Material transfer system and passivation process line

Abstract

The application provides a material transfer system and a passivation process production line. The material transfer system comprises a bottom support, a carrying device, a transfer device and a flow transfer device. The carrying device can carry sheet materials passing through a processing link through a process carrier. The flow transfer device can flow transfer sheet materials needing to enter a long-distance transportation link through a transfer carrier. Between the flow transfer device and the carrying device, the transfer device realizes the transfer of the sheet materials between the process carrier and the transfer carrier through the bottom support. In this way, different carriers are configured according to the requirements of different process links to meet different production requirements. Moreover, each carrier only needs to be used for the corresponding process link, reducing the overall transportation cycle of a single carrier and shortening the loading waiting time and transfer time between the upper and lower batches of materials, thereby improving the material flow transfer efficiency and production efficiency.

Description

Technical Field

[0001] This application relates to the field of battery cell processing technology, and in particular to a material transfer system and a passivation process production line. Background Technology

[0002] In the production of solar cells, to improve the electrical performance of the structure and reduce costs while increasing efficiency, it is usually necessary to dicing and cutting the sheet material into multiple pieces, and then performing ALD (Atomic Layer Deposition) passivation coating on the cut surfaces of the sheet material. The ALD passivation process can form a passivation film on the cut surfaces of the sheet material through deposition, thereby improving the quality and efficiency of the sheet material cross-section, while reducing the problem of carrier corrosion.

[0003] In related technologies, passivation processes involve multiple processing steps, and sheet-like materials need to be transferred in an orderly manner between these steps, but there is a problem of low material transfer efficiency. Utility Model Content

[0004] In view of the above, it is necessary to provide a material transfer system and passivation process production line to improve material flow efficiency.

[0005] The first aspect of this application provides a material transfer system, including a base tray, a handling device, a transfer device, and a circulation device. The base tray is used to support stacked sheet materials and can be placed in multiple different carriers, including process carriers and transfer carriers. The transfer device is disposed between the handling device and the circulation device, and has a base tray station for buffering the base tray, a process station for buffering the process carriers, and a transfer station for buffering the transfer carriers. The transfer device is used to receive transfer carriers through the transfer station. The handling device is used to transport the process carrier loaded with processed sheet materials and the base tray to the process station. The transfer device is also used to transport the processed sheet materials and the base tray within the process carrier to an empty transfer carrier. The circulation device is used to remove the transfer carrier loaded with processed sheet materials and the base tray from the transfer station and to transport the transfer carrier to the transfer station.

[0006] A second aspect of this application provides a passivation process production line, including the material transfer system of the first aspect. The passivation process production line further includes a loading device, a boat placement platform, a boat handling device, a processing device, and a unloading device. The boat placement platform is used to buffer the process boat; the loading device is used to buffer the process carrier loaded with a base and load unprocessed sheet material onto the process carrier; the handling device is used to transport the process carrier of the loading device to the process boat on the boat placement platform; the boat handling device is used to transfer the process boat between the boat placement platform and the processing device; the handling device is also used for... After processing by the processing device, the process carrier loaded with the processed sheet material and the base is transported from the process boat to the process station; the handling device is also used to transport the process carrier loaded with the base from the transfer device to the loading device after the base is loaded onto the empty process carrier; the transfer device is used to transport the transfer carrier loaded with the processed sheet material and the base from the transfer station to the unloading device; the unloading device is used to remove the processed sheet material from the transfer carrier; the transfer device is also used to transport the transfer carrier loaded with the base from the unloading device to the transfer device.

[0007] The material transfer system and passivation process production line provided in this application allow the handling device to transport sheet materials that have undergone processing via process carriers, and the circulation device to transfer sheet materials that need to enter long-distance transportation via transfer carriers. Between the circulation device and the handling device, the transfer device uses a base to transfer sheet materials between the process carrier and the transfer carrier. In this way, different carriers are configured for different process stages to meet different production requirements. Furthermore, each carrier only needs to be used for its corresponding process stage, reducing the overall transportation cycle of a single carrier and shortening the loading waiting time and transfer time between batches of materials, thereby improving material flow efficiency and production efficiency. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the material transfer system provided in this application.

[0009] Figure 2 A schematic diagram of the transfer vehicle provided in this application.

[0010] Figure 3 A schematic diagram of the process carrier provided in this application.

[0011] Figure 4 This is a schematic diagram of the transfer device provided in this application.

[0012] Figure 5 This is a schematic diagram illustrating the movement of sheet material and base in the material transfer system provided in this application.

[0013] Figure 6This is a schematic diagram of the cell passivation process system provided in this application.

[0014] Figure 7 This is a schematic diagram showing the connection between the feeding mechanism, transition mechanism, unloading mechanism, and unloading device of this application.

[0015] Figure 8 This is a schematic diagram of the material feeding and transfer mechanism and the guide plate receiving mechanism provided in this application.

[0016] Explanation of main component symbols

[0017] 10. Sheet material; 20. Process carrier; 21. First inner cavity; 30. Transfer carrier; 31. Limiting baffle; 32. Second inner cavity; 33. Clearance opening; 40. Process boat; 100. Loading device; 101. Loading conveyor line; 102. Sheet picking and placing mechanism; 103. Carrier positioning mechanism; 200. Handling device; 201. Carrier placement platform; 202. Handling and gripping mechanism; 203. Handling drive mechanism; 300. Boat placement platform; 400. Boat moving device; 401. Boat gripping mechanism; 402. Boat moving drive mechanism; 500. Processing device; 700. Transfer device; 70A. 70B, Process Station; 70C, Transfer Station; 701, Process Buffer Mechanism; 7011, Process Buffer Platform; 7012, Process Buffer Transport Component; 7013, Lifting Frame; 7014, Lifting Drive Component; 702, Transfer Buffer Mechanism; 7021, Transfer Buffer Platform; 7022, Transfer Buffer Transport Component; 703, Transfer Drive Mechanism; 704, Base Buffer Mechanism; 7041, Buffer Rack; 7042, Lifting Platform; 7043, Lifting Drive Component; 705, Transfer Gripping Mechanism; 7051, Support Platform; 7052, First Transfer Gripper; 7053. 7054. Second transfer gripper; 7055. Clamping drive component; 7056. First support block; 7057. Second support block; 800. Transfer device; 900. Unloading device; 1000. Boat cooling platform; 1100. Loading transfer mechanism; 1101. Loading docking assembly; 1102. Loading translation assembly; 1200. Unloading transfer mechanism; 1200A. First unloading transfer mechanism; 1200B. Second unloading transfer mechanism; 1201. Unloading conveyor line; 1202. Unloading translation assembly; 1300. Transition transfer mechanism; 1301. Docking conveyor assembly; 1301A. First transition conveyor... Feeding line; 1301B, Second transition conveyor line; 1302, Docking and switching assembly; 1302A, Switching conveyor belt; 1302B, Switching drive; 1400, Integrated receiving mechanism; 1500, Guided piece receiving mechanism; 1600, Carrier transfer assembly; 1601, Carrier conveyor belt; 1601A, Process carrier conveyor line; 1601B, Transfer carrier conveyor line; 1602, Carrier return unit; 1603, Carrier buffer; 1604, Return drive; 1700, Guided piece transfer assembly; 1800, Guided piece transfer assembly; 1801, Piece gripper; 1802, Transfer drive. Detailed Implementation

[0018] In the description of the embodiments of this application, when an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an element centrally located simultaneously. When an element is considered to be "disposed" on another element, it can be directly disposed on the other element or there may be an element centrally located simultaneously. In this application, unless otherwise expressly specified and limited, the terms "installed," "connected," "linked," "fixed," etc., should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through a medium; it can be a connection within two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "up," "down," "top," "bottom," etc., are all referenced to the direction of the product in the actual use scenario. The mention of "embodiment" in this document means that a specific feature, structure, or characteristic described in conjunction with the embodiment can be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0019] This application provides a material transfer system and a passivation process production line.

[0020] like Figures 1 to 3 As shown, this application first provides a material transfer system for transferring materials between different carriers. The materials are stacked sheet materials 10, which can be battery cells. The material transfer system can be applied to a passivation process production line. The passivation process production line is used to achieve automatic loading and unloading and automated processing of materials. In the example of this application, the processing technology of the passivation process production line can be ALD (Atomic Layer Deposition) technology.

[0021] Please refer to the following: Figure 4 In this embodiment, the material transfer system includes a base 50, a handling device 200, a transfer device 700, and a circulation device 800. The base 50 is used to support stacked sheet materials 10 and can be placed in multiple different carriers, including a process carrier 20 and a transfer carrier 30. The process carrier 20 and the transfer carrier 30 can be different types of material boxes, with the following differences: the process carrier 20 provides a relatively stronger restraining effect on the sheet materials 10, while the transfer carrier 30 provides a relatively weaker restraining effect.

[0022] For example, the process carrier 20 has a first inner cavity 21, which extends through the top of the process carrier 20 to form an opening. Multiple stacked sheet materials 10 can be supported on the top surface of the base 50, and the sheet materials 10 and the base 50 can enter and exit the first inner cavity 21 through the first opening. The process carrier 20 has three states: the first is an empty state, in which the process carrier 20 is not loaded with sheet materials 10 or base 50; the second is a pre-loaded state, in which the process carrier 20 is loaded with only the base 50 and not with sheet materials 10; and the third is a fully loaded state, in which the process carrier 20 is loaded with both the base 50 and sheet materials 10. When the process carrier 20 is loaded with both the base 50 and sheet materials 10, the process carrier 20 can be loaded into a process boat 50. A single process boat 50 can simultaneously load multiple process carriers 20 and put them into the passivation process.

[0023] The internal space of the process carrier 20 is more adapted to the size of the sheet material 10, so that the gap between the cavity wall of the first inner cavity 21 and the periphery of the sheet material 10 is smaller, and the process carrier 20 has a relatively strong limiting effect on the sheet material 10, thereby improving the control accuracy of the attitude and position of the sheet material 10. It is suitable for process steps with high positioning accuracy requirements, such as passivation.

[0024] The transfer carrier 30 is provided with multiple limiting baffles 31 along its circumference. The multiple limiting baffles 31 are spaced apart and enclose a second inner cavity 32. The second inner cavity 32 forms a second opening at the top of the limiting baffles 31. Multiple stacked sheet materials 10 can be supported on the top surface of the base 50. The sheet materials 10 and the base 50 can enter and exit the second inner cavity 32 through the second opening. The transfer carrier 30 has three states: the first is an empty state, in which the transfer carrier 30 is not loaded with sheet materials 10 or base 50; the second is a pre-loaded state, in which the transfer carrier 30 is loaded with only the base 50 and not the sheet materials 10; and the third is a fully loaded state, in which the transfer carrier 30 is loaded with both the base 50 and the sheet materials 10.

[0025] The internal space of the transfer carrier 30 is larger than the size of the sheet material 10, and the limiting baffle 31 has a certain degree of elasticity, so that the gap between the cavity wall of the second inner cavity 32 and the periphery of the sheet material 10 is larger, so that the transfer carrier 30 leaves space for the sheet material 10 to move. It has a relatively weak limiting effect and provides a certain energy absorption and buffering effect, which plays a better role in protecting the sheet material 10. It is suitable for process links with high safety requirements, such as long-distance transportation.

[0026] In this embodiment, the transfer device 700 is disposed between the handling device 200 and the transfer device 800. The transfer device 700 has a base station 70A for causing the base tray 50, a process station 70B for causing the process carrier 20, and a transfer station 70C for causing the transfer carrier 30.

[0027] The transfer device 700 is used to receive the transfer carrier 30 at the transfer station 70C. The transfer device 700 is capable of receiving the transfer carrier 30 loaded with a base tray 50 at the transfer station 70C and transporting the base tray 50 of the transfer carrier 30 to the base tray station 70A. The handling device 200 is used to transport the process carrier 20 loaded with the processed sheet material 10 and the base tray 50 to the process station 70B. The transfer device 700 is also used to transport the processed sheet material 10 and the base tray 50 within the process carrier 20 to an empty transfer carrier 30, and to load the base tray 50 from the base tray station 70A into an empty process carrier 20. The transfer device 700 is capable of transporting the processed sheet material 10 from the process carrier 20 to a pre-loaded transfer carrier 30. After the sheet material 10 in the fully loaded processed process carrier 20 is removed, the transfer device 700 can obtain the pre-loaded process carrier 20, and after the processed sheet material 10 is transferred to the transfer carrier 30, the transfer device 700 can obtain the fully loaded processed transfer carrier 30.

[0028] The transfer device 800 is used to remove the transfer carrier 30, which is loaded with the processed sheet material 10 and the base tray 50, from the transfer station 70C so that the transfer carrier 30 flows into the unloading stage. The transfer device 800 is also used to transport the transfer carrier 30 to the transfer station 70C. The transfer device 800 can transport the transfer carrier 30 loaded with the base tray 50 to the transfer station 70C so that the transfer carrier 30 returns to the transfer station 70C after unloading.

[0029] The handling device 200 can transport the sheet material 10 that has undergone processing via the process carrier 20. The transfer device 800 can transfer the sheet material 10 that needs to enter the long-distance transportation stage via the transfer carrier 30. Between the transfer device 800 and the handling device 200, the transfer device 700 uses a base 50 to transfer the sheet material 10 between the process carrier 20 and the transfer carrier 30. In this way, different carriers are configured for different process stages to meet different production requirements. Furthermore, each carrier only needs to be used for the corresponding process stage, reducing the overall transportation cycle of a single carrier and shortening the loading waiting time and transfer time between two batches of materials, thereby improving production efficiency.

[0030] In some embodiments, the transfer device 700 includes a process buffer mechanism 701, a transfer buffer mechanism 702, a transfer drive mechanism 703, a base buffer mechanism 704, and a transfer gripping mechanism 705. The base buffer mechanism 704 is provided with a base station 70A. The transfer buffer mechanism 702 is provided with a transfer station 70C. The process buffer mechanism 701 is provided with a process station 70B. The transfer gripping mechanism 705 is used to grip the base 50 individually, or to grip the sheet material 10 and the base 50 together. The transfer drive mechanism 703 is connected to the transfer gripping mechanism 705 and is used to drive the transfer gripping mechanism 705 to move to the base station 70A, the transfer station 70C, or the process station 70B.

[0031] For example, the process buffer mechanism 701 includes a process buffer platform 7011, a process buffer transport assembly 7012, a lifting frame 7013, and a lifting drive component 7014. The process buffer platform 7011 is used to place and position the process carrier 20, and a process station 70B is formed on the upper surface of the process buffer platform 7011. An opening for the lifting frame 7013 to pass through is provided in the middle of the process buffer platform 7011. A through hole corresponding to the lifting frame 7013 is provided at the bottom of the process carrier 20. When the process carrier 20 is placed on the process buffer platform 7011, the lifting frame 7013 can pass through both the process buffer platform 7011 and the process carrier 20.

[0032] The process buffer transport component 7012 is connected to the process buffer platform 7011. The process buffer transport component 7012 is used to drive the process buffer platform 7011 to move in the horizontal direction so that the empty process buffer platform 7011 can move to a designated position to receive the process carrier 20, or to drive the process carrier 20 to a designated position.

[0033] The lifting frame 7013 works in conjunction with the lifting drive 7014 to push the sheet material 10 and the base 50 upward from the process carrier 20. The lifting frame 7013 is positioned corresponding to the lifting opening 7015 of the process buffer platform 7011. The lifting drive 7014 can be an electric cylinder mechanism. The lifting drive 7014 is connected to the lifting frame 7013 and is used to drive the lifting frame 7013 to rise and fall. When the process buffer platform 7011, carrying the process carrier 20, moves directly above the lifting frame 7013, the lifting drive 7014 can drive the lifting frame 7013 to rise, allowing it to pass through the lifting opening 7015 and the connecting opening 22 into the first inner cavity 21, and push the sheet material 10 and the base 50 upward from the process carrier 20.

[0034] For example, the transfer buffer mechanism 702 includes a transfer buffer platform 7021 and a transfer buffer transport component 7022. The transfer buffer platform 7021 is used to place and position the transfer carrier 30, and its upper surface forms a transfer station 70C. The transfer buffer transport component 7022 is connected to the transfer buffer platform 7021 and is used to drive the transfer buffer platform 7021 to move horizontally, so that an empty process buffer platform 7011 can move to a designated position to receive the transfer carrier 30, or to move the transfer buffer platform 7021 to a designated position.

[0035] For example, the base tray buffer mechanism 704 includes a buffer frame 7041, a lifting platform 7042, and a lifting drive 7043. The buffer frame 7041 is used to accommodate stacked base trays 50 and to limit the movement of the base trays 50. The lifting platform 7042 is disposed inside the buffer frame 7041 and is used to support the base trays 50. Multiple base trays 50 can be stacked sequentially from bottom to top on the lifting platform 7042. The lifting drive 7043 can be an electric cylinder mechanism. The lifting drive 7043 is connected to the lifting platform 7042 and is used to drive the lifting platform 7042 to rise and fall, thereby moving the lifting platform 7042 and the base trays 50 to a specified height.

[0036] For example, the transfer drive mechanism 703 can be a gantry-type translation mechanism, used to drive the transfer gripping mechanism 705 to move in the horizontal direction (XY direction) and the vertical direction (Z direction). The process buffer mechanism 701, the transfer buffer mechanism 702, and the base buffer mechanism 704 are distributed at intervals along the horizontal direction. When the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move in the horizontal direction, the transfer gripping mechanism 705 can move directly above the process buffer mechanism 701, the transfer buffer mechanism 702, or the base buffer mechanism 704. When the transfer gripping mechanism 705 is directly above the process buffer mechanism 701, the transfer buffer mechanism 702, or the base buffer mechanism 704, the transfer drive mechanism 703 can drive the transfer gripping mechanism 705 to move in the vertical direction.

[0037] For example, the transfer gripping mechanism 705 includes a support platform 7051, a first transfer gripper 7052, a second transfer gripper 7053, and a clamping drive member 7054. The support platform 7051 is connected to the transfer drive mechanism 703. The first transfer gripper 7052 and the second transfer gripper 7053 are disposed opposite to each other, and both are slidably connected to the support platform 7051 in the horizontal direction. A first support block 7055 is provided at the lower end of the first transfer gripper 7052, and the upper end of the first transfer gripper 7052 is connected to the clamping drive member 7054. A second support block 7056 is provided at the lower end of the second transfer gripper 7053, and the upper end of the second transfer gripper 7053 is connected to the clamping drive member 7054. The clamping drive member 7054 can be a lead screw mechanism, used to drive the first transfer gripper 7052 and the second transfer gripper 7053 to move closer or further apart. The transfer carrier 30 has clearance openings 33 on both sides of its bottom, which are connected to the second inner cavity 32. The size of the clearance openings 33 is adapted to the first support block 7055 and the second support block 7056. The limiting baffles 31 on both sides of the transfer carrier 30 are spaced apart to leave space for the first transfer gripper 7052 or the second transfer gripper 7053 to be accommodated.

[0038] In this embodiment, the transfer gripping mechanism 705 can grip the base tray 50 independently or simultaneously grip the sheet material 10 and the base tray 50. Specifically, the transfer gripping mechanism 705 grips the base tray 50 independently as follows: the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move, so that the first transfer gripper 7052 and the second transfer gripper 7053 are located on both sides of the base tray 50, while the first support block 7055 and the second support block 7056 are both located at the bottom of the base tray 50. Then, the first transfer gripper 7052 and the second transfer gripper 7053 move closer to each other and adhere to both sides of the base tray 50, while the first support block 7055 and the second support block 7056 cooperate to support the base tray 50.

[0039] The transfer gripping mechanism 705 grips the sheet material 10 and the base 50 together as follows: the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move, so that the first transfer gripper 7052 and the second transfer gripper 7053 are located on both sides of the sheet material 10 and the base 50, while the first support block 7055 and the second support block 7056 are both located at the bottom of the base 50. Then, the first transfer gripper 7052 and the second transfer gripper 7053 move closer to each other and are close to both sides of the sheet material 10 and the base 50, while the first support block 7055 and the second support block 7056 cooperate to support the base 50.

[0040] For ease of understanding, the following text will first provide an exemplary description of the flow process of sheet material 10 and base 50 in the material transfer system, specifically including the following steps.

[0041] T1. A transfer carrier 30 loaded with a base tray 50 is placed at a transfer station 70C. A process carrier 20 loaded with a base tray 50 and sheet material 10 is placed at a process station 70B. The base tray 50 is stored in a base tray buffer mechanism 704.

[0042] T2. The transfer gripping mechanism 705 removes the base tray 50 from the transfer carrier 30 and places it in the base tray buffer mechanism 704. The transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move above the transfer station 70C and then lowers it, positioning the first transfer gripper 7052 and the second transfer gripper 7053 on opposite sides of the base tray 50, with the first support block 7055 and the second support block 7056 aligned with the clearance openings 33 on both sides of the transfer carrier 30. Then, the first transfer gripper 7052 and the second transfer gripper 7053 are driven closer together, causing the first support block 7055 and the second support block 7056 to respectively pass under the clearance openings 33, with the first transfer gripper 7052 and the second transfer gripper 7053 close to the opposite sides of the base tray 50. Finally, the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to rise, removing the base tray 50 from the transfer carrier 30. Then, the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move so as to place the base tray 50 from top to bottom onto the base tray buffer mechanism 704.

[0043] T3. The transfer and gripping mechanism 705 removes the sheet material 10 and the base 50 from the process carrier 20. Specifically, the lifting drive 7014 drives the lifting frame 7013 to rise, which pushes the sheet material 10 and the base 50 upwards from the process carrier 20. Then, the transfer drive mechanism 703 drives the transfer and gripping mechanism 705 to move to the lifted sheet material 10 and base 50, and the transfer and gripping mechanism 705 grips the sheet material 10 and base 50 together.

[0044] T4. The transfer gripping mechanism 705 places the gripped sheet material 10 and base tray 50 into an empty transfer carrier 30 located at the transfer station 70C. The transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move above the transfer station 70C and then descends, allowing the sheet material 10 and base tray 50 to enter the transfer carrier 30 from top to bottom. At this time, the first transfer gripper 7052 and the second transfer gripper 7053 can be accommodated in the space between the respective limiting baffles 31, and the first support block 7055 and the second support block 7056 can be accommodated in their respective clearance openings 33. Then, the first transfer gripper 7052 and the second transfer gripper 7053 move away from each other, so that the first transfer gripper 7052, the second transfer gripper 7053, the first support block 7055, and the second support block 7056 are away from the sheet material 10 and the base tray 50.

[0045] T5. The transfer gripping mechanism 705 grips the base tray 50 from the base tray buffer mechanism 704. Specifically, the lifting drive 7043 drives the lifting platform 7042 to rise, moving the top-level base tray 50 to the top of the buffer rack 7041. Then, the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move to the lifted base tray 50, and the transfer gripping mechanism 705 grips the base tray 50 individually.

[0046] T6. The transfer gripping mechanism 705 places the gripped base 50 into the empty process carrier 20 located at the process station 70B. Specifically, when the lifting drive 7014 drives the lifting frame 7013 to rise, the transfer drive mechanism 703 drives the transfer gripping mechanism 705 to move directly above the process station 70B, and the transfer gripping mechanism 705 places the base 50 on top of the lifting frame 7013. Then, the lifting drive 7014 drives the lifting frame 7013 to descend, causing the base 50 to descend into the process carrier 20.

[0047] After step T3, the process carrier 20 carrying the base tray 50 can be returned to the incoming material stage and the processing stage via the conveying device 200. After step T4, the transfer carrier 30 carrying the sheet material 10 and the base tray 50 can directly enter the long-distance unloading conveying stage. In this way, rapid exchange of materials between different carriers can be realized, reducing the transportation cycle of a single carrier and thus improving the conveying efficiency of the production line.

[0048] Please refer to the following: Figure 6 In some embodiments, the passivation process production line further includes a loading device 100, a boat placement platform 300, a boat handling device 400, a processing device 500, and an unloading device 900. The passivation process production line has a loading transfer area, a process transfer area, and an unloading transfer area, wherein the process transfer area is located between the loading transfer area and the unloading transfer area. The loading device 100, the handling device 200, the boat placement platform 300, and the transfer device 700 are disposed in the loading transfer area. The processing device 500 is disposed in the process transfer area. The unloading device 900 is disposed in the unloading transfer area. The transfer device 800 spans the loading transfer area, the process transfer area, and the unloading transfer area, and the boat handling device 400 spans the loading transfer area and the process transfer area.

[0049] The loading device 100 is used to buffer the process carrier 20 containing the base 50 and to load the unprocessed sheet material 10 into the process carrier 20 containing the base 50. The loading device 100 can store the process carrier 20, which can be a pre-loaded unprocessed process carrier 20 or a fully loaded unprocessed process carrier 20.

[0050] The feeding device 100 can receive unprocessed sheet material 10 from the upstream process equipment, and then load the unprocessed sheet material 10 into the pre-loaded process carrier 20, thereby obtaining a fully loaded unprocessed process carrier 20. The upstream process equipment can be a conveyor line that transports the sheet material 10 that needs to be processed.

[0051] The boat placement platform 300 is used to store the process boats 40. The process boats 40 stored on the boat placement platform 300 can be empty, fully loaded with unprocessed process boats 40, or fully loaded with processed process boats 40. An empty process boat 40 refers to a process boat 40 that is not loaded with process carriers 20; a fully loaded unprocessed process boat 40 refers to a process boat 40 loaded with unprocessed process carriers 20; and a fully loaded processed process boat 40 refers to a process boat 40 loaded with a specified number of processed process carriers 20. A processed process carrier 20 refers to a process carrier 20 loaded with a specified number of processed sheet materials 10.

[0052] The transport device 200 is used to transfer the process carrier 20 between the boat placement platform 300 and the loading device 100. The transport device 200 is capable of transporting the process carrier 20 loaded with unprocessed sheet material 10 from the loading device 100 to the process boat 40 stored on the boat placement platform 300. The transport device 200 is capable of loading the unprocessed process carrier 20 into the process boat 40. After a specified number of unprocessed process carriers 20 are loaded into the process boat 40, the boat placement platform 300 can obtain a fully loaded unprocessed process boat 40.

[0053] The processing device 500 is used to passivate the sheet material 10 in the process boat 40. The boat-moving device 400 is used to transfer the process boat 40 between the boat placement platform 300 and the processing device 500. The boat-moving device 400 can transport a fully loaded, unprocessed process boat 40 to the processing device 500 for passivation. After the process boat 40 has completed processing, the boat-moving device 400 can obtain a fully loaded, processed process boat 40, which contains the processed process carrier 20.

[0054] The handling device 200 is also used to transport the process carrier 20, which is loaded with the processed sheet material 10 and the base 50, from the process boat 40 to the process station 70B after the process boat 40 has been processed by the processing device 500. The handling device 200 can also transport the process carrier 20 loaded with the processed material from the process boat 40 located on the boat placement platform 300 to the transfer device 700. After the process carrier 20 is removed from the fully loaded, processed process boat 40, the boat placement platform 300 can obtain a fully loaded, unprocessed process boat 40.

[0055] The conveying device 200 can also transport the process carrier 20 loaded with the base 50 from the transfer device 700 to the loading device 100. In this way, the process carrier 20 loaded with the base 50 is returned from the transfer device 700 to the loading device 100, and the loading device 100 can obtain the pre-loaded process carrier 20.

[0056] The conveying device 200 is also used to move the process carrier 20 loaded with the base tray 50 from the transfer device 700 to the loading device 100 after the base tray 50 has been loaded onto the empty process carrier 20. In this way, the loading device 100 can receive the process carrier 20 loaded with the base tray 50 from the conveying device 200, realizing the return of the pre-loaded process carrier 20.

[0057] The transfer device 800 is used to transfer the transfer carrier 30 between the transfer device 700 and the unloading device 900. The transfer device 800 is used to move the transfer carrier 30, which is loaded with the processed sheet material 10 and the base 50, from the transfer station 70C to the unloading device 900.

[0058] The unloading device 900 is used to remove the processed sheet material 10 from the fully loaded transfer carrier 30 to obtain a transfer carrier 30 loaded with a base tray 50. The transfer device 800 can also transport the transfer carrier 30 loaded with the base tray 50 from the unloading device 900 to the transfer device 700. In this way, the loading device 100 can receive the pre-loaded transfer carrier 30 from the transfer device 800, realizing the return of the transfer carrier 30 from the unloading device 900 to the transfer device 700.

[0059] For ease of understanding, the following text first provides an exemplary description of the transfer process of sheet material 10 in the passivation process production line, specifically including the following steps.

[0060] S1. The feeding device 100 receives the pre-loaded process carrier 20 from the conveying device 200 and loads the unprocessed sheet material 10 into the pre-loaded process carrier 20.

[0061] S2. The handling device 200 transports the unprocessed, fully loaded process carrier 20 from the loading device 100 to the process boat 40 of the boat placement platform 300.

[0062] S3, the boat-moving device 400 puts the process boat 40 into the processing device 500.

[0063] S4. After the processing is completed, the boat moving device 400 moves the process boat 40 to the boat placement platform 300.

[0064] S5. The handling device 200 removes the fully loaded, processed process carrier 20 from the process boat 40 of the boat placement platform 300 and transports it to the transfer device 700.

[0065] S6. Transfer station 70C of transfer device 700 receives pre-loaded transfer carrier 30 from transfer device 800. Process station 70B of transfer device 700 receives fully loaded, processed process carrier 20 from handling device 200. Transfer device 700 removes sheet material 10 from process carrier 20 and transfers it to transfer carrier 30, thus obtaining pre-loaded process carrier 20 at process station 70B. Handling device 200 transports pre-loaded process carrier 20 from process station 70B to loading device 100.

[0066] S7. The transfer device 800 moves the fully loaded transfer carrier 30 that has been processed from the transfer device 700 to the unloading device 900.

[0067] S8. The feeding device 900 receives the transfer carrier 30 from the transfer device 800 and removes the sheet material 10 from the transfer carrier 30.

[0068] S9. Transfer device 800 transports the pre-loaded transfer carrier 30 from unloading device 900 to transfer device 700.

[0069] In step S5, the boat placement platform 300 can obtain an empty process boat 40 again, realizing the return flow of the process boat 40.

[0070] Thus, the process carrier 20 and the transfer carrier 30 can be applied to different process stages to meet the corresponding processing quality requirements, processing efficiency requirements and safety requirements. Furthermore, the transfer device 700 can accelerate the material transfer between the process carrier 20 and the transfer carrier 30, thereby shortening the return cycle of the process carrier 20 and the transfer carrier 30.

[0071] During steps S1 to S5, i.e., before and during processing of the sheet material 10, the use of the process carrier 20 enables precise positioning of the sheet material 10, ensuring stable and accurate control of process parameters, reducing product quality issues caused by human factors and equipment fluctuations, and improving the consistency and stability of product quality. In steps S6 to S8, i.e., after processing of the sheet material 10, the use of the transfer carrier 30 allows for a more relaxed requirement on the positioning accuracy of the sheet material 10, reducing the likelihood of fragmentation during subsequent long-distance transport and improving safety.

[0072] The types of process carriers 20 and transfer carriers 30 described above are merely illustrative examples. In practical applications, the types of carriers can be configured according to the needs of the process steps, and the loading method of sheet material 10 can also be adapted according to the types of carriers. This application does not impose any restrictions on this.

[0073] During the entire flow of sheet material 10, after the process carrier 20 completes loading the previous batch of sheet material 10 from unprocessed to finished, it is returned via the transfer device 700, handling device 200, and loading device 100. The returned process carrier 20 can then participate in loading the next batch of sheet material 10 from unprocessed to finished. Thus, the process carrier 20 does not need to participate in the entire flow of a single batch of sheet material 10, shortening the waiting time between loading the previous and next batches, reducing operation time and transfer time between process steps, and improving production efficiency. Similarly, after the transfer carrier 30 completes loading the previous batch of sheet material 10 from finished to unloaded, it is returned via the transfer device 700 and unloading device 900. The returned transfer carrier 30 can then participate in loading the next batch of sheet material 10 from finished to unloaded. In this way, the transfer carrier 30 does not need to participate in the entire flow process of a single batch of sheet material 10, which shortens the waiting time between loading the previous batch of sheet material 10 and the next batch of sheet material 10, reduces the operation time and the transfer time of sheet material 10 between various process steps, and improves production efficiency.

[0074] In some embodiments, the passivation process line further includes a boat cooling platform 1000, which is disposed in the process flow area and located on one side of the processing apparatus 500. The boat cooling platform 1000 is used to store process boats 40. The process boats 40 stored in the boat cooling platform 1000 can be either fully loaded with unprocessed process boats 40 or fully loaded with processed process boats 40.

[0075] The boat-moving device 400 is also used to transfer the process boat 40 between the boat placement platform 300, the boat cooling platform 1000, and the processing device 500. Before the process boat 40 is put into the processing device 500 for processing, the boat-moving device 400 can move the process boat 40 to the boat cooling platform 1000 for transfer and waiting. After the corresponding conditions are met, the boat-moving device 400 will then move the process boat 40 to the processing device 500. In this way, the space occupied by the process boat 40 on the boat placement platform 300 can be reduced, and the movement of the process carrier 20 can be facilitated.

[0076] After the process boat 40 is processed by the processing device 500, the boat-moving device 400 can transport the process boat 40 to the boat cooling platform 1000 for cooling. After cooling, the boat-moving device 400 then transports the process boat 40 to the boat placement platform 300. Since the process boat 40 needs to be in a high-temperature environment during processing, the boat cooling platform 1000 can reduce the impact of the high temperature of the process boat 40 on the devices or sheet materials 10 in the upstream flow area.

[0077] Please refer to the following: Figure 7 and Figure 8 In some embodiments, the transfer device 800 includes a loading transfer mechanism 1100, a unloading transfer mechanism 1200, and a transition transfer mechanism 1300. The loading transfer mechanism 1100 extends along a first direction and is used to transport the transfer carrier 30 along the first direction. The unloading transfer mechanism 1200 extends along the first direction and is spaced apart from the loading transfer mechanism 1100 along a second direction. The unloading transfer mechanism 1200 is used to transport the transfer carrier 30 along the first direction, and there is an angle between the first and second directions. The transition transfer mechanism 1300 is disposed between the loading transfer mechanism 1100 and the unloading transfer mechanism 1200 and is used to transport the transfer carrier 30 along the second direction. For example, the first direction is the X-axis direction shown in the figure, and the second direction is the Y-axis direction shown in the figure.

[0078] In the example of this application, a process transfer area is formed between the loading transfer mechanism 1100, the unloading transfer mechanism 1200, and the transition transfer mechanism 1300. The loading transfer area is formed on the side of the loading transfer mechanism 1100 away from the process transfer area, and the unloading transfer area is formed on the side of the unloading transfer mechanism 1200 away from the process transfer area. Thus, the loading transfer area, the process transfer area, and the unloading transfer area are distributed sequentially along the second direction.

[0079] When it is necessary to transport the transfer carrier 30 from the transfer device 700 to the unloading device 900, firstly, the loading transfer mechanism 1100 obtains the transfer carrier 30 from the transfer device 700 and transports the transfer carrier 30 to the transition transfer mechanism 1300 along the first direction; then, the transition transfer mechanism 1300 transports the transfer carrier 30 to the unloading transfer mechanism 1200 along the second direction; then, the unloading transfer mechanism 1200 transports the transfer carrier 30 to the unloading device 900 along the first direction.

[0080] When it is necessary to transfer the transfer carrier 30 from the unloading device 900 to the transfer device 700, firstly, the unloading transfer mechanism 1200 obtains the transfer carrier 30 from the unloading device 900 and transfers the transfer carrier 30 to the transition transfer mechanism 1300 along the first direction; then, the transition transfer mechanism 1300 transfers the transfer carrier 30 to the loading transfer mechanism 1100 along the second direction; then, the loading transfer mechanism 1100 transfers the transfer carrier 30 to the transfer device 700 along the first direction.

[0081] In some embodiments, the loading device 100, the transfer device 700, the handling device 200, and the boat placement platform 300 constitute a loading unit. The loading device 100, the transfer device 700, and the boat placement platform 300 belonging to the same loading unit are distributed at intervals around the handling device 200. In this way, the distance between the handling device 200 and the loading device 100, the transfer device 700, and the boat placement platform 300 can be shortened, thereby improving the turnover efficiency of the process carrier 20.

[0082] The feeding unit comprises multiple sets, which are spaced apart along a first direction. Multiple transfer devices 700 within these feeding units are all located on one side of the feeding transfer mechanism 1100 and are spaced apart along the first direction. Thus, the feeding transfer mechanism 1100 can acquire the process carriers 20 from the multiple transfer devices 700 along the first direction, or provide the process carriers 20 to the multiple transfer devices 700 along the first direction.

[0083] For example, there are two feeding units, arranged side-by-side in the feeding transfer area along a first direction. Each feeding unit includes two feeding devices 100, one transfer device 700, one handling device 200, and one boat placement platform 300. The handling device 200 is located on the side of the feeding transfer area closest to the feeding transfer mechanism 1100. The boat placement platform 300 is located on the side of the handling device 200 closest to the center of the feeding transfer area. The transfer device 700 is located on the side of the handling device 200 away from the boat placement platform 300. The two feeding devices 100 are spaced apart along the first direction, and both feeding devices 100 are located on the side of the handling device 200 away from the feeding transfer mechanism 1100.

[0084] Each feeding unit is constructed around the handling device 200, enabling the handling device 200 to acquire or place process carriers 20 from surrounding devices. Thus, multiple feeding units can simultaneously handle the flow of sheet material 10 and process carriers 20, improving production efficiency. Furthermore, the optimized arrangement of each feeding unit improves equipment layout, making the positions of related devices more compact, shortening the flow distance between devices, and reducing the equipment's footprint. In other embodiments, the type or number of devices in each feeding unit can be adjusted according to actual needs, as long as the flow of sheet material 10 and process carriers 20 is satisfied; this application does not impose any limitations on this.

[0085] In some embodiments, the feeding device 100 includes a feeding conveyor line 101, a sheet picking and placing mechanism 102, and a carrier positioning mechanism 103. The feeding conveyor line 101 is used to convey unprocessed sheet material 10. The carrier positioning mechanism 103 is used to place a process carrier 20. The sheet picking and placing mechanism 102 is disposed between the feeding conveyor line 101 and the carrier positioning mechanism 103, and is used to pick up the sheet material 10 from the feeding conveyor line 101 and transport it to the process carrier 20 of the carrier positioning mechanism 103.

[0086] For example, the feeding conveyor line 101 is a conveyor belt mechanism. The sheet material 10 conveyed by the previous process equipment can be conveyed to the feeding conveyor line 101 in single pieces or in whole stacks, and then conveyed by the feeding conveyor line 101 to a designated position for the sheet picking mechanism 102 to pick up the sheet material 10.

[0087] For example, the sheet material pick-and-place mechanism 102 includes a pick-and-place component and a pick-and-place drive component, with the drive component connected to the pick-and-place component. The pick-and-place component grips the sheet material 10, and the drive component moves the pick-and-place component to a designated position to grip the sheet material 10, or places the gripped sheet material 10 at a designated position. The drive component can be a multi-axis robotic arm, with the pick-and-place component located at the movable end of the multi-axis robotic arm, enabling high-precision displacement of the pick-and-place component. The pick-and-place component can be a suction cup or gripper, or other structure suitable for picking and placing the sheet material 10, and can be configured according to the shape and material of the sheet material 10, or according to the type of carrier.

[0088] In some embodiments, the handling device 200 includes a carrier placement platform 201, a handling gripping mechanism 202, and a handling drive mechanism 203. The carrier placement platform 201 is disposed between the loading device 100, the boat placement platform 300, and the transfer device 700, and is used to place the process carrier 20. The handling gripping mechanism 202 is used to grip the process carrier 20. The handling drive mechanism 203 is connected to the handling gripping mechanism 202. The handling drive mechanism 203 is used to drive the handling gripping mechanism 202 to move, thereby transferring the process carrier 20 between the loading device 100, the boat placement platform 300, and the transfer device 700.

[0089] For example, the handling and gripping mechanism 202 can be a gripper mechanism, which is suitable for gripping the process carrier 20. The handling drive mechanism 203 can be a multi-axis robotic arm, and the handling and gripping mechanism 202 is located at the active end of the multi-axis robotic arm, and the active range of the multi-axis robotic arm spans the area where the feeding device 100, the boat placement platform 300 and the transfer device 700 are located.

[0090] During the process of the transport device 200 transporting the process carrier 20 from the loading device 100 to the empty process boat 40 of the boat placement platform 300, the operation of the transport device 200 may include: first, the transport drive mechanism 203 drives the transport gripping mechanism 202 to move to the carrier positioning mechanism 103, and the transport gripping mechanism 202 grips the process carrier 20 in the carrier positioning mechanism 103; then, the transport drive mechanism 203 drives the transport gripping mechanism 202 to move to the boat placement platform 300, and drives the transport gripping mechanism 202 to insert the process carrier 20 into the process boat 40 in the boat placement platform 300.

[0091] During the process of the transport device 200 removing the process carrier 20 from the process boat 40 of the boat placement platform 300 and transporting it to the transfer device 700, the actions of the transport device 200 may include: first, the transport drive mechanism 203 drives the transport gripping mechanism 202 to move to the boat placement platform 300, and the transport gripping mechanism 202 grips the process carrier 20 in the process boat 40 of the boat placement platform 300; then, the transport drive mechanism 203 drives the transport gripping mechanism 202 to move to the transfer device 700, and the transport gripping mechanism 202 places the process carrier 20 in the transfer device 700.

[0092] During the process of transferring the process carrier 20 between the loading device 100, the boat placement platform 300 and the transfer device 700, the operation of the handling device 200 can be adjusted according to the process requirements. For example, the handling device 200 can also be used to put on and take off the cover of the process carrier 20, and this application does not limit this.

[0093] In some embodiments, the boat cooling platform 1000 is disposed on the side of the loading and transfer mechanism 1100 away from the boat placement platform 300, and the boat placement platform 300 and the boat cooling platform 1000 are sequentially distributed in a second direction. This shortens the distance between the boat cooling platform 1000 and the boat placement platform 300, and the boat-transferring device 400 can directly transfer the process boat 40 between the boat placement platform 300 and the boat cooling platform 1000 along the second direction. Multiple boat cooling platforms 1000 are provided, and these multiple boat cooling platforms 1000 are spaced apart along a first direction. Thus, multiple boat cooling platforms 1000 respectively hold multiple process boats 40, facilitating the transfer and cooling of the process boats 40. The boat-transferring device 400 can respectively transport the process boats 40 on the multiple boat cooling platforms 1000 along the first direction. For example, the number of boat cooling platforms 1000 is 4, and the 4 boat cooling platforms 1000 are arranged side-by-side along the first direction.

[0094] In some embodiments, the processing apparatus 500 is an ALD passivation process host. The processing apparatus 500 is disposed on the side of the boat cooling platform 1000 away from the loading and transfer mechanism 1100, and the boat placement platform 300, the boat cooling platform 1000, and the processing apparatus 500 are sequentially distributed in the second direction. In this way, the distance between the boat cooling platform 1000 and the processing apparatus 500 can be shortened, and the boat handling device 400 can directly transfer the process boat 40 between the boat cooling platform 1000 and the processing apparatus 500 along the second direction.

[0095] In some embodiments, the boat handling device 400 includes a boat gripping mechanism 401 and a boat handling drive mechanism 402. The boat gripping mechanism 401 grips the process boat 40. The boat handling drive mechanism 402 is connected to the boat gripping mechanism 401. The boat handling drive mechanism 402 drives the boat gripping mechanism 401 to move, thereby transferring the process boat 40 between the loading transfer area and the process transfer area.

[0096] For example, the boat gripping mechanism 401 can be a gripper assembly or other structure suitable for picking up and placing the process boat 40, and can be specifically configured according to the shape and size of the process boat 40. The boat moving drive mechanism 402 can be a gantry-type three-dimensional translation mechanism, which can drive the boat gripping mechanism 401 to move back and forth in the horizontal and vertical directions, wherein the horizontal direction includes a first direction and a second direction. By driving the boat gripping mechanism 401 to move along the second direction through the boat moving drive mechanism 402, the boat gripping mechanism 401 can span the boat placement platform 300, the boat cooling platform 1000 and the processing device 500, so as to realize the transfer of the process boat 40 between the boat placement platform 300, the boat cooling platform 1000 and the processing device 500. The boat-handling mechanism 402 drives the boat-grabbing mechanism 401 to move along the first direction, allowing the boat-grabbing mechanism 401 to span multiple boat placement platforms 300 or multiple boat cooling platforms 1000, thus placing the process boat 40 on different boat placement platforms 300 or different boat cooling platforms 1000. This makes the flow and placement of the process boat 40 more rational, improving not only space utilization but also the flow efficiency of the process boat 40.

[0097] In some embodiments, the loading transfer mechanism 1100 includes a loading docking assembly 1101 and a loading translation assembly 1102. The loading docking assembly 1101 is used to dock with the transfer device 700 to obtain a fully loaded processed transfer carrier 30 from the transfer device 700, or to provide a pre-loaded transfer carrier 30 to the transfer device 700. The loading docking assembly 1101 is also used to dock with the transition transfer mechanism 1300 to obtain a pre-loaded transfer carrier 30 from the transition transfer mechanism 1300, or to provide a fully loaded transfer carrier 30 to the transition transfer mechanism 1300. The loading translation assembly 1102 extends along a first direction and is connected to the loading docking assembly 1101. The loading translation assembly 1102 is used to drive the loading docking assembly 1101 to move along the first direction.

[0098] For example, the loading translation component 1102 can be a gantry-type transverse mechanism, which can drive the loading docking component 1101 to reciprocate in a first direction. For example, the loading docking component 1101 can dock with the transfer buffer mechanism 702 via a conveyor belt to realize the transfer of the transfer vehicle 30. The transfer buffer mechanism 702 is a buffer conveyor belt, which is used to carry the transfer vehicle 30 and also to transport the transfer vehicle 30 along a second direction.

[0099] The loading docking assembly 1101 is a loading docking conveyor belt, which is used to carry the transfer vehicle 30 and also to transport the transfer vehicle 30 along the second direction. The surface height of the loading docking conveyor belt is flush with the surface height of the buffer conveyor belt.

[0100] When the feeding transfer mechanism 1100 needs to obtain the transfer carrier 30 from the transfer device 700, firstly, the feeding translation component 1102 drives the feeding docking component 1101 to move along the first direction so that the feeding docking conveyor belt of the feeding docking component 1101 docks with the buffer conveyor belt of the transfer buffer mechanism 702; then, the buffer conveyor belt transports the transfer carrier 30 to the feeding docking conveyor belt along the second direction.

[0101] When the feeding transfer mechanism 1100 needs to provide the transfer carrier 30 to the transfer device 700, firstly, the feeding translation component 1102 drives the feeding docking component 1101 to move along the first direction so that the feeding docking conveyor belt of the feeding docking component 1101 docks with the buffer conveyor belt of the transfer buffer mechanism 702; then, the feeding docking conveyor belt transports the transfer carrier 30 to the buffer conveyor belt along the second direction.

[0102] In this embodiment, the loading docking component 1101 and the transfer buffer mechanism 702 adopt a smooth grounding method for the transition flow of the transfer carrier 30. In other embodiments, the loading docking component 1101 can also adopt other methods, such as using a gripper structure to grab the transfer carrier 30 and take it out from the transfer buffer mechanism 702, etc. The specific configuration can be made according to the type of carrier, and this application does not limit it.

[0103] In some embodiments, the transition transfer mechanism 1300 includes a docking conveying component 1301 and a docking switching component 1302, wherein the docking switching component 1302 is disposed on the side of the feeding transfer mechanism 1100 away from the transfer device 700, and the docking switching component 1302 is disposed on the side of the feeding transfer mechanism 1100 away from the feeding transfer mechanism 1100, thus the docking switching component 1302 is disposed between the docking conveying component 1301 and the feeding transfer mechanism 1100.

[0104] The docking switching component 1302 is used to transfer the transfer carrier 30 between the docking conveying component 1301 and the feeding transfer mechanism 1100, and the docking conveying component 1301 is used to transfer the transfer carrier 30 between the docking switching component 1302 and the unloading transfer mechanism 1200.

[0105] When it is necessary to transport the fully loaded transfer carrier 30 of the loading transfer mechanism 1100 to the unloading transfer mechanism 1200, the loading transfer mechanism 1100 transports the transfer carrier 30 to the docking conveyor 1301 through the docking switching component 1302, and the docking conveyor 1301 transports the transfer carrier 30 to the unloading transfer mechanism 1200.

[0106] When it is necessary to transport the pre-loaded transfer carrier 30 of the unloading transfer mechanism 1200 to the loading transfer mechanism 1100, the unloading transfer mechanism 1200 transports the pre-loaded transfer carrier 30 to the docking conveyor assembly 1301, and the docking conveyor assembly 1301 transports the transfer carrier 30 to the loading transfer mechanism 1100 through the docking switching assembly 1302.

[0107] The docking switching component 1302 is disposed at one end of the docking conveyor component 1301 near the loading transfer mechanism 1100. The docking conveyor component 1301 includes a first transition conveyor line 1301A and a second transition conveyor line 1301B. Both the first transition conveyor line 1301A and the second transition conveyor line 1301B are conveyor belt mechanisms, and the first transition conveyor line 1301A and the second transition conveyor line 1301B are arranged side by side with intervals. In this way, the first transition conveyor line 1301A and the second transition conveyor line 1301B are staggered and can independently convey the transfer carrier 30.

[0108] The docking switching assembly 1302 has a first state and a second state. When the docking switching assembly 1302 is in the first state, it docks with the first transition conveyor line 1301A, and conveys the transfer carrier 30 to the first transition conveyor line 1301A so that the first transition conveyor line 1301A can convey the transfer carrier 30 to the unloading transfer mechanism 1200. When the docking switching assembly 1302 is in the second state, it docks with the second transition conveyor line 1301B, and the second transition conveyor line 1301B conveys the transfer carrier 30 from the unloading transfer mechanism 1200 to the docking switching assembly 1302.

[0109] The first transition conveyor line 1301A and the second transition conveyor line 1301B can respectively realize the conveying of the transfer carrier 30. That is, while the first transition conveyor line 1301A conveys a fully loaded transfer carrier 30 to the downward material transfer mechanism 1200, the second transition conveyor line 1301B can also convey a pre-loaded transfer carrier 30 to the upward material transfer mechanism 1100. In this way, the forward conveying and reverse return of the transfer carrier 30 can be realized simultaneously, improving the flow efficiency.

[0110] For example, the docking switching component 1302 switches between the first and second states by lifting. The first transition conveyor line 1301A and the second transition conveyor line 1301B are arranged in a double-layered configuration, both extending along a second direction and spaced apart vertically. The first transition conveyor line 1301A and the second transition conveyor line 1301B can transport the transfer vehicle 30 in opposite directions. In the example of this application, the first transition conveyor line 1301A is located above the second transition conveyor line 1301B.

[0111] The docking switching assembly 1302 includes a switching conveyor belt 1302A and a switching drive unit 1302B. The switching conveyor belt 1302A is used to carry the transfer vehicle 30 and to transport the transfer vehicle 30 along a second direction. The switching drive unit 1302B is connected to the switching conveyor belt 1302A and is used to drive the switching conveyor belt 1302A to move up and down.

[0112] When the switching drive unit 1302B drives the switching conveyor belt 1302A to rise and fall to the first height, the surface height of the switching conveyor belt 1302A is flush with the surface height of the first transition conveyor line 1301A. At this time, the docking switching assembly 1302 is in the first state, and the switching conveyor belt 1302A can dock with the first transition conveyor line 1301A.

[0113] When the switching drive unit 1302B drives the switching conveyor belt 1302A to rise and fall to the second height, the surface height of the switching conveyor belt 1302A is flush with the surface height of the second transition conveyor line 1301B. At this time, the docking switching assembly 1302 is in the second state, and the switching conveyor belt 1302A can dock with the second transition conveyor line 1301B.

[0114] When the switching drive unit 1302B drives the switching conveyor belt 1302A to rise and fall to the third height, the surface height of the switching conveyor belt 1302A is flush with the surface height of the loading docking assembly 1101. At this time, the switching conveyor belt 1302A can dock with the loading docking assembly 1101. The third height can be configured to be equal to the first height or equal to the second height.

[0115] When it is necessary to transport a fully loaded transfer vehicle 30 to the first transition conveyor line 1301A, firstly, the loading translation component 1102 drives the loading docking component 1101 carrying the fully loaded transfer vehicle 30 to move to one side of the docking switching component 1302, and the switching drive component 1302B drives the switching conveyor belt 1302A to rise and fall to the third height; then, the loading docking conveyor belt of the loading docking component 1101 transports the transfer vehicle 30 to the switching conveyor belt 1302A; then, the switching drive component 1302B drives the switching conveyor belt 1302A to rise and fall to the first height, and the switching conveyor belt 1302A transports the transfer vehicle 30 to the first transition conveyor line 1301A.

[0116] When it is necessary to transport the pre-loaded transfer carrier 30 to the loading docking assembly 1101, firstly, the switching drive unit 1302B drives the switching conveyor belt 1302A to rise and fall to the second height, and the second transition conveyor line 1301B transports the transfer carrier 30 to the switching conveyor belt 1302A; then, the loading translation assembly 1102 drives the loading docking assembly 1101, which carries the fully loaded transfer carrier 30, to move to one side of the docking switching assembly 1302, and the switching drive unit 1302B drives the switching conveyor belt 1302A to rise and fall to the third height; then, the switching conveyor belt 1302A transports the transfer carrier 30 to the loading docking conveyor belt of the loading docking assembly 1101.

[0117] In this embodiment, the docking conveyor assembly 1301 adopts a double-layer conveyor belt to enable simultaneous conveying of two conveyor lines in different directions. In other embodiments, the docking conveyor assembly 1301 may also adopt other structures, such as a double-rail conveyor line arranged in parallel in the horizontal direction. The specific configuration can be made according to actual needs, and this application does not impose any restrictions on it.

[0118] In some embodiments, the unloading transfer mechanism 1200 includes an unloading conveyor line 1201 and an unloading translation component 1202. The unloading conveyor line 1201 is used to dock with a transition transfer mechanism 1300 to obtain a fully loaded, processed transfer carrier 30 from the transition transfer mechanism 1300, or to provide a pre-loaded transfer carrier 30 to the transition transfer mechanism 1300. The unloading docking is also used to dock with an unloading device 900 to obtain a pre-loaded transfer carrier 30 from the unloading device 900, or to provide a fully loaded transfer carrier 30 to the unloading device 900. The unloading translation component 1202 extends along a first direction and is connected to the unloading conveyor line 1201. The unloading translation component 1202 is used to drive the unloading conveyor line 1201 to move along the first direction.

[0119] For example, the unloading translation component 1202 can be a gantry-type transverse transfer mechanism, which can drive the unloading conveyor line 1201 to reciprocate in a first direction. For example, the height of the unloading conveyor line 1201 is set to correspond to the height of the transition transfer mechanism 1300, and the unloading conveyor line 1201 can transport the transfer carrier 30 to the transition transfer mechanism 1300 in a horizontal direction to realize the docking between the unloading conveyor line 1201 and the transition transfer mechanism 1300.

[0120] In some embodiments, the unloading transfer mechanism 1200 has two sets, each set of which includes an unloading conveyor line 1201 and an unloading translation component 1202. The two sets of unloading transfer mechanisms 1200 are respectively used to dock with the first transition conveyor line 1301A and the second transition conveyor line 1301B.

[0121] For example, two sets of feeding conveyor mechanisms 1200 are distributed vertically at intervals. One set of feeding conveyor mechanisms 1200 is defined as the first feeding conveyor mechanism 1200A, and the other set is defined as the second feeding conveyor mechanism 1200B. The surface height of the feeding conveyor line 1201 of the first feeding conveyor mechanism 1200A is flush with the surface height of the first transition conveyor line 1301A. The surface height of the feeding conveyor line 1201 of the second feeding conveyor mechanism 1200B is flush with the surface height of the second transition conveyor line 1301B. When the feeding conveyor line 1201 of the first feeding transfer mechanism 1200A moves to one side of the first transition conveyor line 1301A, the first feeding transfer mechanism 1200A docks with the first transition conveyor line 1301A. The first transition conveyor line 1301A can transport the fully loaded transfer vehicle 30 to the first feeding transfer mechanism 1200A along the second direction. Then, the first feeding transfer mechanism 1200A can transport the fully loaded transfer vehicle 30 to the feeding device 900. After the second unloading transfer mechanism 1200B obtains the pre-loaded transfer carrier 30 from the unloading device 900, the unloading conveyor line 1201 of the second unloading transfer mechanism 1200B can be moved to one side of the second transition conveyor line 1301B so that the second unloading transfer mechanism 1200B docks with the second transition conveyor line 1301B; then, the second unloading transfer mechanism 1200B can transport the pre-loaded transfer carrier 30 to the second transition conveyor line 1301B along the second direction.

[0122] In this embodiment, the unloading transfer mechanism 1200 adopts a double-layer conveyor belt, enabling it to directly connect with the first transition conveyor line 1301A and the second transition conveyor line 1301B, thereby improving the transfer efficiency of the transfer carrier 30. Furthermore, the conveying method of the unloading transfer mechanism 1200 can be adjusted according to the conveying method of the transition transfer mechanism 1300. That is, if the transition transfer mechanism 1300 can adopt other structures, such as a double-track conveyor line arranged in parallel in the horizontal direction, the unloading transfer mechanism 1200 can also adaptably adopt a corresponding double-track conveyor line. This application does not impose any limitations on this.

[0123] In some embodiments, the unloading device 900 includes an integrated receiving mechanism 1400 and / or a guide sheet receiving mechanism 1500. The integrated receiving mechanism 1400 is used to remove multiple processed sheet materials 10 from the transfer carrier 30 and transport the removed sheet materials 10 together to a designated location; the pre-loaded transfer carrier 30 can be returned to the unloading transfer mechanism 1200. The guide sheet receiving mechanism 1500 is used to remove multiple processed sheet materials 10 from the transfer carrier 30 and transport the removed sheet materials 10 individually to a designated location; the pre-loaded transfer carrier 30 can be returned to the unloading transfer mechanism 1200. The integrated receiving mechanism 1400 can unload multiple sheet materials 10 in a stack, which can then be directly stored or fed into the next process as a whole. The sheet-guiding receiving mechanism 1500 can support the sequential unloading of multiple sheet materials 10 into multiple individual sheet materials 10, which can then be fed into the next process individually. Thus, the unloading device 900 can support different unloading modes to suit different application scenarios and facilitate operation and management.

[0124] The above-described working modes of the integrated receiving mechanism 1400 and the guide plate receiving mechanism 1500 are merely illustrative examples of the optional working modes of the unloading device 900. In other embodiments, the unloading device 900 may also support other unloading modes, and this application does not impose any limitations on this.

[0125] In the example of this application, the unloading device 900 includes an integrated receiving mechanism 1400 and a guide piece receiving mechanism 1500. Both the integrated receiving mechanism 1400 and the guide piece receiving mechanism 1500 are located on the side of the unloading transfer mechanism 1200 away from the transition transfer mechanism 1300, and are spaced apart along a first direction. There are two guide piece receiving mechanisms 1500, and the two sets of guide piece receiving mechanisms 1500 are spaced apart along the first direction. Thus, the unloading transfer mechanism 1200 can transfer the transport carrier 30 along the first direction via the integrated receiving mechanism 1400 and the guide piece receiving mechanism 1500, respectively.

[0126] For example, the integrated receiving mechanism 1400 is positioned at a designated operating station. When a fully loaded transfer carrier 30 is delivered to the operating station, the sheet material 10 can be removed from the transfer carrier 30 by automated equipment or manual means, thus obtaining a pre-loaded transfer carrier 30. The integrated receiving mechanism 1400 can be connected to the unloading flow mechanism 1200 via a conveyor belt to transfer the transfer carrier 30. The integrated receiving mechanism 1400 uses a double-layer conveyor belt and includes a first integrated conveyor line and a second integrated conveyor line distributed vertically. The first integrated conveyor line is used to carry the transfer carrier 30 and also to transport the transfer carrier 30 along a second direction. The surface height of the first integrated conveyor line is flush with the surface height of the unloading conveyor line 1201 of the first unloading flow mechanism 1200A. The second integrated conveyor line is used to carry the transfer carrier 30 and also to transport the transfer carrier 30 along a second direction. The surface height of the second integrated conveyor line is flush with the surface height of the unloading conveyor line 1201 of the second unloading transfer mechanism 1200B. The first integrated conveyor line and the second integrated conveyor line can transport the transfer carrier 30 in opposite directions.

[0127] When the first unloading translation component 1202 drives the first integrated receiving mechanism 1400 to move to one end of the integrated receiving mechanism 1400, the integrated receiving mechanism 1400 docks with the first unloading mechanism 1200A. The first unloading mechanism 1200A can transport the fully loaded transfer carrier 30 to the first integrated conveyor line along the second direction. Then, the first integrated conveyor line transports the fully loaded transfer carrier 30 to the operating station, where the sheet material 10 can be removed from the transfer carrier 30 by automated equipment or manual means, and the pre-loaded transfer carrier 30 is transported to the second integrated conveyor line. Then, the second integrated conveyor line can transport the pre-loaded transfer carrier 30 to the second unloading mechanism 1200B along the second direction.

[0128] In this embodiment, the integrated receiving mechanism 1400 adopts a double-layer conveyor belt, enabling it to directly connect with the first unloading mechanism 1200A and the second unloading mechanism 1200B, thereby improving the transfer efficiency of the transfer carrier 30. Furthermore, the conveying method of the integrated receiving mechanism 1400 can be adjusted according to the conveying method of the unloading transfer mechanism 1200. That is, if the unloading transfer mechanism 1200 can adopt other structures, such as a horizontally parallel double-rail conveyor line, the integrated receiving mechanism 1400 can also adaptably adopt a corresponding double-rail conveyor line. This application does not impose any limitations on this.

[0129] In some embodiments, the sheet receiving mechanism 1500 includes a carrier transmission assembly 1600, a sheet transmission assembly 1700, and a sheet transfer assembly 1800. The carrier transmission assembly 1600 is disposed on one side of the unloading transfer mechanism 1200, and one end of the carrier transmission assembly 1600 can dock with the unloading transfer mechanism 1200. The carrier transmission assembly 1600 is used to carry the transfer carrier 30 and to convey the transfer carrier 30 along a second direction. The sheet transmission assembly 1700 is disposed on one side of the carrier transmission assembly 1600, and the sheet transmission assembly 1700 is used to carry the sheet material 10 and to convey the sheet material 10 along a second direction. The sheet transfer assembly 1800 is disposed between the carrier transfer assembly 1600 and the sheet transfer assembly 1700. The sheet transfer assembly 1800 is used to grab the sheet material 10 from the fully loaded transfer carrier 30 of the carrier transfer assembly 1600 and transport the sheet material 10 to the sheet transfer assembly 1700.

[0130] The working method of the guide plate receiving mechanism 1500 is as follows: First, the unloading transfer mechanism 1200 transports the fully loaded transfer carrier 30 to the carrier transmission assembly 1600, and the carrier transmission assembly 1600 transports the fully loaded transfer carrier 30 to the designated position; then, the guide plate transfer assembly 1800 grabs the sheet material 10 from the fully loaded transfer carrier 30 and transports the sheet material 10 to the guide plate transmission assembly 1700; then, the guide plate transmission assembly 1700 transports the sheet material 10 to the next process, and the carrier transmission assembly 1600 transports the pre-loaded transfer carrier 30 back to the unloading transfer mechanism 1200.

[0131] For example, the sheet conveying assembly 1700 is a conveyor belt mechanism. Multiple sheet materials 10 can be laid flat on the sheet conveying assembly 1700, which then transports the multiple sheet materials 10 to the outside of the equipment, allowing each sheet material 10 to be directly input into the next process. For example, the sheet transfer assembly 1800 includes a sheet gripper 1801 and a transfer drive 1802, with the transfer drive 1802 connected to the sheet gripper 1801. The sheet gripper 1801 is used to grip the sheet material 10, and the transfer drive 1802 is used to drive the sheet gripper 1801 to move to a designated position to grip the sheet material 10, or to place the gripped sheet material 10 at a designated position. The transfer drive 1802 can be a gantry-type three-dimensional translation mechanism, which can drive the sheet picking member to move reciprocally in both the horizontal and vertical directions. The gripper 1801 can be a suction cup or a gripper, etc., suitable for gripping sheet material 10. The specific configuration can be based on the shape and material of sheet material 10, or on the type of carrier.

[0132] In some embodiments, the carrier transfer assembly 1600 includes a carrier conveyor belt 1601 and a carrier return unit 1602. The carrier conveyor belt 1601 is disposed on one side of the unloading transfer mechanism 1200 and is used to dock with the unloading transfer mechanism 1200 to transfer the transfer carrier 30. The carrier return unit 1602 is disposed at the end of the carrier conveyor belt 1601 away from the unloading transfer mechanism 1200 and is used to switch the conveying direction of the transfer carrier 30 on the carrier conveyor belt 1601.

[0133] The carrier conveyor belts 1601 are arranged in multiple sets, spaced apart along a first direction. A guide plate transfer assembly 1700 is disposed between the multiple sets of carrier conveyor belts 1601. A carrier return unit 1602 is used to transfer the transfer carrier 30 between the multiple sets of carrier return units 1602. A guide plate transfer assembly 1800 is used to transfer the sheet material 10 between the multiple sets of carrier return units 1602 and an adjacent guide plate transfer assembly 1700. This improves the transfer efficiency between the sheet material 10 and the transfer carrier 30. In the example of this application, each carrier transfer assembly 1600 has two sets of carrier conveyor belts 1601, distributed on both sides of the guide plate transfer assembly 1700.

[0134] For example, the carrier conveyor belt 1601 includes a process carrier conveyor line 1601A and a transfer carrier conveyor line 1601B, wherein the process carrier conveyor line 1601A and the transfer carrier conveyor line 1601B are arranged side by side at intervals. The process carrier conveyor line 1601A is used to dock with the first unloading mechanism 1200A, and the process carrier conveyor line 1601A is used to carry the transfer carrier 30 and transport the transfer carrier 30 along the second direction. The surface height of the process carrier conveyor line 1601A is flush with the surface height of the unloading conveyor line 1201 of the first unloading transfer mechanism 1200A.

[0135] The transfer carrier conveyor line 1601B is used to dock with the second unloading mechanism 1200B. The transfer carrier conveyor line 1601B carries the transfer carrier 30 and transports it along a second direction. The surface height of the transfer carrier conveyor line 1601B is flush with the surface height of the unloading conveyor line 1201 of the second unloading mechanism 1200B. The process carrier conveyor line 1601A and the transfer carrier conveyor line 1601B can transport the transfer carrier 30 in opposite directions.

[0136] For example, the vehicle return unit 1602 includes a vehicle buffer 1603 and a return drive 1604, wherein the vehicle buffer 1603 is used to grab the transfer vehicle 30, and the return drive 1604 is connected to the vehicle buffer 1603 and is used to drive the vehicle buffer 1603 to move.

[0137] The carrier transfer assembly 1600 operates as follows: First, the process carrier conveyor line 1601A receives a fully loaded transfer carrier 30 from the first unloading mechanism 1200A and conveys the fully loaded transfer carrier 30 toward the carrier return unit 1602; then, the sheet transfer assembly 1800 removes the sheet material 10 from the transfer carrier 30 to obtain a pre-loaded transfer carrier 30; then, the process carrier conveyor line 1601A conveys the pre-loaded transfer carrier 30 to the carrier return unit 1602; then, the return drive 1604 drives the carrier buffer. Component 1603 moves to process carrier conveyor line 1601A, and carrier buffer component 1603 acquires the pre-loaded transfer carrier 30; then, return drive component 1604 drives carrier buffer component 1603 to transfer carrier conveyor line 1601B, and carrier buffer component 1603 puts the transfer carrier 30 loaded with base tray 50 into process carrier conveyor line 1601A; then, transfer carrier conveyor line 1601B conveys the transfer carrier 30 loaded with base tray 50 to unloading transfer mechanism 1200 so that unloading transfer mechanism 1200 acquires the pre-loaded transfer carrier 30.

[0138] For example, the process carrier conveyor line 1601A and the transfer carrier conveyor line 1601B are arranged in two layers, one above the other. The first transition conveyor line 1301A and the second transition conveyor line 1301B both extend along the second direction, and the first transition conveyor line 1301A and the second transition conveyor line 1301B are distributed at intervals in the vertical direction. The first transition conveyor line 1301A is located above the second transition conveyor line 1301B.

[0139] The carrier buffer 1603 can be a conveyor belt mechanism. The carrier buffer 1603 can move to a first position or a second position under the drive of the return drive 1604. When the carrier buffer 1603 is in the first position, its surface height is flush with the surface height of the process carrier conveyor line 1601A, and the carrier buffer 1603 can dock with the process carrier conveyor line 1601A. When the carrier buffer 1603 is in the second position, its surface height is flush with the surface height of the transfer carrier conveyor line 1601B, and the carrier buffer 1603 can dock with the transfer carrier conveyor line 1601B.

[0140] In this embodiment, the carrier transfer assembly 1600 adopts a double-layer conveyor belt, enabling it to directly connect with the first unloading mechanism 1200A and the second unloading mechanism 1200B, thereby improving the transfer efficiency of the transfer carrier 30. Furthermore, the conveying method of the carrier transfer assembly 1600 can be adjusted according to the conveying method of the unloading transfer mechanism 1200. That is, if the unloading transfer mechanism 1200 can adopt other structures, such as a horizontally parallel double-rail conveyor line, the carrier transfer assembly 1600 can also adaptably adopt a corresponding double-rail conveyor line. This application does not impose any limitations on this.

[0141] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. A material transfer system, characterized by, The device includes a base, a handling device, a transfer device, and a circulation device. The base is used to support stacked sheet materials and can be placed in multiple different carriers, including process carriers and transfer carriers. The transfer device is disposed between the handling device and the circulation device and has a base station for buffering the base, a process station for buffering the process carriers, and a transfer station for buffering the transfer carriers. The transfer device is used to receive the transfer vehicle through the transfer station; The conveying device is used to transport the process carrier loaded with the processed sheet material and the base to the process station; The transfer device is also used to transport the processed sheet material and the base tray in the process carrier to the empty transfer carrier; The transfer device is used to move the transfer carrier loaded with the processed sheet material and the base from the transfer station, and also to transport the transfer carrier to the transfer station.

2. The material handling system of claim 1, wherein, The transfer device includes: The base support buffer mechanism is equipped with the aforementioned base support station; The transfer and buffer mechanism is equipped with the aforementioned transfer station; A process buffer mechanism is provided with the aforementioned process station; A transfer and gripping mechanism is used to grip the base tray separately, or to grip the sheet material and the base tray together; A transfer drive mechanism, connected to the transfer gripping mechanism, is used to drive the transfer gripping mechanism to move to the base station, the transfer station, or the process station.

3. A passivation process line characterized in that, Including the material transfer system as described in claim 1 or 2, the passivation process production line further includes a feeding device, a boat placement platform, a boat handling device, a processing device, and a unloading device; the boat placement platform is used to buffer the process boats; The feeding device is used to buffer the process carrier loaded with the base and to load the unprocessed sheet material into the process carrier; The conveying device is used to convey the process carrier of the loading device to the process boat of the boat placement platform; The boat-moving device is used to transfer the process boat between the boat placement platform and the processing device; The transport device is also used to transport the process carrier, which is loaded with the processed sheet material and the base, from the process boat to the process station after the process boat has been processed by the processing device. The conveying device is also used to convey the process carrier loaded with the base tray from the transfer device to the loading device after the base tray is loaded onto the empty process carrier; The transfer device is used to move the transfer carrier loaded with the processed sheet material and the base from the transfer station to the unloading device; The unloading device is used to remove the processed sheet material from the transfer carrier; The transfer device is also used to move the transfer carrier loaded with the base from the unloading device to the transfer device.

4. The passivation process line of claim 3, wherein, The conveying device includes: A carrier placement platform is located on one side of the transfer device and is used to place the process carrier; A handling and gripping mechanism for gripping the process carrier; A transport drive mechanism is connected to the transport gripping mechanism and is used to drive the transport gripping mechanism to move.

5. The passivation process line of claim 3, wherein, The transfer device includes: A feeding and transfer mechanism is used to convey the transfer vehicle along a first direction; The unloading transfer mechanism is distributed at intervals from the loading transfer mechanism along the second direction. The unloading transfer mechanism is used to transport the transfer carrier along the first direction, and there is an angle between the first direction and the second direction. A transition mechanism is disposed between the loading transition mechanism and the unloading transition mechanism, and the transition mechanism is used to transport the transfer carrier along the second direction; The passivation process production line has a feeding transfer area, a process transfer area, and a discharging transfer area. The process transfer area is formed between the feeding transfer mechanism, the discharging transfer mechanism, and the transition transfer mechanism. The feeding transfer area is formed on the side of the feeding transfer mechanism away from the process transfer area, and the discharging transfer area is formed on the side of the discharging transfer mechanism away from the process transfer area.

6. The passivation process line of claim 5, wherein, The feeding device, the handling device, the boat placement platform, and the transfer device are all located in the feeding and transfer area; The feeding device, the transfer device, the handling device, and the boat placement platform constitute a feeding unit. The feeding device, the transfer device, and the boat placement platform belonging to the same feeding unit are distributed at intervals around the handling device. The feeding unit has multiple sets, and multiple transfer devices in the multiple sets of feeding units are all arranged on one side of the feeding and transfer mechanism and are distributed at intervals along the first direction.

7. The passivation process line of claim 5, wherein, The transfer device includes: the passivation process production line further includes a boat cooling platform, which is used to store the processed process boat for cooling; the boat moving device is used to transfer the process boat between the boat placement platform, the boat cooling platform and the processing device.

8. The passivation process line of claim 7, wherein, Both the boat cooling platform and the processing device are located in the process flow area; The boat cooling platform is located on one side of the loading and transfer mechanism, and the processing device is located on the side of the boat cooling platform away from the loading and transfer mechanism.

9. The passivation process line of claim 5, wherein, The transfer device includes: the unloading device includes an integrated receiving mechanism and / or a guide plate receiving mechanism; The integrated receiving mechanism is used to remove the processed sheet material from the transfer carrier and transport multiple sheet materials together to a designated location. The guide sheet receiving mechanism is used to remove multiple processed sheet materials from the transfer carrier and individually transport the multiple sheet materials to a designated location.

10. The passivation process production line according to claim 5, characterized in that, The boat-moving device includes: A boat-grabbing mechanism is used to grab the process boat; A boat-moving drive mechanism is connected to the boat-grabbing mechanism; the boat-moving drive mechanism is used to drive the boat-grabbing mechanism to move, so as to transfer the process boat between the loading transfer area and the process transfer area.

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