Mobile power supply system for electron beam scanning electron microscope ion pump

Abstract

The utility model provides a kind of mobile power supply system for electron beam scanning electron microscope ion pump.The mobile power supply system includes box, the power supply core being set in the box, charging interface and at least one discharge interface.Charging interface is used to connect external power supply and power supply system, to charge power supply system;Each discharge interface is used to connect power supply core and an ion pump, to discharge ion pump.The mobile power supply system of the utility model integrates multiple functions, is easy to operate, and has complete safety measures, which can ensure that the internal vacuum degree of the electron gun deteriorates during transportation, and maintain the high vacuum state of the electron gun by supplying power to the ion pump to vacuumize the electron gun.The mobile power supply system is installed in the electron gun transport cabinet in the form of a module, which is small in size and easy to install.When the entire module fails, efficient maintenance can be achieved by replacing the module, reducing maintenance time and cost.

Description

Technical Field

[0001] This utility model relates to the field of electronic optical instrument technology, and in particular to a mobile power supply system for an ion pump of an electron beam scanning electron microscope. Background Technology

[0002] With the development of artificial intelligence, chips are widely used and popularized in various industries. In the semiconductor chip industry, electron beam scanning electron microscopy (SEM) equipment is a key link in ensuring product yield. As semiconductor technology continues to advance, the complexity and precision of SEM equipment are also constantly improving. The internal environment of an SEM is high voltage and high vacuum, achieving nanometer-level imaging precision. However, various unforeseen circumstances may occur during the transportation of an SEM, such as vacuum leaks caused by bumps. These situations can severely damage the electron gun, potentially rendering it unusable.

[0003] To maintain the high vacuum level inside the electron microscope and the high resolution after integration, the ion pump of the electron microscope needs to run continuously during transportation:

[0004] (i) Ensure a high vacuum inside the electron beam scanning electron microscope.

[0005] The tip of an electron beam scanning electron microscope (SEM) operates in a high-voltage, high-vacuum environment. Under the action of the ion pump, the inside of the SEM is always kept in a high-vacuum environment.

[0006] (ii) Protect the tip of the electron beam scanning electron microscope.

[0007] The tip of an electron beam scanning electron microscope is in a semi-molten state under high voltage. Once the microscope is turned on, the tip runs continuously, and restarting it requires a complicated process. In addition, the semi-molten tip will oxidize when it comes into contact with air under high vacuum, which will affect the lifespan of the electron gun.

[0008] (iii) Ensure image quality.

[0009] The electron beam scanning electron microscope requires a certain vacuum level to be met each time the gun tip is fired. If the vacuum level drops, the electron gun will be shut down by a chain. Re-firing the gun is not only cumbersome, but also cannot guarantee the quality and stability of the image.

[0010] Existing ion pump power supply systems use a combination of dry cell batteries and booster circuits to power the ion pump. This maintains a slow vacuum leak inside the electron gun during transport, providing a temporary solution but not a fundamental solution to the vacuum leakage problem. Current solutions only slow the rate of vacuum leakage; they cannot restore a high vacuum when the internal vacuum deteriorates. Multiple transport experiences have demonstrated that the vacuum level of the electron beam scanning electron microscope is extremely poor upon arrival at the site, and the images are unsatisfactory after the electron gun is relit.

[0011] Therefore, it is crucial to establish a reliable dedicated power supply system for the electron beam scanning electron microscope ion pump to improve the safety and stability of electron beam defect detection and measurement equipment during use. Utility Model Content

[0012] One objective of this invention is to overcome at least one technical defect in the prior art and provide a mobile power supply system for an ion pump in an electron beam scanning electron microscope.

[0013] A further objective of this invention is to ensure the safe and stable operation of the power supply system.

[0014] Another further objective of this invention is to facilitate the operation and maintenance of the power supply system.

[0015] This utility model provides a mobile power supply system for an ion pump in an electron beam scanning electron microscope, characterized in that it includes:

[0016] Box;

[0017] A power supply cell, located inside the housing, is used to supply power to the ion pump;

[0018] A charging interface for connecting an external power source to the power supply cell to charge the power supply cell; and

[0019] At least one discharge port, each discharge port being used to connect the power supply cell to one of the ion pumps to discharge to the ion pumps.

[0020] The mobile power supply system of this invention can continuously power the ion pump of the electron beam scanning electron microscope during equipment shipment and transportation, effectively maintaining the internal vacuum of the electron gun and avoiding damage and scrapping of the electron gun caused by vacuum leakage. Moreover, the mobile power supply system of this invention adopts an integrated box design, which facilitates transportation and unpacking maintenance.

[0021] Optionally, the mobile power supply system further includes:

[0022] An overcharge and over-discharge protection circuit is connected to the power supply cell, the charging interface, and the at least one discharge interface, respectively. It is configured to disconnect the power supply cell from the charging interface when the voltage of the power supply cell is higher than a preset high voltage threshold, and to disconnect the power supply cell from the at least one discharge interface when the voltage of the power supply cell is lower than a preset low voltage threshold.

[0023] This invention provides overcharge and over-discharge protection circuits between the power supply cell and the charging and discharging interfaces, which can prevent overcharging and over-discharging of the power supply cell from causing cell damage or affecting its lifespan.

[0024] Optionally, the mobile power supply system further includes:

[0025] The first switch includes a first contact disposed between the negative terminal of the power supply cell and the overcharge and over-discharge protection circuit, and a second contact disposed between the positive terminal of the charging interface and the overcharge and over-discharge protection circuit, for synchronously connecting or disconnecting the electrical connection between the overcharge and over-discharge protection circuit and the power supply cell and the charging interface.

[0026] This invention uses dual first switches to simultaneously turn on or off the charging and discharging paths. Compared to setting separate charging and discharging switches, this avoids confusion in the charging and discharging states due to accidental touches.

[0027] Optionally, the mobile power supply system further includes:

[0028] The diode is configured such that its anode is connected to the second contact and its cathode is connected to the overcharge and over-discharge protection circuit to prevent electrical energy from flowing back from the power supply cell to the external power source.

[0029] This invention, by placing a diode between the charging interface and the overcharge and over-discharge protection circuit, not only prevents current from flowing back to the external power supply when the over-discharge protection fails, but also suppresses the surge voltage of the external power supply, thus protecting the overcharge and over-discharge protection circuit.

[0030] Optionally, the mobile power supply system further includes:

[0031] The second switch is connected to the portion of the overcharge and over-discharge protection circuit that connects to the discharge interface, and is configured to close when the first switch is closed, so as to provide the overcharge and over-discharge protection circuit with a trigger signal to switch from the charging state to the discharging state.

[0032] This utility model is equipped with a second switch that switches the overcharge and over-discharge protection circuit from the charging state to the discharging state when the power supply system is turned on. This can avoid circuit abnormalities caused by user misoperation, such as the charging and discharging paths being simultaneously connected, preventing the risk of current backflow or short circuit, thus realizing the safe operation of the power supply system and reducing redundant path losses.

[0033] Optionally, the mobile power supply system further includes:

[0034] A ring-shaped indicator light, arranged around the second switch, is configured to illuminate when either of the discharge interfaces is in a discharge state.

[0035] This utility model features a ring-shaped indicator light surrounding the second switch, which not only reduces the space occupied on the cabinet panel but also helps users observe the status of the second switch and identify whether the overcharge and over-discharge protection circuit has properly switched from the charging state to the discharging state.

[0036] Optionally, the mobile power supply system further includes:

[0037] The charging indicator light is set to illuminate when the charging port is in a charging state; and

[0038] A relay, connected to the portion of the overcharge and over-discharge protection circuit that connects to the charging interface, is used to control the on / off state of the charging indicator light.

[0039] This utility model is equipped with a charging indicator light and a corresponding control relay. The relay can work in conjunction with the protection circuit, and the charging indicator light is triggered only when the protection circuit confirms that the charging status of the power supply system is normal, so that the user can quickly and accurately identify the charging status.

[0040] Optionally, the mobile power supply system further includes:

[0041] The discharge indicator light is set to illuminate when any of the discharge interfaces is in a discharge state.

[0042] This invention establishes a dual confirmation mechanism for the discharge status by setting up a ring indicator light and a discharge indicator light, which facilitates on-site personnel to observe the operating status in a timely manner and to perform preliminary fault diagnosis when the indicator lights are abnormal.

[0043] Optionally, the mobile power supply system further includes:

[0044] An expansion interface is configured to allow the power supply cell to be connected in parallel with another power supply cell from the power supply system, so that they can jointly supply power to the ion pump.

[0045] This utility model has a reserved expansion interface, which allows multiple power supply systems to be connected in parallel. The number of parallel stages can be flexibly adjusted according to the required power supply duration to achieve a longer power supply time.

[0046] Optionally, the mobile power supply system further includes:

[0047] A third switch is connected in series between the positive terminal of the power supply cell and the expansion interface for controlled connection or disconnection of multiple power supply cells.

[0048] This utility model also has a third switch corresponding to the expansion interface, which can be turned on to connect the power supply cells when multiple power supply cells are connected in parallel, and disconnected to realize independent power supply of a single power supply system, thereby flexibly adjusting the number of parallel stages of the power supply system.

[0049] The mobile power supply system for the electron beam scanning electron microscope ion pump of this invention integrates multiple functions, is simple to operate, and has complete safety measures. It can ensure that when the internal vacuum of the electron gun deteriorates during transportation, the electron gun is evacuated by supplying power to the ion pump to maintain the high vacuum state of the electron gun.

[0050] This invention integrates a mobile power supply system into an electron gun transport cabinet in the form of a module. It is compact, easy to install, and when the entire module fails, it can be replaced to achieve efficient maintenance, reducing maintenance time and costs.

[0051] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0052] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0053] Figure 1 This is a schematic structural diagram of a mobile power supply system according to an embodiment of the present utility model;

[0054] Figure 2 yes Figure 1 A schematic circuit diagram of a mobile power supply system in China;

[0055] Figure 3 yes Figure 1 A schematic diagram of the mobile power supply system in the image.

[0056] Figure label:

[0057] 100; 110; 115; 120; 130; 130; overcharge and over-discharge protection circuit.

[0058] Charging interface PLT; Discharging interfaces LP1, LP2; First switch S1; First contact S1a; Second contact S1b; Second switch S2; Ring indicator RS2; Discharging indicator H1; Charging indicator H2; Relay K1; Control circuit K1a; Switching circuit K1b; Diode V1; Expansion interface EI; Third switch S3;

[0059] Ion pump 200. Detailed Implementation

[0060] Figure 1 This is a schematic structural diagram of a mobile power supply system 100 according to an embodiment of the present utility model; Figure 2 yes Figure 1 A schematic circuit diagram of the mobile power supply system 100 in the middle; Figure 3 yes Figure 1 A schematic outline drawing of the mobile power supply system 100. See also... Figures 1 to 3 The mobile power supply system 100 for the ion pump 200 of the electron beam scanning electron microscope of this utility model may include a housing 110, a power supply cell 120, a charging interface PLT and at least one discharge interface.

[0061] The power supply cell 120 can be installed inside the housing 110 to supply power to the ion pump 200.

[0062] The charging interface PLT can be used to connect an external power source to the power supply cell 120 to charge the power supply cell 120. There can be only one charging interface PLT.

[0063] Each discharge port can be used to connect the power supply cell 120 to an ion pump 200 for discharging into the ion pump 200. In this invention, at least one can be one, two, or more than two. Figures 2 to 3 In the embodiment shown, there are two discharge interfaces, namely discharge interface LP1 and discharge interface LP2.

[0064] The mobile power supply system 100 of this invention can continuously supply power to the ion pump 200 of the electron beam scanning electron microscope during shipment and transportation, effectively maintaining the internal vacuum of the electron gun and avoiding damage and scrapping of the electron gun caused by vacuum leakage. Moreover, the mobile power supply system 100 of this invention adopts an integrated box design 110, which is convenient for transportation and unpacking maintenance.

[0065] In some embodiments, the charging interface PLT and the discharging interfaces LP1 and LP2 may be provided with a foolproof structure to prevent wiring errors.

[0066] For example, the charging interface PLT can be a PLT-162-PR type interface; the discharging interfaces LP1 and LP2 can be LP-12-J03SX-02-401 interfaces.

[0067] In some embodiments, the mobile power supply system 100 may further include a discharge indicator H1 and a charging indicator H2.

[0068] The discharge indicator H1 can be set to light up when either discharge interface LP1 or LP2 is in the discharge state; the charging indicator H2 can be set to light up when the charging interface PLT is in the charging state, to indicate the operating status for on-site personnel to observe.

[0069] In some embodiments, the mobile power supply system 100 may further include an overcharge and over-discharge protection circuit 130.

[0070] The overcharge and over-discharge protection circuit 130 can be connected to the power supply cell 120, the charging interface PLT, and the discharging interfaces LP1 and LP2 respectively. It is set to disconnect the connection with the charging interface PLT when the voltage of the power supply cell 120 is higher than the preset high voltage threshold, and disconnect the connection with the discharging interfaces LP1 and LP2 when the voltage of the power supply cell 120 is lower than the preset low voltage threshold.

[0071] The overcharge and over-discharge protection circuit 130 may include a comparator for voltage comparison and a switching device for circuit on / off control. Since the comparator and switching device are well known to those skilled in the art, they will not be described in detail here.

[0072] This utility model provides an overcharge and over-discharge protection circuit 130 between the power supply cell 120 and the charging interface PLT and discharging interfaces LP1 and LP2, which can prevent the power supply cell 120 from being damaged or its lifespan affected by overcharging and over-discharging.

[0073] In some further embodiments, the mobile power supply system 100 may also include a relay K1.

[0074] Relay K1 can be connected to the charging interface PLT portion of the overcharge and over-discharge protection circuit 130 to control the on / off state of the charging indicator light H2. Specifically, relay K1 can be an electromagnetic relay, including a control circuit K1a and a switching circuit K1b. The control circuit K1a can be connected to the charging interface PLT portion of the overcharge and over-discharge protection circuit 130, and the switching circuit K1b can be connected in series with the charging indicator light H2. When the overcharge and over-discharge protection circuit 130 is in a charging state, the control circuit K1a controls the switching circuit K1b to close, thereby illuminating the charging indicator light H2.

[0075] The relay K1 of this utility model can work in conjunction with the protection circuit 130. It will only trigger the charging indicator H2 to light up when the protection circuit 130 confirms that the charging status of the power supply system 100 is normal, so that the user can quickly and accurately identify the charging status.

[0076] In some further embodiments, the mobile power supply system 100 may also include a first switch S1.

[0077] The first switch S1 can be a dual-channel self-locking switch. The first switch S1 may include a first contact S1a and a second contact S1b, wherein the first contact S1a is disposed between the negative terminal of the power supply cell 120 and the overcharge and over-discharge protection circuit 130, and the second contact S1b is disposed between the positive terminal of the charging interface PLT and the overcharge and over-discharge protection circuit 130.

[0078] This invention uses a dual-path first switch S1 to simultaneously turn on or off the charging path (electrical connection between the charging interface PLT and the overcharge and over-discharge protection circuit 130) and the discharging path (electrical connection between the power supply cell 120 and the overcharge and over-discharge protection circuit 130). Compared with setting independent charging and discharging switches, this invention can avoid confusion in charging and discharging states due to accidental touch.

[0079] A diode V1 can be provided between the second contact S1b and the overcharge and over-discharge protection circuit 130 to prevent the self-powered battery cell 120 from flowing back to the external power source. Specifically, the anode of the diode V1 is connected to the second contact S1b, and the cathode is connected to the overcharge and over-discharge protection circuit 130.

[0080] This invention, by placing a diode V1 between the charging interface PLT and the overcharge and over-discharge protection circuit 130, can not only prevent current from flowing back to the external power supply when the over-discharge protection fails, but also suppress the surge voltage of the external power supply and protect the overcharge and over-discharge protection circuit 130.

[0081] In some further embodiments, the mobile power supply system 100 may also include a second switch S2.

[0082] The second switch S2 can be a self-resetting push button switch. The second switch S2 can be connected to the discharge interface LP1, LP2 of the overcharge and over-discharge protection circuit 130, and is configured to close when the first switch S1 is closed, so as to provide the overcharge and over-discharge protection circuit 130 with a trigger signal to switch from the charging state to the discharging state.

[0083] This utility model is equipped with a second switch S2 that switches the overcharge and over-discharge protection circuit 130 from the charging state to the discharging state when the power supply system 100 is turned on. This can avoid circuit abnormalities caused by user misoperation, such as the charging and discharging paths being simultaneously connected, preventing the risk of current backflow or short circuit, realizing the safe operation of the power supply system 100 and reducing redundant path losses.

[0084] In some further embodiments, the mobile power supply system 100 may also include a ring indicator RS2.

[0085] The ring indicator RS2 can be arranged around the second switch S2 and is set to light up when either discharge port LP1 or LP2 is in a discharge state.

[0086] The present invention features a ring indicator RS2 surrounding the second switch S2, which not only reduces the space occupied on the panel of the housing 110, but also helps the user to observe the status of the second switch S2 and identify whether the overcharge and over-discharge protection circuit 130 has switched normally from the charging state to the discharging state.

[0087] Furthermore, the ring indicator RS2 and the discharge indicator H1 form a dual confirmation mechanism for the discharge status, which facilitates on-site personnel to observe the operating status in a timely manner and to perform preliminary fault diagnosis when the indicator lights are abnormal.

[0088] In some embodiments, the mobile power supply system 100 may also include an expansion interface EI.

[0089] The expansion interface EI can be configured to allow the power supply cell 120 to be connected in parallel with the power supply cell 120 of another power supply system 100, so that they can supply power to the ion pump 200 together.

[0090] This utility model has a reserved expansion interface EI, which allows multiple power supply systems to be connected in parallel up to 100. The number of parallel stages can be flexibly adjusted according to the required power supply duration to achieve a longer power supply time.

[0091] In some further embodiments, the mobile power supply system 100 may also include a third switch S3.

[0092] The third switch S3 can be a self-locking switch. The third switch S3 can be connected in series between the positive terminal of the power supply cell 120 and the expansion interface EI, and is used to controllably connect or disconnect multiple power supply cells 120.

[0093] This utility model also has a third switch S3 corresponding to the expansion interface EI, which can be turned on to connect the power supply cells 120 when multiple power supply cells 120 are connected in parallel, and disconnected to realize independent power supply of a single power supply system 100, thereby flexibly adjusting the number of parallel stages of the power supply system 100.

[0094] In some embodiments, the charging interface PLT, the discharging interface LP1, the discharging interface LP2, the first switch S1, the second switch S2, the discharging indicator H1, the charging indicator H2, the expansion interface EI, and the third switch S3 can all be disposed on the front surface of the housing 110 to facilitate the connection of lines and the observation of indicator signals.

[0095] The front surface of the enclosure 110 may also be provided with a handle 115 to facilitate the user's disassembly and maintenance of the power supply system 100 and reduce the space occupied by the power supply system 100.

[0096] In some embodiments, the housing 110 may adopt a UL94-V0 flame-retardant structure, which can reduce the fire risk of the battery cells.

[0097] In some embodiments, the housing 110 may also be provided with vibration damping foam to reduce the risk of mechanical damage to the battery cell caused by external vibration or impact, and to prevent dust or liquid from entering.

[0098] In some embodiments, the power supply cell 120 may be a valve-regulated sealed lead-acid battery to reduce production costs while ensuring safety and stability. For example, the overcharge and over-discharge protection circuit 130 may have a high-voltage threshold of 26V and a low-voltage threshold of 22V.

[0099] The mobile power supply system 100 of the electron beam scanning electron microscope ion pump 200 of this utility model integrates multiple functions, is simple to operate, and has complete safety measures. A single power supply system 100 can maintain a power supply duration of 96 hours. At the same time, multiple power supply systems 100 can be connected in parallel to provide power for a longer duration. It can ensure that when the internal vacuum of the electron gun deteriorates during transportation, the electron gun is evacuated by supplying power to the ion pump 200 to maintain the high vacuum state of the electron gun.

[0100] This utility model installs the mobile power supply system 100 in the form of a module inside the electron gun transport cabinet. It is compact and easy to install. When the whole module fails, it can be maintained efficiently by replacing the module, which reduces maintenance time and cost.

[0101] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A mobile power supply system for an ion pump in an electron beam scanning electron microscope, characterized in that, include: Box; A power supply cell, located inside the housing, is used to supply power to the ion pump; A charging interface for connecting an external power source to the power supply cell to charge the power supply cell; and At least one discharge port, each discharge port being used to connect the power supply cell to one of the ion pumps to discharge to the ion pumps.

2. The mobile power supply system according to claim 1, characterized in that, Also includes: An overcharge and over-discharge protection circuit is connected to the power supply cell, the charging interface, and the at least one discharge interface, respectively. It is configured to disconnect the power supply cell from the charging interface when the voltage of the power supply cell is higher than a preset high voltage threshold, and to disconnect the power supply cell from the at least one discharge interface when the voltage of the power supply cell is lower than a preset low voltage threshold.

3. The mobile power supply system according to claim 2, characterized in that, Also includes: The first switch includes a first contact disposed between the negative terminal of the power supply cell and the overcharge and over-discharge protection circuit, and a second contact disposed between the positive terminal of the charging interface and the overcharge and over-discharge protection circuit, for synchronously connecting or disconnecting the electrical connection between the overcharge and over-discharge protection circuit and the power supply cell and the charging interface.

4. The mobile power supply system according to claim 3, characterized in that, Also includes: The diode has its anode connected to the second contact and its cathode connected to the overcharge and over-discharge protection circuit to prevent electrical energy from flowing back from the power supply cell to the external power source.

5. The mobile power supply system according to claim 3, characterized in that, Also includes: The second switch is connected to the portion of the overcharge and over-discharge protection circuit that connects to the discharge interface, and is configured to provide a trigger signal to the overcharge and over-discharge protection circuit to switch from a charging state to a discharging state in response to an external operation when the first switch is closed.

6. The mobile power supply system according to claim 5, characterized in that, Also includes: A ring-shaped indicator light, arranged around the second switch, is configured to illuminate when either of the discharge interfaces is in a discharge state.

7. The mobile power supply system according to claim 2, characterized in that, Also includes: The charging indicator light is set to illuminate when the charging port is in a charging state; and A relay, connected to the portion of the overcharge and over-discharge protection circuit that connects to the charging interface, is used to control the on / off state of the charging indicator light.

8. The mobile power supply system according to claim 1, characterized in that, Also includes: The discharge indicator light is set to illuminate when any of the discharge interfaces is in a discharge state.

9. The mobile power supply system according to claim 1, characterized in that, An expansion interface is configured to allow the power supply cell to be connected in parallel with another power supply cell from the power supply system, so that they can jointly supply power to the ion pump.

10. The mobile power supply system according to claim 9, characterized in that, Also includes: A third switch is connected in series between the positive terminal of the power supply cell and the expansion interface for controlled connection or disconnection of multiple power supply cells.

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