Micro-channel cold plate with fluidic jets

Abstract

The application relates to a jet micro-channel cold plate, which comprises a cover plate, a jet plate, a fin assembly and a base plate connected in sequence, the fin assembly comprises a plurality of heat dissipation fins arranged along a first direction; the cover plate is provided with a first liquid inlet hole and a first liquid outlet hole, a liquid collecting groove is arranged on the side of the cover plate close to the jet plate, and the liquid collecting groove is communicated with the first liquid inlet hole; the jet plate is provided with a jet slit communicated with the liquid collecting groove and a plurality of jet holes communicated with the liquid collecting groove, the length direction of the jet slit is parallel to the first direction, the jet plate is further provided with a second liquid outlet hole communicated with the first liquid outlet hole, and the cooling liquid discharged through the fin assembly can be discharged from the second liquid outlet hole. The jet slit and the jet hole cooperate with each other to expand the action range of the jet plate, the local high strength and the global uniformity are considered at the same time, and the heat dissipation efficiency is improved. Moreover, the length direction of the jet slit is parallel to the first direction, thereby ensuring that the cooling liquid flows through the whole area of the heat dissipation fin, and the heat dissipation area of the jet micro-channel cold plate is enhanced.

Description

Technical Field

[0001] This application relates to the field of electronic device cooling technology, and in particular to a jet microchannel cold plate. Background Technology

[0002] As the demand for AI computing power continues to increase, the heat flux density of power devices is also rising, leading to increasingly stringent requirements and challenges in heat dissipation. Therefore, more efficient heat dissipation solutions are needed to address the heat dissipation issues of high heat flux density chips. Liquid cooling plate solutions are becoming increasingly advantageous, with microchannel cold plates being used more and more due to their high heat dissipation performance. Jet microchannel cold plates are a novel heat dissipation technology proposed to improve the convective heat dissipation performance of microchannel cold plates. Their main principle is to form a jet of liquid supply, increasing the flow rate of the coolant through the microchannels, thereby enhancing the heat exchange performance of the cold plate.

[0003] The existing jet microchannel cold plate includes an inlet and outlet layer, a flow distribution layer, a jet layer, and a microchannel layer arranged in sequence. The inlet and outlet layer is provided with an inlet hole and a drain hole that are connected to the liquid collection tank. The coolant flows through the inlet hole, then through the flow distribution layer and the jet layer in sequence, and then flows into the microchannel layer. The coolant that flows through the microchannel layer is then discharged through the drain hole.

[0004] In related technologies, existing jet layers and microchannel layers have two placement positions. The first position involves the jet layer completely covering the microchannel layer. In this case, the coolant flow rate is high in the area below the inlet hole and low in the area further away. This uneven flow distribution leads to uneven temperature distribution in power devices. The second position involves the jet layer not completely covering the microchannel layer. This results in the coolant not flowing through the entire area of ​​the microchannel, reducing the heat dissipation effect of the jet microchannel cold plate. Utility Model Content

[0005] Therefore, it is necessary to provide a jet microchannel cold plate to address the problems of uneven flow distribution or the coolant not flowing through the entire area of ​​the microchannel.

[0006] A jet microchannel cold plate, the jet microchannel cold plate includes a cover plate, a jet plate, a fin assembly and a substrate connected in sequence, the fin assembly including a plurality of heat dissipation fins arranged along a first direction;

[0007] The cover plate is provided with a first liquid inlet and a first liquid outlet. The cover plate is provided with a liquid collection tank on the side near the jet plate, and the liquid collection tank is connected to the first liquid inlet.

[0008] The jet plate is provided with a jet slit communicating with the liquid collection tank and a plurality of jet holes communicating with the liquid collection tank. The length direction of the jet slit is parallel to the first direction. The jet plate is provided with a second drain hole communicating with the first drain hole. The coolant discharged through the fin assembly can be discharged from the second drain hole.

[0009] The aforementioned jet microchannel cold plate has a first liquid inlet, a first liquid outlet, and a liquid collection tank on the cover plate, and a jet slit, multiple jet holes, and a second liquid outlet on the jet plate. Coolant can flow sequentially through the first liquid inlet, the liquid collection tank, the jet slit, and / or the jet holes through the fin assembly, thereby increasing the heat dissipation area of ​​the jet microchannel cold plate using the fin assembly. The coolant flowing through the fin assembly can then be discharged sequentially through the second liquid outlet and the first liquid outlet to the outside of the jet microchannel cold plate, thus achieving coolant circulation.

[0010] This application incorporates jet slits, which can form continuous sheet-like or ribbon-like jets, resulting in more uniform fluid distribution and a larger coverage area. The jet slits and jet holes work together to expand the effective range of the jet plate, while simultaneously ensuring both localized high intensity and global uniformity, thus improving heat dissipation efficiency. Furthermore, by arranging multiple heat dissipation fins of the fin assembly along a first direction, and with the length direction of the jet slit parallel to the first direction, the coolant passing through the jet slits inevitably flows into the gap between any two adjacent heat dissipation fins, thereby ensuring that the coolant flows through the entire area of ​​the heat dissipation fins and improving the utilization rate of the fin assembly area of ​​the jet microchannel cold plate.

[0011] In one embodiment, a plurality of jet holes are arranged at intervals along the first direction, and the plurality of jet holes arranged at intervals along the first direction constitute a group of jet holes. At least one group of the jet holes is provided on each side of the jet slit along the second direction, and the second direction is perpendicular to the length direction.

[0012] By setting multiple sets of jet holes, and having at least one set of jet holes on each side of the jet slit along the second direction, the flow velocity of the liquid increases after passing through the jet holes. This achieves the cooperation between the multiple sets of jet holes and the jet slit, further enhancing the heat dissipation efficiency of the jet microchannel cold plate.

[0013] In one embodiment, the liquid collection tank includes a first connecting groove and a second connecting groove that are connected to each other. Both the first connecting groove and the second connecting groove extend along the first direction, and the first connecting groove is provided with a second connecting groove on each side along the second direction.

[0014] The first connecting groove is connected to the jet slit, and the second connecting groove is connected to the corresponding jet hole group.

[0015] By providing a first connecting groove that is connected to the jet slit, the coolant in the first connecting groove can be sprayed onto the fin assembly through the jet slit. By providing a second connecting groove that is connected to the jet hole group, the coolant in the second connecting groove can be sprayed onto the fin assembly through multiple jet holes. Furthermore, the first and second connecting grooves are also connected, allowing the coolant to circulate within the collection tank, thus solving the problem of insufficient coolant storage in either the first or second connecting groove.

[0016] In one embodiment, the first liquid inlet is located at the midpoint of the first connecting groove.

[0017] By placing the first inlet hole at the midpoint of the first connecting groove, the coolant is introduced from the geometric center of the first connecting groove and diffuses to the surrounding area, which can significantly reduce the local flow unevenness caused by "offset inlet".

[0018] In one embodiment, the first liquid inlet is located at the geometric center of the cover plate.

[0019] By placing the first inlet hole at the geometric center of the cover plate, the coolant is introduced from the geometric center of the cover plate and diffuses outward, reducing the problem of uneven flow distribution. Moreover, the center of gravity of the cover plate is concentrated, and placing the first inlet hole at the geometric center of the cover plate ensures uniform stress on the cover plate, which can reduce stress concentration or vibration problems caused by off-center inlet.

[0020] In one embodiment, the jet plate is provided with a receiving groove on the side near the substrate, and an abutting boss is provided in the receiving groove. The jet slit and a plurality of jet holes are provided on the abutting boss. The jet plate is attached to the substrate, and the abutting boss is attached to the fin assembly.

[0021] The abutment boss, the wall of the receiving groove, and the fin assembly together define a drainage channel that extends circumferentially around the fin assembly.

[0022] The bottom surface of the jet plate, near the substrate, has a receiving groove. Abutment bosses are located within this groove, abutting against the fin assembly. There are no gaps between the abutment bosses and the fin assembly, allowing all coolant flowing through the jet slots and holes to directly enter the fin assembly. This ensures the coolant impacts the fin assembly and substrate at a high jet velocity, improving the jet heat transfer coefficient and preventing the coolant from bypassing the fin assembly. Furthermore, the jet plate's fit against the substrate, along with the abutment bosses, the groove walls, and the fin assembly, defines a drainage channel, forming a closed space between the jet plate and the substrate to prevent coolant leakage.

[0023] In one embodiment, the tank wall of the receiving tank is provided with a second drain hole, and the liquid in the drain channel can be discharged to the outside through the second drain hole and the first drain hole in sequence.

[0024] By setting a second drain hole, the coolant flowing through the fin assembly is drained into the drain channel, and then discharged to the outside through the second drain hole and the first drain hole in sequence.

[0025] In one embodiment, a baffle is provided on the abutting protrusion, the baffle is located on one side of the fin assembly and is disposed between the jet slit and the second drain hole.

[0026] By installing a baffle on the abutment boss, the baffle is located on one side of the fin assembly and between the jet slit and the second drain hole. The baffle separates the jet slit and the second drain hole, allowing all the coolant passing through the jet hole assembly and the jet slit to flow into the fin assembly for heat dissipation. The coolant flowing through the fin assembly is discharged into the drain channel, where it is collected and discharged through the second drain hole.

[0027] In one embodiment, the end face of the fin assembly near the jet plate has a gap between it and the liquid outlet end of the jet slot and the liquid outlet end of the jet hole.

[0028] By defining the end face of the fin assembly close to the jet plate, and having a gap between it and the liquid outlet end of the jet slit and jet hole, that is, a gap between the lower end of the jet hole and the top end of the fin assembly, the coolant flowing out through the jet slit and jet hole can not only be directly sprayed onto the heat dissipation fins directly below it, but the coolant can also flow within the gap to other heat dissipation fins, thereby enhancing the heat dissipation effect of heat dissipation fins in other locations.

[0029] In one embodiment, the diameter of the jet hole gradually increases along a third direction, which is the direction of the jet hole's axial direction near the cover plate.

[0030] The diameter of the jet orifice gradually increases along the third direction, that is, the jet orifice is a conical orifice. The large end of the jet orifice faces the liquid collection tank, and the small end of the jet orifice faces the fin assembly, which ensures that the coolant is ejected at high speed at the outlet of the jet orifice. Compared with the through-hole type of jet orifice with a fixed orifice diameter, the pressure drop of the coolant on the jet plate can be significantly reduced. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the jet microchannel cold plate provided in Embodiment 1 of this application.

[0032] Figure 2 This is a cross-sectional view of the jet microchannel cold plate provided in Embodiment 1 of this application.

[0033] Figure 3 An exploded view of the jet microchannel cold plate provided in Embodiment 1 of this application from a first-view perspective.

[0034] Figure 4 An exploded view of the jet microchannel cold plate provided in Embodiment 1 of this application from a second perspective.

[0035] Figure 5 This is a schematic diagram of the cover plate provided in Embodiment 1 of this application.

[0036] Figure 6 This is a schematic diagram of the jet plate provided in Embodiment 1 of this application.

[0037] Figure 7 This is a cross-sectional view of the jet microchannel cold plate provided in Embodiment 2 of this application.

[0038] Figure label:

[0039] 100. Cover plate; 110. First liquid inlet; 120. First liquid outlet; 130. Liquid collection tank; 131. First connecting groove; 132. Second connecting groove;

[0040] 200, jet plate; 210, jet slot; 220, jet hole; 230, receiving tank; 240, drain channel; 250, second drain hole;

[0041] 300. Fin assembly;

[0042] 400. Substrate;

[0043] 500. Abutting boss;

[0044] 600, baffle;

[0045] 700. Liquid inlet connector;

[0046] 800, drain connector. Detailed Implementation

[0047] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0048] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0049] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0050] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0051] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0052] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0053] This application provides a jet microchannel cold plate, such as Figures 1 to 4 As shown, the jet microchannel cold plate includes a cover plate 100, a jet plate 200, a fin assembly 300, and a substrate 400 connected in sequence. The fin assembly 300 includes a plurality of heat dissipation fins arranged along a first direction. The cover plate 100 is provided with a first liquid inlet 110 and a first liquid outlet 120. The cover plate 100 is provided with a liquid collection tank 130 on the side near the jet plate 200, and the liquid collection tank 130 is connected to the first liquid inlet 110. The jet plate 200 is provided with a jet slit 210 connected to the liquid collection tank 130 and a plurality of jet holes 220 connected to the liquid collection tank 130. The length direction of the jet slit 210 is parallel to the first direction. The jet plate 200 is also provided with a second liquid outlet 250 connected to the first liquid outlet 120. The coolant discharged through the fin assembly 300 can be discharged from the second liquid outlet 250.

[0054] The aforementioned jet microchannel cold plate comprises a cover plate 100, a jet plate 200, a fin assembly 300, and a substrate 400 arranged and connected in sequence. The cover plate 100 has a first inlet hole 110, a first outlet hole 120, and a collection tank 130. The jet plate 200 has a jet slit 210, multiple jet holes 220, and a second outlet hole 250. Coolant can flow sequentially through the first inlet hole 110, the collection tank 130, the jet slit 210, and / or the jet holes 220 through the fin assembly 300, thereby increasing the heat dissipation area of ​​the jet microchannel cold plate. The coolant flowing through the fin assembly 300 can be discharged sequentially through the second outlet hole 250 and the first outlet hole 120 to the outside of the jet microchannel cold plate, thus achieving coolant circulation.

[0055] This application, by setting a jet slit 210, can form a continuous sheet-like or strip-like jet, resulting in a more uniform fluid distribution and a larger coverage area. The jet slit 210 and the jet hole 220 work together, expanding the effective range of the jet plate 200 through the combination of holes and slits, while taking into account both local high intensity and global uniformity, thus improving heat dissipation efficiency. Moreover, by arranging multiple heat dissipation fins of the fin assembly 300 along a first direction, and with the length direction of the jet slit 210 parallel to the first direction, the coolant passing through the jet slit 210 will inevitably flow into the gap between any two adjacent heat dissipation fins, thereby ensuring that the coolant flows through the entire area of ​​the heat dissipation fins and improving the utilization rate of the fin assembly area of ​​the jet microchannel cold plate.

[0056] In this embodiment, the length of the jet slit 210 along the first direction is greater than or equal to the length of the fin assembly 300 along the first direction, thereby covering the entire area of ​​the fin assembly with the jet slit 210, further improving the heat dissipation effect.

[0057] In one embodiment, such as Figures 1 to 4 As shown, the jet microchannel cold plate also includes a liquid inlet connector 700, one end of which is connected to the first liquid inlet hole 110.

[0058] In one embodiment, such as Figures 1 to 4 As shown, the jet microchannel cold plate also includes a drain connector 800, one end of which is connected to the first drain hole 120.

[0059] In one embodiment, such as Figure 3 and Figure 4 As shown, multiple jet holes 220 are arranged at intervals along a first direction, forming a jet hole group. At least one jet hole group is provided on each side of the jet slit 210 along a second direction, which is perpendicular to the length direction. By providing multiple jet hole groups, and at least one jet hole group on each side of the jet slit 210 along the second direction, the liquid flow velocity increases after passing through the jet holes 220. This achieves mutual cooperation between the multiple jet hole groups and the jet slit 210, further enhancing the heat dissipation efficiency of the jet microchannel cold plate.

[0060] In this embodiment, as Figure 3 and Figure 4 As shown, there are two sets of jet hole groups, with one set of jet hole groups on each side of the jet slot 210 along the second direction.

[0061] In other embodiments, the jet orifice group is provided in three, four or more groups, and the number of jet orifice groups is set according to the actual operation needs.

[0062] In one embodiment, such as Figures 3 to 5As shown, the liquid collection tank 130 includes a first connecting groove 131 and a second connecting groove 132 that are connected. Both the first connecting groove 131 and the second connecting groove 132 extend along a first direction, and a second connecting groove 132 is provided on each side of the first connecting groove 131 along a second direction. The first connecting groove 131 is connected to the jet slit 210, and the second connecting groove 132 is connected to the corresponding jet hole group. By providing the first connecting groove 131, which is connected to the jet slit 210, the coolant in the first connecting groove 131 can be ejected to the fin assembly 300 through the jet slit 210. By providing the second connecting groove 132, which is connected to the jet hole group, the coolant in the second connecting groove 132 can be ejected to the fin assembly 300 through the multiple jet holes 220. The first connecting groove 131 and the second connecting groove 132 are also connected, so that the coolant can circulate in the liquid collection tank 130, solving the problem of insufficient coolant storage in the first connecting groove 131 or the second connecting groove 132.

[0063] In one embodiment, such as Figures 3 to 5 As shown, the first inlet hole 110 is located at the geometric center of the first connecting groove 131. By placing the first inlet hole 110 at the geometric center of the first connecting groove 131, the coolant is introduced from the midpoint of the first connecting groove 131 and diffuses to the surrounding area, which can significantly reduce the local flow unevenness caused by "offset inlet".

[0064] In this embodiment, the first connecting groove 131 is elongated, and the geometric center of the first connecting groove 131 is the midpoint of the elongated first connecting groove 131.

[0065] In one embodiment, such as Figures 3 to 5 As shown, the first inlet hole 110 is located at the geometric center of the cover plate 100. By placing the first inlet hole 110 at the geometric center of the cover plate 100, coolant is introduced from the geometric center of the cover plate 100 and diffuses outward, reducing the problem of uneven flow distribution. Furthermore, the center of gravity of the cover plate 100 is concentrated, and by placing the first inlet hole 110 at the intersection of the diagonals of the cover plate 100, the stress on the cover plate 100 is uniform, which can reduce stress concentration or vibration problems caused by offset inlet.

[0066] In this embodiment, the cover plate 100 has a cuboid structure, and the geometric center of the cover plate 100 is the intersection of the two diagonals of the cover plate 100.

[0067] In one embodiment, such as Figure 2 and Figure 6As shown, a receiving groove 230 is provided on the side end face of the jet plate 200 near the substrate 400. An abutment boss 500 is provided in the receiving groove 230. The jet slit 210 and a plurality of jet holes 220 are provided on the abutment boss 500. The jet plate 200 is attached to the substrate 400, and the abutment boss 500 is attached to the fin assembly 300. The abutment boss 500, the groove wall of the receiving groove 230 and the fin assembly 300 together define the drain channel 240, which extends circumferentially around the plurality of fin assemblies 300.

[0068] The jet plate 200 is located on one end face of the substrate 400, that is, on the side face of the substrate 400. Figure 2 From a certain perspective, the bottom surface of the jet plate 200 has a receiving groove 230, and an abutment boss 500 is provided in the receiving groove 230. The abutment boss 500 abuts against the fin assembly 300, that is, the abutment boss 500 is in close contact with the fin assembly 300. There is no gap between the abutment boss 500 and the fin assembly 300. All the coolant flowing out through the jet slot 210 and jet hole 220 flows directly into the fin assembly 300, so that the coolant directly impacts the fin assembly 300 to the substrate 400 at a high jet velocity, which improves the jet heat transfer coefficient and also avoids the problem of the coolant bypassing the fin assembly 300. In addition, the jet plate 200 is attached to the substrate 400, and together with the boss 500, the groove wall of the receiving groove 230 and the fin assembly (300), it defines the drain channel 240, that is, a closed space is formed between the jet plate 200 and the substrate 400 to prevent coolant leakage.

[0069] In this embodiment, the jet plate 200 is welded to the substrate 400 on one end face near the substrate 400.

[0070] In one embodiment, such as Figure 2 and Figure 6 As shown, the tank wall of the receiving tank 230 is provided with a second drain hole 250. Liquid in the drain channel 240 can be discharged to the outside through the second drain hole 250 and the first drain hole 120 in sequence. By providing the second drain hole 250, the coolant flowing through the fin assembly 300 is discharged into the drain channel 240, and then discharged to the outside through the second drain hole 250, the first drain hole 120 and the drain connector 800 in sequence.

[0071] In this embodiment, as Figure 2 and Figure 6 As shown, a second drain hole 250 is provided on the wall of the receiving tank 230 along the third direction, that is, a second drain hole 250 is provided on the drain channel 240. The third direction is the axial direction of the jet hole 220 near the cover plate 100.

[0072] In this embodiment, as Figure 2 and Figure 6As shown, the receiving tank 230 has a cuboid structure, the abutting boss 500 has a cuboid structure, and a U-shaped drainage channel 240 is formed between the tank wall of the receiving tank 230 and the abutting boss 500.

[0073] In one specific embodiment, the sidewall of the abutment boss 500 along the first direction is attached to the groove wall of the receiving groove 230.

[0074] In other embodiments, there are gaps between the multiple sidewalls of the abutting boss 500 and the groove wall of the receiving groove 230.

[0075] In other embodiments, the shape of the enclosed drainage channel 240 varies depending on the shape of the receiving groove 230 and the abutting boss 500. For example, if the receiving groove 230 and the abutting boss 500 are cylindrical, then the enclosed drainage channel 240 is annular.

[0076] In one embodiment, such as Figure 2 and Figure 6 As shown, a baffle 600 is provided on the abutment boss 500. The baffle 600 is located on one side of the fin assembly 300 and is positioned between the jet slit 210 and the second drain hole 250. By providing the baffle 600 on the abutment boss 500, with the baffle 600 located on one side of the fin assembly 300 and positioned between the jet slit 210 and the second drain hole 250, the baffle 600 separates the jet slit 210 and the second drain hole 250, allowing all the coolant passing through the jet hole group and the jet slit 210 to flow into the fin assembly 300 for heat dissipation. The coolant flowing through the fin assembly 300 is discharged into the drain channel 240, where it is collected and discharged through the second drain hole 250.

[0077] In conclusion, Figures 2 to 6 In the embodiment of the jet microchannel cold plate, a liquid collection groove 130 is provided on one end face of the cover plate 100 that is attached to the jet plate 200 (i.e., the bottom wall of the cover plate 100), and a receiving groove 230 is provided on the bottom wall of the jet plate 200. An abutment boss 500 and a baffle 600 are provided in the receiving groove 230. The abutment boss 500 abuts against the end face of the fin assembly 300, and the baffle 600 is located on one side of the fin assembly 300 and separates the jet. The slit 210 and the second drain hole 250, and the drain channel 240 are arranged circumferentially around the fin assembly 300, so that the cover plate 100, the jet plate 200, the fin assembly 300 and the base plate 400 form a closed loop. After the coolant is injected into the fin assembly 300 from the jet slit 210 and the jet hole 220, it flows into the drain channel 240 and finally flows into the drain connector 800 from the second drain hole 250 and the first drain hole 120.

[0078] In one embodiment, such as Figure 2As shown, the diameter of the jet orifice 220 gradually increases along a third direction, which is the direction of the jet orifice 220 axially closer to the cover plate 100. The jet orifice 220 is tapered, with its larger end facing the liquid collection tank 130 and its smaller end facing the fin assembly 300. This ensures high-speed ejection of coolant at the outlet of the jet orifice 220. Compared to a through-hole jet orifice 220 with a constant diameter, the pressure drop of the coolant on the jet plate 200 can be significantly reduced.

[0079] In one embodiment, such as Figure 7 As shown, the end face of the fin assembly 300 near the jet plate 200 has a gap between it and the liquid outlet ends of the jet slot 210 and the jet hole 220. By defining the gap between the end face of the fin assembly 300 near the jet plate 200 and the liquid outlet ends of the jet slot 210 and the jet hole 220, that is, in... Figure 7 From a certain perspective, there is a gap between the lower end of the jet hole 220 and the top end of the fin assembly 300. The coolant flowing out through the jet slot 210 and the jet hole 220 can not only be directly sprayed onto the heat dissipation fins directly below it, but the coolant can also flow in the gap to other heat dissipation fins to enhance the heat dissipation effect of other heat dissipation fins.

[0080] It should be noted that the liquid outlet end of the jet hole 220 is the end from which the coolant flows out of the jet hole 220.

[0081] It should be noted that the third direction, the first direction, and the second direction are all perpendicular to each other.

[0082] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0083] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A jet microchannel cold plate, characterized in that, The jet microchannel cold plate includes a cover plate (100), a jet plate (200), a fin assembly (300) and a substrate (400) connected in sequence. The fin assembly (300) includes a plurality of heat dissipation fins arranged along a first direction. The cover plate (100) is provided with a first liquid inlet (110) and a first liquid outlet (120). The cover plate (100) is provided with a liquid collection tank (130) on the side near the jet plate (200). The liquid collection tank (130) is connected to the first liquid inlet (110). The jet plate (200) is provided with a jet slit (210) communicating with the liquid collection tank (130) and a plurality of jet holes (220) communicating with the liquid collection tank (130). The length direction of the jet slit (210) is parallel to the first direction. The jet plate (200) is provided with a second drain hole (250) communicating with the first drain hole (120). The coolant discharged through the fin assembly (300) can be discharged from the second drain hole (250).

2. The jet microchannel cold plate according to claim 1, characterized in that, Multiple jet holes (220) are arranged at intervals along the first direction, and the multiple jet holes (220) arranged at intervals along the first direction constitute a jet hole group. The jet slit (210) is provided with at least one group of the jet holes on both sides along the second direction, and the second direction is perpendicular to the length direction.

3. The jet microchannel cold plate according to claim 2, characterized in that, The liquid collection tank (130) includes a first connecting groove (131) and a second connecting groove (132) that are connected. The first connecting groove (131) and the second connecting groove (132) both extend along the first direction, and the first connecting groove (131) is provided with a second connecting groove (132) on both sides along the second direction. The first connecting groove (131) is connected to the jet slit (210), and the second connecting groove (132) is connected to the corresponding jet hole group.

4. The jet microchannel cold plate according to claim 3, characterized in that, The first liquid inlet (110) is located at the geometric center of the first connecting groove (131).

5. The jet microchannel cold plate according to claim 1, characterized in that, The first liquid inlet (110) is located at the geometric center of the cover plate (100).

6. The jet microchannel cold plate according to claim 1, characterized in that, The jet plate (200) has a receiving groove (230) on the side near the substrate (400), and an abutment boss (500) is provided in the receiving groove (230). The jet slit (210) and a plurality of jet holes (220) are provided on the abutment boss (500). The jet plate (200) is attached to the substrate (400), and the abutment boss (500) is attached to the fin assembly (300). The abutment boss (500), the wall of the receiving groove (230), and the fin assembly (300) together define a drainage channel (240), which extends circumferentially around the fin assembly (300).

7. The jet microchannel cold plate according to claim 6, characterized in that, The tank wall of the receiving tank (230) is provided with the second drain hole (250), and the liquid in the drain channel (240) can be discharged to the outside through the second drain hole (250) and the first drain hole (120) in sequence.

8. The jet microchannel cold plate according to claim 7, characterized in that, The abutment boss (500) is provided with a baffle (600), which is located on one side of the fin assembly (300) and is disposed between the jet slit (210) and the second drain hole (250).

9. The jet microchannel cold plate according to claim 1, characterized in that, The end face of the fin assembly (300) near the jet plate (200) has a gap between the liquid outlet end of the jet slot (210) and the liquid outlet end of the jet hole (220).

10. The jet microchannel cold plate according to claim 1, characterized in that, The diameter of the jet hole (220) gradually increases along a third direction, which is the direction of the jet hole (220) axially close to the cover plate (100).

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