A guard for semiconductor processing debris protection

Abstract

The utility model relates to the technical field of semiconductor processing chip guide protection, especially point to a kind of for semiconductor processing chip protection coaming, including lathe chassis, two-axis moving module is equipped on lathe chassis upper end, workbench is equipped in two-axis moving module upper end, two-axis moving module drives workbench and moves along X axis and Y axis horizontal direction, annular flow channel is arranged around at workbench periphery, fence is equipped outside flow channel, water guide groove is loaded in flow channel;This technology blocks most of the processing cutting fluid splashing, concentrates and guides cutting waste liquid, reduces the adhesion of powdery processing chip dust on the inner surface of machine tool;It is possible to block the possibility that cutting waste liquid enters internal cavity from mounting gap due to large flow soaking, damages internal precision lead screw linear rail and other components.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing debris guiding and protection technology, and in particular to a protective plate for semiconductor processing debris protection. Background Technology

[0002] A machining center, also known as a CNC machine tool, is used for semiconductor processing.

[0003] Taking a Chinese utility model patent with patent number CN 206732151 U, entitled "A Machining Center with a Spindle with Buffer Function," as an example, the existing machining methods all involve grinding on a fixed plate and simultaneously spraying cutting fluid for cleaning. However, since the worktable on the existing machine tool is a flat, exposed type without any guards, the powdery machining debris generated during the grinding of semiconductor materials will come into contact with the cutting fluid to form machining waste fluid, which can easily enter the lead screw and linear guide and accumulate, thus entering the machine tool and easily damaging the lead screw and linear guide. Utility Model Content

[0004] To overcome the shortcomings mentioned above, this utility model aims to provide a technical solution that can solve the above problems.

[0005] A protective panel for semiconductor processing debris includes an assembly machine tool chassis. A two-axis moving module is provided on the upper end of the machine tool chassis. A worktable is provided on the upper end of the two-axis moving module. The two-axis moving module drives the worktable to move horizontally along the X-axis and Y-axis. An annular flow channel is provided around the periphery of the worktable. A fence is provided outside the flow channel. A water guide trough is loaded in the flow channel.

[0006] Furthermore, the flow channel is located at the bottom of the outer wall of the workbench, and there are four water guide channels located at the four ends of the flow channel.

[0007] Furthermore, the water guide channel is formed as a vertical guide column, which is hollow inside and connects the upper and lower parts.

[0008] Furthermore, the fence is in the shape of a surrounding square, and includes a front panel, a left panel, a right panel, and a rear panel welded to the outside of the flow channel; and a notch is provided at the front panel, where an openable baffle is assembled.

[0009] Furthermore, a hinge is provided between the lower end of the baffle and the front panel, and fasteners are provided between the left and right sides of the baffle and the front panel.

[0010] Furthermore, the fastener includes a fixing profile fixed to the front bulkhead and a locking strip for locking the baffle. The fixing profile is L-shaped and fixed to the front bulkhead, forming an insertion groove between the fixing profile and the front bulkhead. The locking strip includes a front plate and a rear plate, with an assembly block between the front plate and the rear plate. The lower end of the rear plate has a strip-shaped hole that interlocks with the fixing profile. The front plate is placed horizontally, and when the rear plate is inserted into the insertion groove, the front plate abuts against the baffle.

[0011] The beneficial effects of this utility model are: it blocks most of the cutting fluid from splashing, concentrates and guides the cutting waste fluid, and reduces the adhesion of powdery machining debris to the inner surface of the machine tool; it prevents the possibility of cutting waste fluid entering the internal cavity through the installation gap due to large-flow immersion and damaging internal precision lead screws, linear guides and other components, greatly reducing maintenance costs and indirectly improving the service life of internal precision components.

[0012] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model.

[0014] Figure 2 For based on Figure 1 Schematic diagram of the first position of the structure on the middle workbench.

[0015] Figure 3 For based on Figure 1 Schematic diagram of the second position of the structure on the middle workbench.

[0016] Figure 4 This is a schematic diagram of the fastener structure.

[0017] The attached diagrams are labeled as follows: machine tool chassis-1, two-axis moving module-2, worktable-3, flow channel-4, fence-5, water guide channel-6, guide post-7, front panel-8, left panel-9, right panel-10, rear panel-11, baffle-12, hinge-13, fastener-14, fixing profile-15, clip-16, insertion slot-17, front panel-18, rear panel-19, assembly block-20, and strip hole-21. Detailed Implementation

[0018] The technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] Please see Figures 1-4 The present invention includes an assembly machine tool chassis 1, a two-axis moving module 2 is provided on the upper end of the machine tool chassis 1, a worktable 3 is provided on the upper end of the two-axis moving module 2, and the two-axis moving module 2 drives the worktable 3 to move horizontally along the X-axis and Y-axis. The invention is characterized in that: an annular flow channel 4 is provided around the periphery of the worktable 3, a fence 5 is provided outside the flow channel 4, and a water guide trough 6 is loaded in the flow channel 4.

[0020] The main design of this technical solution lies in the machine tool chassis 1. Firstly, a two-axis moving module 2, consisting of a forward / backward moving module and a left / right moving module, is installed on the upper part of the machine tool chassis 1. A worktable 3 is located on the upper part of the two-axis moving module 2. The worktable 3 can be moved in the corresponding plane by driving the two-axis moving module 2. Since the two-axis movement principle of the worktable 3 is an existing technical solution, it will not be elaborated upon further.

[0021] The main technical feature is the annular flow channel 4 surrounding the worktable 3, with a fence 5 on the outside of the flow channel 4. Water guide grooves 6 are loaded within the flow channel 4. The fence 5's function is to trap the waste fluid formed by the mixture of chips and cutting fluid during machining within the annular flow channel 4 between the inner side of the fence 5 and the outer side of the worktable 3. The flow channel 4 is located at the bottom of the outer wall of the worktable 3. Four water guide grooves 6 are loaded within the flow channel 4 and located at its four ends. Each water guide groove 6 is formed by a vertical guide post 7, which is hollow and connects the upper and lower parts. The four water guide grooves 6 are always located outside the two-axis moving module 2, or the water guide grooves 6 are guided by hoses. The waste fluid in the fence 5 eventually flows out with the central guide post 7. This design effectively blocks most of the cutting fluid splashing, concentrates and guides the cutting waste fluid, and reduces the adhesion of powdery machining debris to the inner surface of the machine tool.

[0022] The enclosure 5 is designed in a square, encircling shape. Enclosure 5 includes a front panel 8, a left panel 9, a right panel 10, and a rear panel 11 welded to the outside of the flow channel 4. A notch is provided in the front panel 8 to facilitate loading and unloading of workpieces. An openable baffle 12 is assembled at the notch. A hinge 13 is provided between the lower end of the baffle 12 and the front panel 8, and fasteners 14 are provided between the left and right sides of the baffle 12 and the front panel 8. Hinged to the front panel 8 by the hinge 13, it can be flipped up and down. When loading or unloading workpieces, it can be flipped down for easy loading and unloading; during processing, it can be flipped up and secured using the fasteners 14, forming a square enclosure with the other panels to prevent cutting fluid splashing.

[0023] Specifically, the design of the fastener 14 is shown in the figure. The fastener 14 consists of a fixing profile 15 fixed to the front panel 8 and a locking strip 16 for locking the baffle 12. The fixing profile 15 is in a transverse L-shape and is fixed to the front panel 8, forming an insertion groove 17 between them. The locking strip 16 includes a front plate 18 and a rear plate 19, with an assembly block 20 between the front plate 18 and the rear plate 19. The lower end of the rear plate 19 has a strip-shaped hole 21 that intersects with the fixing profile 15. When the rear plate 19 is inserted into the insertion groove 17, the front plate 18 and the baffle 12 abut against each other, thereby realizing the fastening function.

[0024] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A protective panel for semiconductor processing debris, comprising a machine tool chassis (1), a two-axis moving module (2) provided at the upper end of the machine tool chassis (1), a worktable (3) provided at the upper end of the two-axis moving module (2), the two-axis moving module (2) driving the worktable (3) to move along the X-axis and Y-axis planes, characterized in that: The workbench (3) is surrounded by a ring-shaped flow channel (4), and a fence (5) is provided on the outside of the flow channel (4). A water guide trough (6) is loaded in the flow channel (4).

2. The enclosure for protecting semiconductor processing debris according to claim 1, characterized in that: The flow channel (4) is located at the bottom of the outer wall of the workbench (3), and there are four water guides (6) located at the four ends of the flow channel (4).

3. A protective panel for semiconductor processing debris protection according to claim 1, characterized in that: The water guide channel (6) is formed as a vertical guide post (7), which is hollow inside and connects the upper and lower parts.

4. A protective panel for semiconductor processing debris protection according to claim 1, characterized in that: The fence (5) is a square shape that surrounds the flow channel (4). The fence (5) includes a front panel (8), a left panel (9), a right panel (10), and a rear panel (11) welded to the outside of the flow channel (4). A notch is provided at the front panel (8), and an openable baffle (12) is assembled at the notch.

5. A protective panel for semiconductor processing debris protection according to claim 4, characterized in that: A hinge (13) is provided between the lower end of the baffle (12) and the front panel (8), and a fastener (14) is provided between the left and right sides of the baffle (12) and the front panel (8).

6. A protective panel for semiconductor processing debris protection according to claim 5, characterized in that: The fastener (14) includes a fixing profile (15) fixed on the front panel (8) and a clip (16) for locking the baffle (12). The fixing profile (15) is in a horizontal L-shape and is fixed to the front panel (8). An insertion groove (17) is formed between the fixing profile (15) and the front panel (8). The clip (16) includes a front plate (18) and a rear plate (19). An assembly block (20) is provided between the front plate (18) and the rear plate (19). A strip hole (21) is provided at the lower end of the rear plate (19) to be inserted into the fixing profile (15). The front plate (18) is placed horizontally. When the rear plate (19) is inserted into the insertion groove (17), the front plate (18) and the baffle (12) abut against each other.

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