A pin device for a bonding device

Abstract

This utility model discloses a pin device for a bonding apparatus, comprising a pin mechanism and a pin lifting drive mechanism. The pin mechanism is mounted on the pin lifting drive mechanism and is driven by the lifting drive mechanism to move vertically. The pin mechanism includes a mounting bracket, a housing, a pin cap, a pin, a pin seat, a lifting rod, a compression spring, a cam, and a cam drive motor. The housing is fixed to the mounting bracket, the pin cap is fixed to the upper end of the housing and has a through hole at the upper end for the pin to extend out, the pin is fixed to the pin seat, the pin seat is fixed to the upper end of the lifting rod, the lifting rod is slidably disposed within the housing in the vertical direction, the compression spring is sleeved on the outside of the lifting rod and provides a downward elastic force to the lifting rod, the lower end of the lifting rod abuts against the upper side of the cam, and the cam is driven to rotate by the cam drive motor. This utility model can conveniently control the pin lifting speed and has a low cost.

Description

Technical Field

[0001] This utility model relates to a pin device, and more particularly to a pin device for a bonding device, belonging to the field of semiconductor processing equipment technology. Background Technology

[0002] Bonding equipment is the core equipment in semiconductor packaging processes that physically connects and electrically interconnects chips with substrates, wires, or other chips. During chip bonding, a pusher device is needed to eject the chip to be bonded from the substrate. Traditional pusher devices typically use cylinders, but cylinders are difficult to control the ejection speed; excessive speed can damage the ejected chip, reducing yield. Electric drive devices, such as linear motors, require high precision due to the short stroke of the pusher pins, and high-precision linear motors are expensive. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a pin device for a bonding device, which converts the change of motor angle into a uniform ejection action through a cam, resulting in uniform speed and low precision requirements for the drive motor.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0005] A pin assembly for a bonding device includes a pin mechanism and a pin lifting drive mechanism. The pin mechanism is mounted on the pin lifting drive mechanism and is driven by the lifting drive mechanism to move vertically. The pin mechanism includes a mounting bracket, a housing, a pin cap, a pin, a pin seat, a lifting rod, a compression spring, a cam, and a cam drive motor. The housing is fixed on the mounting bracket. The pin cap is fixed on the upper end of the housing and has a through hole at the upper end for the pin to extend out. The pin is fixed on the pin seat, and the pin seat is fixed on the upper end of the lifting rod. The lifting rod is slidably mounted vertically inside the housing. The compression spring is sleeved on the outside of the lifting rod and provides a downward elastic force to the lifting rod. The lower end of the lifting rod abuts against the upper side of the cam, and the cam is driven to rotate by the cam drive motor.

[0006] Furthermore, the lifting rod is slidably mounted in the housing in the vertical direction via a linear bearing.

[0007] Furthermore, a roller is provided at the lower end of the lifting rod, the roller is rotatably located at the lower end of the lifting rod, and the lower side of the roller is rolled on the upper side of the cam.

[0008] Furthermore, the upper end of the compression spring abuts against the upper stepped surface of the housing, and the lower end of the lifting rod is provided with a protruding ring protruding from the side of the lifting rod. The lower end of the compression spring abuts against the upper side of the protruding ring to provide a downward elastic force to the lifting rod.

[0009] Furthermore, the cam employs an Archimedean spiral.

[0010] Furthermore, the lower end of the housing is provided with a first adjusting seat, a second adjusting seat, a first adjusting shaft, and a second adjusting shaft. The first adjusting seat is fixed on the mounting bracket. The second adjusting seat is rotatably mounted on the upper side of the first adjusting seat via the first adjusting shaft. A first countersunk bolt is provided on each side of the first adjusting shaft. The lower end of the housing is rotatably mounted on the upper side of the second adjusting seat via the second adjusting shaft. A second countersunk bolt is provided on each side of the second adjusting shaft. The first adjusting shaft and the second adjusting shaft are perpendicular to each other.

[0011] Furthermore, a three-point leveling mechanism is provided between the first adjusting seat and the mounting bracket. The three-point leveling mechanism includes a fixed shaft, a third adjusting shaft, and a fourth adjusting shaft. The fixed shaft, the third adjusting shaft, and the fourth adjusting shaft are distributed in a triangle on the first adjusting seat and the mounting bracket. The third adjusting shaft and the fourth adjusting shaft each include a screw and an adjusting nut. The screw is vertically fixed on the mounting bracket, and the adjusting nut is sleeved on the screw and threadedly connected to the screw. The adjusting nut is rotatably mounted on the first adjusting seat.

[0012] Furthermore, the ejector pin lifting drive mechanism includes a frame, a lead screw, a lead screw nut, a lead screw drive motor, and a vertical slide rail. The lead screw is arranged vertically and its upper and lower ends are rotatably mounted on the frame. The lower end of the lead screw is connected to the lead screw drive motor and is driven to rotate by the lead screw drive motor. The lead screw nut is sleeved on the outside of the lead screw and threadedly connected to the lead screw. The lead screw nut is fixedly connected to the mounting bracket. The vertical slide rail is fixed on the frame vertically, and the mounting bracket is slidably mounted on the vertical slide rail.

[0013] Compared with the prior art, this utility model has the following advantages and effects: This utility model discloses a pin device for a bonding equipment, which converts the uniform rotation angle of the motor into uniform vertical motion through an Archimedean spiral cam. This reduces the precision requirements of the motor and makes it easy to control the lifting speed of the pin, resulting in lower cost. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the ejector pin device of a bonding apparatus according to the present invention.

[0015] Figure 2 This is a schematic diagram of the ejector pin device of a bonding apparatus according to this utility model from another direction.

[0016] Figure 3 This is a schematic diagram of the ejector mechanism of this utility model.

[0017] Figure 4 This is a top view of the ejector mechanism of this utility model.

[0018] Figure 5 This is a cross-sectional view of the ejector mechanism of this utility model. Detailed Implementation

[0019] To elaborate on the technical solutions adopted by this utility model to achieve the intended technical objectives, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Furthermore, the technical means or technical features in the embodiments of this utility model can be replaced without creative effort. The utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0020] like Figure 1 , 2 As shown in Figures 3 and 5, the present invention provides a pin device for a bonding apparatus, comprising a pin mechanism and a pin lifting drive mechanism. The pin mechanism is mounted on the pin lifting drive mechanism and is driven by the lifting drive mechanism to move up and down in the vertical direction.

[0021] The ejector mechanism includes a mounting bracket 1, a housing 2, a needle cap 3, an ejector pin 4, a needle seat 5, a lifting rod 6, a compression spring 7, a cam 8, and a cam drive motor 9. The housing 2 is fixed on the mounting bracket 1. The needle cap 3 is fixed on the upper end of the housing 2 and has a through hole at the upper end for the ejector pin 4 to extend out. The ejector pin 4 is fixed on the needle seat 5. The needle seat 5 is fixed on the upper end of the lifting rod 6. The lifting rod 6 is slidably disposed in the housing 2 in a vertical direction. The compression spring 7 is sleeved on the outside of the lifting rod 6 and provides a downward elastic force to the lifting rod 6. The lower end of the lifting rod 6 abuts against the upper side of the cam 8. The cam 8 is driven to rotate by the cam drive motor 9.

[0022] The lifting rod 6 is slidably mounted in the housing 2 in the vertical direction via a linear bearing 10, ensuring smooth up-and-down sliding of the lifting rod 6.

[0023] A roller 11 is provided at the lower end of the lifting rod 6. The roller 11 is rotatably located at the lower end of the lifting rod 6, and the lower side of the roller 11 is rolled on the upper side of the cam 8.

[0024] The upper end of the compression spring 7 abuts against the upper stepped surface of the housing 2, and the lower end of the lifting rod 6 is provided with a protruding ring protruding from the side of the lifting rod 6. The lower end of the compression spring 7 abuts against the upper side of the protruding ring to provide a downward elastic force to the lifting rod 6.

[0025] Cam 8 adopts an Archimedean spiral, and its standard polar coordinate equation is r(θ) = a + bθ, where: θ represents the polar angle, which represents the angle of the point on the spiral; when θ = 0, the initial polar diameter r = 13 mm; b is the spiral coefficient, which represents the increase in polar diameter (0.01 mm / degree) for every 1 degree of rotation.

[0026] The lower end of the housing 2 is provided with a first adjusting seat 12, a second adjusting seat 13, a first adjusting shaft 14, and a second adjusting shaft 15. The first adjusting seat 12 is fixed on the mounting bracket 1. The second adjusting seat 13 is rotatably mounted on the upper side of the first adjusting seat 12 via the first adjusting shaft 14. A first countersunk bolt is provided on each side of the first adjusting shaft 14. The lower end of the housing 2 is rotatably mounted on the upper side of the second adjusting seat 13 via the second adjusting shaft 15. A second countersunk bolt is provided on each side of the second adjusting shaft 15. The first adjusting shaft 14 and the second adjusting shaft 15 are perpendicular to each other. When adjustment is required, the first countersunk bolts on both sides of the first adjusting shaft 14 are rotated to adjust the angle of the second adjusting seat 13. The second countersunk bolts on both sides of the second adjusting shaft 15 are rotated to adjust the angle of the housing 2.

[0027] A three-point leveling mechanism is provided between the first adjusting seat 12 and the mounting bracket 1. This mechanism includes a fixed shaft 16, a third adjusting shaft 17, and a fourth adjusting shaft 18, arranged in a triangle on the first adjusting seat 12 and the mounting bracket 1. The third adjusting shaft 17 and the fourth adjusting shaft 18 each include a screw and an adjusting nut. The screw is vertically fixed to the mounting bracket 1, and the adjusting nut is threaded onto the screw and rotates on the first adjusting seat 12. By adjusting the height of the third adjusting shaft 17 and the fourth adjusting shaft 18, the first adjusting seat 12 is brought to a horizontal position.

[0028] The ejector pin lifting drive mechanism includes a frame 19, a lead screw 20, a lead screw nut 21, a lead screw drive motor 22, and a vertical slide rail 23. The lead screw 20 is arranged vertically, and its upper and lower ends are rotatably mounted on the frame 19. The lower end of the lead screw 20 is connected to the lead screw drive motor 22 and is driven to rotate by the lead screw drive motor 22. The lead screw nut 21 is sleeved on the outside of the lead screw 20 and threadedly connected to the lead screw 20. The lead screw nut 21 is fixedly connected to the mounting bracket 1. The vertical slide rail 23 is fixed vertically on the frame 19, and the mounting bracket 1 is slidably mounted on the vertical slide rail 23.

[0029] The working principle of the ejector pin device of this bonding equipment is as follows: the lead screw drive motor 22 drives the lead screw 20 to rotate, thereby driving the lead screw nut 21 to move up and down along the lead screw 20, and then driving the mounting bracket 1 to move up and down along the vertical slide rail 23, realizing the up and down adjustment of the ejector pin mechanism. When the ejector pin mechanism is working, the cam drive motor 9 drives the cam 8 to rotate. Since the lower end of the lifting rod 6 is rolled on the upper side of the cam 8 through the roller 11, the radius of the cam 8 changes when it rotates, thereby controlling the lifting rod 6 to move upward, so that the ejector pin 4 extends out of the through hole of the needle cap 3 to complete the ejector pin action. Since the cam 8 adopts an Archimedean spiral, the uniform rotation of the cam 8 can be converted into the uniform up and down motion of the ejector pin 4, which has high control precision and realizes the speed control of lifting and lowering.

[0030] This utility model discloses a pin device for a bonding equipment, which converts the uniform rotation angle of the motor into uniform vertical motion through an Archimedean spiral cam. This reduces the precision requirements of the motor, makes it easy to control the lifting speed of the pin, and lowers the cost.

[0031] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model's technical solution. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments without departing from the scope of the present utility model's technical solution, based on the technical essence of the present utility model and within the spirit and principles of the present utility model, shall still fall within the protection scope of the present utility model's technical solution.

Claims

1. A pin device for a bonding apparatus, characterized in that: It includes a pin mechanism and a pin lifting drive mechanism. The pin mechanism is mounted on the pin lifting drive mechanism and is driven by the lifting drive mechanism to move up and down in the vertical direction. The pin mechanism includes a mounting bracket, a housing, a pin cap, a pin, a pin seat, a lifting rod, a compression spring, a cam, and a cam drive motor. The housing is fixed on the mounting bracket. The pin cap is fixed on the upper end of the housing and has a through hole at the upper end for the pin to extend out. The pin is fixed on the pin seat, and the pin seat is fixed on the upper end of the lifting rod. The lifting rod is slidably mounted in the housing in the vertical direction. The compression spring is sleeved on the outside of the lifting rod and provides a downward elastic force to the lifting rod. The lower end of the lifting rod abuts against the upper side of the cam. The cam is driven to rotate by the cam drive motor.

2. The ejector pin device of a bonding apparatus according to claim 1, characterized in that: The lifting rod is slidably mounted in the housing in the vertical direction via a linear bearing.

3. The ejector pin device of a bonding apparatus according to claim 1, characterized in that: The lower end of the lifting rod is equipped with a roller, which is rotatably mounted on the lower end of the lifting rod, and the lower side of the roller is rolled on the upper side of the cam.

4. The ejector pin device of a bonding apparatus according to claim 1, characterized in that: The upper end of the compression spring abuts against the upper stepped surface of the housing, and the lower end of the lifting rod is provided with a protruding ring that protrudes from the side of the lifting rod. The lower end of the compression spring abuts against the upper side of the protruding ring to provide a downward elastic force to the lifting rod.

5. The ejector pin device of a bonding apparatus according to claim 1, characterized in that: The cam uses an Archimedean spiral.

6. The ejector pin device of a bonding apparatus according to claim 1, characterized in that: The lower end of the housing is provided with a first adjusting seat, a second adjusting seat, a first adjusting shaft, and a second adjusting shaft. The first adjusting seat is fixed on the mounting bracket. The second adjusting seat is rotatably mounted on the upper side of the first adjusting seat via the first adjusting shaft. A first countersunk bolt is provided on each side of the first adjusting shaft. The lower end of the housing is rotatably mounted on the upper side of the second adjusting seat via the second adjusting shaft. A second countersunk bolt is provided on each side of the second adjusting shaft. The first adjusting shaft and the second adjusting shaft are perpendicular to each other.

7. The ejector pin device of a bonding apparatus according to claim 6, characterized in that: A three-point leveling mechanism is provided between the first adjusting seat and the mounting bracket. The three-point leveling mechanism includes a fixed shaft, a third adjusting shaft, and a fourth adjusting shaft. The fixed shaft, the third adjusting shaft, and the fourth adjusting shaft are distributed in a triangle on the first adjusting seat and the mounting bracket. The third adjusting shaft and the fourth adjusting shaft each include a screw and an adjusting nut. The screw is vertically fixed on the mounting bracket, and the adjusting nut is sleeved on the screw and threadedly connected to the screw. The adjusting nut is rotatably mounted on the first adjusting seat.

8. The ejector pin device of a bonding apparatus according to claim 1, characterized in that: The ejector pin lifting drive mechanism includes a frame, a lead screw, a lead screw nut, a lead screw drive motor, and a vertical slide rail. The lead screw is arranged vertically, and its upper and lower ends are rotatably mounted on the frame. The lower end of the lead screw is connected to the lead screw drive motor and is driven to rotate by the lead screw drive motor. The lead screw nut is sleeved on the outside of the lead screw and threadedly connected to the lead screw. The lead screw nut is fixedly connected to the mounting bracket. The vertical slide rail is fixed on the frame vertically, and the mounting bracket is slidably mounted on the vertical slide rail.

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