An access boat structure and coating equipment

Abstract

The utility model provides a kind of in-out boat structure and coating equipment, wherein the in-out boat structure includes lifting drive device, for driving at least two translation drive devices synchronous lifting movement;Translation drive device, for driving the corresponding translation movement piece of each translation drive device synchronous reciprocating translation movement;At least two boat moving assemblies, respectively installed on corresponding translation movement piece, the corresponding support paddle of at least two boat moving assemblies is respectively used to move at least two carriers boat into and out of at least two reaction cavities.The in-out boat structure provided by the utility model can move at least two carriers boat into and out of each group of at least two reaction cavities in the height direction of furnace body synchronously layer by layer, shorten the length of reaction cavity and narrow it under the premise of not reducing production capacity, shorten the cantilever length of support paddle of in-out boat structure adaptively, improve the rigidity of cantilever structure, reduce the scratching of carrier boat caused by cantilever deformation and shaking and the failure rate of coating equipment, and improve the working stability of coating equipment.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell coating technology, and in particular to an inlet / outlet boat structure and a coating equipment using the same. Background Technology

[0002] In the field of photovoltaic cell coating technology, coating equipment (such as PECVD equipment) is usually equipped with multiple reaction chambers (such as furnace tubes with internal reaction chambers), and inlet and outlet boat mechanisms are configured at the inlet and outlet of the reaction chambers. Graphite boats and other carrier boats are used as carriers. A single inlet and outlet boat mechanism performs the inlet and outlet action of a graphite boat in one reaction chamber. The graphite boat, along with the silicon wafer (cell), is moved into the reaction chamber of a single furnace tube for coating in one go through the inlet and outlet boat mechanism, and then the graphite boat, along with the coated silicon wafer, is removed from the reaction chamber of the single furnace tube in one go through the inlet and outlet boat mechanism.

[0003] With the development of PECVD technology, in order to meet the needs of process conditions and large-scale production, the reaction chamber volume of the furnace tube of PECVD equipment has been increasing, and the cross-sectional area and chamber length have increased significantly compared with the past, in order to load longer and larger carrier boats. Typically, two carrier boats are loaded side by side in each extended and widened reaction chamber. Correspondingly, the cantilever length of the support paddle used to support the carrier boat in the boat loading and unloading mechanism has also increased accordingly. However, due to the significant extension of the support paddle cantilever, its structural rigidity is reduced, making it prone to deformation, vibration and other problems. This results in the carrier boat being easily scratched during loading and unloading, a surge in failure rate, and the need for frequent shutdowns for maintenance. This reduces the working stability, coating quality, efficiency and capacity of the coating equipment, and increases the production cost of the coating equipment.

[0004] In addition, the extended and widened reaction chamber with two boats has a more complex internal structure than the reaction chamber with a single boat, and places higher demands on the load-bearing capacity and positioning accuracy of the boat entry and exit mechanism, which further increases the equipment cost and failure rate. At the same time, the reaction chamber requires more space, which reduces the equipment's compactness. Utility Model Content

[0005] This utility model proposes an inlet / outlet boat structure and a coating equipment using the same, in order to solve the technical problem that existing coating equipment, in order to increase production capacity, lengthens and widens the reaction chamber to load two boats, resulting in the lengthening and reduction of the rigidity of the cantilever supporting the paddle in the inlet / outlet boat mechanism, which leads to the cantilever being prone to deformation and shaking, thus affecting the stability of the carrier boat during the inlet / outlet boat movement.

[0006] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0007] This utility model provides an entry / exit boat structure, including:

[0008] A lifting drive device is used to drive at least two translational transmission devices to move up and down synchronously.

[0009] Translation drive device, used to drive the corresponding translation motion parts of each translation transmission device to perform synchronous reciprocating translational motion;

[0010] At least two boat-moving assemblies are respectively mounted on corresponding translational motion components, and the corresponding support paddles of the at least two boat-moving assemblies are respectively used to move at least two vehicle boats into and out of at least two reaction chambers.

[0011] Preferably, the lifting drive device includes:

[0012] The lifting drive frame extends vertically.

[0013] The lifting screw mechanism is installed on the lifting drive frame;

[0014] The lifting motion component is installed on the lifting screw that extends vertically in the lifting screw mechanism;

[0015] The lifting drive unit is installed on the lifting drive frame and is used to drive the lifting screw to rotate, thereby driving the lifting moving parts to move up and down on the lifting screw in the vertical direction;

[0016] The inlet / outlet structure includes two translational transmission devices, which are respectively installed on both sides of the lifting moving parts.

[0017] Preferably, the translational transmission device includes:

[0018] The translation transmission frame extends along a first horizontal direction and is installed on one side of the lifting motion component in a second horizontal direction perpendicular to the first horizontal direction;

[0019] The synchronous belt pulley mechanism is mounted on the translation transmission frame and is used to drive the translation motion component to reciprocate translational motion along the first horizontal direction;

[0020] The translation drive device includes:

[0021] The translation drive unit is installed on the translation transmission frame at the position of the drive wheel corresponding to the synchronous belt pulley mechanism;

[0022] The first and second drive shafts are respectively located on both sides of the translation drive unit in the second horizontal direction and both extend in the second horizontal direction, and are synchronously driven by the first output shaft of the translation drive unit.

[0023] The first driving wheel and the second driving wheel are respectively mounted on the first driving shaft and the second driving shaft, and respectively mesh with the driving wheel of the corresponding translation transmission device.

[0024] Furthermore, the inlet / outlet structure also includes a third translational transmission device. The translational transmission frame of the third translational transmission device is installed on the side of the translational transmission device facing away from the lifting motion component in the second horizontal direction. The three translational transmission devices are connected by at least one transmission connector, so that the lifting motion component can drive the three translational transmission devices to move up and down synchronously in the vertical direction.

[0025] The translation drive also includes:

[0026] The third driving wheel is located on the second driving shaft and on the side of the second driving wheel facing away from the first driving wheel in the second horizontal direction, and meshes with the drive wheel of the third translational transmission device.

[0027] Preferably, the lifting drive unit is a lifting drive motor, the second output shaft of the lifting drive motor extending along the first horizontal direction is provided with a drive gear, and the lifting screw is provided with a first driven gear that meshes with the drive gear;

[0028] The second output shaft is used to drive the drive gear to rotate and drive the first driven gear and the lifting screw to rotate, thereby driving the lifting motion component to drive the two translation transmission devices to move up and down synchronously in the vertical direction.

[0029] Furthermore, the entry and exit structure also includes:

[0030] The lifting transmission device includes:

[0031] The lifting transmission frame extends vertically and is spaced apart from the lifting drive frame along the first horizontal direction;

[0032] The driven screw mechanism is mounted on the lifting transmission frame;

[0033] The lifting driven component is mounted on the transmission screw extending vertically in the driven screw mechanism, and the corresponding translation transmission frames of the two translation transmission devices are respectively mounted on both sides of the lifting driven component in the second horizontal direction.

[0034] The transmission screw is equipped with a second driven gear that matches the position of the second output shaft;

[0035] A drive shaft extends along a first horizontal direction between a second output shaft and a second driven gear. One end of the drive shaft in the first horizontal direction is provided with a first drive gear that meshes with the first driven gear, and the other end of the drive shaft in the first horizontal direction is provided with a second drive gear that meshes with the second driven gear.

[0036] The second output shaft is used to drive the transmission gear and the drive gear to rotate synchronously, and to drive the first driven gear, the lifting screw, the second driven gear, and the transmission screw to rotate synchronously, thereby driving the lifting motion component and the lifting driven component to drive the two translation transmission devices to move synchronously up and down in the vertical direction.

[0037] Furthermore, the entry and exit structure also includes:

[0038] The lifting guide device includes:

[0039] The lifting guide frame extends vertically and is spaced apart from the lifting drive frame along the first horizontal direction;

[0040] Linear bearing assembly, installed on the lifting guide frame;

[0041] The lifting bearing is installed on the lifting guide rod extending vertically from the linear bearing assembly, and the corresponding translation transmission frames of the two translation transmission devices are respectively installed on both sides of the lifting bearing in the second horizontal direction.

[0042] The lifting bearing is used to support and guide the two translational transmission devices to move up and down synchronously in the vertical direction.

[0043] Preferably, the boat transfer assembly includes:

[0044] Support frame, mounted on the translational moving parts;

[0045] The support frame extends horizontally and is installed on the support frame;

[0046] Several supporting paddles extend horizontally and are mounted on the supporting platform to secure and support the vehicle boat.

[0047] Preferably, the length of the boat-moving assembly matches the length of the translational transmission device.

[0048] This utility model also provides a coating equipment, including at least two layers of furnace tube groups arranged in a vertical direction, each layer of furnace tube group including at least two horizontal furnace tubes extending in a horizontal direction, the horizontal furnace tubes being provided with a horizontal reaction chamber, and also including the above-mentioned inlet and outlet boat structure, at least two boat moving components being used to translate the corresponding carrier boats into and out of the corresponding horizontal reaction chambers of the same layer of furnace tube groups.

[0049] Compared with the prior art, the present invention has the following beneficial effects:

[0050] The inlet / outlet boat structure provided by this utility model can simultaneously move at least two carrier boats into and out of at least two reaction chambers at one time. This allows the existing coating equipment with its lengthened and widened reaction chambers to accommodate furnace tubes carrying two boats to shorten and narrow the reaction chamber length without reducing production capacity. Furthermore, the existing configuration of a single furnace tube (and its reaction chamber) per layer in the furnace height direction is changed to at least two furnace tubes (and their reaction chambers) arranged side-by-side per layer. The inlet / outlet boat structure changes from a "one-to-one" inlet / outlet action of moving an extended carrier boat into and out of a single reaction chamber at a time to a "one-to-two" inlet / outlet action of moving a shorter carrier boat matching the shortened reaction chamber into and out of two reaction chambers at a time. This shortens the adaptability of the cantilever length of the inlet / outlet boat structure, thereby improving the structural rigidity of the cantilever, reducing carrier boat scraping caused by cantilever deformation and vibration, and ultimately reducing the failure rate of the coating equipment, improving the working stability, coating quality, coating efficiency, and production capacity of the coating equipment.

[0051] Meanwhile, shortening and narrowing the length of the reaction chamber and arranging at least two furnace tubes (and their reaction chambers) side by side in each layer along the height of the furnace body simplifies the internal structure of the chamber and reduces the requirements for the load-bearing capacity and positioning accuracy of the inlet and outlet boat mechanism. This further reduces the manufacturing and maintenance costs and failure rate of the coating equipment. At the same time, the space required for the reaction chamber is also reduced, improving the compactness and space utilization of the coating equipment.

[0052] Furthermore, the inlet / outlet boat structure provided by this utility model uses a lifting drive device and a translation drive device to synchronously drive at least two translation transmission devices to lift and translate, and the two translation transmission devices share the motion mechanism of the lifting drive device and the translation drive device to achieve synchronous lifting and translation operation. Compared with the traditional inlet / outlet boat structure in which a lifting drive device and a translation drive device drive a translation transmission device separately, it can significantly improve the synchronization of inlet / outlet boats of multiple different reaction chambers. Under the premise of ensuring consistent process time, it can realize large-scale production of the same or different processes on the same machine, and ensure the production capacity of coating equipment. Attached Figure Description

[0053] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0054] Figure 1 A three-dimensional structural schematic diagram of an embodiment of the inlet / outlet boat structure provided by this utility model;

[0055] Figure 2 for Figure 1A partially enlarged structural diagram of region A of the inlet / outlet boat structure;

[0056] Figure 3 A three-dimensional structural schematic diagram of an embodiment of the translation drive device for the entry / exit boat structure provided by this utility model;

[0057] Figure 4 A three-dimensional structural schematic diagram of an embodiment in which the three translational transmission devices of the inlet / outlet boat structure provided by this utility model are connected by transmission connectors;

[0058] Figure 5 for Figure 1 A partially enlarged structural diagram of region B of the inlet / outlet boat structure;

[0059] Figure 6 A three-dimensional structural schematic diagram of an embodiment of the lifting guide device for the entry / exit boat structure provided by this utility model;

[0060] Figure 7 A three-dimensional structural diagram of an embodiment of the inlet / outlet boat structure provided by this utility model, which is extended vertically to adapt to a three-layer furnace tube assembly.

[0061] The main markings in the attached figures are as follows:

[0062] 1. Lifting drive device; 11. Lifting drive frame; 12. Lifting screw mechanism; 121. Lifting screw; 1211. First driven gear; 122. Lifting moving component; 123. Lifting drive unit; 1231. Second output shaft; 1232. Drive gear; 2. Translation transmission device; 21. Translation transmission frame; 22. Synchronous belt pulley mechanism; 221. Translation moving component; 3. Translation drive device; 31. Translation drive unit; 311. First output shaft; 32. First drive shaft; 321. First drive wheel; 33. Second drive shaft; 331. Second drive wheel; 332. Connecting part; 34. Motor reducer; 341. Power transmission 35. Outlet hole; 36. Shaft connector; 4. Shaft connecting flange; 5. Transmission connector; 6. Lifting transmission device; 7. Lifting transmission frame; 8. Driven screw mechanism; 9. Transmission screw; 10. Second driven gear; 11. Lifting driven component; 12. Transmission shaft; 13. First transmission gear; 14. Second transmission gear; 15. Lifting guide device; 16. Lifting guide frame; 17. Linear bearing assembly; 18. Lifting guide rod; 19. Lifting bearing; 10. Guide connector; 11. Boat moving assembly; 12. Support frame; 13. Support tube; 14. Support paddle; 15. Paddle clamp; 16. Furnace tube; 17. Reaction chamber.

[0063] Other markings in the attached figures are as follows:

[0064] X, first horizontal direction; Y, second horizontal direction; Z, vertical direction. Detailed Implementation

[0065] Please refer to the following: Figure 1-7 The entry / exit boat structure provided by this utility model includes:

[0066] The lifting drive device 1 is used to drive at least two translation transmission devices 2 to move up and down synchronously; the translation drive device 3 is used to drive the corresponding translation motion component 221 of each translation transmission device 2 to move back and forth synchronously; at least two boat moving components 7 are respectively installed on the corresponding translation motion component 221, and the corresponding support paddles 73 of the at least two boat moving components 7 are respectively used to move at least two carrier boats (not shown in the figure) into and out of at least two reaction chambers 81.

[0067] The boat entry / exit structure provided by this utility model can simultaneously move at least two carrier boats into and out of at least two reaction chambers 81 at one time. This allows the existing coating equipment with its lengthened and widened reaction chambers 81 adapted to accommodate the furnace tubes 8 carrying two boats to shorten and narrow the length of the reaction chambers 81 without reducing production capacity. Furthermore, it changes the configuration of a single furnace tube 8 (and its reaction chamber 81) per layer in the furnace height direction to at least two furnace tubes 8 (and their reaction chambers 81) arranged side-by-side per layer. Correspondingly, the boat entry / exit structure changes from simultaneously moving at least two extended / widened reaction chambers 81 into and out of at least two reaction chambers 81 at one time to accommodating the furnace tubes 8 loaded with two boats. The "one-to-one" entry and exit action of the carrier boat moving into and out of a single reaction chamber 81 is changed to a "one-to-two" entry and exit action of moving the shorter carrier boat of the matched shortened reaction chamber 81 into and out of two reaction chambers 81 at once. This shortens the cantilever length of the supporting paddle 73 of the entry and exit boat structure, thereby improving the structural rigidity of the cantilever, reducing the scraping of the carrier boat caused by cantilever deformation and vibration, and thus reducing the failure rate of the coating equipment, improving the working stability, coating quality, coating efficiency and production capacity of the coating equipment.

[0068] Meanwhile, shortening and narrowing the length of the reaction chamber 81 and arranging at least two furnace tubes 8 (and their reaction chambers 81) side by side in each layer along the height of the furnace body simplifies the internal structure of the chamber and reduces the requirements for the load-bearing capacity and positioning accuracy of the inlet and outlet boat mechanism. This further reduces the manufacturing and maintenance costs and failure rate of the coating equipment. At the same time, the space required for the reaction chamber 81 is also reduced, improving the compactness and space utilization of the coating equipment.

[0069] Furthermore, the boat entry / exit structure provided by this utility model is driven by a lifting drive device 1 and a translation drive device 3, which synchronously drive at least two translation transmission devices 2 to lift and translate. The two translation transmission devices 2 share the motion mechanism of the lifting drive device 1 and the translation drive device 3, thus achieving synchronous lifting and translation. Compared with the traditional boat entry / exit structure where a single translation transmission device 2 is driven by a single lifting drive device 1 and a single translation drive device 3, this structure can significantly improve the synchronization of boat entry / exit of multiple different reaction chambers 81. Under the premise of ensuring consistent process time, it can achieve large-scale production of the same or different processes on the same machine, thus ensuring the production capacity of the coating equipment.

[0070] Please refer to the following: Figure 1-3 In this embodiment, the lifting drive device 1 includes:

[0071] A lifting drive frame 11 extends vertically in the Z direction and is mounted on a fixed object to support the entire lifting drive device 1; a lifting screw mechanism 12 is mounted on the lifting drive frame 11; a lifting motion component 122 is mounted on the lifting screw 121 extending vertically in the Z direction of the lifting screw mechanism 12; and a lifting drive unit 123 is mounted on the lifting drive frame 11 to drive the lifting screw 121 to rotate, thereby causing the lifting motion component 122 to move vertically in the Z direction on the lifting screw 121.

[0072] The inlet / outlet structure includes two translational transmission devices 2, which are respectively installed on both sides of the lifting motion component 122, so that the two translational transmission devices 2 are synchronously driven to move up and down through a single lifting motion component 122 of the same lifting drive device 1.

[0073] Please see Figure 1 , 2 In a preferred embodiment of this invention, connecting flanges or connecting plates (not shown in the figure) are installed on both sides of the lifting motion component 122, and two translation transmission devices 2 are installed on the connecting components on both sides of the lifting motion component 122.

[0074] In other embodiments, the lifting drive device 1 may also use a linear drive mechanism such as a synchronous belt pulley mechanism 22, a cylinder telescopic rod mechanism, or a gear and rack mechanism to replace the lifting screw mechanism 12.

[0075] Please refer to the following: Figure 1-3 In this embodiment, the translation transmission device 2 includes:

[0076] A translational transmission frame 21 extends along a first horizontal direction X and is mounted on one side of the lifting motion member 122 in a second horizontal direction Y perpendicular to the first horizontal direction X. A synchronous pulley mechanism 22 is mounted on the translational transmission frame 21, and the translational motion member 221 is mounted on the synchronous belt (not shown in the figure) of the synchronous pulley mechanism 22. The synchronous pulley mechanism 22 is used to drive the translational motion member 221 to reciprocate along the first horizontal direction X.

[0077] Translation drive device 3 includes:

[0078] The translation drive unit 31 is installed on the translation transmission frame 21 at the position of the drive wheel (not shown in the figure) corresponding to the synchronous belt pulley mechanism 22; the first drive shaft 32 and the second drive shaft 33 are respectively located on both sides of the translation drive unit 31 in the second horizontal direction Y and both extend along the second horizontal direction Y, and are synchronously driven by the first output shaft 311 of the translation drive unit 31; the first drive wheel 321 and the second drive wheel 331 are respectively located on the first drive shaft 32 and the second drive shaft 33, and respectively mesh with the drive wheel of the corresponding translation transmission device 2, so as to realize the power transmission from the translation drive unit 31 to each synchronous belt pulley mechanism 22.

[0079] Please refer to the following: Figure 1-3 In a preferred embodiment, the translation drive unit 31 is a translation drive motor. The first output shaft 311 is located at the bottom of the translation drive motor in the vertical direction Z and extends along the vertical direction Z. The first drive shaft 32 and the second drive shaft 33 are coaxially arranged in the second horizontal direction Y. A motor reducer 34 connected to the first drive shaft 32 is provided at the bottom of the translation drive motor in the vertical direction Z. The motor reducer 34 is provided with a power output hole 341 at one end of the motor reducer 34 in the second horizontal direction Y corresponding to the first drive shaft 32. The motor reducer 34 is fastened to the first drive shaft 32 through the power output hole 341, so that the translation drive motor directly drives the first drive shaft 32 to rotate through the drive motor reducer 34.

[0080] The motor reducer 34 is provided with a shaft connector 35 at the opposite end of the second drive shaft 33 in the second horizontal direction Y. The end of the shaft connector 35 facing away from the motor reducer 34 in the second horizontal direction Y is fastened to the connection part 332 of one end of the second drive shaft 33 through a shaft connection flange 36 or a coupling, so that the translation drive motor (translation drive unit 31) drives the second drive shaft 33 and the first drive shaft 32 to rotate synchronously through the drive motor reducer 34. Under the premise that the synchronous belt pulley mechanisms 22 on both sides of the translation drive motor are of the same model and specification, the translation speed of the translation drive device 3 is kept synchronous.

[0081] Please see Figure 4As a preferred embodiment of this example, the boat entry and exit structure further includes a third translation transmission device 2. The translation transmission frame 21 of the third translation transmission device 2 is installed on the side of the translation transmission device 2 facing away from the lifting motion member 122 in the second horizontal direction Y. The three translation transmission devices 2 are connected by at least one transmission connector 4, so that the power of the lifting motion member 122 can be synchronously transmitted to the three translation transmission devices 2 through the transmission connector 4, thereby driving the three translation transmission devices 2 to move synchronously up and down in the vertical direction Z.

[0082] The translation drive device 3 further includes a third drive wheel (not shown in the figure), which is disposed on the second drive shaft 33 and located on the side of the second drive wheel 331 facing away from the first drive wheel 321 in the second horizontal direction Y, and meshes with the drive wheel of the third translation transmission device 2.

[0083] By adding a third translational transmission device 2, the number of carrier boats that the coating equipment can transport at one time can be increased by the inlet / outlet structure, thereby meeting the needs of higher production capacity of the coating equipment.

[0084] Please see Figure 4 In a preferred embodiment of this invention, the transmission connector 4 is a transmission rod. The corresponding translation transmission frames 21 of the three translation transmission devices 2 are connected by at least one transmission rod (transmission connector 4). For example, one transmission rod (transmission connector 4) can be used to connect the translation transmission frame 21 of the translation transmission device 2 on one side of the lifting drive device 1 to the translation transmission frame 21 of the third translation transmission device 2. Alternatively, two transmission rods (transmission connectors 4) can be used to connect the corresponding translation transmission frames 21 of the two translation transmission devices 2 on both sides of the lifting drive device 1, and the translation transmission frame 21 of the third translation transmission device 2 to the corresponding translation transmission frame 21 of the lifting drive device 1 on one side. Alternatively, one transmission rod (transmission connector 4) can be used to pass through the translation transmission frames 21 of the three lifting drive devices 1 simultaneously.

[0085] In other embodiments of this example (not shown in the figure), the transmission rod (transmission connector 4) can also be connected between the lifting motion component 122 and the translation transmission frame 21 of the third translation transmission device 2. In this case, the transmission rod needs to bypass the translation transmission frame 21 of the lifting drive device 1 on the side of the translation transmission frame 21 of the third translation transmission device 2.

[0086] As a preferred embodiment of this invention (not shown in the figure), the corresponding translation transmission frame 21 of the three translation transmission devices 2 are connected by at least two transmission connectors 4, and the two transmission connectors 4 are respectively connected to the two ends of the three translation transmission devices 2 in the first horizontal direction X, so as to balance the forces on the front and rear ends of the boat structure in the first horizontal direction X, and improve the stability of the boat structure when lifting, lowering and translating the vehicle boat.

[0087] In other embodiments of this example (not shown in the figures), the boat-entry / exit structure further includes four or more translational transmission devices 2. The corresponding translational transmission frames 21 of the four or more translational transmission devices 2 are connected by at least one transmission connector 4, so that the lifting motion component 122 can drive the four or more translational transmission devices 2 to move synchronously up and down in the vertical direction Z. Correspondingly, the translational drive device 3 also includes four or more drive wheels, which respectively mesh with the drive wheels of each translational transmission device 2. By adding more translational transmission devices 2, the production capacity of the coating equipment can be further improved.

[0088] Please see Figure 1 , 2 In a preferred embodiment of this invention, the lifting drive unit 123 is a lifting drive motor. The second output shaft 1231 of the lifting drive motor, which extends along the first horizontal direction X, is provided with a drive gear 1232. The lifting screw 121 is provided with a first driven gear 1211 that meshes with the drive gear 1232.

[0089] The second output shaft 1231 is used to drive the drive gear 1232 to rotate and drive the first driven gear 1211 and the lifting screw 121 to rotate, thereby driving the lifting motion component 122 to drive the two translation transmission devices 2 to move synchronously up and down in the vertical direction Z.

[0090] Please refer to the following: Figure 1 , 2 5. In this embodiment, the boat entry / exit structure further includes:

[0091] The lifting transmission device 5 includes: a lifting transmission frame 51, extending vertically in the Z direction and mounted on a fixed object, and spaced apart from the lifting drive frame 11 along the first horizontal direction X, for supporting the entire lifting transmission device 5; a driven screw mechanism 52, mounted on the lifting transmission frame 51; a lifting driven member 522, mounted on the transmission screw 521 extending vertically in the Z direction of the driven screw mechanism 52; corresponding translation transmission frames 21 of the two translation transmission devices 2 are respectively mounted on both sides of the lifting driven member 522 in the second horizontal direction Y; the transmission screw 521 is provided with a second driven gear 5211 that matches the position of the second output shaft 1231;

[0092] The drive shaft 53 extends along the first horizontal direction X between the second output shaft 1231 and the second driven gear 5211. One end of the drive shaft 53 in the first horizontal direction X is provided with a first drive gear 531 that meshes with the first driven gear 1211, and the other end of the drive shaft 53 in the first horizontal direction X is provided with a second drive gear 532 that meshes with the second driven gear 5211.

[0093] The second output shaft 1231 is used to drive the transmission shaft 53, the first transmission gear 531, the second transmission gear 532 and the drive gear 1232 to rotate synchronously and drive the first driven gear 1211, the lifting screw 121 and the second driven gear 5211 and the transmission screw 521 to rotate synchronously, thereby driving the lifting motion component 122 and the lifting driven component 522 to drive the two translation transmission devices 2 to move synchronously up and down in the vertical direction Z.

[0094] Please refer to the following: Figure 1 , 5 As a preferred embodiment of this invention, connecting flanges or connecting plates (not shown in the figure) are installed on both sides of the lifting driven member 522, and two translation transmission devices 2 are installed on the driven connecting members on both sides of the lifting driven member 522.

[0095] Please refer to the following: Figure 1 , 5 As a preferred embodiment of this invention, a lifting transmission device 5 is provided at intervals in the first horizontal direction X of the lifting drive device 1.

[0096] By adding lifting transmission devices 5 at intervals on the first horizontal direction X of the lifting drive device 1, the front and rear forces of each translation transmission device 2 in the length direction (first horizontal direction X) are distributed, thereby improving the stability of the lifting vehicle boat when entering and exiting the boat structure.

[0097] In other embodiments of this example (not shown in the figure), at least two lifting transmission devices 5 are provided at intervals at the same end or both ends on the first horizontal direction X of the lifting drive device 1. Correspondingly, the number of transmission shafts 53 and transmission gears increases with the number of lifting transmission devices 5 to further improve the stability of the lifting vehicle boat in and out of the boat structure.

[0098] Please refer to the following: Figure 1 , 5 6. As a preferred embodiment of this invention, the boat entry / exit structure further includes:

[0099] The lifting guide device 6 includes:

[0100] The lifting guide frame 61 extends vertically in the Z direction and is mounted on a fixed object, and is spaced apart from the lifting drive frame 11 in the first horizontal direction X; the linear bearing assembly 62 is mounted on the lifting guide frame 61; the lifting bearing 622 is mounted on the lifting guide rod 621 extending vertically in the Z direction of the linear bearing assembly 62; and the corresponding translation transmission frames 21 of the two translation transmission devices 2 are respectively mounted on both sides of the lifting bearing 622 in the second horizontal direction Y.

[0101] The lifting bearing 622 is used to support and guide the two translation transmission devices 2 to move synchronously up and down in the vertical direction Z. This allows the lifting bearing 622 to connect the two translation transmission devices 2 to the same lifting guide rod 621, achieving a hard connection between the two translation transmission devices 2 and guiding the two translation transmission devices 2 to move synchronously and more stably up and down in the vertical direction Z.

[0102] Meanwhile, the linear bearing assembly 62 enables the boat-moving assembly 7, which is connected to multiple translation transmission devices 2, to more accurately align each carrier boat with the reaction chamber 81 of the corresponding furnace tube 8 during the process of moving (sending) or leaving the boat, thereby improving the accuracy of the boat-moving structure in performing the boat-moving actions.

[0103] Please refer to the following: Figure 1 , 5 6. As a preferred embodiment of this embodiment, guide connecting parts 623 such as connecting flanges or connecting plates are respectively installed on both sides of the lifting bearing 622, and two translation transmission devices 2 are respectively installed on the guide connecting parts 623 on both sides of the lifting bearing 622.

[0104] Please see Figure 1 , 5 As a preferred embodiment, at least two lifting guide devices 6 are provided at intervals at the same end or both ends of the lifting drive device 1 in the first horizontal direction X, and the lifting guide devices 6 are provided at intervals with the lifting transmission device 5, so as to further disperse the front and rear forces of each translation transmission device 2 in the length direction (first horizontal direction X), thereby further improving the stability when entering and exiting the lifting vehicle boat of the boat structure.

[0105] Please see Figure 1 In this embodiment, the boat-transfer assembly 7 includes:

[0106] A support frame 71 is mounted on the translational motion component 221 to support the entire boat-moving assembly 7; a support tube 72 extends horizontally and is mounted on the support frame 71; and a plurality of support paddles 73 extend horizontally and are mounted on the support tube 72 to fix and support the aforementioned vehicle boat.

[0107] Please see Figure 1In a preferred embodiment of this invention, the support frame 71, the support tube 72, and the support paddle 73 all extend along the first horizontal direction X, and the support tube 72 and the support paddle 73 are connected vertically in the vertical direction Z.

[0108] Please see Figure 1 As a preferred embodiment, the support frame 72 can move horizontally along the first horizontal direction X relative to the support frame 71, so that the support paddle 73 connected to the support frame 72 can adjust its position relative to the boat moving assembly 7 in the first horizontal direction X.

[0109] Please see Figure 1 In a preferred embodiment of this invention, the length of the boat-moving assembly 7 is matched with the length of the translation transmission device 2. Specifically, the length of the boat-moving assembly 7 can be slightly longer than, equal to, or slightly shorter than the length of the translation transmission device 2, so that the length of the supporting paddle 73 of the boat-moving assembly 7 is limited to a certain range, thereby improving the overall rigidity and stability of the boat-entry and boat-exit structure and preventing the boat-entry and boat-exit structure from being damaged during the boat-entry and boat-exit process due to the excessive length of the supporting paddle 73 of the boat-moving assembly 7.

[0110] Please see Figure 1 In a preferred embodiment of this invention, the carrier boat is a graphite boat, and the boat-moving assembly 7 further includes at least two paddle clamps 731, which are spaced apart on the supporting paddle 73 along the first horizontal direction X, and are used to abut and restrict the two ends of the graphite boat in the first direction (front and rear) to prevent the graphite boat from moving back and forth and causing a collision when it is carried on the supporting paddle 73.

[0111] As a preferred embodiment of this invention, the graphite boat (carrier boat) includes at least two limiting blocks, which are spaced apart at the foot (bottom) of the boat along the second horizontal direction Y. These blocks are used to abut against the left and right sides of the support paddle 73 in the first direction when the graphite boat is placed on the support paddle 73, so as to avoid the graphite boat from moving left and right and causing collision when it is supported by the support paddle 73.

[0112] Please see Figure 7 The present invention also provides a coating equipment, including at least two layers of furnace tube groups arranged in a vertical direction Z, each layer of furnace tube group including at least two horizontal furnace tubes 8 extending in a horizontal direction, each horizontal furnace tube 8 having a horizontal reaction chamber 81 inside, and also including the above-mentioned inlet and outlet boat structure, with at least two boat moving components 7 respectively used to move the corresponding carrier boat into and out of the corresponding horizontal reaction chamber 81 of the same layer of furnace tube group.

[0113] The inlet / outlet boat structure provided by this utility model is applicable to various coating equipment in the photovoltaic cell industry (such as PECVD equipment), as well as carrier boats (such as graphite boats) adapted to various photovoltaic cell coating processes.

[0114] Please see Figure 7As one embodiment of this invention, the coating equipment includes at least three layers of furnace tubes arranged in the vertical direction Z. Correspondingly, the lifting screw 121 of the lifting drive device 1, the transmission screw 521 of the lifting transmission device 5, and the lifting guide rod 621 of the lifting guide device 6 are extended in the vertical direction Z to adapt to the height of each layer of furnace tubes. This allows the boat-entry structure to be directly driven by the lifting drive device 1 to move each translation transmission device 2 up and down. After each translation transmission device 2 is precisely aligned with each reaction chamber 81 of the corresponding layer of furnace tubes in the vertical direction Z, the corresponding boat-moving component 7 of each translation transmission device 2 is driven by the translation drive device 3 to align with the reaction chamber 81 of each furnace tube 8, and the boat-entry and boat-exit actions are performed layer by layer. This improves the convenience and accuracy of the boat-entry and boat-exit structure and reduces the movement time of the boat-entry and boat-exit.

[0115] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A boat entry / exit structure, characterized in that, include: A lifting drive device (1) is used to drive at least two translational transmission devices (2) to move synchronously up and down; Translation drive device (3) is used to drive the corresponding translation motion component (221) of each of the translation transmission devices (2) to perform synchronous reciprocating translation motion; At least two boat-moving assemblies (7) are respectively installed on the corresponding translational motion member (221), and the corresponding support paddles (73) of the at least two boat-moving assemblies (7) are respectively used to move at least two vehicle boats into and out of at least two reaction chambers (81).

2. The boat entry / exit structure as described in claim 1, characterized in that, The lifting drive device (1) includes: The lifting drive frame (11) extends in the vertical direction (Z); The lifting screw mechanism (12) is mounted on the lifting drive frame (11); The lifting motion component (122) is installed on the lifting screw (121) of the lifting screw mechanism (12) extending in the vertical direction (Z); The lifting drive unit (123) is mounted on the lifting drive frame (11) and is used to drive the lifting screw (121) to rotate, thereby driving the lifting motion component (122) to move up and down along the vertical direction (Z) on the lifting screw (121); The in-and-out boat structure includes two translational transmission devices (2), which are respectively installed on both sides of the lifting motion component (122).

3. The boat entry / exit structure as described in claim 2, characterized in that, The translation transmission device (2) includes: The translational transmission frame (21) extends along the first horizontal direction (X) and is mounted on one side of the lifting motion component (122) in the second horizontal direction (Y) perpendicular to the first horizontal direction (X); Synchronous belt pulley mechanism (22) is mounted on the translation transmission frame (21) and is used to drive the translation motion component (221) to reciprocate in the first horizontal direction (X); The translation drive device (3) includes: The translation drive unit (31) is installed on the translation transmission frame (21) at the position corresponding to the drive wheel of the synchronous belt pulley mechanism (22); The first drive shaft (32) and the second drive shaft (33) are respectively located on both sides of the translation drive unit (31) in the second horizontal direction (Y) and both extend along the second horizontal direction (Y), and are synchronously driven by the first output shaft (311) of the translation drive unit (31); The first drive wheel (321) and the second drive wheel (331) are respectively disposed on the first drive shaft (32) and the second drive shaft (33), and respectively mesh with the drive wheel of the corresponding translation transmission device (2).

4. The boat entry / exit structure as described in claim 3, characterized in that, The inlet and outlet structure also includes a third translation transmission device (2). The translation transmission frame (21) of the third translation transmission device (2) is installed on the side of the lifting motion member (122) on any side of the translation transmission device (2) facing away from the lifting motion member (122) in the second horizontal direction (Y). The three translation transmission devices (2) are connected by at least one transmission connector (4), so that the lifting motion member (122) can drive the three translation transmission devices (2) to move up and down synchronously in the vertical direction (Z). The translation drive device (3) further includes: The third drive wheel is located on the second drive shaft (33) and on the side of the second drive wheel (331) facing away from the first drive wheel (321) in the second horizontal direction (Y), and meshes with the drive wheel of the third translational transmission device (2).

5. The boat entry / exit structure as described in claim 3, characterized in that, The lifting drive unit (123) is a lifting drive motor. The second output shaft (1231) of the lifting drive motor, which extends along the first horizontal direction (X), is provided with a drive gear (1232). The lifting screw (121) is provided with a first driven gear (1211) that meshes with the drive gear (1232). The second output shaft (1231) is used to drive the drive gear (1232) to rotate and drive the first driven gear (1211) and the lifting screw (121) to rotate, thereby driving the lifting motion component (122) to drive the two translation transmission devices (2) to move synchronously up and down in the vertical direction (Z).

6. The boat entry / exit structure as described in claim 5, characterized in that, The boat entry / exit structure also includes: The lifting transmission device (5) includes: The lifting transmission frame (51) extends in the vertical direction (Z) and is spaced apart from the lifting drive frame (11) in the first horizontal direction (X); The driven lead screw mechanism (52) is mounted on the lifting transmission frame (51); The lifting follower (522) is installed on the transmission screw (521) of the driven screw mechanism (52) extending in the vertical direction (Z), and the corresponding translation transmission frames (21) of the two translation transmission devices (2) are respectively installed on both sides of the lifting follower (522) in the second horizontal direction (Y); The transmission screw (521) is provided with a second driven gear (5211) that matches the position of the second output shaft (1231); A drive shaft (53) extends along a first horizontal direction (X) between a second output shaft (1231) and a second driven gear (5211). One end of the drive shaft (53) in the first horizontal direction (X) is provided with a first drive gear (531) that meshes with the first driven gear (1211), and the other end of the drive shaft (53) in the first horizontal direction (X) is provided with a second drive gear (532) that meshes with the second driven gear (5211). The second output shaft (1231) is used to drive the transmission gear and drive gear (1232) to rotate synchronously and drive the first driven gear (1211), lifting screw (121), and second driven gear (5211) and transmission screw (521) to rotate synchronously, thereby driving the lifting motion component (122) and the lifting driven component (522) to drive the two translation transmission devices (2) to move synchronously up and down in the vertical direction (Z).

7. The boat entry / exit structure as described in claim 5, characterized in that, Also includes: The lifting guide device (6) includes: The lifting guide frame (61) extends in the vertical direction (Z) and is spaced apart from the lifting drive frame (11) in the first horizontal direction (X); A linear bearing assembly (62) is mounted on the lifting guide frame (61); The lifting bearing (622) is installed on the lifting guide rod (621) extending in the vertical direction (Z) of the linear bearing assembly (62), and the corresponding translation transmission frames (21) of the two translation transmission devices (2) are respectively installed on both sides of the lifting bearing (622) in the second horizontal direction (Y); The lifting bearing (622) is used to support and guide the two translation transmission devices (2) to move synchronously up and down in the vertical direction (Z).

8. The boat entry / exit structure as described in any one of claims 1-7, characterized in that, The boat transfer assembly (7) includes: The supporting frame (71) is mounted on the translational motion component (221); The support frame (72) extends horizontally and is mounted on the support frame (71); Several of the aforementioned support paddles (73) extend horizontally and are mounted on the support support tube (72) for securing and supporting the vehicle boat.

9. The boat entry / exit structure as described in any one of claims 1-7, characterized in that, The length of the boat-moving assembly (7) is matched with the length of the translation transmission device (2).

10. A coating apparatus comprising at least two layers of furnace tube assemblies arranged in a vertical (Z) direction, each layer of said furnace tube assembly comprising at least two horizontal furnace tubes (8) extending in a horizontal direction, wherein said horizontal furnace tubes (8) are provided with a horizontal reaction chamber (81), characterized in that, It also includes the boat entry and exit structure as described in any one of claims 1-9, wherein at least two of the boat transfer components (7) are used to translate the corresponding carrier boat into and out of the corresponding horizontal reaction chamber (81) of the same layer of furnace tube group.

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