A nanoimprint assembly device

Abstract

The utility model discloses a kind of nano-imprinting plate-making equipment, comprising: platform component, is provided with the supporting platform for placing wafer to be processed;Impression component, for transferring the pattern on soft film to wafer;Membrane frame component, be arranged between the platform component and the impression component, for fixing soft film;Lifting frame component, for fixing camera alignment component and UV light source component;Dispensing component, for dispensing.The utility model has beneficial effects, realize nano-imprinting plate-making, improve production efficiency, impression quality is good, spliced pattern is complete, precision is high.

Description

Technical Field

[0001] This utility model relates to the field of nanoimprint technology, specifically to a nanoimprint imprinting device. Background Technology

[0002] With the continuous development and advancement of micro-nano fabrication technology, nanoimprint lithography has overcome the challenges of traditional photolithography in reducing feature size, offering advantages such as high resolution, low cost, and high yield. It is widely used in various fields involving micro-nano fabrication, including semiconductor manufacturing, MEMS, and biochips.

[0003] Nanoimprint lithography is an advanced nanofabrication method primarily used to create high-precision, high-resolution nanoscale patterns. Micro / nanoimprint lithography commonly uses soft templates to imprint lithography adhesive onto wafers. Typically, each wafer imprints one pattern. To improve processing efficiency, a panelization method is generally used to transfer multiple patterns. For example, Chinese utility model patent application CN 103226288 A discloses a UV-curable micro / nano structure panelization device and process. While panelization lithography is achieved, the positioning holes used to locate the soft film during the lithography process can easily lead to overlapping patterns, resulting in incomplete designs. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a nanoimprinting and imprinting equipment that imprints multiple patterns on a single wafer, thereby improving production efficiency, providing high imprinting quality, complete and precise stitched patterns.

[0005] Specifically, this utility model discloses a nanoimprint imprinting device, comprising:

[0006] The platform component includes a receiving platform for placing the wafers to be processed.

[0007] Imprinting assembly, used to transfer patterns from a flexible film onto a wafer;

[0008] A film frame assembly is disposed between the platform assembly and the imprinting assembly for fixing the flexible film;

[0009] The lifting frame assembly is used to fix the camera alignment assembly and the UV light source assembly;

[0010] Dispensing assembly, used for dispensing adhesive.

[0011] The advantages of adopting the above technical solution are that it enables nano-imprinting and plate making, improves production efficiency, provides good imprinting quality, complete and accurate spliced ​​graphics, and occupies little space.

[0012] Furthermore, the membrane frame assembly includes a membrane frame plate, and lifting devices are provided on both sides of the membrane frame plate, including frame plate lifting drive components installed on both sides of the membrane frame plate. The frame plate lifting drive components control the lifting of one end of the membrane frame plate or the lifting of both ends together.

[0013] The advantages of adopting the above technical solution are that the film frame plate is used to fix the soft film frame, the frame plate lifting drive component controls the height and angle of the soft film, and the soft film is tilted during the imprinting process, which effectively reduces air bubbles between the soft film and the wafer, while also ensuring the integrity of the pattern.

[0014] Furthermore, the imprinting assembly includes: a support frame, a moving module, and a roller pressing module. The moving module is disposed on the support frame, and the roller pressing module includes an imprinting roller that can be rolled. The imprinting roller is connected to an imprinting cylinder, which drives the imprinting roller to rise and fall. The roller pressing module moves along the moving module.

[0015] The advantage of adopting the above technical solution is that the impression roller moves horizontally under the drive of the moving module to achieve impression, while the impression cylinder controls the position of the impression roller to achieve the lifting and lowering of the impression roller.

[0016] Furthermore, the moving module includes a symmetrically arranged linear motor, a moving plate, and a cam bearing follower. The cam bearing follower is mounted on the moving plate, and the moving plate is driven by the linear motor. The rolling module is mounted on a mounting frame, and baffles are symmetrically mounted on the lower side of the mounting frame. The baffles have through grooves, and the cam bearing follower is located in the through grooves and drives the baffles to move by contacting both sides of the through grooves.

[0017] The advantage of adopting the above technical solution is that by using a cam bearing follower to drive the moving plate to move, and further drive the mounting bracket to move, the situation of the mounting bracket tilting and jamming due to the asynchronous operation of the linear motors on both sides is effectively avoided. This allows for minor errors in the mounting bracket and extends its service life.

[0018] Furthermore, the platform component includes an air flotation platform, the air flotation platform is equipped with an XYU platform component, and the receiving platform is disposed on the XYU platform component, and translates and rotates under the drive of the XYU platform component.

[0019] The advantage of adopting the above technical solution is that the XYU platform component drives the receiving platform to move, so that the wafer placed on the receiving platform can move and rotate horizontally. During the panelization process, the wafer movement and rotation realize the position change, ensuring the integrity of the panelization pattern.

[0020] Furthermore, the dispensing assembly includes: a mounting plate, a dispensing head, a vertical dispensing movement module, a receiving box, and a receiving box driver. The vertical dispensing movement module is fixed on the mounting plate, and the vertical dispensing movement module drives the dispensing head to move vertically. The receiving box driver is connected to the receiving box. After dispensing is completed, the receiving box moves to the underside of the dispensing head.

[0021] The advantages of the above technical solution are that the dispensing head is used to dispense glue at a set position, and after dispensing, it is pressed and cured to form a pattern on the wafer. The receiving box is used to receive the glue flowing out of the dispensing head after dispensing, effectively preventing excess glue from dripping onto the flexible film or wafer.

[0022] Furthermore, the lifting frame assembly includes: a support rod, a frame body, and a lifting drive component. The frame body moves up and down along the support rod, and the lifting drive component drives the frame body to move. A horizontal movement module is provided on the frame body to drive the camera alignment component and the UV light source component to move horizontally.

[0023] The advantage of adopting the above technical solution is that by setting up a lifting drive component to drive the frame to rise and fall, the camera alignment component and the UV light source component can move up and down. At the same time, a horizontal movement module is set up to give the camera alignment component and the UV light source component horizontal freedom, ensuring the needs of use.

[0024] Furthermore, the camera alignment component includes a camera, a camera moving module, a camera lifting plate, and a camera lifting drive component. The camera moving module drives the camera to move horizontally, the camera lifting plate is connected to the camera moving module, and the camera lifting drive component drives the camera lifting plate to move.

[0025] The advantage of adopting the above technical solution is that it enables the horizontal movement and vertical rotation of the camera alignment component, achieving precise alignment of the wafer and the flexible film, and ensuring the integrity of the panel pattern. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0027] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0028] Figure 2 This is a structural diagram of the membrane frame assembly of this utility model.

[0029] Figure 3 This is a structural diagram of the embossing component of this utility model.

[0030] Figure 4 This is an enlarged view of section A of this utility model.

[0031] Figure 5 This is a schematic diagram of the positional structure of the baffle and cam bearing follower of this utility model.

[0032] Figure 6 This is a schematic diagram of the mounting structure of the cam follower of this utility model.

[0033] Figure 7 This is a schematic diagram of the platform component structure of this utility model.

[0034] Figure 8 This is a schematic diagram of the lifting device structure of this utility model.

[0035] Figure 9 This is a schematic diagram of the camera alignment component structure of this utility model.

[0036] The reference numerals used in the attached figures are as follows:

[0037] Platform component 1; receiving platform 11; air flotation platform 12; XYU platform component 13; rotating platform 14; imprinting component 2; support frame 21; moving module 22; linear motor 221; moving plate 222; cam bearing follower 223; roller pressing module 23; imprinting roller 24; imprinting cylinder 25; baffle 26; membrane frame component 3; membrane frame plate 31; first frame plate 311; second frame plate 312; lifting device 32; frame plate lifting drive component 33 Support base plate 34; Lifting plate 35; Bearing 36; Guide block 37; Lifting frame assembly 4; Support rod 41; Frame 42; Lifting drive component 43; Dispensing assembly 5; Mounting plate 51; Dispensing head 52; Dispensing vertical moving module 53; Receiver box 54; Receiver box drive component 55; Camera alignment assembly 6; Camera 61; Camera moving module 62; Camera lifting plate 63; Camera lifting drive component 64; UV light source assembly 7; XXY alignment platform 8. Detailed Implementation

[0038] The present invention will now be described in further detail with reference to the accompanying drawings.

[0039] As shown in the figure, this utility model discloses a nanoimprint imprinting device, comprising:

[0040] Platform component 1 is provided with a receiving platform 11 for placing the wafers to be processed;

[0041] Imprinting assembly 2, located on the upper side of receiving platform 11, is used to transfer the pattern on the flexible film onto the wafer;

[0042] The film frame assembly 3 is disposed between the platform assembly 1 and the imprinting assembly 2 for fixing the soft film;

[0043] The lifting frame assembly 4 is located on the upper side of the imprinting assembly 2 and is used to fix the camera alignment assembly 6 and the UV light source assembly 7.

[0044] The dispensing assembly 5 is connected to the imprinting assembly 2 and is used for dispensing adhesive.

[0045] The advantages of adopting the above technical solution are that it enables nano-imprinting and plate making, improves production efficiency, provides good imprinting quality, complete and high-precision spliced ​​graphics, and the equipment occupies little space.

[0046] The membrane frame assembly 3 includes a membrane frame plate 31, with lifting devices 32 on both sides of the membrane frame plate 31. These devices include frame plate lifting drive components 33 mounted on both sides of the membrane frame plate 31. The frame plate lifting drive components 33 control the lifting of one end of the membrane frame plate 31 or both ends simultaneously. The lifting device 32 includes supporting base plates 34 on both sides, which are fixed to the platform assembly 1 at the bottom. The frame plate lifting drive component 33 is a cylinder, vertically installed, with lifting plates 35 on both sides of the cylinder. The lifting plates 35 rise and fall along guide rails mounted on both sides of the supporting base plates 34, and are controlled by the cylinders. On the side closer to the imprinting assembly 2, the top of the lifting plate 35 is fixedly installed to the membrane frame plate 31; on the side farther from the imprinting assembly 2... A rotatable bearing 36 is installed on the top of the lifting plate 35, and a guide block 37 with a guide groove is installed on the bottom of the film frame plate 31. The bearing 36 moves within the guide groove but will not come out of the guide groove. At the same time, the film frame plate 31 has a limiting block for fixing the soft film frame. The soft film is fixed by the soft film frame, and the soft film frame can be limited by the limiting block and fixed by screws. The film frame plate 31 is divided into a first frame plate 311 and a second frame plate 312. The first frame plate 311 and the second frame plate 312 are connected by a rotating shaft, so that the first frame plate 311 can rotate to form a certain angle with the second frame plate 312. Before imprinting, the cylinder on the side away from the imprinting component 2 extends, so that the soft film is in an inclined state, reducing the generation of air bubbles and ensuring the integrity of the imprinted pattern.

[0047] Furthermore, the imprinting assembly 2 includes: a support frame 21, a moving module 22, and a roller pressing module 23. The moving module 22 is mounted on the support frame 21. The roller pressing module 23 includes an imprinting roller 24 that can be rolled. The imprinting roller 24 is connected to an imprinting cylinder 25. The imprinting cylinder 25 drives the imprinting roller 24 to rise and fall. The roller pressing module 23 moves along the moving module 22 to complete the imprinting process. The moving module 22 includes a symmetrically arranged linear motor 221, a moving plate 222, and a cam bearing follower 223. The cam bearing follower 223 is mounted on the moving plate 222, which is driven by the linear motor 221. The roller pressing module 23 is mounted on a mounting frame, and a baffle 26 with a through groove is installed on the lower side of the mounting frame. The cam bearing follower 223 is located in the through groove and contacts both sides of the through groove. The cam bearing follower 223 drives the baffle 26 to move, which in turn drives the roller pressing module 23 to move, making the roller pressing process smooth, ensuring the synchronicity of the movement on both sides, improving service life, and ensuring printing accuracy. At the same time, the roller pressing module 23 also has a vertical moving module, which can be a lead screw motor linear module. The printing cylinder 25 moves vertically through this vertical moving module to realize the vertical movement of the printing roller 24. The mounting frame is also equipped with an electrostatic eliminator to eliminate static electricity.

[0048] In some implementation schemes, platform component 1 includes an air-floating platform 12, on which an XYU platform component 13 is mounted. The receiving platform 11 is mounted on the XYU platform component 13 and moves under the drive of the XYU platform component 13. The air-floating platform 12 forms the base of the entire equipment, and the bottom has an air-floating shock absorber to ensure that the air-floating platform 12 is level and also to reduce vibration. The XYU platform component 13 includes a linear motion module in the X direction, a linear motion module in the Y direction, and a rotating platform 14 in the U direction. The U direction is the rotation direction, which is the forward and reverse rotation of the receiving platform around its center point. The two linear motion modules can be lead screw motor modules or synchronous belt driven linear modules, etc. The rotating platform 14 can be controlled by a motor to rotate the platform. Its structure and working principle are existing technologies and will not be described here. The receiving platform 11 is mounted on the rotating platform 14. Its surface is provided with multiple air holes, which are connected to a vacuum generator to adsorb and fix the wafer, ensuring that the wafer does not move during the imprinting process. The receiving platform 11 has linear and rotational degrees of freedom under the drive of the two linear modules and the rotating platform 14. At the same time, it moves precisely under the control of the equipment control system to ensure accurate panelization and improve processing efficiency.

[0049] In some implementations, the dispensing assembly 5 includes: a mounting plate 51, a dispensing head 52, a dispensing vertical movement module 53, a receiving box 54, and a receiving box drive 55. The dispensing vertical movement module 53 is fixed on the mounting plate 51, which is mounted on a support frame 21. The support frame 21 is provided with a through hole for the dispensing head 52 to pass through. The dispensing vertical movement module 53 drives the dispensing head 52 to move vertically. The dispensing vertical movement module 53 can be a linear motor module, a lead screw motor module, a synchronous belt module, etc. The receiving box drive 55 is connected to the receiving box 54. The receiving box drive 55 is a slide cylinder. After dispensing is completed, the cylinder extends out of the receiving box 54 and moves to the underside of the dispensing head 52 to receive the glue flowing out of the dispensing head 52, effectively preventing excess glue from dripping onto the flexible film or wafer.

[0050] In some implementations, the lifting frame assembly 4 includes: support rods 41, frame 42, and lifting drive components 43. There are four support rods 41, which are fixedly installed at the bottom on the air-floating platform 12 and are equipped with guide sleeves. The frame 42 moves up and down along the guide sleeves. The lifting drive components 43 drive the frame 42 to move. There are four lifting drive components 43, which are vertically arranged and whose output ends are connected to the frame 42. They can be electric cylinders, hydraulic cylinders, etc. A horizontal movement module is fixedly installed on the frame 42. The horizontal movement module can be a linear motor module, which drives the camera alignment component 6 and the UV light source component 7 to move horizontally, so that the camera alignment component 6 and the UV light source component 7 have horizontal degrees of freedom to ensure the use requirements.

[0051] Furthermore, the camera alignment component 6 includes a camera 61, a camera moving module 62, a camera lifting plate 63, and a camera lifting drive 64. The camera moving module 62 drives the camera 61 to move, the camera lifting plate 63 is connected to the camera moving module 62, and the camera lifting drive 64 drives the camera lifting plate 63 to move. There are two cameras 61, each connected to the camera moving module 62, and each camera 61 has degrees of freedom in the x, y, and z directions. The camera moving module 62 can use three linear motor modules to achieve precise control of the position of the camera 61, while simultaneously controlling the camera lifting... The drive unit 64 can be a servo electric cylinder, vertically mounted on a mounting bracket. Its output is connected to the camera lifting plate 63, controlling the lifting of the camera. The mounting bracket moves with the horizontal moving module on the frame 42, thus changing the position of the camera 61. At the bottom of the frame 42, an XXY alignment platform 8 is also installed, which works with the camera 61 to achieve precise alignment. This alignment platform is equipped with a film glass for shielding the UV light source and exposing the area to be cured. The structure and working principle of the XXY alignment platform 8 are existing technologies and will not be repeated here. This achieves precise alignment of the wafer and the flexible film, ensuring the integrity of the panel layout.

[0052] Furthermore, the UV light source assembly 7 includes a UV lamp, has the same mounting bracket as the camera alignment assembly 6, moves with the horizontal moving module on the frame 42 via the mounting bracket, and also has the same lifting drive as the camera alignment assembly 6, which lowers and opens when curing is required.

[0053] This application also discloses a nanoimprint imprinting method, which uses the nanoimprint imprinting equipment described above and includes the following steps:

[0054] S1, Preparation of a soft membrane;

[0055] S2, loading wafer;

[0056] S3, the camera alignment component 6 is aligned, and the dispensing component 5 descends to the wafer set position to dispense adhesive;

[0057] S4, Imprint assembly 2 descends for imprinting;

[0058] S5, UV light source component 7 is turned on and moves to cure the imprinted area;

[0059] S6, demolding;

[0060] S7, repeat S3-S6 until the layout is complete.

[0061] Furthermore, in step S4, before the imprinting assembly 2 descends, the film frame assembly 3 moves to tilt the soft film.

[0062] Furthermore, in step S1, the preparation of the soft film specifically includes the following steps:

[0063] Load blank flexible film;

[0064] Place the master template onto the receiving platform 11;

[0065] Imprint assembly 2 descends to imprint the soft film;

[0066] UV light source component 7 is cured;

[0067] Demolding.

[0068] The specific process is as follows:

[0069] The first step is to manually install the blank flexible film onto the flexible film frame and place the master template on the receiving platform 11;

[0070] The second step involves the impression roller 24 descending to imprint, followed by the UV light source module descending for curing.

[0071] Third, the film frame assembly 3 rises to complete demolding. At this time, the master plate is removed, and the pattern on the master plate is transferred to the soft film, which has the pattern to be imprinted.

[0072] The next step is the assembly process:

[0073] The first step is to manually place the 8-inch wafer onto the receiving platform 11;

[0074] The second step involves the XYU platform component 13 moving the wafer to the dispensing position, and the vertical dispensing module 53 driving the dispensing head 52 to dispense the adhesive. After dispensing is completed, the receiving box 54 moves to the underside of the dispensing head 52 to prevent adhesive leakage.

[0075] The third step is to lower the lifting frame assembly 4, which will move the camera alignment assembly 6 and the UV light source assembly 7 to the working position. The camera 61 will find the mark point and take pictures. During this process, the XYU platform assembly 13 moves the wafer to achieve alignment, and at the same time, the XXY alignment platform 8 moves to achieve alignment between the film glass and the soft film. In some processing situations where the film glass does not need to block light, the XXY alignment platform 8 does not need to move.

[0076] Fourth step, the lifting device 32 on one side rises, the soft film is tilted, the imprint roller 24 descends, the static eliminator is opened, and the imprint roller 24 descends until the imprinting is completed. During the movement of the imprint roller 24, the lifting device 32 slowly descends until the graphic imprinting is completed.

[0077] Step 5: Turn on the UV lamp for curing;

[0078] Step 6: The membrane frame assembly 3 rises, completing demolding;

[0079] Step 7: Repeat steps 2 through 6 until the puzzle is complete.

[0080] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A nanoimprinting imposition device, characterized in that, include: Platform component (1) is provided with a receiving platform (11) for placing the wafer to be processed. Imprinting assembly (2) is used to transfer patterns on a flexible film onto a wafer; A film frame assembly (3) is disposed between the platform assembly (1) and the imprinting assembly (2) for fixing the soft film; The lifting frame assembly (4) is used to fix the camera alignment assembly (6) and the UV light source assembly (7). Dispensing assembly (5), used for dispensing adhesive.

2. The nanoimprinting imposition equipment according to claim 1, characterized in that, The membrane frame assembly (3) includes a membrane frame plate (31), and lifting devices (32) are provided on both sides of the membrane frame plate (31), including a frame plate lifting drive (33) installed on both sides of the membrane frame plate (31). The frame plate lifting drive (33) controls one end of the membrane frame plate (31) to lift or both ends to lift.

3. The nanoimprinting imposition equipment according to claim 1, characterized in that, The embossing assembly (2) includes a support frame (21), a moving module (22), and a roller pressing module (23). The moving module (22) is mounted on the support frame (21). The roller pressing module (23) includes an embossing roller (24) that can be rolled. The embossing roller (24) is connected to an embossing cylinder (25). The embossing cylinder (25) drives the embossing roller (24) to move up and down. The roller pressing module (23) moves along the moving module (22).

4. The nanoimprinting imposition equipment according to claim 3, characterized in that, The moving module (22) includes a symmetrically arranged linear motor (221), a moving plate (222), and a cam bearing follower (223). The cam bearing follower (223) is mounted on the moving plate (222). The moving plate (222) is driven by the linear motor (221). The rolling module (23) is mounted on a mounting frame. A baffle (26) is symmetrically mounted on the lower side of the mounting frame. The baffle (26) has a through groove. The cam bearing follower (223) is located in the through groove and drives the baffle (26) to move by contacting both sides of the through groove.

5. The nanoimprinting imposition equipment according to claim 1, characterized in that, The platform component (1) includes an air flotation platform (12), the air flotation platform (12) is provided with an XYU platform component (13), and the receiving platform (11) is disposed on the XYU platform component (13) and moves and rotates under the drive of the XYU platform component (13).

6. The nanoimprinting imposition equipment according to claim 1, characterized in that, The dispensing assembly (5) includes: a mounting plate (51), a dispensing head (52), a dispensing vertical moving module (53), a receiving box (54), and a receiving box driving component (55). The dispensing vertical moving module (53) is fixed on the mounting plate (51). The dispensing vertical moving module (53) drives the dispensing head (52) to move vertically. The receiving box driving component (55) is connected to the receiving box (54). After dispensing is completed, the receiving box (54) moves to the underside of the dispensing head (52).

7. The nanoimprinting imposition equipment according to claim 1, characterized in that, The lifting frame assembly (4) includes: a support rod (41), a frame (42), and a lifting drive component (43). The frame (42) moves up and down along the support rod (41), and the lifting drive component (43) drives the frame (42) to move. A horizontal moving module is provided on the frame (42) to drive the camera alignment assembly (6) and the UV light source assembly (7) to move horizontally.

8. The nanoimprinting imposition equipment according to claim 1, characterized in that, The camera alignment component (6) includes a camera (61), a camera moving module (62), a camera lifting plate (63), and a camera lifting drive (64). The camera moving module (62) drives the camera (61) to move horizontally. The camera lifting plate (63) is connected to the camera moving module (62). The camera lifting drive (64) drives the camera lifting plate (63) to move.

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