An insulated window heating device

Abstract

This utility model discloses an insulating window heating device, which relates to the field of insulating window heating technology. It includes: a heating element disposed on an insulating window of an etching device for heating the insulating window; and opposing fixing components, both movably disposed on the etching device. The opposing fixing components are positioned close to each other, connecting the heating element to the etching device; or the opposing fixing components are positioned far apart, separating the heating element from the etching device. The advantages of this utility model are: the fixing components improve the efficiency of installing or removing the heating element, and also improve the tightness of the fit between the heating element and the insulating window, thereby effectively improving the uniformity of heating the insulating window and the heat conduction effect during heating.

Description

Technical Field

[0001] This utility model relates to the field of insulating window heating technology, specifically to an insulating window heating device. Background Technology

[0002] Etching equipment is a key piece of equipment in fields such as semiconductors. It selectively removes specific materials from the surface of wafers through physical or chemical methods. In semiconductor chip manufacturing, it precisely etches microstructures such as transistors and circuits to build complex circuits, which is crucial for improving chip performance and integration. At the same time, it plays an indispensable role in the manufacturing of micro-components such as flat panel displays, microelectromechanical systems, and photonic devices.

[0003] Currently, most heaters for the insulating windows of etching machines are fixed by adhesive. This method is prone to gaps between the heater and the insulating window due to the aging of the adhesive material, resulting in uneven heating. At the same time, the aging of the adhesive material and cleaning operations can easily damage the heater and increase its wear and tear. Utility Model Content

[0004] The purpose of this invention is to provide an insulated window heating device.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an insulated window heating device, comprising:

[0006] A heating element is provided at the insulating window of the etching equipment to heat the insulating window;

[0007] The opposing fixed components are movably disposed on the etching device; the opposing fixed components are close to each other, so that the heating element is connected to the etching device; or the opposing fixed components are far apart, so that the heating element is separated from the etching device.

[0008] As a further aspect of this utility model: the fixing component includes:

[0009] An arc-shaped pressure plate is rotatably connected to the top side of the etching equipment;

[0010] A bracket is fixed to the side wall of the arc-shaped pressure plate, and the bracket has a square hole and two limiting holes.

[0011] A pull rod is installed inside the square hole. The outer wall of the pull rod is fixed to two baffles. Two spring seats are sleeved on the pull rod below the baffles.

[0012] The pull rod is movably sleeved between the two spring seats and a flat pressure plate is provided, and a telescopic spring is fixed between one of the spring seats and the flat pressure plate.

[0013] Limiting rods are provided opposite each other on the top wall of the flat pressure plate, and the two limiting rods are respectively sleeved in the two limiting holes.

[0014] As a further aspect of this utility model: the heating element includes:

[0015] The base is laid on the surface of the insulated window to better conduct heat into the insulated window.

[0016] An insulating sticker is laid on the surface of the base. A heating element is provided on the insulating sticker. The insulating sticker is used to prevent leakage current generated by the heating element from being conducted to the insulating window through the base.

[0017] A protective shell is fitted over the heating element, the insulating sticker, and the base, with the base used to seal the heating element and the insulating sticker inside the protective shell.

[0018] As a further embodiment of this utility model: a connecting frame is connected to both of the arc-shaped pressure plates, so that the two arc-shaped pressure plates can be fixed in position after they approach each other and fit against the heating element;

[0019] The connecting frame has a first end, a second end and a third end, wherein the top side of the arc-shaped pressure plate is rotatably connected to the bottom side of the first end;

[0020] The second end is detachably mounted on the top side of the other arc-shaped pressure plate;

[0021] The third end is detachably mounted on the top side of the etching equipment.

[0022] As a further embodiment of this utility model, handles are fixed to the top sides of both of the arc-shaped pressure plates for easier rotation of the arc-shaped pressure plates.

[0023] As a further aspect of this invention: the heating element further includes:

[0024] A power connector is provided on the heating element, and the power connector extends through the surface of the protective shell.

[0025] As a further embodiment of this utility model: the connecting frame further includes:

[0026] A stop block is fixed to the side of the connecting frame near the second end, and a stop bar adapted to the stop block is fixed on the arc-shaped pressure plate.

[0027] Compared with the prior art, the beneficial effects of this utility model by adopting the above technical solution are as follows:

[0028] 1. This utility model improves the efficiency of installing or removing the heating element by using a fixing component, and also improves the tightness of the fit between the heating element and the insulating window, thereby effectively improving the uniformity of heating the insulating window and the heat conduction effect during heating.

[0029] 2. This utility model, through the fixing component, allows the heating element to be removed from the insulation window more quickly and conveniently, thus avoiding damage to the heating element during cleaning of the insulation window and further improving the service life of the heating element.

[0030] Other advantages, objectives and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination or study, or may be taught from the practice of this invention. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the main structure in an embodiment of this utility model;

[0032] Figure 2 This is a partial structural diagram of the fixing component in an embodiment of the present utility model;

[0033] Figure 3 This is a partial structural diagram of the heating element in an embodiment of the present invention;

[0034] Figure 4 This is a partial structural diagram of the baffle in an embodiment of the present invention.

[0035] In the diagram: 1. Heating element; 11. Base; 12. Insulating sticker; 13. Heating element; 131. Power connector plug; 14. Protection; 2. Insulating window; 3. Fixing assembly; 31. Arc-shaped pressure plate; 32. Bracket; 33. Square hole; 34. Limiting hole; 35. Pull rod; 36. Baffle; 37. Spring seat; 38. Flat pressure plate; 39. Telescopic spring; 310. Limiting rod; 4. Connecting frame; 41. First end; 42. Second end; 43. Third end; 5. Handle; 401. Stop block; 402. Stop bar. Detailed Implementation

[0036] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for the purpose of helping to understand this utility model, but does not constitute a limitation on this utility model.

[0037] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0038] Please see the appendix Figure 1 - Appendix Figure 4 This utility model discloses an insulated window heating device, comprising:

[0039] Heating element 1 is provided at the insulating window 2 of the etching equipment to heat the insulating window 2;

[0040] The opposing fixed components 3 are all movable and can be placed on the etching equipment; the opposing fixed components 3 are close to each other, so that the heating element 1 is connected to the etching equipment; or the opposing fixed components 3 are far apart, so that the heating element 1 is separated from the etching equipment.

[0041] Specifically, the fixing component 3 can quickly separate the heating element 1 from the insulating window 2, avoiding damage to the heating element 1 when cleaning the insulating window 2.

[0042] Example 1: The fixing component 3 includes:

[0043] The arc-shaped pressure plate 31 is rotatably connected to the top side of the etching equipment;

[0044] The bracket 32 ​​is fixed to the side wall of the arc-shaped pressure plate 31. The bracket 32 ​​has a square hole 33 and two limiting holes 34.

[0045] A pull rod 35 is installed inside the square hole 33. The outer wall of the pull rod 35 is fixed to two baffles 36. Two spring seats 37 are sleeved on the pull rod 35 below the baffles 36.

[0046] A flat pressure plate 38 is movably connected between two spring seats 37, and a telescopic spring 39 is fixed between one of the spring seats 37 and the flat pressure plate 38.

[0047] Limiting rods 310 are provided opposite to each other on the top wall of the flat pressure plate 38, and the two limiting rods 310 are respectively sleeved in the two limiting holes 34;

[0048] Specifically, the arc-shaped pressure plate 31 is rotatably connected to the top side of the etching equipment via a rotating rod. The upper cross-section of the arc-shaped pressure plate 31 is larger than the lower cross-section, which can better fix the edge of the heating element 1. A spring seat 37 near the baffle 36 is movably sleeved on the outer wall of the pull rod 35, and a spring seat 37 away from the baffle 36 is tightly sleeved on the outer wall of the pull rod 35 and located below the flat pressure plate 38. The length and width of the square hole 33 are greater than the width and length of the two baffles 36.

[0049] Example 2, heating element 1 includes:

[0050] The base 11 is laid on the surface of the insulating window 2 to better conduct heat into the insulating window 2.

[0051] Insulating sticker 12 is laid on the surface of base 11. A heating element 13 is provided on the insulating sticker 12. The insulating sticker 12 is used to prevent leakage current generated by the heating element 13 from being conducted to the insulating window 2 through base 11.

[0052] The protective shell 14 is fitted onto the outside of the heating element 13, the insulating sticker 12 and the base 11. The base 11 is used to seal the heating element 13 and the insulating sticker 12 inside the protective shell 14.

[0053] Specifically, the protective shell 14 is made of PTFE material.

[0054] In embodiment three, a connecting frame 4 is connected to both arc-shaped pressure plates 31 so that the two arc-shaped pressure plates 31 can be fixed in position after they approach each other and fit against the heating element 1;

[0055] The connecting frame 4 has a first end 41, a second end 42 and a third end 43, wherein the top side of an arc-shaped pressure plate 31 is rotatably connected to the bottom side of the first end 41.

[0056] The second end 42 is detachably mounted on the top side of another arc-shaped pressure plate 31;

[0057] The third end 43 is detachably mounted on the top side of the etching equipment;

[0058] Specifically, the first end 41 is rotatably connected to the top side of one of the arc-shaped pressure plates 31 via a rotating rod, the second end 42 is connected to the top side of the other arc-shaped pressure plate 31 via bolts or screws, and the third end 43 is fixed to the top side of the etching equipment via bolts or screws. The two arc-shaped pressure plates 31 can be connected together via the first end 41 and the second end 42, and then the positions of the two arc-shaped pressure plates 31 are fixed via the third end 43.

[0059] In embodiment four, handles 5 are fixed to the top sides of both arc-shaped pressure plates 31 to facilitate the rotation of the arc-shaped pressure plates 31.

[0060] In Example 5, the heating element 13 further includes:

[0061] A power connector 131 is disposed on the heating element 13 and extends through the surface of the protective shell 14.

[0062] Specifically, a sealing insulating strip is provided at the position where the power connector 131 passes through the protective shell 14.

[0063] In embodiment six, the connecting frame 4 further includes:

[0064] The stop block 401 is fixed on the side of the connecting frame 4 near the second end 42, and the arc-shaped pressure plate 31 is fixed with a stop rod 402 that is compatible with the stop block 401.

[0065] Specifically, by using the stop block 401 and the stop lever 402, the connecting frame 4 can be quickly rotated to the designated position. At the same time, by using the stop lever 402 and the stop block 401, it is possible to more intuitively observe whether the connecting frame 4 has moved to the designated position.

[0066] Working principle:

[0067] First, place the heating element 1 on the top side of the insulating window 2. Then, pull the two handles 5 to bring the two fixing components 3 closer together and make them fit against the heating element 1. When both arc-shaped pressure plates 31 rotate around the rotating rod and fit against the heating element 1, stop pulling the handles 5. Then, rotate the connecting frame 4 around the rotating rod. When the stop block 401 fixed on one side of the rotating rod contacts the stop bar 402, stop rotating the connecting frame 4. Then, fix the second end 42 of the connecting frame 4 to the top side of another arc-shaped pressure plate 31 with bolts. Then, fix the third end 43 of the connecting frame 4 to the top side of the etching equipment with bolts, thus completing the fixing of the edge of the heating element 1. Then, rotate the pull rod 35 clockwise or counterclockwise by 90°. At this time, the two baffles 36 are exactly aligned with the square hole. The shapes overlap, and then the pull rod 35 is moved downward until the baffle 36 passes through the square hole and is located below the square hole. Then the pull rod 35 is rotated 90° in the opposite direction and released. The telescopic spring 39 releases its elasticity to both ends. When one end of the telescopic spring 39 extends, it drives one of the spring seats 37 and the two baffles 36 to move upward. When the top side of the baffle 36 contacts the bracket 32, the other end of the telescopic spring 39 extends downward, driving the flat pressure plate 38 to move downward on the outer wall of the pull rod 35. When the flat pressure plate 38 moves downward, it drives the two limiting rods 310 to move in the two limiting holes 34. When the bottom side of the flat pressure plate 38 contacts the top side of the heating element 1, the fixing of the heating element 1 is completed. At this point, the entire process is completed.

[0068] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on.

[0069] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0070] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0071] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.

Claims

1. An insulated window heating device, characterized in that, include: A heating element (1) is provided at the insulating window (2) of the etching equipment to heat the insulating window (2); The fixing components (3) arranged opposite each other are movably disposed on the etching device; the fixing components (3) arranged opposite each other are close to each other, so that the heating element (1) is connected to the etching device; or the fixing components (3) arranged opposite each other are far apart, so that the heating element (1) is separated from the etching device.

2. The insulated window heating device of claim 1, wherein: The fixing component (3) includes: An arc-shaped pressure plate (31) is rotatably connected to the top side of the etching equipment; The bracket (32) is fixed to the side wall of the arc-shaped pressure plate (31). The bracket (32) has a square hole (33) and two limiting holes (34). A pull rod (35) is provided in the square hole (33). The outer wall of the pull rod (35) is fixed to two baffles (36). Two spring seats (37) are sleeved on the pull rod (35) below the baffles (36). The pull rod (35) is movably sleeved between the two spring seats (37) with a flat pressure plate (38), and a telescopic spring (39) is fixed between one of the spring seats (37) and the flat pressure plate (38); Limiting rods (310) are provided opposite to each other on the top wall of the flat pressure plate (38), and the two limiting rods (310) are respectively sleeved in the two limiting holes (34).

3. The insulated window heating device of claim 1, wherein: The heating element (1) includes: The base (11) is laid on the surface of the insulating window (2) to better conduct heat into the insulating window (2); An insulating sticker (12) is laid on the surface of the base (11). A heating element (13) is provided on the insulating sticker (12). The insulating sticker (12) is used to prevent leakage current generated by the heating element (13) from being conducted to the insulating window (2) through the base (11). A protective shell (14) is fitted over the heating element (13), the insulating sticker (12), and the base (11). The base (11) is used to seal the heating element (13) and the insulating sticker (12) inside the protective shell (14).

4. The insulated window heating device of claim 2, wherein: A connecting frame (4) is connected to both of the arc-shaped pressure plates (31) so that the two arc-shaped pressure plates (31) can be fixed in position after they come close to each other and fit against the heating element (1); The connecting frame (4) has a first end (41), a second end (42) and a third end (43), wherein the top side of the arc-shaped pressure plate (31) is rotatably connected to the bottom side of the first end (41); The second end (42) is detachably mounted on the top side of another of the arc-shaped pressure plates (31); The third end (43) is detachably mounted on the top side of the etching equipment.

5. The insulated window heating device of claim 4, wherein: Each of the two arc-shaped pressure plates (31) has a handle (5) fixed on its top side for easier rotation of the arc-shaped pressure plate (31).

6. The insulated window heating device of claim 3, wherein: The heating element (13) also includes: A power connector (131) is disposed on the heating element (13) and extends through the surface of the protective shell (14).

7. The insulated window heating device of claim 5, wherein: The connecting frame (4) also includes: A stop block (401) is fixed on the side of the connecting frame (4) near the second end (42), and a stop bar (402) adapted to the stop block (401) is fixed on the arc-shaped pressure plate (31).

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