A fixture for photomask coating

Abstract

This utility model belongs to the field of coating fixture technology, specifically disclosing a fixture for photomask coating, including a back plate, a top plate mounted on the upper part of the back plate, sliding side plates and fixed side plates mounted on both sides of the back plate, and a base mounted on the bottom of the back plate; the top plate, sliding side plates, fixed side plates and base form an installation space for mounting the photomask, and the sliding side plates can slide laterally along the back plate to clamp the photomask. This utility model can adapt to the installation of photomasks of different sizes and specifications, and ensures the cleanliness of the glass surface of the photomask, avoiding the application of AF film.

Description

Technical Field

[0001] This utility model relates to the field of coating fixture technology, specifically to a fixture for coating photomasks. Background Technology

[0002] In precision optics fields such as semiconductor manufacturing and flat panel displays, photomasks are core components for pattern transfer, and their surface properties directly affect product yield and accuracy. As end-users increasingly demand higher product appearance quality, some photomasks require an AF film (anti-fingerprint film) to be deposited on their surface after pattern fabrication to achieve strong hydrophobicity, oil resistance, and fingerprint resistance. This technology is based on the "lotus effect," which involves coating the glass surface with nanomaterials to create a micro-rough structure and a low surface energy interface, thereby reducing the adhesion of contaminants.

[0003] Currently, the deposition of AF films on photomasks mainly employs magnetron sputtering. This process utilizes orthogonal electromagnetic fields to construct a closed magnetic field, confining electrons to the target surface and causing them to move in a spiral motion, significantly improving plasma density and sputtering efficiency. However, existing film loading fixtures suffer from significant technical bottlenecks:

[0004] Firstly, the fixture uses a hollow design, resulting in both the film surface and the glass surface being exposed after the mask is loaded. The only way to prevent coating on the glass surface is through a baffle plate suspended around the cavity. This method limits the number of coatings (existing coating fixtures can only meet the coating requirements of large-sized products of 700*800 and 813*1379, and each furnace can only coat one product at a time; for small-sized products of 550*450, 660*609, and 660*635 and below, each furnace can only coat two products at a time). Furthermore, products of different sizes cannot be mixed, and large and small sizes cannot be coated simultaneously (coating costs are charged per furnace). Since there is only one coating equipment, congestion will occur when there are many products, thus affecting product delivery time. This results in high coating costs per furnace and low coating quantities, thereby affecting coating efficiency.

[0005] Secondly, during magnetron sputtering, electrons are bound to the target surface and move in a spiral motion through a closed magnetic field in an orthogonal electromagnetic field. This makes it impossible to avoid uneven deposition of AF film on the mask glass surface. As a result, the non-filmed surface will produce a large number of stubborn white spots after cleaning after coating, which are difficult to deal with. This not only doubles the time for wiping the product before shipment, causing delays in product delivery, but also leaves many appearance problems, seriously affecting product quality and customer satisfaction, and has already triggered complaints from many downstream manufacturers. Utility Model Content

[0006] This utility model provides a fixture for photomask coating, which aims to adapt to the installation of photomasks of different sizes and specifications, and to ensure the cleanliness of the glass surface of the photomask, so as to avoid the coating of AF film.

[0007] This utility model is achieved through the following technical solution: a fixture for mask coating, including a back plate, a top plate installed on the upper part of the back plate, a sliding side plate and a fixed side plate respectively installed on both sides of the back plate, and a base installed on the bottom of the back plate;

[0008] The top plate, sliding side plate, fixed side plate and base form an installation space for mounting the mask, and the sliding side plate can slide laterally along the back plate to lock the mask.

[0009] Compared with existing technologies, this solution has the following advantages and beneficial effects:

[0010] In this fixture, the top plate, sliding side plate, fixed side plate, and base on the back plate form an installation space for installing the photomask. The sliding side plate can slide laterally along the back plate. Thus, when installing the photomask, the size of the installation space can be changed by sliding the sliding side plate according to the actual size of the photomask, thereby enabling the installation of photomasks of different widths and making it more widely applicable.

[0011] Furthermore, the installation space formed by the top plate, sliding side plate, fixed side plate, and base provides a clear installation position for the photomask, making it convenient for operators to place the photomask into the fixture. At the same time, the sliding side plate can slide laterally to lock the photomask in place, accommodating photomasks of different sizes and ensuring that the photomask remains fixed during the coating process, preventing shaking or displacement from affecting the coating effect.

[0012] The sliding side plate design allows the fixture to accommodate photomasks of different sizes within a certain range, eliminating the need to design dedicated fixtures for each size of photomask. This reduces the manufacturing and management costs of the fixture and improves its versatility and practicality.

[0013] In addition, by setting a back plate in this solution, when the mask is installed between the top plate, sliding side plate, fixed side plate and base, the back plate can block the glass surface of the mask, accurately defining the coating area. In this way, when coating the film surface of the mask, it can prevent its glass surface from being coated, effectively preventing product defects caused by coating position deviation, ensuring that the quality and performance of the coated product meet the standards, and improving the product qualification rate.

[0014] Furthermore, a transverse slide rail is installed on the back plate, and a transverse slider is connected to the sliding side plate. The transverse slider is inserted into the transverse slide rail and slides transversely along the transverse slide rail.

[0015] Beneficial effects: In this solution, by installing a transverse slide rail on the back plate, the transverse slider on the sliding side plate cooperates with the transverse slide rail. The transverse slide rail provides a precise guide path for the movement of the sliding side plate. With the embedded installation of the transverse slider, the sliding side plate can slide smoothly along a fixed direction, avoiding deviation, shaking or jamming during the sliding process. This ensures that the sliding side plate can accurately and stably clamp masks of different sizes, ensuring the accuracy of the mask positioning in the fixture.

[0016] Furthermore, a vertically arranged vertical slide rail is installed on the back plate, and a vertical slider is connected to the top plate. The vertical slider is inserted into the vertical slide rail and slides vertically along the vertical slide rail.

[0017] Beneficial effects: In this solution, the height of the top plate can be easily adjusted by sliding the vertical slider on the top plate along the vertical slide rail on the back plate, thereby changing the vertical dimensions of the fixture installation space. Combined with the lateral sliding of the sliding side plate, this allows the fixture to adapt to masks of different lengths and widths, greatly improving its versatility. It eliminates the need to design dedicated fixtures for masks of different lengths and widths, reducing production and management costs.

[0018] When installing the mask, the top plate can be slid upwards along the vertical slide rail to expand the installation space opening, making it easier to insert the mask smoothly. After installation, the top plate can be slid downwards to the appropriate position to fix the mask. The entire loading and unloading process is simple and smooth, saving manpower and time and improving production efficiency.

[0019] Furthermore, both the vertical slide rail and the horizontal slide rail are provided with grooves, and the shape of the grooves is rectangular, T-shaped or dovetail-shaped. The shapes of the vertical slider and the horizontal slider match the shape of the grooves.

[0020] Beneficial effects: In this solution, rectangular, T-shaped, or dovetail-shaped grooves fit tightly with correspondingly shaped sliders, constraining the sliders in multiple directions and effectively limiting their offset and wobbling during sliding. For example, dovetail and T-shaped grooves, through their unique cross-sectional shapes, can interlock with the sliders from the sides and bottom. Compared to simple planar contact, they can withstand greater external forces, ensuring the stability of the sliding side plates and top plates in both sliding and fixed states. This guarantees the mask is firmly clamped, improving stability during the coating process.

[0021] Furthermore, the special structure of the T-shaped and dovetail-shaped slides makes it difficult for the slider to detach from the slide once it is embedded, enhancing the reliability of the connection between the slider and the slide rail. Even when the fixture is subjected to vibration, external impact, or long-term high-frequency use, the slider is not easily dislodged from the slide rail, ensuring the safety and continuity of production.

[0022] Furthermore, the base has clearance grooves on both the left and right sides.

[0023] Beneficial effects: The clearance groove on the base in this solution provides a clearance space for the operator's hands when lifting and placing the mask, making it easier for the operator to put their hands down and avoiding the risk of being squeezed or pinched by the mask due to improper hand position during the installation process.

[0024] When placing the mask, the hand can use the clearance slot to more accurately adjust the position of the mask and quickly and smoothly place it into the installation space of the fixture; when removing the mask, the clearance slot can also be used to easily grasp the mask, making the entire installation and removal process smoother and more convenient.

[0025] Furthermore, a stop block is detachably fitted inside the relief groove, and the stop block can be inserted into or pulled out of the relief groove; after the stop block is inserted into the relief groove, it can block the relief groove.

[0026] Beneficial effects: When it is necessary to lift or lower the photomask, the stop block can be pulled out from the clearance groove to leave enough space for the operator's hands to operate; when the photomask is installed and enters the coating process, the stop block can be inserted to block the clearance groove, which can prevent coating materials, debris and other materials from falling into the groove and avoid contaminating the glass surface of the photomask.

[0027] Furthermore, the base has a horizontal slot, into which the bottom of the mask plate can be inserted.

[0028] Beneficial effects: In this solution, the slot provides a clear positioning reference for the bottom of the mask, allowing operators to quickly and accurately place the mask in the designated position, avoiding the impact of placement deviation on subsequent clamping and coating processes, ensuring the consistency of mask position each time, and improving assembly accuracy and production efficiency.

[0029] In addition, after the bottom of the mask is inserted into the slot, the limiting function of the slot can effectively restrict the horizontal displacement of the mask, thus limiting the mask. Together with the clamping of the top plate, sliding side plate and fixed side plate, a multi-directional stable constraint is formed. Even if the equipment vibrates during the coating process, the mask can remain fixed, preventing slippage, tilting and other situations, and ensuring the stability and reliability of the coating process.

[0030] Furthermore, the top plate, the fixed side plate, and the sliding side plate are all provided with slots on their inner sides, and the four sides of the mask can be respectively inserted into each of the slots.

[0031] Beneficial effects: The mask is inserted into the corresponding slots on all four sides, and the mask is precisely positioned in all directions from both horizontal and vertical directions. Compared with single-direction positioning, the position of the mask in the fixture can be determined more accurately, which greatly reduces installation errors and ensures that the mask is in the ideal coating position, laying the foundation for high-quality coating.

[0032] Furthermore, it also includes a limiting plate, the two ends of which are detachably connected to the top plate and the base, respectively, and the limiting plate forms an installation space between the fixed side plate and the sliding side plate for installing photomasks of different specifications.

[0033] Beneficial effects: By disassembling or installing the limiting plate and adjusting the position of the sliding side plate, the size and shape of the internal installation space of the fixture can be quickly changed, easily adapting to masks of different lengths and widths. It can simultaneously coat large and small masks on the same coating equipment without redesigning or replacing the entire fixture, reducing the equipment investment cost for enterprises, meeting diverse production needs, improving the versatility and utilization of the fixture, and effectively improving coating efficiency.

[0034] Furthermore, both sides of the limiting plate are provided with vertically oriented limiting grooves, and the sliding side plate is provided with a vertically oriented slot on the side facing the limiting plate, so that the side of the mask plate can be inserted into the limiting groove and the slot.

[0035] Beneficial effects: In this design, limiting grooves are opened on both sides of the limiting plate, forming a two-way slot structure. The slots opened on the sliding side plate form a one-way slot structure. Thus, when it is necessary to coat both large and small masks simultaneously, by placing the large and small masks into the corresponding installation spaces and having the limiting grooves of the limiting plate and the slots of the sliding side plate cooperate with each other, a dual positioning structure is formed for the sides of the masks of both sizes, improving the stability of mask installation and the accuracy of installation position. Attached Figure Description

[0036] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0037] Figure 1 This is a front view of an embodiment of a photomask coating fixture according to the present invention;

[0038] Figure 2 This is a perspective view of an embodiment of a photomask coating fixture according to the present invention;

[0039] Figure 3 for Figure 2 A magnified view of a section at point B in the middle;

[0040] Figure 4 for Figure 1 A magnified view of a section at point A in the middle;

[0041] Figure 5 This is a front view of another embodiment of a photomask coating fixture according to the present invention;

[0042] Figure 6 This is a top view of the limiting plate in an embodiment of a photomask coating fixture of the present invention;

[0043] Figure 7 This is a rear view of an embodiment of a photomask coating fixture according to the present invention.

[0044] The attached diagram shows the markings and corresponding component names:

[0045] 1. Back plate, 2. Support frame, 3. Top plate, 4. Vertical slide rail, 5. Vertical slider, 6. Sliding side plate, 7. Horizontal slider, 8. Horizontal slide rail, 9. Base, 91. Slot, 10. Stop block, 100. Notch, 11. Fixing bolt, 12. Fixing side plate, 13. Wing bolt, 14. Slide groove, 15. Limiting plate, 151. Limiting groove. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0047] As one embodiment of this application, such as Figure 1 As shown, a photomask coating fixture is provided, including a back plate 1, a top plate 3 mounted on the upper part of the back plate 1, sliding side plates 6 and fixed side plates 12 respectively mounted on both sides of the back plate 1, and a base 9 mounted on the bottom of the back plate 1. In this embodiment, the back plate 1 is a stainless steel back plate 1.

[0048] The top plate 3, the sliding side plate 6, the fixed side plate 12 and the base 9 form an installation space for mounting the mask. The sliding side plate 6 can slide laterally along the back plate 1 to clamp the mask.

[0049] In one embodiment, such as Figure 1 As shown, a transverse slide rail 8 is fixedly installed on the back plate 1 by welding or bolts. In this embodiment, there are two transverse slide rails 8, which are arranged parallel to each other. Two transverse sliders 7 are connected to the sliding side plate 6 by screws or bolts. The two transverse sliders 7 are respectively inserted into the two transverse slide rails 8 and slide laterally along the transverse slide rails 8.

[0050] In one embodiment, such as Figure 1 As shown, vertical slide rails 4 are fixedly installed on the back plate 1 by welding or bolts. In this embodiment, there are three vertical slide rails 4, which are horizontally spaced apart and located at the top of the back plate 1.

[0051] Three vertical sliders 5 are connected to the top plate 3 by bolts or screws. The three vertical sliders 5 are respectively inserted into three vertical slide rails 4 and slide vertically along the vertical slide rails 4.

[0052] In one embodiment, combined Figure 2 and Figure 3 As shown, both the vertical slide rail 4 and the horizontal slide rail 8 are provided with slide grooves 14, and the shape of the slide grooves 14 is rectangular, T-shaped, or dovetail-shaped. In this embodiment, the shape of the slide groove 14 is described using a T-shape as an example. The shapes of the vertical slider 5 and the horizontal slider 7 match the shape of the slide grooves 14.

[0053] like Figure 1 As shown, in this embodiment, threaded through holes are opened on one side of both the vertical slider 5 and the horizontal slider 7. Fasteners are connected to the threaded through holes. The fasteners can be the wing bolts 13 in the prior art. When the vertical slider 5 and the horizontal slider 7 slide to the designated positions on the vertical slide rail 4 and the horizontal slide rail 8 respectively, the positions of the vertical slider 5 and the horizontal slider 7 can be locked by tightening the wing bolts 13 to prevent the vertical slider 5 and the horizontal slider 7 from sliding.

[0054] In one embodiment, combined Figure 1 and Figure 4 As shown, in this embodiment, clearance grooves are provided on both the left and right sides of the base 9, and the top and front sides of the clearance grooves extend through the top and front sides of the base 9. A stop block 10 is detachably fitted inside the clearance groove. The shape of the stop block 10 matches the shape of the clearance groove, and the stop block 10 is in clearance fit with the clearance groove. The stop block 10 can be inserted into or pulled out of the clearance groove; after the stop block 10 is inserted into the clearance groove, it can seal the clearance groove.

[0055] In this embodiment, when installing a large-sized mask, the stop block 10 is pulled out from the relief groove, the operator lifts the bottom of the mask with their hand and places it stably on the base 9. The relief groove provides space for the operator's hand, making it easier for the operator to put their hand down and avoid the hand being squeezed by the mask. It also makes it easier for the operator to place the mask stably and accurately.

[0056] Once the large-size photomask is fully installed, a stop block 10 is inserted in front of the clearance groove to seal it. This prevents the coating material from contaminating the glass surface of the photomask during the later spraying process, ensuring the quality requirements of the photomask are met.

[0057] In one embodiment, both the stop block 10 and the relief groove are provided with opposite threaded holes. After the stop block 10 is inserted into the relief groove, the stop block 10 is fixed in the relief groove by screwing in the fixing bolt 11 or screw to ensure the stability of the stop block 10.

[0058] In one embodiment, a notch 100 is provided at the bottom of the stop 10 to facilitate hand insertion and operation, providing a point of leverage and space for the fingers to exert force. The operator can easily hook the notch 100 with just their fingers to quickly complete the pushing or pulling action of the stop 10, reducing the difficulty of operation.

[0059] In one embodiment, such as Figure 2 As shown, a slot 91 is horizontally provided on the base 9, and the bottom of the mask can be inserted into the slot 91. The slot 91 can provide precise installation and positioning of the mask and make the mask more stable after installation.

[0060] In one embodiment, the top plate 3, the fixed side plate 12, the sliding side plate 6, and the base 9 are all provided with slots 91 on their inner sides. The four sides of the mask can be respectively inserted into each slot 91, which can further improve the limiting and positioning effect of the mask, reduce installation error, and further improve the stability of the mask. This ensures that the mask does not move during the coating process, resulting in better coating quality.

[0061] In one embodiment, such as Figure 5 As shown, a photomask coating fixture also includes a limiting plate 15. The two ends of the limiting plate 15 are detachably connected to the top plate 3 and the base 9, respectively. The limiting plate 15 forms an installation space for installing photomasks of different specifications between the fixed side plate 12 and the sliding side plate 6.

[0062] Specifically: The limiting plate 15 can be prefabricated with multiple limiting plates 15 of different heights according to the size of the mask plate, so as to adapt to the vertical sliding height of the top plate 3. The corresponding limiting plate 15 can be selected according to the height of the top plate 3.

[0063] Multiple mounting holes can be pre-drilled along the horizontal direction on the top plate 3 and the base 9. The limiting plate 15 is adjusted to its horizontal position on the top plate 3 and the base plate according to the size of different photomasks. The two ends of the limiting plate 15 are fixed with the mounting holes through-hole bolts or screws at the corresponding positions, thereby completing the installation of the limiting plate 15.

[0064] In this embodiment, photomasks of different sizes can be mounted on the same fixture, thereby enabling simultaneous coating of photomasks of different sizes on the same fixture, which effectively improves work efficiency.

[0065] In one embodiment, such as Figure 6 As shown, in this embodiment, limiting grooves 151 are vertically formed on both sides of the limiting plate 15. The limiting grooves 151 are through groove structures. The sliding side plate 6 is vertically formed on the side facing the limiting plate 15 with a slot 91. The side of the mask can be inserted into the limiting grooves 151 and the slot 91, thereby improving the limiting effect on the mask.

[0066] In this embodiment, the limiting grooves 151 on both sides of the limiting plate 15 make the limiting plate 15 form a bidirectional slot structure, while the slot 91 on one side of the sliding side plate 6 makes the sliding side plate 6 form a unidirectional slot structure. This facilitates the installation of photomasks of different sizes and specifications, while improving the installation positioning accuracy of the photomasks and the stability of the photomask installation.

[0067] In one embodiment, both the slot 91 and the limiting slot 151 are V-shaped slots, which can provide guidance for the insertion of the mask and reduce installation errors.

[0068] In one embodiment, such as Figure 2 and Figure 7 As shown, a support frame 2 is fixed to the back of the back plate 1. The support frame 2 has a hollow structure. The support frame 2 and the back plate 1 can be fixed by bolts, screws, welding or other means. The support frame 2 provides support for the back plate 1 and improves the strength of the back plate 1.

[0069] Adjust the positions of the top plate 3 and the sliding side plate 6 according to the length and width of the mask, and slide the corresponding top plate 3 and sliding side plate 6 according to the size of the mask to achieve multi-size applicability, wide range of use and strong practicality; if it is necessary to load two masks at the same time, simply add a limiting plate 15 with a two-way slot between the top plate 3 and the base 9 to meet the simultaneous loading and coating of two masks.

[0070] It should be noted that the above description of the disclosed embodiments enables those skilled in the art to implement or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A fixture for photomask coating, characterized in that, Includes a back panel, a top plate is installed on the upper part of the back panel, sliding side plates and fixed side plates are installed on both sides of the back panel respectively, and a base is installed on the bottom of the back panel; The top plate, sliding side plate, fixed side plate and base form an installation space for mounting the mask, and the sliding side plate can slide laterally along the back plate to lock the mask.

2. The photomask coating fixture according to claim 1, characterized in that, A transverse slide rail is installed on the back plate, and a transverse slider is connected to the sliding side plate. The transverse slider is inserted into the transverse slide rail and slides transversely along the transverse slide rail.

3. The photomask coating fixture according to claim 2, characterized in that, The back plate is equipped with a vertically arranged vertical slide rail, and the top plate is connected to a vertical slider. The vertical slider is inserted into the vertical slide rail and slides vertically along the vertical slide rail.

4. A photomask coating fixture according to claim 3, characterized in that, Both the vertical slide rail and the horizontal slide rail are provided with grooves, and the shape of the grooves is rectangular, T-shaped or dovetail-shaped. The shapes of the vertical slider and the horizontal slider match the shapes of the grooves.

5. A photomask coating fixture according to claim 1, characterized in that, The base has clearance grooves on both the left and right sides.

6. A photomask coating fixture according to claim 5, characterized in that, A stop block is detachably fitted inside the clearance groove. The stop block can be inserted into or pulled out of the clearance groove. When the stop block is inserted into the clearance groove, it can block the clearance groove.

7. A photomask coating fixture according to any one of claims 1-6, characterized in that, The base has a slot that is opened horizontally, and the bottom of the mask can be inserted into the slot.

8. A photomask coating fixture according to claim 7, characterized in that, The top plate, the fixed side plate, and the sliding side plate all have slots on their inner sides, and the four sides of the mask can be respectively inserted into each of the slots.

9. A photomask coating fixture according to claim 1, characterized in that, It also includes a limiting plate, the two ends of which are detachably connected to the top plate and the base, respectively. The limiting plate, the fixed side plate and the sliding side plate form an installation space for installing mask plates of different specifications.

10. A photomask coating fixture according to claim 9, characterized in that, Both sides of the limiting plate have vertically spaced limiting grooves, and the sliding side plate has a vertically spaced slot on the side facing the limiting plate, so that the side of the mask plate can be inserted into the limiting groove and the slot.

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