Glue removal system and coating apparatus

Abstract

A glue cleaning system for cooperating with a glue applying part of a coating knife, after the glue applying part of the coating knife is applied with glue, the glue cleaning system is used for cleaning glue liquid adhered to a slit type glue outlet of the glue applying part, the glue cleaning system comprises a flushing assembly, a blowing assembly and a scraping assembly, wherein the flushing assembly has a liquid outlet for spraying diluent liquid to the glue applying part after the glue applying part is applied with glue, the liquid outlet is capable of translating relative to a length direction of the glue outlet, the blowing assembly has a blowing port for blowing air to the diluent liquid on the glue applying part, the air blown by the blowing port is used for diffusing the diluent liquid to dilute the glue liquid adhered to the glue applying part and the glue outlet, the blowing port moves synchronously with the liquid outlet, the scraping assembly is capable of reciprocating and translating relative to the length direction of the glue outlet, has a scraper matched with the glue applying part, the scraper is in sliding abutment with the glue applying part, and the scraper is used for scraping off the diluted glue liquid on the glue applying part in the process of translating, the phenomenon of the glue outlet being blocked or the glue being applied unevenly in the prior art is avoided, and the glue applying precision of the glue applying part is improved.

Description

Technical Field

[0001] This utility model relates to a glue removal system and a coating device having the glue removal system. Background Technology

[0002] The coating equipment includes a coating section with a slit-type adhesive outlet. The coating section moves parallel to the semiconductor substrate to complete the coating. Due to the high viscosity and corrosiveness of the adhesive, the adhesive will remain on the coating section after each coating, which can easily cause the adhesive outlet to be blocked or the adhesive to be dispensed unevenly, thus affecting the coating accuracy of the coating section. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a glue removal system for use with the glue application section of a coating knife, as well as a coating device including the glue removal system, to avoid the phenomenon of glue outlet blockage or uneven glue application and improve the glue application accuracy of the glue application section.

[0004] This invention is implemented as follows: a glue removal system, used in conjunction with the glue application section of a coating knife, removes glue adhering to the slit-type glue outlet of the coating section after glue application, comprising:

[0005] The rinsing assembly has an outlet for spraying a diluent onto the glued portion after glue application, the outlet being capable of translational relative to the length direction of the glue outlet;

[0006] An air blowing assembly has an air blowing port that blows air onto a diluent on a coating section. The air blowing port is used to diffuse the diluent to dilute the adhesive adhering to the outer periphery of the coating section and the outlet. The air blowing port moves synchronously with the outlet.

[0007] The glue scraper assembly is capable of reciprocating along the length of the glue outlet and has a scraper adapted to the glue application section. The scraper slides against the glue application section and is used to scrape off the diluted glue during the translation process. The gas blown out by the air outlet is also used to evaporate the liquid remaining on the glue application section.

[0008] Preferably, the scraper is V-shaped.

[0009] Furthermore, the adhesive removal system also includes:

[0010] The guide rail is set parallel to the coating blade;

[0011] A guide seat is slidably mounted on the guide rail. The guide seat has a receiving groove corresponding to the scraper. The scraper is detachably mounted on the guide seat. The two inclined surfaces of the receiving groove of the guide seat are respectively provided with the liquid outlet and the air blowing port.

[0012] A power unit is used to drive the guide seat to reciprocate on the guide rail.

[0013] Furthermore, the adhesive removal system also includes:

[0014] A sensor is used to detect the cleaning position of the coating blade. When the coating blade moves to the cleaning position, the sensor outputs a signal indicating the current cleaning position of the coating blade.

[0015] The drive controller controls the power unit to drive the guide seat to reciprocate along the guide rail based on the current cleaning position signal of the coating knife fed by the sensor.

[0016] Furthermore, both the flushing assembly and the air blowing assembly are electrically connected to the drive controller. When the drive controller controls the power component to drive the guide seat to move back and forth, the drive controller is also used to control the liquid outlet to spray diluent and the air blowing outlet to blow air.

[0017] Preferably, the receiving groove of the guide seat is positioned lower than the position of the coating knife, so that an interval space is formed between the receiving groove and the coating knife to increase the liquid outlet area and the air outlet area.

[0018] Furthermore, the adhesive removal system includes a blade soaking assembly, the blade soaking assembly comprising:

[0019] A solution tank, containing a diluent, is positioned directly below the applicator at the cleaning location;

[0020] The guide seat has a liquid guide port that communicates with the receiving tank, and the liquid guide port is used to guide the adhesive and diluent scraped off by the scraper into the solution tank;

[0021] The applicator is moved from the cleaning position to the soaking position to immerse the dispensing nozzle in the solution tank.

[0022] Furthermore, the bottom of the solution tank is an inclined surface with one end higher than the other, and a drain port and a valve for controlling the opening or closing of the drain port are provided at the lower end of the inclined surface.

[0023] Furthermore, the coating blade soaking assembly also includes an overflow port communicating with the solution tank, the overflow port being used to maintain the liquid level of the diluent in the solution tank at a set level.

[0024] Furthermore, a guide portion is provided at the bottom of the guide seat along its length, and guide grooves are formed at both ends of the top of the solution tank along its length, and a guide opening is located between the two guide grooves for horizontally guiding the guide portion and allowing the adhesive coating portion to vertically penetrate. The guide opening is connected to and correspondingly provided with the guide grooves.

[0025] This utility model also provides a coating device, including the above-described adhesive removal system, and further comprising:

[0026] A coating system includes a coating blade that moves horizontally and vertically, the coating blade having a nozzle for applying adhesive to a semiconductor substrate.

[0027] This utility model provides a glue removal system for use with the glue application section of a coating knife, and a coating device including the glue removal system. After the coating knife applies glue, the system removes the glue adhering to the slit-type glue outlet of the glue application section. The glue removal system includes a rinsing component, an air blowing component, and a scraping component. The rinsing component has an outlet for spraying diluent onto the glued part after application. The outlet is movable relative to the length of the glue outlet. The air blowing component has an air blowing port for blowing air onto the diluent on the glued part. The air blowing port is used to diffuse the diluent to dilute the glue adhering to the outer periphery of the glued part and the glue outlet. The air blowing port moves synchronously with the outlet. The scraping component is movable relative to the length of the glue outlet and has a scraper adapted to the glued part. The scraper slides against the glued part and scrapes off the diluted glue on the glued part during the translation process, avoiding glue outlet blockage or uneven glue application and improving the glue application accuracy of the glued part. Attached Figure Description

[0028] To more clearly illustrate the technical solution of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a structural diagram of the adhesive removal system provided in this embodiment of the utility model.

[0030] Figure 2 This is a structural diagram of the guide seat in the glue removal system provided in this embodiment of the utility model.

[0031] Figure 3 This is a structural diagram of the coating blade soaking component in the adhesive removal system provided in this embodiment of the utility model.

[0032] Figure 4 It is along Figure 3 A cross-sectional view along the AA direction.

[0033] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings.

[0034] The reference numerals in the attached figures are explained as follows:

[0035] The system includes: a glue removal system 100, a rinsing assembly 110, a liquid outlet 111, a cleaning fluid tank 112, a liquid injection pump 113, an air blowing assembly 120, an air blowing port 121, a nitrogen compression bottle 122, a nitrogen pipeline 123, a control valve 124, a glue scraping assembly 130, two scrapers (131, 131'), a scraper blade 132, a guide rail 140, a guide seat 150, a receiving tank 151, a liquid guide port 152, a guide section 153, and two through holes (154). 154'), two inclined planes (1511, 1511'), power unit 160, rotary motor 161, driven wheel 162, belt 163, support plate 164, sensor 165, drive controller 166, first position sensor 167, second position sensor 168, coating knife soaking assembly 170, solution tank 171, drain port 172, guide groove 173, guide port 174, overflow port 180, slide rail seat 190;

[0036] 200 applicator blade, 210 glue application section, 211 glue outlet, and beveled glue application surfaces (212, 212'). Detailed Implementation

[0037] In this invention, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or state relationship based on the orientation or state relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0038] Furthermore, in addition to indicating location or state relationships, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0039] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this utility model based on the specific circumstances.

[0040] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts, which may be the same or different in type and construction, and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0041] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0042] Overview of a gluing system as an example

[0043] like Figures 1-4 As shown in the figure, the present invention provides a glue removal system 100 for use in conjunction with the glue application part 210 of the applicator 200. The glue application part 210 is a boss provided along the length direction of the applicator 200. In this embodiment, the boss is preferably a V-shaped boss. A slit-type glue outlet 211 is provided at the tip of the boss. After the applicator 200 applies glue, the glue removal system 100 removes the glue adhering to the glue outlet 211.

[0044] like Figure 2 As shown, the adhesive removal system 100 includes:

[0045] The rinsing assembly 110 has multiple outlets 111 for spraying diluent onto the glued part 210 after glue application, and the outlets 111 are capable of translational relative to the length direction of the glue outlet 211.

[0046] The blowing assembly 120 has an air blowing port 121 for blowing air onto the diluent on the coating part 210. The air blowing port 121 is used to rapidly diffuse the diluent to dilute the adhesive adhering to the outer periphery of the coating part 210 and the outlet 211. The air blowing port 121 moves synchronously with the outlet 111. Preferably, the gas blown out by the air blowing port 121 is nitrogen.

[0047] The scraper assembly 130 is capable of reciprocating along the length of the glue outlet 211 and has a scraper 131 adapted to the glue application section 210. The scraper 131 slides against the glue application section 210. During the translation process, the scraper 131 is used to scrape off the diluted glue from the glue outlet and the outer periphery of the glue application section 210, avoiding the phenomenon of glue outlet blockage or uneven glue application in the prior art, and improving the glue application accuracy of the glue application section 210. In this embodiment, the scraper 131 is preferably V-shaped.

[0048] The gas blown out of the air outlet 121 is also used to evaporate the liquid remaining on the coating section 210. Since the adhesive and diluent are harmful to the human body, the adhesive removal system 100 and the coating knife 200 are isolated from the outside world. In this case, it is necessary to use air blowing to make the liquid remaining on the coating section 210 evaporate quickly.

[0049] like Figure 1 As shown, in this embodiment, the rinsing assembly 110 includes an injection pump 113 for pumping out the cleaning fluid from the cleaning fluid tank 112 and an injection pipeline 114 connected to the injection pump 113. The injection pipeline 114 is connected to the outlet 111. Preferably, there are two outlets 111. The two outlets 111 are respectively arranged opposite to the two adhesive slopes (212, 212') of the adhesive coating section 210. The cleaning fluid sprayed from the outlet 111 flows along the two adhesive slopes (212, 212') to the adhesive outlet 211, thereby diluting the adhesive adhering to the adhesive slopes (212, 212') and the adhesive outlet 211 of the adhesive coating section 210.

[0050] like Figure 1 and Figure 2 As shown, in this embodiment, the blowing assembly 120 includes a nitrogen compression bottle 122 and a nitrogen pipeline 123 connected to the nitrogen compression bottle 122, and a control valve 124 for controlling the flow rate of the nitrogen pipeline 123. The nitrogen pipeline 123 is connected to the blowing port 121. Preferably, there are two blowing ports 121, which are respectively arranged opposite to the two coating slopes (212, 212') of the coating part 210. When blowing air, the two blowing ports 121 can make the diluent on the coating slopes (212, 212') of the two coating parts 210 diffuse in all directions, increasing the dilution area and flow rate of the diluent. At the same time, after the scraper 131 scrapes off the mixture of diluent and adhesive, it is also used to make the liquid remaining on the coating part 210 evaporate quickly.

[0051] In this embodiment, the scraper assembly 130 includes a scraper plate 132 and a scraper blade 131 formed on the scraper plate 132 and integrally molded. The scraper plate 132 and the scraper blade 131 are made of Teflon. Teflon has excellent heat resistance, chemical inertness and low coefficient of friction. It also has excellent high and low temperature resistance (-192℃ to 260℃), corrosion resistance (resistance to strong acids, strong alkalis, aqua regia, etc.), weather resistance, high insulation, high lubricity and non-adhesion and non-toxicity.

[0052] like Figure 1 As shown, the adhesive removal system 100 further includes:

[0053] Guide rail 140 is set parallel to paint knife 200;

[0054] The guide seat 150 is slidably mounted on the guide rail 140. The guide seat 150 has a receiving groove 151 corresponding to the scraper 131. In this embodiment, the receiving groove 151 is preferably a V-shaped groove that cooperates with the V-shaped boss. The two scrapers 131 are detachably installed at both ends of the guide seat 150 in the length direction. The two inclined surfaces (1511, 1511') of the receiving groove 151 are respectively provided with a liquid outlet 111 and an air blowing port 121. After the scraper 131 is installed at both ends of the guide seat 150 in the length direction, after the scraper 131 cooperates with the glue coating part 210, a flow channel is formed between the scraper 131 and the two inclined surfaces (1511, 1511') of the receiving groove 151, so as to guide the diluent and glue in the flow channel into the liquid guide port 152, and then guide it into the solution tank for collection and treatment through the liquid guide port 152.

[0055] The power unit 160 is used to drive the guide seat 150 to reciprocate on the guide rail 140. It includes a rotary motor 161 with a drive shaft, a driven wheel 162 arranged parallel to and spaced apart from the drive shaft, and a belt 163 sleeved on the drive shaft and the driven wheel 162. The guide seat 150 is directly or indirectly fixed on the belt 163. The rotary motor 161 rotates according to a set speed, number of revolutions and direction, which drives the belt 163 to rotate and move, thereby making the guide seat 150 slide at a constant speed on the guide rail 140.

[0056] In this embodiment, the guide rail 140, the rotary motor 161, and the driven wheel 162 are all mounted on the side of the vertically arranged support plate 164, and the coating blade soaking assembly 170 is mounted on the other side of the support plate 164. The support plate 164 adopts a vertically arranged structural design to save installation space and facilitate product miniaturization. By placing the power component 160 and the coating blade soaking assembly 170 on the two sides of the support plate 164 respectively, it is beneficial to distribute the force evenly on both sides of the support plate 164 and improve the stability of the support plate 164.

[0057] Furthermore, the adhesive removal system 100 also includes:

[0058] Sensor 165 is used to detect the cleaning position of the applicator 200. When the applicator 200 moves to the cleaning position, sensor 165 outputs the current cleaning position signal of the applicator 200.

[0059] The drive controller 166 controls the power unit 160 to drive the guide seat 150 to reciprocate along the guide rail 140 based on the current cleaning position signal of the coating blade 200 fed by the sensor 165, so as to achieve the purpose of cleaning the coating part 210. In this embodiment, the drive controller 166 stores the rotation number, speed and direction information of the rotary motor 161.

[0060] Furthermore, both the flushing assembly 110 and the air blowing assembly 120 are electrically connected to the drive controller 166. When the drive controller 166 controls the power component 160 to drive the guide seat 150 to move back and forth, the drive controller 166 also starts the injection pump 113 and the control valve 124, thereby controlling the liquid outlet 111 to spray diluent and the air blowing port 121 to blow nitrogen, which has a high degree of intelligence.

[0061] like Figure 3 and Figure 4 As shown, the adhesive removal system 100 further includes a knife dipping assembly 170, which includes:

[0062] The solution tank 171 contains a diluent and is located directly below the cleaning position of the applicator 200. In this embodiment, the bottom of the solution tank 171 is an inclined surface 1711 with one end higher than the other. The lower end of the inclined surface 1711 is provided with a drain port 172 and a valve (not shown) for controlling the opening or closing of the drain port 172. The drain port 172 is located at the lowest end of the solution tank 171 to completely drain the diluent and / or adhesive in the solution tank 171.

[0063] The liquid inlet 152 is used to guide the adhesive and diluent scraped off by the scraper 131 into the solution tank 171;

[0064] The applicator 200 descends from the cleaning position to the soaking position, so that the dispensing nozzle 211 is immersed in the solution in the solution tank 171, thus preventing the adhesive in the dispensing nozzle 211 from solidifying due to prolonged disuse of the applicator 200.

[0065] like Figure 1 As shown, the coating knife 200 immersion assembly further includes an overflow port 180 connected to the solution tank 171. The overflow port 180 is used to maintain the liquid level of the diluent in the solution tank 171 at a set level. In this embodiment, the overflow port 180 is connected to an overflow pipe (not shown) to discharge the diluent flowing out of the overflow port 180.

[0066] like Figure 1 and Figure 4 As shown, further, a guide portion 153 is provided in the length direction of the bottom of the guide seat 150, and guide grooves 173 are formed at both ends of the top of the solution tank 171 in the length direction for guiding the guide portion 153. In this embodiment, the guide groove 173 is preferably a V-shaped guide groove. A guide opening 174 is also formed at the upper end of the solution tank 171, which can guide the guide portion 153 horizontally and allow the glue application portion 210 to pass through during the vertical descent. The guide opening 174 is connected to and correspondingly provided with the guide groove 173.

[0067] like Figure 3As shown, further, connecting plates (175, 175') are respectively provided at both ends of the top of the solution tank 171 in the width direction. The two connecting plates (175, 175') are arranged in parallel, and a guide port 174 is formed at the interval between the two connecting plates (175, 175'). The two connecting plates (175, 175') are detachably connected to the solution tank 171. In this embodiment, a threaded connection is preferred, which is convenient for disassembly and assembly. When the guide port 174 is worn and the guiding accuracy is not high, it is convenient to replace the connecting plates (175, 175') in time, which improves the fitting accuracy between the guide part 153 and the guide port 174, and facilitates the smooth sliding of the guide part 153 in the guide port 174.

[0068] The adhesive application section 210 is inserted into the guide groove 173 during immersion, and the adhesive outlet 211 is immersed in the cleaning solution in the solution tank 171.

[0069] like Figure 1 and Figure 2 As shown, in this embodiment, the adhesive removal system 100 further includes a slide rail seat 190 vertically slidable on the guide rail 140. A guide seat 150 is detachably fixed to the slide rail seat 190. Preferably, the guide seat 150 is provided with two through holes (154, 154') parallel to the guide rail 140. Bolts (155, 155') that are directly or indirectly screwed into the two through holes (154, 154') are respectively threaded through them. The thread stalks 1551 of the two bolts (155, 155') are both smaller than the inner diameter of the two through holes (154, 154'). The nuts 1552 of the bolts (155, 155') press and limit the guide seat 150 respectively. Since the screws 1551 of the two bolts (155, 155') are smaller than the inner diameter of the two through holes (154, 154'), before the two bolts (155, 155') are tightened, the parallelism and fit between the scrapers (131, 131') installed on both sides of the guide seat 150 and the glue application part 210 can be finely adjusted. This makes it easier for the two scrapers (131, 131') to slide smoothly along the glue application part 210 to complete the glue application action. At the same time, it also reduces the installation difficulty and improves the installation efficiency.

[0070] like Figure 1As shown, the power unit 160 further includes a first position sensor 167 for detecting the starting position of the slide rail 190 and a second position sensor 168 for detecting the ending position of the slide rail 190. Both the first position sensor 167 and the second position sensor 168 are electrically connected to the drive controller 166. Since both scrapers (131, 131') are mounted on the slide rail 190 via guide seats 150, the slide rail is detected by the first position sensor 167 and the second position sensor 168. The starting and ending positions of the slide rail seat 190 are determined, thereby determining the starting and ending positions of the two scrapers (131, 131'). When the drive controller 166 receives a signal from the first position sensor 167 or the second position sensor 168 indicating that the slide rail seat 190 is currently at the starting or ending position, it controls the rotation direction of the rotary motor 161, causing the two scrapers (131, 131') mounted on the slide rail seat 190 to reciprocate and translate, so as to scrape off the adhesive from the glue outlet 211 and the glue application section 210.

[0071] In this embodiment, both the first position sensor 167 and the second position sensor 168 are mounted on the support plate 164.

[0072] This utility model also provides a coating device, including the above-mentioned adhesive removal system, and further including:

[0073] The coating system includes a coating blade 200 that moves in parallel and vertically. The coating blade 200 has a dispensing port 211 for coating a semiconductor substrate. The coating blade 200 moves in parallel to apply adhesive to the semiconductor substrate. The coating blade 200 moves to a cleaning position to spray diluent and blow air onto the dispensing portion 210 of the coating blade and scrape off the diluted adhesive. The coating blade 200 moves down from the cleaning position to an immersion position to immerse the dispensing port 211 of the dispensing portion 210 in a solution tank 171. The coating blade 200 is driven by a drive motor (not shown) to move down from the cleaning position to the immersion position, or to move up from the immersion position to the cleaning position.

[0074] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A glue removal system for use with the glue application section of a coating knife, for removing glue adhering to the slit-type glue outlet on the glue application section after glue application, characterized in that, include: The rinsing assembly has an outlet for spraying a diluent onto the glued portion after glue application, the outlet being capable of translational relative to the length direction of the glue outlet; An air blowing assembly has an air blowing port that blows air onto a diluent on a coating section. The air blowing port is used to diffuse the diluent to dilute the adhesive adhering to the outer periphery of the coating section and the outlet. The air blowing port moves synchronously with the outlet. The glue scraper assembly is capable of reciprocating along the length of the glue outlet and has a scraper adapted to the glue application section. The scraper slides against the glue application section and is used to scrape off the diluted glue on the glue application section during the translation process. The gas blown out by the air outlet is also used to evaporate the liquid remaining on the glue application section.

2. The adhesive removal system according to claim 1, characterized in that, include: The guide rail is set parallel to the coating blade; A guide seat is slidably mounted on the guide rail. The guide seat has a receiving groove that cooperates with the scraper. The scraper is detachably mounted on the guide seat. The two inclined surfaces of the receiving groove of the guide seat are respectively provided with the liquid outlet and the air blowing port. A power unit is used to drive the guide seat to reciprocate along the guide rail.

3. The adhesive removal system according to claim 2, characterized in that, include: A sensor is used to detect the cleaning position of the coating blade. When the coating blade moves to the cleaning position, the sensor outputs a signal indicating the current cleaning position of the coating blade. The drive controller controls the power unit to drive the guide seat to reciprocate along the guide rail based on the current cleaning position signal of the coating knife fed by the sensor.

4. The adhesive removal system according to claim 3, characterized in that, Both the flushing assembly and the air blowing assembly are electrically connected to the drive controller. The drive controller is configured to control the power component to drive the guide seat to move back and forth, and is also used to control the liquid outlet to spray diluent and the air blowing outlet to blow air.

5. The adhesive removal system according to claim 2, characterized in that, The guide seat's receiving groove is positioned lower than the coating blade, so that a space is formed between the receiving groove and the coating blade to increase the liquid outlet area and air outlet area.

6. The adhesive removal system according to claim 2, characterized in that, Includes a coating blade soaking assembly, the coating blade soaking assembly comprising: A solution tank, containing a diluent, is positioned directly below the applicator at the cleaning location; The guide seat has a liquid guide port that communicates with the receiving tank, and the liquid guide port is used to guide the adhesive and diluent scraped off by the scraper into the solution tank; The applicator is configured to move from the cleaning position to the immersion position, so that the dispensing nozzle is immersed in the solution in the solution tank.

7. The adhesive removal system according to claim 6, characterized in that, The bottom of the solution tank is an inclined surface with one end higher than the other. A drain port and a valve for controlling the opening or closing of the drain port are provided at the lower end of the inclined surface.

8. The adhesive removal system according to claim 6, characterized in that, The coating blade soaking assembly includes an overflow port communicating with the solution tank, the overflow port being used to maintain the liquid level of the diluent in the solution tank at a set level.

9. The adhesive removal system according to claim 6, characterized in that, The bottom of the guide seat is provided with a guide part along its length direction. The top two ends of the solution tank along its length direction are formed with guide grooves and a guide opening located between the two guide grooves for horizontally guiding the guide part and allowing the adhesive coating part to vertically penetrate. The guide opening is connected to and correspondingly provided with the guide grooves.

10. A coating apparatus, characterized in that, The adhesive removal system according to any one of claims 1 to 9 further includes: A coating system includes a coating blade that moves horizontally and vertically, the coating blade having a nozzle for applying adhesive to a semiconductor substrate.

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