TEOS bearing liquid tank and TEOS heating unit

Abstract

The utility model discloses a kind of TEOS carrying liquid tank and TEOS heating unit, it is related to tank body structure technical field, wherein, TEOS carrying liquid tank, including tank body and liquid inlet pipe;The technical scheme of the utility model is recessed into groove in accommodating cavity bottom wall, and the end of liquid inlet pipe inserted into groove is inserted, in this way, liquid inlet pipe can realize stable output in liquid inlet process to accumulate and store TEOS liquid, when extracting liquid in tank body by liquid inlet pipe, rely on the groove of inner groove, realize the massive extraction of liquid in tank body, avoid the spacing between pipeline and tank body inner bottom wall, so that there is always part of liquid remaining after extraction, and affect the quality and efficiency of extraction.

Description

Technical Field

[0001] This utility model relates to the field of tank structure technology, and in particular to a TEOS liquid-carrying tank and a TEOS heating unit. Background Technology

[0002] TEOS (tetraethyl orthosilicate) is a liquid at room temperature. In the process of forming an oxide film on a wafer using TEOS, the liquid TEOS must first be converted into a gas by equipment, and then transported into the reaction chamber through pipelines to carry out the oxide film formation process.

[0003] Generally, liquid TEOS is mostly stored in liquid tanks, which are directly heated to vaporize and output the TEOS. However, when the gaseous TEOS is output and liquid remains in the tank, it needs to be removed in time. Currently, most methods for removing liquid from the tank involve direct pipe extraction. However, since the pipe that extends directly into the tank is always at a distance from the bottom wall of the tank, the quality and efficiency of liquid extraction cannot be guaranteed. Utility Model Content

[0004] The main purpose of this invention is to propose a TEOS carrying liquid tank, a TEOS heating unit, and a diffusion furnace, which aims to improve the quality and efficiency of liquid extraction from the tank.

[0005] To achieve the above objectives, the present invention proposes a TEOS liquid-carrying tank, comprising:

[0006] The can body has a receiving cavity inside it;

[0007] A liquid inlet pipe is installed on the tank body and extends into the receiving cavity;

[0008] The cavity has a groove formed in the bottom wall, and the inlet pipe extends into the groove.

[0009] In one embodiment, the thickness of the bottom wall of the can body is greater than the depth of the groove.

[0010] In one embodiment, the groove is disposed on the bottom wall of the receiving cavity near the side wall of the receiving cavity.

[0011] In one embodiment, the groove opening communicates with the receiving cavity, and the sidewall of the groove extends obliquely toward the sidewall of the can body.

[0012] In one embodiment, the TEOS carrying liquid tank further includes a temperature detection unit, which is installed on the tank body, extends into the receiving cavity, and one end of the temperature detection unit is disposed near the bottom wall of the receiving cavity.

[0013] In one embodiment, the TEOS carrying liquid tank further includes a vent pipe, which is installed on the tank body and extends into the receiving cavity, with one end of the vent pipe extending into the receiving cavity away from the bottom wall of the receiving cavity.

[0014] In one embodiment, the liquid inlet pipe and the gas outlet pipe are positioned far apart from each other.

[0015] In one embodiment, the tank body is equipped with a liquid level monitoring device that extends into the accommodating cavity.

[0016] In one embodiment, a connecting portion is provided on the side of the can body, and the connecting portion is located close to the groove.

[0017] This utility model also proposes a TEOS heating unit, including the TEOS carrying liquid tank.

[0018] The technical solution of this utility model is to form a groove in the bottom wall of the accommodating cavity, and insert one end of the liquid inlet pipe into the groove. In this way, the liquid inlet pipe can achieve stable output and accumulate TEOS liquid during the liquid inlet process, and when the liquid is drawn from the tank body through the liquid inlet pipe, the groove of the inner groove can be used to achieve a large amount of liquid to be drawn from the tank body. This avoids the problem that some liquid will always remain after the extraction due to the gap between the pipe and the bottom wall of the tank body, which would affect the quality and efficiency of the extraction. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of an embodiment of the TEOS liquid-carrying tank provided by this utility model;

[0021] Figure 2 A schematic diagram of another embodiment of the TEOS liquid-carrying tank provided by this utility model;

[0022] Figure 3 This is a schematic diagram of another embodiment of the TEOS liquid-carrying tank provided by this utility model;

[0023] Figure 4 A schematic diagram of another embodiment of the TEOS liquid-carrying tank provided by this utility model;

[0024] Figure 5 for Figure 4 Enlarged cross-sectional view at point BB.

[0025] Explanation of icon numbers:

[0026] 100. TEOS liquid tank; 10. Tank body; 20. Air inlet pipe; 30. Air outlet pipe; 40. Liquid level monitoring device; 50. Liquid inlet pipe; 60. Receptacle; 70. Groove.

[0027] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0029] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0030] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0031] TEOS (tetraethyl orthosilicate) is a liquid at room temperature. In the process of forming an oxide film on a wafer using TEOS, the liquid TEOS must first be converted into a gas by equipment, and then transported into the reaction chamber through pipelines to carry out the oxide film formation process.

[0032] Generally, liquid TEOS is mostly stored in liquid tanks, which are directly heated to vaporize and output the TEOS. However, when the gaseous TEOS is output and liquid remains in the tank, it needs to be removed in time. Currently, most methods for removing liquid from the tank involve direct pipe extraction. However, since the pipe that extends directly into the tank is always at a distance from the bottom wall of the tank, the quality and efficiency of liquid extraction cannot be guaranteed.

[0033] This utility model proposes a TEOS liquid-carrying tank.

[0034] Please see Figure 1 In one embodiment of this utility model, the TEOS liquid-carrying tank includes:

[0035] The can body 10 has a receiving cavity 60 inside it;

[0036] Liquid inlet pipe 50, which is installed on the tank body 10 and extends into the receiving cavity 60;

[0037] The cavity 60 has a groove 70 formed in the bottom wall, and the inlet pipe 50 extends into the groove 70.

[0038] like Figure 1 As shown, the tank body 10 is a liquid tank for containing liquid TEOS.

[0039] It is understood that the accommodating cavity 60 provided inside the tank body 10 is used to contain liquid TEOS.

[0040] Furthermore, by providing the inlet pipe 50 on the tank body 10, TEOS is filled into the tank body 10 through the inlet pipe 50.

[0041] It should be noted that, in order to stably transfer liquid into the tank body 10, one end of the liquid inlet pipe 50 extending into the tank body 10 is close to the bottom wall of the tank body 10, so that the liquid can be stably output and accumulated from bottom to top in the tank body 10, avoiding oscillation.

[0042] The technical solution of this utility model is to form a groove 70 in the bottom wall of the accommodating cavity 60, and insert one end of the liquid inlet pipe 50 into the groove 70. In this way, the liquid inlet pipe 50 can achieve stable output and accumulate TEOS liquid during the liquid inlet process, and when the liquid inlet pipe 50 is used to draw liquid from the tank body 10, a large amount of liquid in the tank body 10 can be drawn out by relying on the groove 70 of the inner groove. This avoids the problem that some liquid will always remain after the extraction due to the gap between the pipe and the bottom wall of the tank body, which would affect the quality and efficiency of the extraction.

[0043] In one embodiment, the thickness of the bottom wall of the can body 10 is greater than the depth of the groove 70.

[0044] It should be noted that, since the tank body 10 needs to bear a large amount of liquid TEOS, it needs to withstand enormous pressure. In order to ensure the stability of the liquid carried by the tank body 10, the bottom wall of the tank body 10 is thickened.

[0045] It is understandable that, such as Figure 5 As shown, the bottom wall of the tank body 10 is thickened, that is, the thickness of the bottom wall of the tank body 10 is greater than the thickness of the side wall of the tank body.

[0046] Preferably, the thickness of the sidewall of the tank body 10 gradually decreases along the direction extending from the bottom wall of the tank body 10 toward the filling port.

[0047] Meanwhile, the thickness of the bottom of the tank body 10 is greater than the depth of the groove 70, so that the groove 70 can be accommodated in the bottom of the tank body 10 and facilitates the insertion of the liquid inlet pipe 50.

[0048] It is understood that the inlet pipe 50 enters the groove 70 recessed within the bottom wall of the tank body 10. When it is necessary to extract the liquid from the tank body 10, the liquid can first fill the groove 70, thereby facilitating the extraction of the liquid by the inlet pipe 50 from the groove 70. Since one end of the inlet pipe 50 is lower than the bottom wall of the tank body 10, the liquid in the tank body 10 can be extracted quickly and stably, thereby improving extraction efficiency and quality.

[0049] In one embodiment, the groove 70 is disposed on the bottom wall of the accommodating cavity 60 near the side wall of the accommodating cavity 60.

[0050] It is understandable that, such as Figure 2 and Figure 3 As shown, the groove 70 is disposed on the side close to the side wall of the accommodating cavity 60, thereby making the liquid inlet pipe 50 close to the side wall of the accommodating cavity 60.

[0051] It is understandable that the groove 70 provided on the side facilitates the concentrated flow of liquid to the vicinity of the groove 70 during the liquid extraction process, thereby improving the liquid extraction efficiency of the inlet pipe 50.

[0052] In one embodiment, in order to facilitate the concentration of liquid and ensure extraction efficiency, the inner bottom wall of the tank body 10 is inclined, and the groove 70 is located at the lowest point of the inclined surface, thereby achieving the concentration of liquid and facilitating the extraction of liquid by the inlet pipe 50.

[0053] In another embodiment, the groove 70 is disposed at the center of the inner bottom wall of the tank body 10, and the inner bottom wall of the tank body 10 is inclined with respect to the groove 70, thereby improving the concentration efficiency of the liquid, so as to maximize the extraction of the liquid and avoid liquid residue.

[0054] In one embodiment, the groove 70 is connected to the receiving cavity 60, and the sidewall of the groove 70 extends obliquely toward the sidewall of the can body 10.

[0055] When the liquid in the tank body 10 is about to be completely extracted, in order to collect and extract the remaining liquid, that is, to allow the liquid to flow quickly into the groove 70, the side wall of the groove 70 is tilted.

[0056] It is understandable that the inclined sidewall of the groove 70 is designed to guide the liquid into the groove 70, ensuring that the liquid can be concentrated as quickly as possible. This ensures that the liquid can be concentrated and quickly drawn by the inlet pipe 50, eliminating the need for repeated empty suction and improving the quality and efficiency of the suction.

[0057] In one embodiment, the TEOS carrying liquid tank 100 further includes a temperature detection unit 30, which is installed on the tank body 10, extends into the receiving cavity 60, and one end of the temperature detection unit 30 is disposed near the bottom wall of the receiving cavity 60.

[0058] It should be noted that in order to ensure stable vaporization and output of liquid TEOS, the stability of liquid TEOS must be maintained at all times.

[0059] Therefore, by inserting the temperature detection unit 30 into the can body 10, the temperature inside the can body 10 can be monitored at all times, thereby facilitating the adjustment of the temperature inside the can body 10.

[0060] It is understood that the temperature detection unit 30 is a temperature sensor.

[0061] Meanwhile, in order to ensure the synchronization of the temperature of each layer of liquid in the tank body 10, one end of the temperature detection unit 30 is set close to the bottom wall of the accommodating cavity 60, so as to facilitate the temperature detection unit 30 to monitor the temperature of each layer in the tank body 10 in real time.

[0062] Preferably, the temperature detection unit 30 includes a support tube and a plurality of temperature sensors. The support tube extends into the tank body 10, and the portion of the surface extending into the support tube is uniformly arranged with a plurality of temperature sensors, thereby facilitating the multiple temperature sensors to sense the temperature changes of each layer of liquid in the tank body 10.

[0063] In one embodiment, the TEOS liquid-carrying tank 100 further includes a vent pipe 20, which is installed on the tank body 10 and extends into the receiving cavity 60. One end of the vent pipe 20 extending into the receiving cavity 60 is away from the bottom wall of the receiving cavity 60.

[0064] It is understood that the vent pipe 20 is provided on the can body 10 so that when the can body 10 is heated and output, the vaporized TEOS can be output along the vent pipe 20.

[0065] It should be noted that when gas output is required, in order to achieve rapid output of gas from the tank body 10, the exhaust pipe should be located as far away as possible from the bottom wall of the accommodating cavity 60.

[0066] like Figure 4 As shown, one end of the exhaust pipe 20 is disposed away from the bottom wall of the accommodating cavity 60, so that one end of the exhaust pipe 20 can collect the rising gas and quickly exhaust it.

[0067] Furthermore, the port of the vent pipe 20 that extends into the tank body 10 is located on the inner top wall of the tank body 10.

[0068] It is understandable that when venting impurities inside the tank body 10, the outlet pipe 20 port located on the inner top wall of the tank body 10 can completely vent the gas remaining in the tank body 10.

[0069] Meanwhile, when the tank body 10 is heated to turn the liquid TEOS into a gaseous state and output gaseous TEOS, the outlet pipe 20 located on the inner top wall of the tank body 10 can output gaseous TEOS more concentratedly, ensuring output efficiency.

[0070] It should be noted that in order to ensure the smooth progress of the reaction process, it is necessary to avoid unnecessary reaction gases entering the reaction chamber when adding an oxide film to the wafer.

[0071] It is understandable that before supplying gas to the reaction chamber, the liquid tank and pipeline need to be cleaned. That is, inert gas is injected into the tank body 10 through the gas outlet pipe 20. As the inert gas fills the inside of the tank body 10, the gas in the liquid tank is gradually discharged, and the remaining gas is all inert gas. At the same time, as the inert gas is continuously output, inert gas is present in the pipeline, thereby preventing impurities in the pipeline and the tank body 10 from entering the reaction chamber with the vaporized TEOS and affecting the normal progress of the reaction.

[0072] In one embodiment, the inert gas may be nitrogen.

[0073] In one embodiment, the liquid inlet pipe 50 and the gas outlet pipe 20 are positioned far apart from each other.

[0074] It should be noted that when the distance between the air inlet and outlet is close, the gas that has just entered the accommodating cavity 60 is easily discharged by the outlet pipe 20, and the impurity gas in the tank body 10 cannot be discharged quickly.

[0075] It is understandable that, such as Figure 4 As shown, the liquid inlet pipe 50 and the gas outlet pipe 20 are arranged far apart from each other, so that one end of the liquid inlet pipe 50 and one end of the gas outlet pipe 20 are far apart from each other. This allows the gas entering the tank body 10 through the gas outlet pipe 20 to first deposit in the tank body 10. As the gas continues to accumulate in the tank body 10, the gas containing impurities is quickly discharged through the liquid inlet pipe 50, thereby improving the exhaust efficiency.

[0076] In one embodiment, the tank body 10 is equipped with a liquid level monitoring device 40 that extends into the accommodating cavity 60.

[0077] It should be noted that if liquid is continuously supplied into the tank body 10, such that the rate at which liquid enters the tank body 10 is greater than the rate at which liquid vaporizes, it is easy to cause liquid to be output instead of gas.

[0078] It is understood that a liquid level monitoring device 40 is installed in the accommodating cavity 60 to monitor the liquid level in the tank body 10 in real time, thereby controlling the amount of liquid TEOS entering the tank body 10. When the liquid level in the accommodating cavity 60 drops to a certain limit, the output of gaseous TEOS is stopped, and liquid is replenished into the accommodating cavity 60. When the liquid level rises to a predetermined limit, the replenishment is stopped, and the liquid in the accommodating cavity 60 is heated to achieve the output of gaseous TEOS, ensuring the effectiveness and safety of the gaseous TEOS output.

[0079] In one embodiment, a connecting portion 80 is provided on the side of the can body 10, and the connecting portion 80 is located close to the groove 70.

[0080] It is understandable that, in order to stably install the tank body 10 onto the TEOS heating unit, the connecting part 80 is provided on the side of the tank body 10, thereby ensuring the stability of the connection of the tank body 10 by relying on the connecting part 80 to connect to the TEOS heating unit.

[0081] Furthermore, multiple connection holes are provided on the connection part 80, through which the TEOS heating unit can be connected by bolts or the like.

[0082] This utility model also proposes a TEOS heating unit, which includes a TEOS carrying liquid tank. The specific structure of the TEOS carrying liquid tank is as described in the above embodiments. Since this TEOS heating unit adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.

[0083] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A TEOS-containing liquid tank, characterized in that, include: The can body has a receiving cavity inside it; A liquid inlet pipe is installed on the tank body and extends into the receiving cavity; The cavity has a groove formed in the bottom wall, and the inlet pipe extends into the groove.

2. The TEOS carrying tank as described in claim 1, characterized in that, The thickness of the bottom wall of the can body is greater than the depth of the groove.

3. The TEOS carrying tank as described in claim 1, characterized in that, The groove is located on the bottom wall of the accommodating cavity near the side wall of the accommodating cavity.

4. The TEOS carrying tank as described in claim 1, characterized in that, The groove opening connects to the receiving cavity, and the sidewall of the groove extends obliquely toward the sidewall of the can body.

5. The TEOS carrying tank as described in claim 1, characterized in that, The TEOS carrying liquid tank also includes a temperature detection unit, which is installed on the tank body and extends into the receiving cavity, with one end of the temperature detection unit located near the bottom wall of the receiving cavity.

6. The TEOS carrying tank as described in claim 1, characterized in that, The TEOS liquid-carrying tank also includes an vent pipe, which is installed on the tank body and extends into the receiving cavity. One end of the vent pipe extending into the receiving cavity is away from the bottom wall of the receiving cavity.

7. The TEOS carrying tank as described in claim 6, characterized in that, The liquid inlet pipe and the gas outlet pipe are positioned far apart from each other.

8. The TEOS carrying tank as described in claim 1, characterized in that, The tank body is equipped with a liquid level monitoring device that extends into the accommodating cavity.

9. The TEOS carrying tank as described in claim 1, characterized in that, The tank body has a connecting part on its side, and the connecting part is located close to the groove.

10. A TEOS heating unit, characterized in that, Includes the TEOS carrying tank as described in any one of claims 1 to 9.

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