A quartz furnace door cleaning device convenient to use

Abstract

The utility model relates to quartz furnace door cleaning technical field, specifically disclose a quartz furnace door cleaning device convenient to use, including the box body with drain pipe and liquid inlet pipe, the inside of box body is provided with the mechanism of turning over, the mechanism of turning over includes the pivot that rotates and connects in the inside front and back two end faces of box body, two the opposite end of pivot all is fixedly connected with support plate, two the opposite side of support plate all installs the electric push rod, two the output of electric push rod all is fixedly connected with the clamping seat, the front end of box body is installed with the motor that output end is fixedly connected with the front pivot, the bottom of box body is installed with second electric push rod, the output of second electric push rod penetrates box body and is fixedly connected with the support disc, can drive quartz furnace door rotation 180 degrees through the mechanism of turning over and turn over, make it dead angle soak, and in the spraying process, can drive quartz furnace door turn over again through the mechanism of turning over, make it wash more completely.

Description

Technical Field

[0001] This utility model relates to the field of quartz furnace door cleaning technology, and specifically discloses an easy-to-use quartz furnace door cleaning device. Background Technology

[0002] Quartz furnace doors, as core components of semiconductor, photovoltaic, and high-temperature heat treatment equipment, are exposed to high temperatures, corrosive gases, and deposits for extended periods. Their surfaces are prone to adhering to silica particles, metal oxides, and organic residues. These contaminants not only reduce the light transmittance of the quartz (affecting process monitoring accuracy) but can also lead to seal failure (decrease in vacuum level) and even thermal stress cracks. Therefore, regular cleaning is crucial.

[0003] Existing methods for cleaning quartz furnace doors mainly rely on the following approaches, but these methods have significant drawbacks:

[0004] Fixed cleaning machine: Some equipment uses immersion or spray cleaning, but because the quartz furnace door is placed inside the cleaning machine for immersion or spraying, it is inconvenient to turn the quartz furnace door over, resulting in cleaning dead corners.

[0005] In addition, open-type cleaning causes waste liquid to splash, and the splashing water mist may carry pollutants outside the chamber, affecting the working environment. Therefore, an easy-to-use quartz furnace door cleaning device is needed to solve this problem. Utility Model Content

[0006] This utility model proposes an easy-to-use quartz furnace door cleaning device, which makes it convenient to turn the quartz furnace door over, cleans without dead corners, prevents liquid splashing, and maintains a good working environment.

[0007] This utility model is implemented as follows: a user-friendly quartz furnace door cleaning device includes a box with a drain pipe and a liquid inlet pipe. The box is equipped with a flipping mechanism, which includes a rotating shaft rotatably connected to the front and rear end faces inside the box. A support plate is fixedly connected to one end of each of the two rotating shafts. An electric push rod is installed on one side of each of the two support plates. A clamping seat is fixedly connected to the output end of each of the two electric push rods. A motor with its output end fixedly connected to the front rotating shaft is installed at the front end of the box.

[0008] A second electric actuator is installed at the bottom of the housing, and the output end of the second electric actuator passes through the housing and is fixedly connected to a support plate.

[0009] A protective cover is provided on the top of the housing. A drainage pipe is connected through and fixedly connected to the upper end of the protective cover. The lower end of the drainage pipe is connected to a drainage plate located inside the protective cover. The lower end of the drainage plate is connected to multiple evenly distributed nozzles.

[0010] As a preferred embodiment of the present invention, a quartz furnace door cleaning device that is easy to use, wherein the left and right ends of the housing are fixedly connected to a first support block, and the left and right ends of the protective cover are fixedly connected to two second support blocks, and the lower ends of the two first support blocks are each equipped with a cylinder, and the output ends of the two cylinders pass through the first support blocks and are respectively fixedly connected to the two second support blocks.

[0011] As a preferred embodiment of this utility model of a convenient quartz furnace door cleaning device, the upper end of the support plate is provided with a plurality of evenly distributed mesh holes.

[0012] As a preferred embodiment of this utility model for a user-friendly quartz furnace door cleaning device, the outer wall of the clamping seat is fixedly connected to two guide rods that pass through and are slidably connected to the through holes opened on the outer wall of the support plate.

[0013] As a preferred embodiment of the quartz furnace door cleaning device of this utility model, both of the two clamping seats have V-shaped grooves on their opposite sides, and anti-slip pads are provided inside each.

[0014] As a preferred embodiment of this utility model for a user-friendly quartz furnace door cleaning device, the motor is a worm gear self-locking motor.

[0015] As a preferred embodiment of this utility model of a user-friendly quartz furnace door cleaning device, a controller is installed at the front end of the housing.

[0016] The beneficial effects of this utility model are:

[0017] (1) The quartz furnace door can be rotated 180 degrees by the flipping mechanism to flip it over, so that it can be soaked without dead corners. During the spraying process, the quartz furnace door can be flipped over again by the flipping mechanism to make it rinsed more thoroughly.

[0018] (2) The lower end face of the protective cover is brought into contact with the upper end face of the box, and deionized water is drawn into the interior of the drainage plate through the drainage pipe and sprayed out through multiple nozzles to rinse the quartz furnace door. During the rinsing process, the protective cover blocks the liquid from splashing. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0020] Figure 1 This is an overall structural diagram of a user-friendly quartz furnace door cleaning device according to this utility model;

[0021] Figure 2 This is an overall cross-sectional view of the present invention;

[0022] Figure 3 This is a partial structural diagram of the present invention;

[0023] Figure 4 This is a partial structural diagram of the present invention.

[0024] The markings in the diagram are: 1. Box body; 2. Protective cover; 3. Drainage pipe; 4. Second support block; 5. First support block; 6. Cylinder; 7. Motor; 8. Second electric actuator; 9. Drainage plate; 10. Nozzle; 11. Rotating shaft; 12. Support plate; 13. Electric actuator; 14. Support plate; 15. Clamping seat; 16. Guide rod. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments to aid in understanding its content. Unless otherwise specified, the methods used in this invention are conventional methods; the raw materials and apparatus used, unless otherwise specified, are conventional commercially available products.

[0026] Please see Figure 1-4 A user-friendly quartz furnace door cleaning device includes a housing 1 with a drain pipe and a liquid inlet pipe. The housing 1 is equipped with a flipping mechanism, which includes a rotating shaft 11 rotatably connected to the front and rear ends of the housing 1. Support plates 12 are fixedly connected to the opposite ends of the two rotating shafts 11. Electric push rods 13 are installed on the opposite sides of the two support plates 12. Clamping seats 15 are fixedly connected to the output ends of the two electric push rods 13. A motor 7 with its output end fixedly connected to the front rotating shaft 11 is installed at the front end of the housing 1.

[0027] A second electric actuator 8 is installed at the bottom of the housing 1. The output end of the second electric actuator 8 passes through the housing 1 and is fixedly connected to a support plate 14.

[0028] A protective cover 2 is provided on the top of the housing 1. A drainage pipe 3 is connected through and fixedly connected to the upper end of the protective cover 2. The lower end of the drainage pipe 3 is connected to a drainage plate 9 located inside the protective cover 2. The lower end of the drainage plate 9 is connected to multiple evenly distributed nozzles 10.

[0029] In this embodiment: the quartz furnace door to be cleaned is placed on the upper end of the support plate 14. Then, hydrofluoric acid solution is added inside the housing 1 and soaked for a period of time. After that, the second electric actuator 8 is activated to drive the support plate 14 to move upward, so that the upper end of the support plate 14 abuts against the lower end of the clamping seat 15. The two electric actuators 13 drive the two clamping seats 15 connected to them to move relative to each other, clamping and fixing the quartz furnace door. Then, the motor 7 is activated to drive the rotating shaft 11 connected to it to rotate, thereby driving the quartz furnace door to rotate 180 degrees to flip over. During the flipping process, the support plate 14 moves away from the quartz furnace door and flips over. Then, the second electric actuator 8 is activated again to drive the support plate 14 to move upward, supporting the quartz furnace door. The quartz furnace door is then immersed in the hydrofluoric acid solution again. After immersion for an appropriate amount of time, the second electric actuator 8 is activated again to drive the support plate 14 to move upward, so that the upper end of the support plate 14 abuts against the lower end of the clamping seat 15, and the lower end face of the protective cover 2 abuts against the upper end face of the box 1. Deionized water is then guided through the drainage pipe 3 into the interior of the drainage plate 9 and sprayed out through multiple nozzles 10 to rinse the quartz furnace door. After rinsing, the quartz furnace door is flipped over and rinsed again by the flipping mechanism.

[0030] As a technical optimization of this utility model, the left and right ends of the housing 1 are fixedly connected to the first support block 5, and the left and right ends of the protective cover 2 are fixedly connected to the two second support blocks 4. The lower ends of the two first support blocks 5 are each equipped with a cylinder 6, and the output ends of the two cylinders 6 pass through the first support block 5 and are respectively fixedly connected to the two second support blocks 4.

[0031] In this embodiment, two second support blocks 4 and protective cover 2 can be moved by two cylinders 6.

[0032] As a technical optimization of this utility model, the upper end of the support plate 14 is provided with a plurality of evenly distributed mesh holes.

[0033] In this embodiment, the mesh allows liquid to pass easily through the support plate 14.

[0034] As a technical optimization of this utility model, the outer wall of the clamping seat 15 is fixedly connected to two guide rods 16 that pass through the through holes opened on the outer wall of the support plate 12 and are slidably connected thereto.

[0035] In this embodiment, the stability of the movement of the clamping seat 15 can be increased by the cooperation between the guide rod 16 and the corresponding through hole.

[0036] As a technical optimization of this utility model, V-shaped grooves are provided on the opposite sides of the two clamping seats 15, and anti-slip pads are provided inside each of them.

[0037] In this embodiment: the V-groove can be used to easily center and fix the quartz furnace door, and the anti-slip pad can increase the stability of clamping the quartz furnace door.

[0038] As a technical optimization of this utility model, motor 7 is a worm gear self-locking motor.

[0039] In this embodiment: the motor 7 is a worm gear self-locking motor that can lock the rotation angle of the shaft 11.

[0040] As a technical optimization of this utility model, a controller is installed at the front end of the housing 1.

[0041] In this embodiment, the motor 7, the electric push rod 13, and the second electric push rod 8 are all electrically connected to the controller, and the operation of each component can be controlled by the controller.

[0042] The working principle and usage process of this utility model are as follows: Place the quartz furnace door to be cleaned on the upper end of the support plate 14. Add hydrofluoric acid solution inside the chamber 1, ensuring the hydrofluoric acid solution level inside the chamber 1 is lower than the clamping seat 15. After soaking for a period of time, activate the second electric actuator 8 to drive the support plate 14 upwards, bringing the upper end of the support plate 14 into contact with the lower end of the clamping seat 15. Drive the two electric actuators 13 to move the two connected clamping seats 15 relative to each other, clamping and fixing the quartz furnace door. Then, start the motor 7 to drive the connected rotating shaft 11 to rotate, thereby driving the quartz furnace door to rotate 180 degrees for flipping. During the process, the support plate 14 moves away from the quartz furnace door. After flipping, the second electric push rod 8 is activated again to drive the support plate 14 to move upward, supporting the quartz furnace door. The quartz furnace door is then immersed in hydrofluoric acid solution again. After immersion for an appropriate amount of time, the second electric push rod 8 is activated again to drive the support plate 14 to move upward, so that the upper end of the support plate 14 abuts against the lower end of the clamping seat 15, and the lower end face of the protective cover 2 abuts against the upper end face of the box 1. Deionized water is then guided through the drainage pipe 3 to the interior of the drainage plate 9 and sprayed out through multiple nozzles 10 to rinse the quartz furnace door. After rinsing, the quartz furnace door is flipped over and rinsed again by the flipping mechanism.

[0043] In the description of this utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] However, the above description is only a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.

Claims

1. A user-friendly quartz furnace door cleaning device, comprising a housing (1) with a drain pipe and a liquid inlet pipe, characterized in that: The box (1) is provided with a flipping mechanism. The flipping mechanism includes a rotating shaft (11) rotatably connected to the front and rear end faces inside the box (1). A support plate (12) is fixedly connected to one end of each of the two rotating shafts (11). An electric push rod (13) is installed on one side of each of the two support plates (12). A clamping seat (15) is fixedly connected to the output end of each of the two electric push rods (13). A motor (7) with its output end fixedly connected to the front rotating shaft (11) is installed at the front end of the box (1). The bottom end of the housing (1) is equipped with a second electric actuator (8), the output end of which passes through the housing (1) and is fixedly connected to a support plate (14). A protective cover (2) is provided above the box (1). A drainage pipe (3) is connected through and fixedly connected to the upper end of the protective cover (2). The lower end of the drainage pipe (3) is connected to a drainage plate (9) located inside the protective cover (2). The lower end of the drainage plate (9) is connected to multiple evenly distributed nozzles (10).

2. The easy-to-use quartz furnace door cleaning device according to claim 1, characterized in that: The left and right ends of the box (1) are fixedly connected to a first support block (5), and the left and right ends of the protective cover (2) are fixedly connected to two second support blocks (4). The lower ends of the two first support blocks (5) are each equipped with a cylinder (6). The output ends of the two cylinders (6) pass through the first support block (5) and are respectively fixedly connected to the two second support blocks (4).

3. The easy-to-use quartz furnace door cleaning device according to claim 1, characterized in that: The upper end of the support plate (14) has multiple evenly distributed mesh holes.

4. The easy-to-use quartz furnace door cleaning device according to claim 1, characterized in that: The outer wall of the clamping seat (15) is fixedly connected to two guide rods (16) that pass through the through holes opened on the outer wall of the support plate (12) and are slidably connected thereto.

5. The easy-to-use quartz furnace door cleaning device according to claim 1, characterized in that: Both of the two clamping seats (15) have V-shaped grooves on their opposite sides, and anti-slip pads are provided inside each of them.

6. The easy-to-use quartz furnace door cleaning device according to claim 1, characterized in that: The motor (7) is a worm gear self-locking motor.

7. The easy-to-use quartz furnace door cleaning device according to claim 1, characterized in that: A controller is installed at the front end of the housing (1).

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