Tail gas impurity removal device

Abstract

The utility model relates to a tail gas impurity removal device, it includes at least one impurity removal mechanism, the impurity removal mechanism includes casing and adsorption unit, and the casing has the accommodation cavity, the adsorption unit includes magnetic part and non -magnetic part, the non -magnetic part at least part is located in the accommodation cavity, the magnetic part opposite the non -magnetic part movable, to make the magnetic part can be close to or far from the non -magnetic part, when the magnetic part close to the non -magnetic part, the magnetic part through the non -magnetic part adsorption the magnetic impurity that the tail gas contains in the accommodation cavity, when the magnetic part far from the non -magnetic part, the magnetic impurity can separate from the non -magnetic part, the technical scheme of the embodiment of the application effectively solves the problem that the tail gas is blocked and the pressure is stored due to the impurity enrichment, and is applicable to the industrial tail gas processing scene of magnetic impurity content.

Description

Technical Field

[0001] This utility model relates to the field of separation technology, and in particular to a tail gas impurity removal device. Background Technology

[0002] Taking the production of carbon materials (such as carbon nanotubes and graphene) using Chemical Vapor Deposition (CVD) as an example: During the CVD production process, the generation of impurities in the exhaust gas is unavoidable. These impurities often contain magnetic impurities, and if these impurities accumulate over a long period, they will gradually clog the exhaust pipes. Pipe blockage can lead to pressure buildup, which in turn can cause serious safety accidents, affecting normal production and personnel safety. Utility Model Content

[0003] In view of the above-mentioned defects in the prior art, the purpose of this utility model is to provide an exhaust gas impurity removal device.

[0004] Therefore, the present invention provides the following technical solution.

[0005] This application provides an exhaust gas impurity removal device, which includes at least one impurity removal mechanism, the impurity removal mechanism comprising:

[0006] The shell has a receiving cavity;

[0007] An adsorption unit includes a magnetic component and a non-magnetic component, wherein the non-magnetic component is at least partially located within the receiving cavity, and the magnetic component is movable relative to the non-magnetic component so that the magnetic component can move closer to or away from the non-magnetic component.

[0008] When the magnetic component is close to the non-magnetic component, the magnetic component adsorbs magnetic impurities contained in the exhaust gas in the receiving cavity through the non-magnetic component; when the magnetic component is far away from the non-magnetic component, the magnetic impurities can detach from the non-magnetic component.

[0009] Optionally, the non-magnetic component has an inner cavity and an opening, and the magnetic component being close to the non-magnetic component includes: the magnetic component being at least partially inserted into the inner cavity through the opening; the magnetic component being away from the non-magnetic component includes: the magnetic component being at least partially extended outside the inner cavity.

[0010] Optionally, the housing further has a through hole communicating with the receiving cavity, through which the magnetic element can enter the receiving cavity to bring the magnetic element closer to the non-magnetic element; or, the magnetic element can extend at least partially out of the receiving cavity through the through hole to move the magnetic element away from the non-magnetic element.

[0011] Optionally, the impurity removal mechanism further includes a first driving device connected to the magnetic component to drive the magnetic component to move closer to or away from the non-magnetic component.

[0012] Optionally, the impurity removal mechanism further includes a scraping element and a second driving device, the second driving device being connected to the scraping element to drive the scraping element to scrape off the magnetic impurities on the non-magnetic element.

[0013] Optionally, the scraper has a guide groove, the cross-sectional area of ​​which gradually decreases along the direction of movement of the scraper removing magnetic impurities, and the non-magnetic component passes through the guide groove.

[0014] Optionally, the magnetic component is a permanent magnet, which can be disassembled and replaced to adjust the magnetic field strength.

[0015] Optionally, the impurity removal mechanism further includes a sealing structure, which is at least used to form an air seal between the magnetic element and the wall of the through hole.

[0016] Optionally, the exhaust gas impurity removal device includes at least two impurity removal mechanisms;

[0017] The housing also has an exhaust gas inlet and an exhaust gas outlet communicating with the receiving cavity, and in two adjacent impurity removal mechanisms, the exhaust gas outlet of one impurity removal mechanism is connected to the exhaust gas inlet of the other impurity removal mechanism.

[0018] Optionally, the housing, the magnetic component, and the non-magnetic component all extend in a vertical direction, and the housing also has a discharge port communicating with the receiving cavity, the discharge port being located below the non-magnetic component.

[0019] This utility model has the following technical effects:

[0020] The exhaust gas impurity removal device provided by this invention, when the exhaust gas enters the receiving cavity, the magnetic component approaches the non-magnetic component, and the magnetic field generated by the magnetic component acts on the exhaust gas in the receiving cavity through the non-magnetic component. Magnetic impurities in the exhaust gas are attracted to the surface of the non-magnetic component by the magnetic force. The content of magnetic impurities in the treated exhaust gas is significantly reduced.

[0021] When it is necessary to clean magnetic impurities adsorbed on the surface of a non-magnetic component, the magnetic component moves away from the non-magnetic component, and the magnetic force exerted by the magnetic component on the magnetic impurities weakens. This can also be understood as the non-magnetic component being in a "demagnetized" state due to the movement of the magnetic component; the magnetic impurities can no longer be adsorbed onto the surface of the non-magnetic component by magnetism and can easily detach from the surface. For example, magnetic impurities can detach from the surface of the non-magnetic component under the influence of gravity. Therefore, the exhaust gas impurity removal device of this embodiment can effectively remove magnetic impurities from exhaust gas, reducing safety hazards caused by exhaust gas impurity blockage.

[0022] Furthermore, since magnetic impurities are directly adsorbed onto non-magnetic components, the non-magnetic components only need to be in direct contact with the exhaust gas, while the magnetic components do not need to come into contact with the exhaust gas. This also protects the magnetic components and extends their service life. When non-magnetic components need to be replaced or repaired due to exhaust gas corrosion or other reasons, they can be replaced or repaired separately, resulting in lower maintenance costs. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the exhaust gas purification device in Embodiment 1 of this application;

[0024] Figure 2 This is a partial structural schematic diagram of the exhaust gas impurity removal device in Embodiment 1 of this application;

[0025] Figure 3 This is a schematic diagram of a tail gas impurity removal device formed by a multi-stage series impurity removal mechanism in Embodiment 2 of this application;

[0026] Figure 4 This is a longitudinal cross-sectional view of the scraper in some embodiments of this application;

[0027] Figure 5 The diagram shows the structure of a non-magnetic component in some embodiments of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 100. Impurity removal mechanism; 110. Housing; 111. Receiving cavity; 112. Through hole; 113. Exhaust gas inlet; 114. Exhaust gas outlet; 115. Discharge port; 120. Adsorption unit; 121. Magnetic component; 122. Non-magnetic component; 1221. Opening; 1222. Inner cavity; 130. First drive device; 131. First cylinder; 132. First guide rail; 140. Second drive device; 141. Second cylinder; 142. Second guide rail; 150. Scraper; 151. Guide trough; 160. Vibrator; 170. Observation window; 180. Collection bucket; 190. Electromagnetic pneumatic ball valve. Detailed Implementation

[0030] To make the technical solution and beneficial effects of this utility model more apparent and understandable, a detailed description is provided below by listing specific embodiments. Unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0031] In the description of this utility model, unless otherwise expressly defined, the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the purpose of simplifying the description of this utility model and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. That is, they should not be construed as limitations on this utility model.

[0032] In this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature defined with "first" or "second" can explicitly indicate that at least one of those features is included. In the description of this invention, "a plurality of" means at least two.

[0033] In this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "linking," "fixing," and "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral molding; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] The following is combined with Figures 1 to 5 The exhaust gas purification device according to the embodiments of this application will be described.

[0035] like Figure 1 and Figure 2 As shown, the exhaust gas purification device provided in this application embodiment includes a purification mechanism 100. The purification mechanism 100 includes a housing 110 and an adsorption unit 120, wherein the housing 110 has a receiving cavity 111; the adsorption unit 120 includes a magnetic element 121 and a non-magnetic element 122, the non-magnetic element 122 being at least partially located within the receiving cavity 111, and the magnetic element 121 being movable relative to the non-magnetic element 122 so that the magnetic element 121 can approach or move away from the non-magnetic element 122; when the magnetic element 121 approaches the non-magnetic element 122, the magnetic element 121 adsorbs magnetic impurities contained in the exhaust gas in the receiving cavity 111 through the non-magnetic element 122; when the magnetic element 121 moves away from the non-magnetic element 122, the magnetic impurities can detach from the non-magnetic element 122.

[0036] When the exhaust gas enters the receiving cavity 111, the magnetic component 121 approaches the non-magnetic component 122, and the magnetic field generated by the magnetic component 121 acts on the exhaust gas in the receiving cavity 111 through the non-magnetic component 122. Magnetic impurities in the exhaust gas are attracted to the surface of the non-magnetic component 122 by the magnetic force. The content of magnetic impurities in the treated exhaust gas is significantly reduced.

[0037] When it is necessary to clean magnetic impurities adsorbed on the surface of the non-magnetic component 122, the magnetic component 121 moves away from the non-magnetic component 122, and the magnetic force exerted by the magnetic component 121 on the magnetic impurities weakens. This can also be understood as the non-magnetic component 122 being in a "demagnetized" state due to the movement of the magnetic component 121. Magnetic impurities can no longer be adsorbed onto the surface of the non-magnetic component 122 by magnetism, and can easily detach from the surface of the non-magnetic component 122. For example, magnetic impurities can detach from the surface of the non-magnetic component 122 under the influence of gravity. Therefore, the exhaust gas impurity removal device of this embodiment can effectively remove magnetic impurities from exhaust gas, reducing safety hazards caused by exhaust gas impurity blockage.

[0038] Furthermore, since magnetic impurities are directly adsorbed onto the non-magnetic component 122, the magnetic component 121 does not need to come into contact with the exhaust gas. This also protects the magnetic component 121 and extends its service life. When the non-magnetic component 122 needs to be replaced or repaired due to exhaust gas corrosion or other reasons, the non-magnetic component 122 can be replaced or repaired separately, resulting in lower maintenance costs.

[0039] The material of the housing 110 can be flexibly selected according to the characteristics of the exhaust gas and the requirements for impurity removal, and the material of the housing 110 is not intended to limit this application. For example, in the embodiment illustrated in this application, the housing 110 is made of stainless steel. Stainless steel has good corrosion resistance and strength and can withstand the pressure generated by the exhaust gas flow.

[0040] Non-magnetic part 122 can be made of a non-magnetic material, such as stainless steel, such as 304 or 316L stainless steel, with a polished surface.

[0041] The non-magnetic component 122 can be fixed within the receiving cavity 111. For example: see Figure 2 The non-magnetic component 122 is fixed to the top of the housing 110.

[0042] The number of magnetic components 121 can be one, two, or more. For example, the number of magnetic rods can be 1-100, preferably 3-10. The number of non-magnetic components 122 can be equal to or different from the number of magnetic components 121. The magnetic field strength of a single magnetic component 121 can be 5000-5W Gauss, preferably 1-2W Gauss.

[0043] When there are multiple magnetic components 121, their movements can be synchronous or asynchronous. For example, when multiple magnetic components 121 move asynchronously, some magnetic components 121 move closer to the non-magnetic component 122, while others move to a position away from the non-magnetic component 122. This ensures that the cavity 111 always contains magnetic components 121 capable of adsorbing magnetic impurities.

[0044] In the embodiments illustrated in this application, the magnetic component 121 is a permanent magnet. For example, the magnetic component 121 is made of neodymium iron boron permanent magnet material. Compared with electromagnets, permanent magnets have a simpler structure and are easier to use, which can better improve the compactness of the impurity removal mechanism 100. Moreover, permanent magnets do not require an external power source, have high magnetic field strength and good stability, and have lower subsequent use and maintenance costs.

[0045] Since permanent magnets cannot be demagnetized by cutting off power, the method of "demagnetizing" by moving the magnetic component 121 away from the non-magnetic component 122, causing the non-magnetic component 122 to lose its ability to attract magnetic impurities, is better suited to the characteristics of permanent magnets.

[0046] In some embodiments, see Figure 5 The non-magnetic component 122 has an inner cavity 1222 and an opening 1221. The magnetic component 121 approaching the non-magnetic component 122 includes: the magnetic component 121 being at least partially inserted into the inner cavity 1222 through the opening 1221; the magnetic component 121 away from the non-magnetic component 122 includes: the magnetic component 121 being at least partially extended outside the inner cavity 1222.

[0047] After the magnetic component 121 is inserted into the inner cavity 1222, although it is located within the receiving cavity 111, it is surrounded by the non-magnetic component 122, preventing it from contacting the exhaust gas within the receiving cavity 111. This design makes the relative position between the magnetic component 121 and the non-magnetic component 122 more stable and the magnetic field distribution more uniform, thereby improving the adsorption efficiency of magnetic impurities. Furthermore, the insertion and removal of the magnetic component 121 is simple and convenient, facilitating automated control.

[0048] For example, see Figure 1 and Figure 2 The magnetic component 121 is generally cylindrical, and the non-magnetic component 122 is generally cylindrical. The magnetic component 121 can move along its axial direction to insert into or withdraw from the inner cavity of the non-magnetic component 122.

[0049] The opening 1221 can be located at one end of the inner cavity 1222, through which the magnetic component 121 enters and exits the inner cavity 1222. The bottom of the receiving cavity 111 is sealed, which ensures that after the magnetic component 121 is inserted into the inner cavity 1222, the exhaust gas will not come into contact with the magnetic component 121.

[0050] For example, the magnetic element 121 along Figure 1 and Figure 2 As shown, the vertical extension has an opening 1221 located at the top of the non-magnetic component 122, and the opening 1221 is not connected to the receiving cavity 111. The magnetic component 121 can be fully inserted into the inner cavity 1222, or a portion of its top can be left outside the inner cavity, facilitating operation and control.

[0051] In some embodiments, the housing 110 further has a through hole 112 communicating with the receiving cavity 111 (see...). Figure 1 The magnetic component 121 can enter the receiving cavity 111 through the hole 112, so that the magnetic component 121 is close to the non-magnetic component 122; or, the magnetic component 121 can extend at least partially out of the receiving cavity 111 through the hole 112, so that the magnetic component 121 is close to the non-magnetic component 122. The hole 112 provides a clearance channel for the movement of the magnetic component 121 towards or away from the non-magnetic component 122, so that when the magnetic component 121 moves away from the non-magnetic component 122, the magnetic component 121 can be located outside the receiving cavity 111, so as to reduce the influence of the magnetic field of the magnetic component 121 on some magnetic impurities that cannot be desorbed, thereby improving the desorption efficiency of magnetic impurities.

[0052] In some embodiments, the impurity removal mechanism 100 further includes a sealing structure, which is used at least to form an airtight seal between the magnetic element 121 and the wall of the through hole 112. The sealing structure can effectively prevent exhaust gas leakage that may occur during the movement of the magnetic element 121, improving the sealing performance and safety of the exhaust gas impurity removal device. At the same time, the sealing structure also reduces the interference of the external environment on the exhaust gas treatment process in the receiving cavity 111, improving the stability of the treatment effect.

[0053] For example, the sealing structure is a double-layer seal, comprising an inner rubber ring and an outer clamp or spiral wound gasket. The rubber ring can be a fluororubber O-ring or a plug seal. The clamp can be a fluororubber clamp, and the spiral wound gasket can be a graphite spiral wound gasket. However, it is not limited to those listed in this application.

[0054] In addition to the sealing structure between the magnetic component 121 and the hole wall of the through hole 112, all connections of the housing 110 are provided with sealing structures. For example, a graphite gasket or a fluororubber clamp gasket is used between the magnetic component 121 and the hole wall of the through hole 112, and a plug seal is used between the pull rod of the scraper 150 and the non-magnetic component 122.

[0055] The sealing structure forms a tight contact with the magnetic component 121 and the wall of the through hole 112, respectively, preventing exhaust gas from leaking from the through hole 112. This not only ensures the safety of the working environment and reduces the harm caused by harmful substances in the exhaust gas to operators and the surrounding environment, but also improves the efficiency of exhaust gas treatment and prevents exhaust gas leakage from causing some impurities to be untreated.

[0056] In some embodiments, the impurity removal mechanism 100 further includes a first driving device 130, which is connected to the magnetic component 121 to drive the magnetic component 121 to move closer to or away from the non-magnetic component 122. The first driving device 130 enables automated control of the movement of the magnetic component 121 without frequent manual intervention, thereby improving the operating efficiency and reliability of the device and enhancing the automation level and ease of operation of the exhaust gas impurity removal device.

[0057] See Figure 1 The first driving device 130 includes a power source and a transmission mechanism. The power source can be a first cylinder 131 or an electric cylinder, and the transmission mechanism can be a linear slide rail structure. The cylinder or electric cylinder can drive the magnetic component 121 to reciprocate linearly along the first guide rail 132 of the linear slide rail structure, so as to make the magnetic component 121 move closer to or away from the non-magnetic component 122. A limit sensor is provided at the end of the guide rail stroke to ensure that the magnetic component 121 moves within the desired limit position.

[0058] In some embodiments, see Figure 2 The impurity removal mechanism 100 also includes a scraper 150 and a second drive unit 140 (see...). Figure 1 The second drive unit 140 is connected to the scraper 150 to drive the scraper 150 to scrape magnetic impurities on the non-magnetic part 122.

[0059] The inclusion of the scraper 150 and the second drive device 140 improves the efficiency of removing magnetic impurities from the non-magnetic component 122, solving the problem that relying solely on gravity may result in some magnetic impurities remaining on the surface of the non-magnetic component 122. This enhances the cleaning efficiency and continuous operation capability of the exhaust gas removal device. The second drive device 140 also enables the scraper 150 to automatically perform the scraping action, further ensuring the automation of the exhaust gas removal device.

[0060] When the magnetic component 121 moves away from the non-magnetic component 122, and the magnetic impurities lose their magnetic support, the second driving device 140 drives the scraping component 150 to move. This movement can be rotational, linear, or a combination of both. The scraping component 150 scrapes away the magnetic impurities adsorbed on the surface of the non-magnetic component 122, causing the magnetic impurities to completely detach from the surface of the non-magnetic component 122 and fall into the bottom of the receiving cavity 111 for subsequent collection and processing.

[0061] The structure of the second drive device 140 can be the same as that of the first drive device 130. For example... Figure 1As shown, the second driving device 140 includes a second cylinder 141 and a second guide rail 142. The second cylinder 141 can drive the scraping member 150 to move along the second guide rail 142. That is, the second driving device 140 drives the scraping member 150 to move linearly along the axial direction of the non-magnetic member 122 to scrape away magnetic impurities. In this method, the initial position of the scraping member 150 is above the position on the non-magnetic member 122 where magnetic impurities are attached. During the scraping process, the second driving device 140 drives the scraping member 150 to move downward to perform the scraping action. After the scraping action is completed, the second driving device 140 drives the scraping member 150 to move upward to return to the initial position, and so on.

[0062] In some embodiments, the scraper 150 has a guide groove 151, the cross-sectional area of ​​which gradually decreases along the direction of movement of the scraper 150 in scraping away magnetic impurities, and a non-magnetic component 122 passes through the guide groove 151. See also Figure 4 Based on the above description, when the scraper 150 performs the scraping action from top to bottom, the guide groove 151 is a cone or V-shape with a larger top and a smaller bottom. Most of the residual magnetic impurities on the non-magnetic part 122 can be scraped off below the scraper 150, but a small amount of magnetic impurities may still fall off above the scraper 150. This roughly cone or V-shaped guide groove 151 with a larger top and a smaller bottom can guide the falling magnetic impurities through the gap between the scraper 150 and the non-magnetic part 122, reducing the blockage of magnetic impurities between the scraper 150 and the non-magnetic part 122 and affecting the movement of the scraper 150.

[0063] The scraping component 150 can be a plate, also known as a scraper. Its material can be polytetrafluoroethylene (PTFE). PTFE scrapers have good wear resistance and chemical stability, effectively removing impurities without easily being damaged. The scraper has a circular structure with a hole (the circular hole being a specific shape of the aforementioned guide groove 151), and the small hole is clearance-fitted with the outer diameter of the magnetic rod sleeve (i.e., a structural form of the non-magnetic component 122).

[0064] The guide chute 151 facilitates smoother discharge of magnetic impurities, preventing their accumulation and secondary contamination during the scraping process. Simultaneously, the guide chute 151 increases the conveying distance of the magnetic impurities, enhancing the thoroughness of the scraping.

[0065] The lower part of the housing 110 may also be provided with an observation window 170 with explosion-proof glass, and pressure sensors and temperature sensors may be installed on its side wall.

[0066] Figure 4 An exemplary guide trough 151 is shown. The number of guide troughs 151 can be one, two or more, and the specific number is not limited.

[0067] In some embodiments, when the magnetic component 121 is a permanent magnet, the permanent magnet can be disassembled and replaced to adjust the magnetic field strength. For example, the magnetic component 121 can be fixed by screws. When it is necessary to adjust the magnetic field strength, the current magnetic component 121 can be removed and replaced with a new one. The magnetic field strength of the magnetic component 121 can be 5000 Gauss, 10000 Gauss, or 12000 Gauss.

[0068] The adjustable magnetic field strength of the magnetic component 121 increases the adaptability and flexibility of the exhaust gas removal device, enabling it to meet the exhaust gas treatment needs under different working conditions and improving the practicality and economy of the device.

[0069] Figure 1 and Figure 2 An example of a cleaning mechanism 100 is shown.

[0070] See Figure 3 In some embodiments, the exhaust gas removal device includes at least two removal mechanisms 100; the housing 110 also has an exhaust gas inlet 113 and an exhaust gas outlet 114 communicating with the receiving cavity 111, and in two adjacent removal mechanisms 100, the exhaust gas outlet 114 of one removal mechanism 100 is connected to the exhaust gas inlet 113 of the other removal mechanism 100.

[0071] by Figure 3 Taking the three-stage series impurity removal mechanism 100 as an example: the exhaust gas first enters the receiving cavity 111 of the first impurity removal mechanism 100. The magnetic component 121 of the first impurity removal mechanism 100 approaches the non-magnetic component 122 to adsorb most of the magnetic impurities in the exhaust gas, performing coarse adsorption. The pre-treated exhaust gas is discharged from the exhaust gas outlet 114 of the first impurity removal mechanism 100 and enters the receiving cavity 111 of the second impurity removal mechanism 100. The magnetic component 121 of the second impurity removal mechanism 100 approaches the non-magnetic component 122 for fine adsorption, further adsorbing the small amount of residual magnetic impurities in the exhaust gas. This process continues until the finally treated exhaust gas is discharged from the exhaust gas outlet 114 of the third impurity removal mechanism 100. The adsorption of the third impurity removal mechanism 100 can prevent the residue of magnetic impurities.

[0072] The series connection of at least two impurity removal mechanisms 100 forms a multi-stage impurity removal system, which significantly improves the removal efficiency of magnetic impurities in the exhaust gas. The first impurity removal mechanism 100 mainly removes large-particle magnetic impurities in the exhaust gas, while the second impurity removal mechanism 100 mainly removes small-particle magnetic impurities in the exhaust gas. When used together, they can achieve comprehensive removal of magnetic impurities of various particle sizes in the exhaust gas.

[0073] Two adjacent impurity removal mechanisms 100 can be connected by a flange connection structure or a quick clamp structure, and a guide groove can be set in the inner cavity of the interface.

[0074] In some embodiments, see Figure 1 and Figure 2 The housing 110, magnetic component 121, and non-magnetic component 122 all extend vertically. The housing 110 also has a discharge port 115 communicating with the receiving cavity 111, which is located below the non-magnetic component 122. A collection bucket 180 is generally provided below the discharge port 115.

[0075] This design utilizes gravity, allowing scraped-off magnetic impurities to fall directly downwards through the discharge port 115 into the collection bucket 180. This structure simplifies the collection process of magnetic impurities and improves the self-cleaning capability and continuous operation capability of the exhaust gas removal device. Simultaneously, the location of the discharge port 115 prevents the accumulation of magnetic impurities within the receiving cavity 111, reducing obstruction to exhaust gas flow and improving the efficiency of exhaust gas treatment.

[0076] The housing 110 has a cylindrical cavity 111, and the axes of the cavity 111, the magnetic component 121, the non-magnetic component 122, and the guide groove 151 can all be arranged in parallel.

[0077] The discharge port 115 has a conical structure, and a vibrator 160 is installed on the inner wall of the receiving cavity 111. The vibrator 160 reduces the accumulation of impurities on the inner wall of the receiving cavity 111 through vibration, and better discharges the impurities in the receiving cavity 111 to the collection bucket 180. The end of the discharge port 115 is connected to a solenoid pneumatic ball valve 190. The solenoid pneumatic ball valve 190 is normally open, and is closed when it is necessary to replace or clean the material in the collection bucket 180.

[0078] Based on the above description, in some implementations, impurities can be removed periodically. The process generally includes: setting the impurity removal cycle time to 5 minutes (other time values ​​can also be set). Normally, the magnetic rod (referring to magnetic component 121) is fitted inside the sleeve (referring to non-magnetic component 122), and the scraper (referring to scraping component 150) is at the top. The sleeve adsorbs magnetic particles carried by the airflow. After 5 minutes, the magnetic rod rises to the upper edge of the sleeve, the sleeve is demagnetized, and at this time, the scraper moves down the sleeve from the upper part of the sleeve wall, thereby removing impurities from the sleeve. The impurities are pushed into the collection bucket 180 at the bottom. Then the scraper rises to the top, and the magnetic rod descends into the sleeve, completing one operating cycle.

[0079] This device utilizes the magnetic properties of impurities in the exhaust gas. Through structural design, it achieves continuous adsorption and cleaning of these impurities while ensuring the device's airtightness to prevent gas leakage. Multiple stages can be connected in series when necessary to improve the impurity removal effect. The device achieves high-efficiency impurity removal through the following design: 1. Magnetic adsorption and automatic cleaning: Utilizing the magnetic properties of impurities in the exhaust gas (such as iron / carbon particles), impurities are continuously adsorbed by a sleeved magnetic rod. When the magnetic rod is pulled out along the guide rail, the sleeve is demagnetized, and the impurities automatically fall into the collection bucket 180 under gravity and the action of the PTFE scraper, achieving continuous cleaning without stopping the machine. 2. Fully sealed and modular structure: The device adopts a sealed outer shell and a double-layer sealing system to prevent gas leakage; the magnetic rod guide rail (referring to the aforementioned first guide rail 132) uses a PTFE wear-resistant layer design, supporting quick disassembly and assembly of modules and maintenance. 3. Multi-stage series optimization: Through multi-stage series interfaces, 2-3 stages of the device can be connected, adsorbing residual impurities stage by stage, ultimately achieving an impurity removal rate of over 99%, with minimal impact on exhaust gas resistance.

[0080] The technical solution of this application effectively solves the problem of blockage and pressure buildup in CVD exhaust gas pipelines caused by the enrichment of carbon impurities. It also has the advantages of automated operation, flexible assembly, safety and environmental protection, and is suitable for industrial exhaust gas treatment scenarios with magnetic impurity content.

[0081] The exhaust gas purification device of this application will be further described below with reference to specific embodiments 1, 2, comparative examples 1 and 2.

[0082] Example 1

[0083] Based on the foregoing, see Figure 1 and Figure 2 The exhaust gas removal device in Example 1 includes a removal mechanism, namely, single-stage operation.

[0084] The structure and parameters of the impurity removal mechanism in Example 1 are as follows:

[0085] 1. Adsorption unit:

[0086] - Magnetic rod (i.e. magnetic component) material: neodymium iron boron permanent magnet, surface magnetic field strength 0.8T, sleeve is 316L stainless steel with polishing treatment.

[0087] - Guide rail system (referring to the first drive device and the second drive device, both of which adopt the guide rail system): linear slide rail with a stroke of 300mm, surface coated with a 0.5mm thick polytetrafluoroethylene wear-resistant layer, and equipped with Hall sensor limit.

[0088] 2. Sealing structure

[0089] - Double-layer seal: The inner layer is a fluororubber O-ring (temperature resistance -20~250℃), and the outer layer is a graphite spiral wound gasket (pressure resistance 1.6MPa).

[0090] 3. Test Conditions

[0091] - Exhaust gas flow rate: 10 m³ / h, iron / carbon magnetic impurity concentration: 500 mg / m³.

[0092] - Operation cycle: The magnetic rod is pulled out and cleaned every 30 minutes.

[0093] Experimental results:

[0094]

[0095] Example 2

[0096] Based on the foregoing, see Figure 3 The exhaust gas removal device in Example 2 includes three removal mechanisms, meaning that Example 2 is a three-stage series operation.

[0097] The exhaust gas impurity removal device of Example 1 is structurally optimized as follows:

[0098] 1. Series configuration

[0099] See Figure 3 Medium 100 (A), first-stage impurity removal mechanism: magnetic field strength 0.8T (coarse adsorption);

[0100] See Figure 3 The second-stage impurity removal mechanism of the 100 (B) medium-sized structure has a magnetic field strength of 1.2T (fine adsorption).

[0101] See Figure 3 Medium 100 (C), third-level impurity removal mechanism: magnetic field strength 0.5T + vibration discharge (to prevent residue).

[0102] 2. Exhaust gas path

[0103] Flange connections are used to guide the airflow and prevent short-circuiting.

[0104] Experimental results:

[0105]

[0106] Comparative Example 1 (Conventional Filtration Device)

[0107] Comparative Example 1 Design:

[0108] 1. Structure: The exhaust gas is filtered by a stainless steel screen filter (2mm pore size) to intercept solid impurities, combined with an activated carbon adsorption layer (specific surface area 1200m² / g) for adsorption.

[0109] 2. Test conditions: Same exhaust gas parameters as in Example 1, with backflushing cleaning every 2 hours.

[0110] Experimental results

[0111]

[0112] Comparative Example 2 (Single-stage, non-scraping component design)

[0113] Comparative Example 2 Design:

[0114] 1. The difference between this and Example 1 is that the magnetic rod has no sleeve (referring to the non-magnetic part) and no scraping component; the magnetic rod is directly exposed and adsorbs magnetic impurities. Manual tapping is used for cleaning (every 30 minutes).

[0115] 2. Experimental Results

[0116]

[0117] Experimental conclusion:

[0118] 1. Advantages of the exhaust gas purification device according to the embodiments of this application:

[0119] Example 1 compared to Comparative Example 1: The impurity removal rate is increased by 9.4%, the pressure drop is reduced by 90%, and consumables can be replaced without replacement.

[0120] Example 2 compared to Comparative Example 2: Automated cleaning improves the stability of impurity removal (standard deviation decreased from 3.5% to 0.8%).

[0121] 2. Necessity of multi-stage series connection: After three stages are connected in series, the impurity content in the exhaust gas is lower than the national emission standard (GB 16297-1996) limit of 10mg / m³.

[0122] Through the quantitative comparison of the above embodiments and comparative examples, the significant progress of this device in terms of continuity, impurity removal efficiency, and maintenance cost can be clearly verified.

[0123] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this utility model that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this utility model and do not limit the scope of protection of this utility model patent.

Claims

1. A tail gas impurity removal device, characterized in that, The exhaust gas impurity removal device includes at least one impurity removal mechanism, which includes: The shell has a receiving cavity; An adsorption unit includes a magnetic component and a non-magnetic component, wherein the non-magnetic component is at least partially located within the receiving cavity, and the magnetic component is movable relative to the non-magnetic component so that the magnetic component can move closer to or away from the non-magnetic component. When the magnetic component is close to the non-magnetic component, the magnetic component adsorbs magnetic impurities contained in the exhaust gas in the receiving cavity through the non-magnetic component; when the magnetic component is far away from the non-magnetic component, the magnetic impurities can detach from the non-magnetic component.

2. The exhaust gas impurity removal device according to claim 1, characterized in that, The non-magnetic component has an inner cavity and an opening, and the magnetic component being close to the non-magnetic component includes: the magnetic component being at least partially inserted into the inner cavity through the opening; the magnetic component being away from the non-magnetic component includes: the magnetic component being at least partially extended outside the inner cavity.

3. The exhaust gas impurity removal device according to claim 1, characterized in that, The housing also has a through hole communicating with the receiving cavity, through which the magnetic element can enter the receiving cavity to bring the magnetic element closer to the non-magnetic element; or, the magnetic element can extend at least partially out of the receiving cavity through the through hole to move the magnetic element away from the non-magnetic element.

4. The exhaust gas impurity removal device according to claim 1, characterized in that, The impurity removal mechanism further includes a first driving device, which is connected to the magnetic component to drive the magnetic component to move closer to or away from the non-magnetic component.

5. The exhaust gas impurity removal device according to claim 1, characterized in that, The impurity removal mechanism further includes a scraping component and a second driving device, the second driving device being connected to the scraping component to drive the scraping component to scrape off the magnetic impurities on the non-magnetic component.

6. The exhaust gas impurity removal device according to claim 5, characterized in that, The scraper has a guide groove, the cross-sectional area of ​​which gradually decreases along the direction of movement of the scraper removing magnetic impurities, and the non-magnetic component passes through the guide groove.

7. The exhaust gas impurity removal device according to claim 1, characterized in that, The magnetic component is a permanent magnet, which can be disassembled and replaced to adjust the magnetic field strength.

8. The exhaust gas impurity removal device according to claim 3, characterized in that, The impurity removal mechanism also includes a sealing structure, which is at least used to form an air seal between the magnetic component and the wall of the through hole.

9. The exhaust gas impurity removal device according to any one of claims 1 to 8, characterized in that, The exhaust gas impurity removal device includes at least two impurity removal mechanisms; The housing also has an exhaust gas inlet and an exhaust gas outlet communicating with the receiving cavity, and in two adjacent impurity removal mechanisms, the exhaust gas outlet of one impurity removal mechanism is connected to the exhaust gas inlet of the other impurity removal mechanism.

10. The exhaust gas impurity removal device according to claim 9, characterized in that, The housing, the magnetic component, and the non-magnetic component all extend vertically. The housing also has a discharge port that communicates with the receiving cavity, and the discharge port is located below the non-magnetic component.

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