Cap moving device

Abstract

The application provides a cap moving device, which comprises a frame, a rotating mechanism, a first positioning mechanism, a second positioning mechanism and a cap moving mechanism. The first positioning mechanism comprises a first positioning table and a first positioning member. The first positioning table is configured to receive a bottom surface of a box. The first positioning member is configured to position the bottom surface. The second positioning mechanism comprises a second positioning table and a second positioning member. The second positioning table is configured to receive an assembly side surface of the box. The second positioning table and the first positioning table are oriented differently. The second positioning member is configured to position the assembly side surface. The cap moving mechanism comprises a cap moving fixing member and a cap moving moving member. The cap moving fixing member is arranged on the cap moving moving member and is configured to take and place a box cap. The cap moving moving member is configured to drive the cap moving fixing member to move close to or away from the box. The rotating mechanism is configured to drive the first positioning mechanism and the second positioning mechanism to rotate, so that the bottom surface or the assembly side surface of the box can be opposite to the cap moving mechanism.

Description

Technical Field

[0001] This application relates to the field of silicon wafer transfer technology, and more specifically, to a wafer transfer device. Background Technology

[0002] In the production and transportation of some silicon wafers, the wafers need to be loaded into cassettes for processing. After the wafers are placed in the cassettes, the cassette lid needs to be closed to secure them. In related technologies, the placement posture of the cassette differs when the wafers are placed into it and when they are processed alongside the cassette. This necessitates using different devices for flipping and opening the cassette, resulting in low efficiency. Utility Model Content

[0003] In view of this, this application provides a lid-shifting device that can automatically realize the flipping and lid-shifting operations of the material box, thereby improving efficiency.

[0004] One embodiment of this application provides a cover-shifting device. The cover-shifting device is used to adjust the posture of a cassette and to pick up and place the cassette cover. The cover is used to open or close the pick-up / placement port of the cassette for picking up and placing silicon wafers. The cover-shifting device includes a frame, a rotating mechanism, a first positioning mechanism, a second positioning mechanism, and a cover-shifting mechanism. The rotating mechanism is disposed on the frame. The first positioning mechanism includes a first positioning platform and a first positioning member. The first positioning platform is disposed on the rotating mechanism and configured to receive the bottom surface of the cassette. The first positioning member is disposed on the first positioning platform and configured to position the bottom surface so that the cassette is fixed relative to the first positioning platform in a direction parallel to the bottom surface. The second positioning mechanism includes a second positioning platform and a second positioning member. The second positioning platform is disposed on the rotating mechanism. The second positioning platform and the first positioning platform have different orientations. The second positioning platform is configured to receive the assembly side of the cassette. The second positioning member is disposed on the second positioning platform and configured to position the assembly side so that the cassette is fixed relative to the second positioning platform in a direction parallel to the assembly side. The cover-shifting mechanism includes a cover-shifting fixing member and a cover-shifting moving member. A lid-moving fixing member is provided on the lid-moving moving member. The lid-moving fixing member is configured to pick up and place the lid. The lid-moving moving member is provided on the frame. The lid-moving moving member is configured to move the lid-moving fixing member closer to or away from the material box. A rotating mechanism is configured to drive the first positioning mechanism and the second positioning mechanism to rotate, so that the bottom surface or mounting side of the material box can be opposite to the lid-moving mechanism. When the first positioning platform is rotated to be opposite the lid-moving mechanism, the pick-up / placement port faces the lid-moving mechanism, causing the lid-moving fixing member to separate or connect the lid of the material box from the box body.

[0005] In some embodiments of this application, the first positioning mechanism further includes a first translation member. A first positioning stage is disposed on the rotating mechanism via the first translation member. The first translation member is configured to move the first positioning stage to bring the first positioning member closer to or away from the second positioning stage. The second positioning mechanism further includes a second translation member. A second positioning stage is disposed on the rotating mechanism via the second translation member. The second translation member is configured to move the second positioning stage to bring the second positioning member closer to or away from the first positioning stage.

[0006] In some embodiments of this application, the first positioning mechanism further includes a first detection element. The first detection element is disposed on a first positioning stage. The first detection element is configured to detect the position of the material box relative to the first positioning mechanism. The second positioning mechanism further includes a second detection element. The second detection element is disposed on a second positioning stage. The second detection element is configured to detect the position of the material box relative to the second positioning mechanism.

[0007] In some embodiments of this application, the first positioning stage has a first hollowed-out area. The first positioning member has a plurality of first positioning points. A first hollowed-out area is provided between at least two adjacent first positioning points. A first detection member is disposed within the first hollowed-out area. The second positioning stage has a second hollowed-out area. The second positioning member has a plurality of second positioning points. A second hollowed-out area is provided between at least two adjacent second positioning points. A second detection member is disposed within the second hollowed-out area.

[0008] In some embodiments of this application, the rotating mechanism includes a rotating drive and a rotating connecting seat. The rotating drive is mounted on the frame. The rotating connecting seat is mounted on the rotating drive. A first positioning mechanism and a second positioning mechanism are respectively connected to the rotating connecting seat. The rotating drive is configured to drive the rotating connecting seat to rotate, so that the first positioning stage and the second positioning stage are respectively opposite to the cover-moving mechanism.

[0009] In some embodiments of this application, the rotating mechanism further includes a rotating fixed seat, a first rotating limiting member, and a second rotating limiting member. The rotating drive member is mounted on the frame via the rotating fixed seat. The first and second rotating limiting members are respectively disposed on the rotating fixed seat and configured to abut against the rotating connecting seat to stop the rotation of the rotating connecting seat. When the first rotating limiting member abuts against the rotating connecting seat, the first positioning platform and the cover-moving mechanism are opposite each other. When the second rotating limiting member abuts against the rotating connecting seat, the second positioning platform and the cover-moving mechanism are opposite each other.

[0010] In some embodiments of this application, the rotating mechanism further includes a first rotating buffer and a second rotating buffer. The first and second rotating buffers are respectively disposed on the rotating fixed seat. The first and second rotating buffers are configured to abut against the rotating connecting seat to provide cushioning for the rotation of the rotating connecting seat. When the first rotating limiter abuts against the rotating connecting seat, the first rotating buffer abuts against the rotating connecting seat. The first rotating buffer is configured to abut against the rotating connecting seat before the first rotating limiter. When the second rotating limiter abuts against the rotating connecting seat, the second rotating buffer abuts against the rotating connecting seat. The second rotating buffer is configured to abut against the rotating connecting seat before the second rotating limiter.

[0011] In some embodiments of this application, the cover-moving fixing member includes a cover-moving adapter, a cover-moving positioning part, a cover-moving clamping part, and a clamping moving part. The cover-moving adapter is disposed on the cover-moving member. The cover-moving positioning part is disposed on the cover-moving adapter. The cover-moving clamping part is disposed on the cover-moving adapter via the clamping moving part. The cover-moving member drives the cover-moving adapter to move, so that the cover-moving positioning part and the cover-moving clamping part move closer to or further away from the box. The cover-moving positioning part is configured to move to abut the box cover. The clamping moving part is configured to drive the cover-moving clamping part to move to opposite sides of the box cover, respectively, to clamp the box cover.

[0012] In some embodiments of this application, the cover-moving mechanism further includes a cover-moving unlocking component. The cover-moving unlocking component includes a driving part and an unlocking part. The driving part is disposed on the frame or the cover-moving moving part. The unlocking part and the driving part are connected. The driving part is configured to move the unlocking part closer to or away from the locking structure of the cassette. The unlocking part is configured to unlock the locking structure to allow the cassette cover and the cassette body to separate.

[0013] In some embodiments of this application, the cap-shifting device includes a switching mechanism. The switching mechanism is mounted on the frame. A rotating mechanism is mounted on the switching mechanism. The switching mechanism is configured to move the rotating mechanism to a pick-and-place position or a cap-shifting position. When the rotating mechanism is in the pick-and-place position, the distance between the rotating mechanism and the cap-shifting mechanism increases compared to when it is in the cap-shifting position. Furthermore, when the rotating mechanism is in the cap-shifting position, a first positioning mechanism or a second positioning mechanism is opposite to the cap-shifting mechanism.

[0014] In this application, the material box can be carried by the first positioning mechanism and the second positioning mechanism. The rotation mechanism drives the first positioning mechanism and the second positioning mechanism to rotate, thereby changing the orientation of the material box. The material box can be rotated to a position that facilitates the removal and placement of the lid by the lid-moving mechanism, and it can also be rotated to a processing position that facilitates silicon wafer processing. This automates the flipping and lid-moving operations of the material box, improving efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation on the scope.

[0016] Figure 1 This is a schematic diagram of the structure of a cover-moving device provided in an embodiment of this application;

[0017] Figure 2 for Figure 1 A schematic diagram of the structure of the center-moving cover device and the material box and silicon wafer in conjunction;

[0018] Figure 3 for Figure 2 A schematic diagram of another configuration of the center-moving cover device, material box, and silicon wafer;

[0019] Figure 4 for Figure 2 A schematic diagram of another configuration of the center-moving cover device, material box, and silicon wafer;

[0020] Figure 5 for Figure 2 A schematic diagram of another configuration of the center-moving cover device, material box, and silicon wafer;

[0021] Figure 6 for Figure 2 A schematic diagram of the structure of the feed box and the silicon wafer;

[0022] Figure 7 for Figure 1 A schematic diagram of part of the structure of the central cover relocation device;

[0023] Figure 8 for Figure 7 Another structural schematic diagram of part of the central cover moving device;

[0024] Figure 9 for Figure 7 A schematic diagram of another state of the structure of the central cover device;

[0025] Figure 10 for Figure 9 Another structural schematic diagram of part of the central cover moving device;

[0026] Figure 11 for Figure 1 A schematic diagram of the structure of the central cover mechanism and part of the frame.

[0027] Explanation of key component symbols:

[0028] 100. Cover removal device;

[0029] 10. Rack;

[0030] 20. Rotating mechanism; 21. Rotating drive component; 22. Rotating connecting seat; 23. Rotating fixed seat; 24. First rotating limiting component; 25. Second rotating limiting component; 26. First rotating buffer component; 27. Second rotating buffer component;

[0031] 30. First positioning mechanism; 31. First positioning platform; 311. First hollow area; 32. First positioning component; 321. First positioning point; 33. First translation component; 34. First slide rail; 35. First detection component;

[0032] 40. Second positioning mechanism; 41. Second positioning stage; 411. Second hollow area; 42. Second positioning component; 421. Second positioning point; 43. Second translation component; 44. Second slide rail; 45. Second detection component;

[0033] 50. Cover-moving mechanism; 51. Cover-moving fixing component; 511. Cover-moving adapter; 512. Cover-moving positioning part; 513. Cover-moving clamping part; 514. Clamping moving part; 515. Cover-moving buffer part; 52. Cover-moving moving component; 53. Cover-moving unlocking component; 531. Drive part; 532. Unlocking part;

[0034] 60. Transposition mechanism;

[0035] 200. Material box; 201. Box body; 2011. Working opening; 2012. Bottom surface; 2013. Assembly side; 2014. Pick-and-place opening; 202. Box lid; 2021. Ear; 203. Locking structure; 2031. Hook; 2032. Snap-fit ​​component;

[0036] 300. Silicon wafers. Detailed Implementation

[0037] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0039] Embodiments of this application provide a cover-shifting device. The cover-shifting device is used to adjust the posture of a cassette and to pick up and place the cassette cover. The cover is used to open or close the pick-up / placement port of the cassette for picking up and placing silicon wafers. The cover-shifting device includes a frame, a rotating mechanism, a first positioning mechanism, a second positioning mechanism, and a cover-shifting mechanism. The rotating mechanism is disposed on the frame. The first positioning mechanism includes a first positioning platform and a first positioning member. The first positioning platform is disposed on the rotating mechanism and configured to receive the bottom surface of the cassette. The first positioning member is disposed on the first positioning platform and configured to position the bottom surface so that the cassette is fixed relative to the first positioning platform in a direction parallel to the bottom surface. The second positioning mechanism includes a second positioning platform and a second positioning member. The second positioning platform is disposed on the rotating mechanism. The second positioning platform and the first positioning platform have different orientations. The second positioning platform is configured to receive the assembly side of the cassette. The second positioning member is disposed on the second positioning platform and configured to position the assembly side so that the cassette is fixed relative to the second positioning platform in a direction parallel to the assembly side. The cover-shifting mechanism includes a cover-shifting fixing member and a cover-shifting moving member. A lid-moving fixing member is provided on the lid-moving moving member. The lid-moving fixing member is configured to pick up and place the lid. The lid-moving moving member is provided on the frame. The lid-moving moving member is configured to move the lid-moving fixing member closer to or away from the material box. A rotating mechanism is configured to drive the first positioning mechanism and the second positioning mechanism to rotate, so that the bottom surface or mounting side of the material box can be opposite to the lid-moving mechanism. When the first positioning platform is rotated to be opposite the lid-moving mechanism, the pick-up / placement port faces the lid-moving mechanism, causing the lid-moving fixing member to separate or connect the lid of the material box from the box body.

[0040] The material box can be carried by the first positioning mechanism and the second positioning mechanism. The rotation mechanism drives the first positioning mechanism and the second positioning mechanism to rotate, thereby changing the orientation of the material box. It can rotate the material box to a position that facilitates the removal and placement of the lid by the lid-moving mechanism, and it can also rotate the material box to a processing position that facilitates silicon wafer processing. This automates the flipping and lid-moving operations of the material box, improving efficiency.

[0041] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0042] See Figures 1 to 3 One embodiment of this application provides a cover-removing device 100. The cover-removing device 100 is used to perform a flipping operation and a cover-removing operation on a material box 200. The flipping operation changes the orientation of the material box 200; the cover-removing operation at least opens the material box 200. The material box 200 is used to house silicon wafers 300, and it is understood that the material box 200 can also be used to house other materials.

[0043] In some embodiments, silicon wafer 300 is cut from a single wafer into two halves during the manufacturing process. The cut surfaces are not passivated immediately after cutting, and the conversion efficiency of the half-wafer form of silicon wafer 300 decreases due to increased recombination at the edges. Heterojunction solar cells, due to their higher open-circuit voltage, experience even greater efficiency reductions after laser dicing. Therefore, passivation coating is required on the cut surfaces. Passivation coating refers to the deposition of a passivation film on the surface of the cut surface, thereby reducing minority carrier recombination, providing field passivation effects, and reducing reflectivity.

[0044] In some embodiments, after loading a half-wafer silicon wafer 300 into the cassette 200, it is conveyed to a passivation apparatus (not shown) to perform a passivation process on the cross-section of the half-wafer silicon wafer 300. Multiple silicon wafers 300 are stacked within the cassette 200 to improve transfer and operational efficiency. Figure 6 As shown, the material box 200 is provided with a working opening 2011, and the cross-sections of multiple silicon wafers 300 all face the working opening 2011. The passivation equipment can directly perform the passivation process on the silicon wafers 300 through the working opening 2011. The material box 200 is also provided with a pick-and-place port 2014 for the equipment to pick up and place silicon wafers 300.

[0045] See Figure 6 In some embodiments, the cassette 200 includes a cassette body 201 and a cassette cover 202. Silicon wafers 300 are loaded in the cassette body 201, and the cassette cover 202 is placed over the cassette body 201. The cassette body 201 has a working opening 2011 on one side and a pick-and-place opening 2014 on the other side. The cassette 200 can be placed vertically or horizontally to meet different operational needs. The cassette cover 202 is used to open or close the pick-and-place opening 2014 for picking up and placing silicon wafers 300. Furthermore, after the cassette cover 202 is placed over the cassette body 201, the two can cooperate to clamp the silicon wafers 300, preventing the silicon wafers 300 from moving when the cassette 200 rotates or changes direction.

[0046] When the material box 200 is placed vertically (that is, the box cover 202 and the box body 201 are arranged in a vertical direction), the orientation of the material box 200 is used to load the unpassivated silicon wafer 300 into the material box 200 or to remove the passivated silicon wafer 300 from the material box 200, so as to enable the silicon wafer 300 to be placed in a stacked manner in the material box 200.

[0047] When the material box 200 is placed horizontally (that is, the box cover 202 and the box body 201 are arranged in a horizontal direction), the orientation of the material box 200 is used for the passivation equipment to perform the passivation process on the silicon wafer 300. Usually, when the passivation process is performed, the working opening 2011 of the material box 200 is set to face upwards so as to facilitate uniform passivation of each silicon wafer 300.

[0048] In some embodiments, the material box 200 further includes a locking cover structure 203. The box body 201 and the box cover 202 are secured together by the locking cover structure 203, thereby clamping the internal silicon wafer 300.

[0049] Understandably, in some embodiments, the locking structure 203 includes a hook 2031 and a locking member 2032. The hook 2031 is rotatably mounted on the box body 201. The locking member 2032 is mounted on the box cover 202. When the box cover 202 is placed on the box body 201, the hook 2031 can rotate to engage the locking member 2032, thereby locking the box cover 202 and the box body 201. Pushing the hook 2031 to rotate so that the hook 2031 disengages from the locking member 2032 unlocks the box cover 202 and the box body 201.

[0050] Understandably, in some embodiments, the locking cover structure 203 also includes a resilient element (not shown). The resilient element is configured to apply an elastic force to the latch 2031, causing the latch 2031 to rotate in the direction of engaging the engaging member 2032, thereby enabling the box body 201 and the lid 202 to lock automatically. In other embodiments, the resilient element may be omitted, and the latch 2031 may be engaged with or disengaged from the engaging member 2032 by pushing the latch 2031.

[0051] It is understood that in some embodiments, in order to keep the silicon wafer 300 inside the box body 201 fixed when the box cover 202 moves relative to the box body 201, the material box 200 needs to be in a vertical position when the box cover 202 is moved.

[0052] See Figures 1 to 3 In some embodiments, the cover-moving device 100 includes a frame 10, a rotating mechanism 20, a first positioning mechanism 30, a second positioning mechanism 40, and a cover-moving mechanism 50. The rotating mechanism 20 and the cover-moving mechanism 50 are respectively disposed on the frame 10. The first positioning mechanism 30 and the second positioning mechanism 40 are disposed on the rotating mechanism 20.

[0053] The first positioning mechanism 30 and the second positioning mechanism 40 simultaneously support and position the material box 200. The rotating mechanism 20 drives the first positioning mechanism 30 and the second positioning mechanism 40 to rotate, thereby changing the orientation of the material box 200. This allows the material box 200 to be rotated to a convenient position for the lid-moving mechanism 50 to move the lid 202, or to a convenient processing position for the silicon wafer 300. This automates the flipping and lid-moving operations of the material box 200, improving efficiency. For example, when the material box 200 is in the pick-up / placement position, it is placed vertically; when it is in the processing position, it is placed horizontally. The lid-moving mechanism 50 can at least remove the lid 202 from the box body 201 to achieve an opening operation. In some embodiments, the lid-moving mechanism 50 can also move the lid 202 towards the box body 201 to achieve a closing operation.

[0054] See Figure 2 , Figure 3 and Figure 7 In some embodiments, the rotating mechanism 20 includes a rotating drive 21 and a rotating connecting seat 22. The rotating drive 21 is disposed on the frame 10. For example, the rotating drive 21 may be a motor. The rotating connecting seat 22 is disposed on the rotating drive 21. A first positioning mechanism 30 and a second positioning mechanism 40 are respectively connected to the rotating connecting seat 22. The rotating drive 21 is configured to drive the rotating connecting seat 22 to rotate, so that the first positioning mechanism 30 and the second positioning mechanism 40 are respectively opposite to the cover-moving mechanism 50. And when the first positioning mechanism 30 is rotated to be opposite to the cover-moving mechanism 50, the pick-and-place port 2014 faces the cover-moving mechanism 50, so that the cover-moving mechanism 50 drives the lid 202 of the material box 200 to separate or connect with the box body 201 of the material box 200.

[0055] The rotary drive component 21 can drive the first positioning mechanism 30 and the second positioning mechanism 40 to rotate synchronously, so that after the material box 200 is assembled in place on the cover-shifting device 100, there is no need to repeatedly adjust the relative position between the material box 200 and the first positioning mechanism 30 or the second positioning mechanism 40 when changing the posture of the material box 200. Furthermore, the rotary connecting seat 22 provides a mounting base for the first positioning mechanism 30 and the second positioning mechanism 40, facilitating the assembly and disassembly of the first positioning mechanism 30 and the second positioning mechanism 40.

[0056] When the first positioning mechanism 30 and the cover-moving mechanism 50 are opposite each other, the material box 200 is in a pick-and-place posture (vertically placed); when the second positioning mechanism 40 and the cover-moving mechanism 50 are opposite each other, the material box 200 is in a processing posture (horizontally placed).

[0057] See Figure 7 and Figure 10In some embodiments, the rotating mechanism 20 further includes a rotating fixed base 23, a first rotating limiting member 24, and a second rotating limiting member 25. The rotating drive member 21 is mounted on the frame 10 via the rotating fixed base 23. The first rotating limiting member 24 and the second rotating limiting member 25 are respectively disposed on the rotating fixed base 23 and configured to abut against the rotating connecting seat 22 to stop the rotation of the rotating connecting seat 22. When the first rotating limiting member 24 abuts against the rotating connecting seat 22, the first positioning mechanism 30 and the cover-moving mechanism 50 are opposite each other. When the second rotating limiting member 25 abuts against the rotating connecting seat 22, the second positioning mechanism 40 and the cover-moving mechanism 50 are opposite each other.

[0058] The first rotation limiter 24, by limiting the rotation position of the rotational connecting seat 22, can limit the position of the first positioning mechanism 30, which helps to stably rotate the material box 200 to the pick-up / place posture. The second rotation limiter 25, by limiting the rotation position of the rotational connecting seat 22, can limit the position of the second positioning mechanism 40, which helps to stably rotate the material box 200 to the processing posture.

[0059] In other embodiments, the first rotation limiting member 24 may also directly stop the first positioning mechanism 30 to limit the position of the first positioning mechanism 30; the second rotation limiting member 25 may also directly stop the second positioning mechanism 40 to limit the position of the second positioning mechanism 40.

[0060] In some embodiments, the rotating mechanism 20 further includes a first rotating buffer 26 and a second rotating buffer 27. The first rotating buffer 26 and the second rotating buffer 27 are respectively disposed on the rotating fixed seat 23. The first rotating buffer 26 and the second rotating buffer 27 are configured to abut against the rotating connecting seat 22 to provide cushioning against the rotation of the rotating connecting seat 22. Exemplarily, the first rotating buffer 26 and the second rotating buffer 27 can be compression springs, gas springs, or rubber components, etc.

[0061] When the first rotation limiting member 24 abuts against the rotation connecting seat 22, the first rotation buffer member 26 abuts against the rotation connecting seat 22. The first rotation buffer member 26 is configured to abut against the rotation connecting seat 22 before the first rotation limiting member 24. By providing cushioning to the rotation connecting seat 22 through the first rotation buffer member 26, the rotation connecting seat 22 can rotate towards the first rotation limiting member 24 at a faster speed, thereby reducing the impact when the first rotation limiting member 24 stops the rotation connecting seat 22, which helps to reduce the impact on the silicon wafer 300.

[0062] When the second rotation limiting member 25 abuts against the rotation connecting seat 22, the second rotation buffer member 27 abuts against the rotation connecting seat 22. The second rotation buffer member 27 is configured to abut against the rotation connecting seat 22 before the second rotation limiting member 25. By providing cushioning to the rotation connecting seat 22 through the second rotation buffer member 27, the rotation connecting seat 22 can rotate towards the second rotation limiting member 25 at a faster speed, thereby reducing the impact when the second rotation limiting member 25 stops the rotation connecting seat 22, which helps to reduce the impact on the silicon wafer 300.

[0063] By setting the first rotating buffer 26 and the second rotating buffer 27, it is beneficial to prevent the silicon wafer 300 from falling out of the working opening 2011, and also to prevent damage between different silicon wafers 300 and between the silicon wafer 300 and the material box 200.

[0064] In other embodiments, the first rotating buffer 26 may also directly abut against the first positioning mechanism 30 to provide buffering to the first positioning mechanism 30; the second rotating buffer 27 may also directly abut against the second positioning mechanism 40 to provide buffering to the second positioning mechanism 40.

[0065] See Figure 2 , Figure 3 and Figure 6 In some embodiments, the first positioning mechanism 30 includes a first positioning platform 31. The first positioning platform 31 is disposed on the rotary connecting seat 22 of the rotary mechanism 20. The first positioning platform 31 is also configured to receive the bottom surface 2012 of the material box 200. The bottom surface 2012 is the side of the box body 201 facing away from the lid 202. The second positioning mechanism 40 includes a second positioning platform 41. The second positioning platform 41 is disposed on the rotary mechanism 20. The second positioning platform 41 and the first positioning platform 31 have different orientations. The second positioning platform 41 is also configured to receive the assembly side 2013 of the material box 200. The assembly side 2013 is the side of the box body 201 facing away from the working opening 2011. The first positioning platform 31 and the lid-moving mechanism 50 being opposite each other can represent the first positioning mechanism 30 and the lid-moving mechanism 50 being opposite each other, and the second positioning platform 41 and the lid-moving mechanism 50 being opposite each other can represent the second positioning mechanism 40 and the lid-moving mechanism 50 being opposite each other. Furthermore, the rotary drive 21 drives the rotary connecting seat 22 to rotate, so that the first positioning mechanism 30 and the second positioning mechanism 40 are respectively opposite to the cover-moving mechanism 50, thereby enabling the bottom surface 2012 or the assembly side surface 2013 of the material box 200 to be opposite to the cover-moving mechanism 50.

[0066] Specifically, by rotating the first positioning stage 31 to face the cover-shifting mechanism 50, the first positioning stage 31 assumes the task of supporting the material box 200, and the cover-shifting mechanism 50 is positioned opposite the cover 202, facilitating the cover-shifting mechanism 50 to move the cover 202 relative to the box body 201, thus completing the cover-shifting operation. The rotation mechanism 20 changes the orientation of the material box 200, placing it in an orientation conducive to silicon wafer 300 processing. The second positioning stage 41 then supports the material box 200, stabilizing its posture and facilitating its transfer. This allows the material box 200, carrying the silicon wafer 300, to be directly moved to the passivation mechanism for passivation processing.

[0067] See Figure 6 , Figure 8 and Figure 9 In some embodiments, the first positioning mechanism 30 further includes a first positioning member 32. The first positioning member 32 is disposed on the first positioning stage 31. The first positioning member 32 is configured to position the bottom surface 2012 so that the material box 200 is fixed relative to the first positioning stage 31 in a direction parallel to the bottom surface 2012. The second positioning mechanism 40 further includes a second positioning member 42. The second positioning member 42 is disposed on the second positioning stage 41. The second positioning member 42 is configured to position the assembly side surface 2013 so that the material box 200 is fixed relative to the second positioning stage 41 in a direction parallel to the assembly side surface 2013.

[0068] By setting the first positioning member 32 and the second positioning member 42, the material box 200 can be stably supported on the first positioning table 31 in a pick-up and put-down posture, and stably supported on the second positioning table 41 in a processing posture.

[0069] Understandably, in some embodiments, the first positioning member 32 and the bottom surface 2012 of the material box 200 are mutually positioned and engaged through a concave-convex interlocking structure, and the second positioning member 42 and the assembly side surface 2013 of the material box 200 are mutually positioned and engaged through a concave-convex interlocking structure. For example, the first positioning member 32 is a protruding post, and the bottom surface 2012 of the material box 200 is provided with corresponding holes and slots of the same size and shape; the second positioning member 42 is a protruding post, and the assembly side surface 2013 of the material box 200 is provided with corresponding holes and slots of the same size and shape.

[0070] In some embodiments, the first positioning mechanism 30 further includes a first translation member 33. A first positioning stage 31 is disposed on the rotation mechanism 20 via the first translation member 33. The first translation member 33 is configured to move the first positioning stage 31 to move the first positioning member 32 closer to or further away from the second positioning stage 41. The second positioning mechanism 40 further includes a second translation member 43. The second positioning stage 41 is disposed on the rotation mechanism 20 via the second translation member 43. The second translation member 43 is configured to move the second positioning stage 41 to move the second positioning member 42 closer to or further away from the first positioning stage 31. The first translation member 33 may be a cylinder or a motor; the second translation member 43 may be a cylinder or a motor.

[0071] When the material box 200 needs to be fed into or out of the cover transfer device 100 in a pick-and-place posture, the first positioning platform 31 performs the function of bearing the material box 200. The second positioning platform 41 is moved by the second translation member 43 so that the second positioning member 42 and the material box 200 establish a positioning engagement, so that the second positioning member 42 and the concave and convex structure of the assembly side 2013 achieve a plug-in engagement, thereby so that the material box 200 is stably fixed on the first positioning platform 31, or the second positioning member 42 and the material box 200 are disengaged from the positioning engagement, thereby allowing the material box 200 to be placed on the first positioning platform 31 or leave the first positioning platform 31. When the material box 200 needs to be fed into or out of the cover-shifting device 100 in a processing posture, the second positioning stage 41 performs the function of supporting the material box 200. The first translation member 33 drives the first positioning stage 31 to move, so that the first positioning member 32 and the material box 200 establish a positioning engagement, and the first positioning member 32 and the concave-convex structure of the bottom surface 2012 achieve an interlocking engagement. This allows the material box 200 to be stably fixed to the second positioning stage 41, or the first positioning member 32 and the material box 200 to disengage from the positioning engagement, thus allowing the material box 200 to be placed on or removed from the second positioning stage 41. Furthermore, the first positioning member 32 and the second positioning member 42 can simultaneously engage with the material box 200, and the material box 200 can be fixed to both the first positioning stage 31 and the second positioning stage 41, which helps to prevent the material box 200 from disengaging from the cover-shifting device 100 when the rotating mechanism 20 rotates the material box 200.

[0072] Understandably, in some embodiments, the direction in which the first positioning platform 31 moves, driven by the first translation member 33, is perpendicular to the bearing surface of the second positioning platform 41 used to receive the assembly side 2013 of the material box 200; the direction in which the second positioning platform 41 moves, driven by the second translation member 43, is perpendicular to the bearing surface of the first positioning platform 31 used to receive the bottom surface 2012 of the material box 200.

[0073] Understandably, in some embodiments, the first positioning stage 31 is disposed on the rotary connecting seat 22 via the first translation member 33. The second positioning stage 41 is disposed on the rotary connecting seat 22 via the second translation member 43.

[0074] In some embodiments, the first positioning mechanism 30 further includes a first slide rail 34. The first slide rail 34 is disposed on the rotary connecting base 22, and the first positioning platform 31 is slidably disposed on the first slide rail 34, guiding the first positioning platform 31 to move along a predetermined direction. The second positioning mechanism 40 further includes a second slide rail 44. The second slide rail 44 is disposed on the rotary connecting base 22, and the second positioning platform 41 is slidably disposed on the second slide rail 44, guiding the second positioning platform 41 to move along a predetermined direction.

[0075] In some embodiments, the first positioning mechanism 30 further includes a first detection element 35. The first detection element 35 is disposed on the first positioning stage 31. The first detection element 35 is configured to detect the position of the material box 200 relative to the first positioning mechanism 30. When the first detection element 35 detects the material box 200, it determines that the first positioning stage 31 has received the material box 200, and that the first positioning element 32 and the material box 200 have established a positioning engagement. By setting the first detection element 35, it is beneficial to ensure that the material box 200 is positioned correctly relative to the first positioning mechanism 30, avoiding interference with the lid-moving operation of the material box 200.

[0076] The second positioning mechanism 40 also includes a second detection element 45. The second detection element 45 is disposed on the second positioning stage 41. The second detection element 45 is configured to detect the position of the material box 200 relative to the second positioning mechanism 40. When the second detection element 45 detects the material box 200, it determines that the second positioning stage 41 has received the material box 200, and that the second positioning element 42 and the material box 200 have established a positioning engagement. By setting the second detection element 45, it is beneficial to ensure that the material box 200 is properly positioned relative to the second positioning mechanism 40, avoiding any impact on the processing operation of the material box 200.

[0077] It is understood that in some embodiments, the first detection element 35 and the second detection element 45 can be press-contact detection components, and the judgment method and judgment logic are simple and reliable. In other embodiments, the first detection element 35 and the second detection element 45 can also be infrared ranging detection components.

[0078] In some embodiments, the first positioning platform 31 has a first hollow area 311. The first positioning member 32 has a plurality of first positioning points 321. The first hollow area 311 is provided between at least two adjacent first positioning points 321. The first detection member 35 is disposed within the first hollow area 311. By providing the first hollow area 311, while providing an installation position for the first detection member 35, the height of the first detection member 35 protruding from the side of the first positioning platform 31 where the first positioning member 32 is located can be reduced, making it easier to hide the first positioning member 32 and avoiding affecting the positioning and engagement of the first positioning member 32 and the material box 200.

[0079] The second positioning platform 41 has a second hollow area 411. The second positioning element 42 has multiple second positioning points 421. The second hollow area 411 is provided between at least two adjacent second positioning points 421. The second detection element 45 is disposed within the second hollow area 411. By providing the second hollow area 411, while providing an installation position for the second detection element 45, the height of the second detection element 45 protruding from the side of the second positioning platform 41 where the second positioning element 42 is located can be reduced, making it easier to hide the second positioning element 42 and avoiding affecting the positioning fit between the second positioning element 42 and the material box 200.

[0080] See Figure 1 , Figure 5 and Figure 6 In some embodiments, the cover-moving mechanism 50 includes a cover-moving fixing member 51 and a cover-moving moving member 52. When the first positioning mechanism 30 and the cover-moving mechanism 50 are opposite each other, the pick-and-place port 2014 faces the cover-moving mechanism 50, causing the cover-moving fixing member 51 to separate or connect the lid 202 of the material box 200 from the box body 201 of the material box 200. The cover-moving fixing member 51 is disposed on the cover-moving moving member 52. The cover-moving fixing member 51 is configured to pick up and place the lid 202. The cover-moving moving member 52 is disposed on the frame 10. The cover-moving moving member 52 is configured to move the cover-moving fixing member 51 closer to or away from the box body 201 of the material box 200. The cover-moving moving member 52 can be a cylinder or a motor.

[0081] When the lid-moving mechanism 50 is opposite to the lid 202, the lid-moving fixing member 51 can be fixedly connected to the lid 202. Then, by moving the lid-moving moving member 52, the lid-moving fixing member 51 can be driven to move the lid 202 relative to the box body 201, thus completing the lid-moving operation. By setting the lid-moving moving member 52, the lid 202 can be moved, and the lid-moving fixing member 51 can avoid obstacles before the material box 200 rotates to the correct position.

[0082] See Figure 4 , Figure 6 and Figure 11 In some embodiments, the cover-moving fixing member 51 includes a cover-moving adapter 511, a cover-moving positioning part 512, a cover-moving clamping part 513, and a clamping moving part 514. The cover-moving adapter 511 is disposed on the cover-moving member 52. The cover-moving positioning part 512 is disposed on the cover-moving adapter 511. The cover-moving clamping part 513 is disposed on the cover-moving adapter 511 via the clamping moving part 514. The cover-moving member 52 drives the cover-moving adapter 511 to move, so that the cover-moving positioning part 512 and the cover-moving clamping part 513 move closer to or further away from the material box 200. The cover-moving positioning part 512 is configured to move to abut the box cover 202. The clamping moving part 514 is configured to drive the cover-moving clamping part 513 to move to opposite sides of the box cover 202, respectively, to clamp the box cover 202. The clamping moving part 514 can be a cylinder or a motor.

[0083] The clamping and moving part 514 drives the lid-moving clamping part 513 to move, so that the lid-moving clamping part 513 can cooperate with the lid-moving positioning part 512 to clamp or release the lid 202. This can not only achieve a fixed connection of the lid 202, but also reduce the obstruction encountered by the lid 202 when it moves with the box body 201.

[0084] Understandably, in some embodiments, the direction in which the cap-moving clamping part 513 moves under the influence of the clamping moving part 514 intersects with the direction in which the cap-moving adapter 511 moves under the influence of the cap-moving moving part 52, so that the cap-moving clamping part 513 can avoid the material box 200 during the movement of the cap-moving adapter 511.

[0085] It is understood that in some embodiments, the cover-moving positioning part 512 and the box cover 202 achieve mutual positioning and cooperation through a concave-convex interlocking structure. For example, the cover-moving positioning part 512 is a protruding post, and the box cover 202 is provided with corresponding holes and slots of the same size and shape.

[0086] Understandably, in some embodiments, the lid 202 is provided with an ear 2021 so that the lid-moving clamp 513 can hook onto the lid 202.

[0087] In some embodiments, the cover-moving fixing member 51 further includes a cover-moving buffer portion 515. The cover-moving buffer portion 515 is disposed on the cover-moving adapter 511. The cover-moving buffer portion 515 is configured to abut against the lid 202 to provide cushioning for the abutment between the cover-moving positioning portion 512 and the lid 202. When the cover-moving positioning portion 512 abuts against the lid 202, the cover-moving buffer portion 515 abuts against the lid 202, and the cover-moving buffer portion 515 is configured to abut against the lid 202 before the cover-moving positioning portion 512. Exemplarily, the cover-moving buffer portion 515 may be a compression spring, a gas spring, or a rubber component, etc.

[0088] In some embodiments, the cover-moving mechanism 50 further includes a cover-moving unlocking member 53. The cover-moving unlocking member 53 includes a driving part 531 and an unlocking part 532. The driving part 531 is disposed on the frame 10 or the cover-moving moving member 52. The unlocking part 532 and the driving part 531 are connected. The driving part 531 is configured to move the unlocking part 532 closer to or further away from the locking cover structure 203 of the material box 200. The unlocking part 532 is configured to unlock the locking cover structure 203 to allow the box cover 202 and the box body 201 of the material box 200 to separate. The driving part 531 can be a cylinder or a motor. By driving the unlocking part 532 to move via the driving part 531, the locking cover structure 203 can be unlocked after the material box 200 has moved into place, thereby reducing the obstruction encountered during the movement of the material box 200.

[0089] Understandably, in some embodiments, the unlocking part 532 is driven by the driving part 531 to push the hook 2031 to rotate, so that the hook 2031 disengages from the engaging part 2032, thereby unlocking the box body 201 and the box cover 202.

[0090] See Figure 1 In some embodiments, the cap-shifting device 100 includes a switching mechanism 60. The switching mechanism 60 is disposed on the frame 10. A rotating mechanism 20 is disposed on the switching mechanism 60. The switching mechanism 60 is configured to move the rotating mechanism 20 to either a pick-and-place position or a cap-shifting position. When the rotating mechanism 20 is in the pick-and-place position, the distance between the rotating mechanism 20 and the cap-shifting mechanism 50 is increased compared to when it is in the cap-shifting position. Furthermore, when the rotating mechanism 20 is in the cap-shifting position, the first positioning mechanism 30 or the second positioning mechanism 40 is opposite to the cap-shifting mechanism 50. A rotating fixing seat 23 is disposed on the switching mechanism 60.

[0091] The switching mechanism 60 moves the rotating mechanism 20 to the cover-shifting position, bringing the material box 200 closer to the cover-shifting mechanism 50 to facilitate the cover-shifting operation of the cover-shifting mechanism 50. The switching mechanism 60 also moves the rotating mechanism 20 to the pick-and-place position, allowing the rotating structure to drive the first positioning mechanism 30 and the second positioning mechanism 40 to rotate, facilitating the pick-and-place of the material box 200 and the loading and unloading of silicon wafers 300 into the material box 200.

[0092] See Figures 1 to 5 For example, the working method of the cover transfer device 100 receiving the passivated silicon wafer 300 and transferring the silicon wafer 300 to subsequent processes is as follows:

[0093] Combination Figure 1 As shown, the rotating mechanism 20 drives the second positioning mechanism 40 to rotate to a position opposite to the cover-moving mechanism 50. The shifting mechanism 60 drives the rotating mechanism 20 to move to the pick-and-place position. Figure 2 As shown, the material box 200 is placed in a working posture (horizontally positioned) on the second positioning mechanism 40, and the second positioning member 42 is positioned and engaged with the material box 200. The first translation member 33 and the second translation member 43 respectively drive the first positioning table 31 and the second positioning table 41 to move, so that the first positioning member 32 and the material box 200 are positioned and engaged. Figure 3 As shown, the rotating mechanism 20 drives the first positioning mechanism 30 to a position opposite to the cover-moving mechanism 50, so that the material box 200 is in a pick-and-place posture (vertically placed). Combined with... Figure 4 As shown, the shifting mechanism 60 drives the rotating mechanism 20 to move to the cover-shifting position. Combined with... Figure 5As shown, the cover-moving mechanism 50 first unlocks the locking mechanism between the box body 201 and the cover 202, then fixes the cover 202 and moves it away from the box body 201. The switching mechanism 60 moves the rotating mechanism 20 to the pick-and-place position. The silicon wafer 300 can be directly removed; or, the first translation member 33 moves the first positioning stage 31 to disengage the second positioning member 42 from the material box 200, so that the material box 200 can be removed from the second positioning stage 41.

[0094] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the essential spirit and scope of this application fall within the scope of this application's disclosure.

Claims

1. A lid-moving device for adjusting the posture of a material box and for picking up and placing the lid of the material box, the lid being used to open or close the pick-up and drop-off port of the material box for picking up and placing silicon wafers, characterized in that, include: frame; A rotating mechanism is provided on the frame; The first positioning mechanism includes a first positioning platform and a first positioning element. The first positioning platform is disposed on the rotating mechanism and configured to receive the bottom surface of the material box. The first positioning element is disposed on the first positioning platform and configured to position the bottom surface so that the material box is fixed relative to the first positioning platform in a direction parallel to the bottom surface. The second positioning mechanism includes a second positioning platform and a second positioning element. The second positioning platform is disposed on the rotating mechanism. The second positioning platform and the first positioning platform have different orientations. The second positioning platform is configured to receive the assembly side of the material box. The second positioning element is disposed on the second positioning platform and configured to position the assembly side so that the material box is fixed relative to the second positioning platform in a direction parallel to the assembly side. and The lid-moving mechanism includes a lid-moving fixing member and a lid-moving moving member. The lid-moving fixing member is disposed on the lid-moving moving member and is configured to pick up and place the lid. The lid-moving moving member is disposed on the frame and is configured to drive the lid-moving fixing member closer to or away from the material box. The rotating mechanism is configured to drive the first positioning mechanism and the second positioning mechanism to rotate so that the bottom surface or assembly side of the material box can be opposite to the cover-moving mechanism. When the first positioning platform is rotated to be opposite to the cover-moving mechanism, the pick-and-place port faces the cover-moving mechanism, so that the cover-moving fixing member drives the lid of the material box to separate or connect with the body of the material box.

2. The cover-moving device according to claim 1, characterized in that, The first positioning mechanism further includes a first translation member, and the first positioning platform is disposed on the rotating mechanism via the first translation member. The first translation member is configured to drive the first positioning platform to move so that the first positioning member moves closer to or further away from the second positioning platform. The second positioning mechanism further includes a second translation member, and the second positioning platform is disposed on the rotating mechanism via the second translation member. The second translation member is configured to drive the second positioning platform to move so that the second positioning member moves closer to or further away from the first positioning platform.

3. The cover-moving device according to claim 1, characterized in that, The first positioning mechanism further includes a first detection element, which is disposed on the first positioning stage and configured to detect the position of the material box relative to the first positioning mechanism; The second positioning mechanism further includes a second detection element, which is disposed on the second positioning stage and configured to detect the position of the material box relative to the second positioning mechanism.

4. The cover-moving device according to claim 3, characterized in that, The first positioning platform has a first hollow area, the first positioning component has multiple first positioning points, the first hollow area is provided between at least two adjacent first positioning points, and the first detection component is located within the first hollow area. The second positioning platform has a second hollow area, the second positioning component has multiple second positioning points, and the second hollow area is provided between at least two adjacent second positioning points. The second detection component is located within the second hollow area.

5. The cover-moving device according to claim 1, characterized in that, The rotating mechanism includes a rotating drive and a rotating connecting seat. The rotating drive is disposed on the frame, and the rotating connecting seat is disposed on the rotating drive. The first positioning mechanism and the second positioning mechanism are respectively connected to the rotating connecting seat. The rotating drive is configured to drive the rotating connecting seat to rotate so that the first positioning platform and the second positioning platform are respectively opposite to the cover-moving mechanism.

6. The cover-moving device according to claim 5, characterized in that, The rotating mechanism further includes a rotating fixed seat, a first rotating limiting member and a second rotating limiting member. The rotating drive member is mounted on the frame via the rotating fixed seat. The first rotating limiting member and the second rotating limiting member are respectively mounted on the rotating fixed seat and configured to abut against the rotating connecting seat to stop the rotating connecting seat from rotating. When the first rotating limiting member abuts against the rotating connecting seat, the first positioning platform and the cover-moving mechanism are opposite each other; when the second rotating limiting member abuts against the rotating connecting seat, the second positioning platform and the cover-moving mechanism are opposite each other.

7. The cover-moving device according to claim 6, characterized in that, The rotating mechanism further includes a first rotating buffer and a second rotating buffer, which are respectively disposed on the rotating fixed seat and configured to abut against the rotating connecting seat to provide buffering for the rotation of the rotating connecting seat; When the first rotation limiting member abuts against the rotation connecting seat, the first rotation buffer member abuts against the rotation connecting seat, and the first rotation buffer member is configured to abut against the rotation connecting seat before the first rotation limiting member; When the second rotation limiting member abuts against the rotation connecting seat, the second rotation buffer member abuts against the rotation connecting seat, and the second rotation buffer member is configured to abut against the rotation connecting seat before the second rotation limiting member.

8. The cover-moving device according to claim 1, characterized in that, The cover-moving fixing component includes a cover-moving adapter, a cover-moving positioning part, a cover-moving clamping part, and a clamping moving part. The cover-moving adapter is disposed on the cover-moving component, the cover-moving positioning part is disposed on the cover-moving adapter, and the cover-moving clamping part is disposed on the cover-moving adapter via the clamping moving part. The cover-moving component drives the cover-moving adapter to move, so that the cover-moving positioning part and the cover-moving clamping part are close to or away from the material box, and the cover-moving positioning part is configured to move to abut the box cover; The clamping and moving part is configured to move the cover-moving clamping part to opposite sides of the cover, respectively, so as to clamp the cover.

9. The cover-moving device according to claim 1, characterized in that, The cover-moving mechanism further includes a cover-moving unlocking component, which includes a driving part and an unlocking part. The driving part is disposed on the frame or the cover-moving component. The unlocking part and the driving part are connected. The driving part is configured to drive the unlocking part to move closer to or away from the locking structure of the material box. The unlocking part is configured to unlock the locking structure to allow the box cover and the box body of the material box to separate.

10. The cover-moving device according to claim 1, characterized in that, The cover-shifting device includes a shifting mechanism, which is mounted on the frame. A rotating mechanism is mounted on the shifting mechanism, and the shifting mechanism is configured to drive the rotating mechanism to move to the pick-up / placement position or the cover-shifting position. When the rotating mechanism is located at the pick-and-place position, the distance between the rotating mechanism and the cover-moving mechanism increases compared to when it is located at the cover-moving position; and when the rotating mechanism is located at the cover-moving position, the first positioning mechanism or the second positioning mechanism is opposite to the cover-moving mechanism.

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