconductor cooling wafers, a cylinder-driven slide rail and slider system is used to move the cooling wafer, solving the problem that the developer solution has difficulty covering uneven structures, improving the quality and efficiency of film removal, and adapting to cooling wafers of different sizes.

CN224366303UActive Publication Date: 2026-06-16SHENZHEN HUAXIN ZHONGYUAN TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN HUAXIN ZHONGYUAN TECHNOLOGY CO LTD
Filing Date
2025-06-24
Publication Date
2026-06-16

AI Technical Summary

⚠Technical Problem

In the prior art, the uneven surface structure and corner areas of the semiconductor cooling chip make it difficult for the developer to cover the film evenly, resulting in poor film removal quality.

⚗Method used

A film removal device was designed. A cylinder drives a slide rail and slider system to move the cooling chip placement rack up and down in the film removal tank. The cooling chip is shaken by the cooperation of a push rod and a push block, which promotes the flow of developer on the surface. At the same time, an adjustment mechanism is used to adapt to cooling chips of different sizes to ensure that the developer is in full contact with the chip.

🎯Benefits of technology

It improves the contact between the developer and the surface of the semiconductor cooling chip, enhances the film removal effect and efficiency, adapts to cooling chips of different sizes and specifications, and improves the versatility of production.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224366303U_ABST
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Abstract

The utility model discloses a kind of film removal devices for semiconductor refrigeration sheet production, it is related to the production field of semiconductor refrigeration sheet, including film removal groove, the top of film removal groove is fixed with support plate, the top of support plate is fixed with cylinder, the piston rod end of cylinder is transversely fixed with slide rail, the inside of slide rail is transversely fixed with slide rod, the rod wall of slide rod is slidably equipped with sliding block, and the rod wall of slide rod and located the spring of one side of sliding block is equipped with, the bottom of sliding block is equipped with suspender, and the lower end of suspender is fixed with refrigeration sheet rack;The side of refrigeration sheet rack is fixed with push rod, and the side inner wall of film removal groove is fixed with multiple push block that distribute evenly.The utility model drives refrigeration sheet rack to move up and down and shake by cylinder, enhances the contact effect of semiconductor refrigeration sheet and developing solution, optimizes developing solution update efficiency, improves film removal quality;Adjusting mechanism can be adapted to different specifications refrigeration sheet, improve versatility.
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