Bidirectional anti-deformation sliding table module

Abstract

The utility model relates to a kind of two-way anti-deformation sliding table module, including two parallelly arranged portal frames, two installation base plates being arranged between two portal frames, and sliding table unit being respectively installed on two installation base plates, and two sliding table units are respectively arranged in the side of two installation base plates far from each other;Two sliding table units all have bearing part, and the mounting surface of installation base plate and the bearing surface of bearing part are vertical direction;The utility model sets up two groups of sliding table units on different installation base plates respectively, can also avoid the risk of motion interference while improving processing efficiency;And the structure design of portal frame can improve anti-overturning force;The integral staggered arrangement of weight-reducing groove and reinforcing rib of installation base plate reduces the weight of installation base plate under the premise of not affecting the rigidity of installation base plate, and the utility model is suitable for the field of precision automation equipment such as semiconductor detection, laser processing.

Description

Technical Field

[0001] This utility model relates to the field of slide table technology, and in particular discloses a bidirectional anti-deformation slide table module. Background Technology

[0002] In the fields of precision automation equipment such as semiconductor testing and laser processing, single-station single-slide modules face increasingly prominent efficiency bottlenecks due to their ability to process only one workpiece at a time, making it difficult to meet the growing industry demands. Dual-station slide modules, by integrating two parallel stations on a single device, theoretically achieve seamless integration of workpiece loading / unloading and processing, improving space utilization and adapting to production line layouts. However, because dual-station slide modules have two independent motion units, the asymmetric dynamic load on their mounting base is significantly higher than that of single-slide structures. Especially when installed in a basically vertical position, the mounting base is prone to continuous lateral bending moments due to its own weight or motion loads, leading to torsional deformation and bow-shaped bending, causing drift in grating positioning accuracy. This cumulative deformation effect is particularly significant under large stroke and high acceleration scenarios. Utility Model Content

[0003] In order to overcome the shortcomings and deficiencies of the rigid structure of the existing dual-slide module, the purpose of this utility model is to provide a bidirectional anti-deformation slide module.

[0004] To achieve the above objectives, the present invention provides a bidirectional anti-deformation slide module comprising a support, a mounting base, and slide units; the number of mounting bases is two, which are arranged parallel and spaced apart on the support; the number of slide units is two, which are respectively arranged on the side of the two mounting bases that are far apart from each other; both slide units have a bearing portion that reciprocates along the length direction of the mounting base, and the mounting surface of the mounting base and the bearing surface of the bearing portion are both vertical.

[0005] Furthermore, the supporting part includes a first worktable and a second worktable arranged coaxially, and the supporting surface is the table surface of the first worktable and the table surface of the second worktable; the first worktable and the second worktable are driven to reciprocate along the X-axis by a first drive mechanism and a second drive mechanism respectively, and are independent of each other.

[0006] Furthermore, the support has two parallel gantry frames, each gantry frame including two legs and a crossbeam. One end of each leg is used to support the crossbeam, and the other end of each leg is mounted on an external bearing plane. The cross-sectional dimension of the end of the leg near the crossbeam is smaller than the cross-sectional dimension of the end of the leg near the external bearing plane. The mounting base is mounted on the crossbeam of the support.

[0007] Furthermore, the mounting base plate is provided with a support block on the crossbeam on the side away from the slide unit. The support block is used to reinforce the connection between the mounting base plate and the crossbeam.

[0008] Furthermore, a support plate is provided at one end of the mounting base near the crossbeam, and the support plate is located between the two crossbeams to prevent the mounting base from deforming due to gravity; a plurality of hollow support baffles are evenly provided at one end of the mounting base near the support plate, one end of the support baffle is installed on the mounting base, and the other end is installed on the support plate.

[0009] Furthermore, the mounting base plate has a plurality of grooves spaced apart on the side away from the slide unit, the grooves being used to reduce the load; each groove has a reinforcing rib protruding in a diagonal direction, and there are vertical reinforcing ribs between the grooves.

[0010] Furthermore, the bracket is also equipped with a dustproof cover, which is installed on the bracket via a mounting bracket and covers the slide unit.

[0011] Furthermore, the slide unit also includes a driving assembly, a sliding assembly, and a positioning assembly; the driving assembly includes a stator plate disposed on a mounting base plate and movers respectively disposed on the first worktable and the second worktable; the sliding assembly includes a slide rail disposed on the mounting base plate and a plurality of sliders slidably mounted on the slide rail, the first worktable and the second worktable being sequentially slidably mounted on the slide rail via their respective sliders; the positioning assembly includes a grating measurement system and a position sensing system, wherein the grating measurement system includes a grating ruler disposed on the mounting base plate and a reading head disposed on the worktable, and the position sensing system includes a sensor disposed on the mounting base plate and a sensing plate disposed on the worktable.

[0012] Furthermore, the slide unit also has anti-collision components, and there are multiple anti-collision components, which are respectively located at both ends of the first worktable and the second worktable.

[0013] Furthermore, the slide unit also has a cable drag chain assembly, which has a fixed end and a movable end, wherein the fixed end is mounted on a bracket, the movable end is connected to the worktable, and the fixed end and the movable end are connected by a flexible chain link; the mounting base plate has a mounting groove for accommodating the chain link on the side away from the slide unit.

[0014] The beneficial effects of this utility model are as follows: This utility model is equipped with two sets of sliding table units, and the two sets of sliding table units are respectively set on different mounting base plates, avoiding the risk of motion interference; the tapered gantry structure with a narrow top and wide bottom can lower the center of gravity and improve the anti-overturning moment; the deformation at the connection between the base plate and the crossbeam is eliminated by setting support blocks, support plates and hollow baffles; the weight reduction grooves and reinforcing ribs of the mounting base plate are integrated and staggered, which reduces the weight of the mounting base plate without affecting the rigidity of the mounting base plate. Attached Figure Description

[0015] Figure 1This is a structural schematic diagram of a bidirectional anti-deformation slide module according to the present invention;

[0016] Figure 2 This is a partial structural schematic diagram of the present invention;

[0017] Figure 3 This is a partial structural schematic diagram of the present invention.

[0018] The reference numerals in the attached drawings include: 1. Gantry frame; 11. Support leg; 12. Crossbeam; 2. Mounting base plate; 21. Support block; 22. Support plate; 23. Support baffle; 24. Groove; 25. Reinforcing rib; 31. First worktable; 32. Second worktable; 33. Stator plate; 35. Slide rail; 36. Grating ruler; 37. Reading head; 38. Sensor; 39. Sensing plate; 4. Dustproof protective cover; 5. Mounting bracket; 6. Anti-collision assembly; 7. Cable drag chain assembly; 8. Mounting slot. Detailed Implementation

[0019] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0020] Example 1

[0021] Please see Figures 1 to 3 As shown, a bidirectional anti-deformation slide module of this utility model includes a bracket, a mounting base 2, and slide units; there are two mounting bases 2, which are arranged parallel and spaced apart on the bracket; there are two slide units, which are respectively arranged on the side of the two mounting bases 2 that are far apart from each other; each slide unit has a bearing part that reciprocates along the length direction of the mounting base 2, and the mounting surface of the mounting base 2 and the bearing surface of the bearing part are both vertical.

[0022] In actual use, the mounting base 2 is set perpendicular to the bracket, and the mounting surface of the mounting base 2 is perpendicular to the bracket. Two mounting bases 2 are installed in the middle of the bracket, with sufficient space for manual operation in front of each mounting base 2. Two slide units are respectively mounted on the mounting surfaces of the two mounting bases 2, so the bearing surfaces of both slide units are vertical. Mounting the two slide units on the two mounting bases 2 respectively avoids the risk of movement interference between the two slide units.

[0023] Specifically, the supporting part includes a first worktable 31 and a second worktable 32 arranged coaxially, and the supporting surface is the table surface of the first worktable 31 and the table surface of the second worktable 32; the first worktable 31 and the second worktable 32 are driven to reciprocate along the X-axis by the first driving mechanism and the second driving mechanism respectively, and are independent of each other.

[0024] In actual use, each slide module includes two worktables arranged side by side, which reciprocate in the horizontal direction via independent drive mechanisms.

[0025] Specifically, the support has two parallel gantry frames 1, each gantry frame 1 including two legs 11 and a crossbeam 12. One end of each leg 11 is used to support the crossbeam 12, and the other end of each leg 11 is mounted on an external bearing plane. The cross-sectional dimension of the end of the leg 11 near the crossbeam 12 is smaller than the cross-sectional dimension of the end of the leg 11 near the external bearing plane. The mounting base plate 2 is mounted on the crossbeam 12 of the support.

[0026] In actual use, the support consists of two parallel high-leg gantry frames 1. The outer edge of the leg 11 of the gantry frame 1 near the crossbeam 12 overlaps with the crossbeam 12. The other end of the leg 11 gradually increases to form a trapezoidal structure, which enhances the stability and load-bearing capacity of the leg 11. The mounting base plate 2 of the leg 11 is installed on the crossbeam 12 of the gantry frame 1 and is perpendicular to the crossbeam 12.

[0027] Furthermore, when viewed from above, the outline of the outrigger 11 does not exceed the outline of the crossbeam 12, and the protruding part of the outrigger 11 near the ground does not exceed the crossbeam 12, thus avoiding obstruction. In addition, the outrigger 11 has slots for installing sensors. When the sensors detect a human body, they issue an alarm or initiate an emergency stop operation on the slide module, thus providing a safety protection function.

[0028] Specifically, the mounting base plate 2 is provided with a support block 21 on the side away from the slide unit, which is set on the crossbeam 12. The support block 21 is used to reinforce the connection between the mounting base plate 2 and the crossbeam 12.

[0029] In actual use, the mounting base plate 2 is vertically mounted on the crossbeam 12. The contact area between the mounting base plate 2 and the crossbeam 12 is small. In order to stabilize the connection between the mounting base plate 2 and the crossbeam 12, a support block 21 is provided on the back of the mounting base plate 2. The support block 21 is trapezoidal in shape, with one end of the support block 21 mounted on the mounting base plate 2 and the other end mounted on the crossbeam 12.

[0030] Specifically, the mounting base plate 2 is provided with a support plate 22 at one end near the bracket. The support plate 22 is located between two crossbeams 12 and is used to prevent the mounting base plate 2 from deforming due to gravity. The mounting base plate 2 is provided with a plurality of hollow support baffles 23 at one end near the support plate 22. One end of the support baffle 23 is installed on the mounting base plate 2 and the other end is installed on the support plate 22.

[0031] In actual use, the two ends of the mounting base plate 2 are respectively mounted on the crossbeams 12. To prevent the middle of the mounting base plate 2 from being suspended and deformed due to gravity, a support plate 22 is provided at the bottom of the mounting base plate 2, located between the two crossbeams 12. To reinforce the connection between the mounting base plate 2 and the support plate 22, multiple triangular support baffles 23 are provided behind the mounting base plate 2, with the other end of the support baffles 23 mounted on the support plate 22. To reduce the load on the mounting base plate 2, the support baffles 23 have a hollow structure in the middle.

[0032] Specifically, the mounting base plate 2 has a plurality of grooves 24 spaced apart on the side away from the slide unit, the grooves 24 being used to reduce the load; each groove 24 has a reinforcing rib 25 protruding along the diagonal direction, and there are vertical reinforcing ribs 25 between the grooves 24.

[0033] In actual use, in order to reduce the load, the structure of the mounting base plate 2 was adjusted. Multiple square weight-reducing grooves 24 were cut into the back of the mounting base plate 2. A vertical reinforcing rib 25 was provided between every two adjacent grooves 24. An oblique reinforcing rib 25 was protruding along the diagonal in the middle of the groove 24. The oblique reinforcing rib 25 intersected with the vertical reinforcing rib 25. The load on the mounting base plate 2 was reduced through the weight-reducing grooves 24 without affecting the rigidity and strength of the mounting base plate 2.

[0034] Specifically, the bracket is also provided with a dustproof cover 4, which is installed on the bracket via a mounting bracket 5 and covers the slide unit.

[0035] In actual use, the mounting bracket 5 is a hollow gantry structure, and the two ends of the dustproof cover 4 are respectively placed on the two mounting brackets 5. The hollow gantry structure can reduce the load on the bracket, and to prevent the dustproof cover 4 from deforming, corner bracing plates are also provided along the length of the dustproof cover 4.

[0036] Specifically, the slide unit also includes a driving component, a sliding component, and a positioning component; the driving component includes a stator plate 33 disposed on the mounting base plate 2, and movers respectively disposed on the first worktable 31 and the second worktable 32; the sliding component includes a slide rail 35 disposed on the mounting base plate 2 and a plurality of sliders slidably mounted on the slide rail 35, the first worktable 31 and the second worktable 32 being sequentially slidably mounted on the slide rail 35 via their respective sliders; the positioning component includes a grating measurement system and a position sensing system, wherein the grating measurement system includes a grating ruler 36 disposed on the mounting base plate 2 and a reading head 37 disposed on the worktable, and the position sensing system includes a sensor 38 disposed on the mounting base plate 2 and a sensing plate 39 disposed on the worktable.

[0037] In actual use, there are two slide rails 35. The stator plate 33 is located between the two slide rails 35. Each slide rail 35 is equipped with multiple sliders. The first worktable 31 and the second worktable 32 are straddled on the two slide rails 35 via different sliders. The mover is installed at the end of the first worktable 31 and the second worktable 32 facing the stator plate 33. The grating ruler 36 and the sensor 38 are respectively installed above the mounting base plate 2, and the reading head 37 and the sensing plate 39 are installed on the worktable.

[0038] Specifically, the slide unit also has anti-collision components 6, and there are multiple anti-collision components 6, which are located at both ends of the first worktable 31 and the second worktable 32 respectively.

[0039] In actual use, the anti-collision component 6 is anti-collision rubber, and the two ends of the mounting base plate 2 are respectively provided with side plates. The slide rail 35 and the worktable are located between the two side plates, and the side of the two side plates facing the worktable is provided with anti-collision rubber.

[0040] Specifically, the slide unit also has a cable drag chain assembly 7, which has a fixed end and a moving end. The fixed end is mounted on a bracket, and the moving end is connected to the worktable. The fixed end and the moving end are connected by a flexible chain link. The mounting base plate 2 has a mounting groove 8 on the side away from the slide unit to accommodate the chain link.

[0041] In actual use, each workbench has an individual cable drag chain assembly 7, and the two cable drag chain assemblies 7 in the same slide unit are arranged in opposite directions. The mounting slot 8 is used for the cable drag chain assembly 7. The mounting slot 8 has an open top surface and a slot at the bottom to facilitate the operation of the cable drag chain assembly 7.

[0042] Example 2

[0043] The difference between this embodiment and embodiment 1 is that the dustproof cover in this embodiment is higher in the middle and lower around the edges, forming a guide slope, which is used to guide objects falling from a height outside to slide out of the slide module range, thereby protecting the slide module.

[0044] The rest of this embodiment is the same as that of Embodiment 1. Features not explained in this embodiment are explained using the methods of Embodiment 1, and will not be repeated here.

[0045] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A bidirectional anti-deformation slide module, characterized in that: It includes a bracket, a mounting base (2), and a slide unit; there are two mounting bases (2), which are arranged parallel and spaced apart on the bracket; there are two slide units, which are respectively arranged on the side of the two mounting bases (2) that are far apart from each other; each slide unit has a bearing part that reciprocates along the length of the mounting base (2), and the mounting surface of the mounting base (2) and the bearing surface of the bearing part are both vertical.

2. The bidirectional anti-deformation slide module according to claim 1, characterized in that: The bearing part includes a first worktable (31) and a second worktable (32) arranged in a collinear manner. The bearing surface is the table surface of the first worktable (31) and the table surface of the second worktable (32). The first worktable (31) and the second worktable (32) are driven to reciprocate along the X-axis by the first drive mechanism and the second drive mechanism, respectively, and are independent of each other.

3. The bidirectional anti-deformation slide module according to claim 1, characterized in that: The support has two parallel gantry frames (1), each gantry frame (1) including two legs (11) and a crossbeam (12). One end of each leg (11) is used to support the crossbeam (12), and the other end of each leg (11) is mounted on the external bearing plane. The cross-sectional dimension of the end of the leg (11) near the crossbeam (12) is smaller than the cross-sectional dimension of the end of the leg (11) near the external bearing plane. The mounting base plate (2) is mounted on the crossbeam (12) of the support.

4. The bidirectional anti-deformation slide module according to claim 3, characterized in that: The mounting base plate (2) is provided with a support block (21) on the side away from the slide unit. The support block (21) is used to reinforce the connection between the mounting base plate (2) and the slide unit (12).

5. A bidirectional anti-deformation slide module according to claim 3, characterized in that: The mounting base plate (2) is provided with a support plate (22) at one end near the crossbeam (12). The support plate (22) is located between the two crossbeams (12) to prevent the mounting base plate (2) from deforming due to gravity. The mounting base plate (2) is provided with a plurality of hollow support baffles (23) at one end near the support plate (22). One end of the support baffle (23) is installed on the mounting base plate (2) and the other end is installed on the support plate (22).

6. The bidirectional anti-deformation slide module according to claim 1, characterized in that: The mounting base plate (2) has a plurality of grooves (24) spaced apart on the side away from the slide unit. The grooves (24) are used to reduce the load. Each groove (24) has a reinforcing rib (25) protruding in a diagonal direction. There are vertical reinforcing ribs (25) between the grooves (24).

7. A bidirectional anti-deformation slide module according to claim 1, characterized in that: The bracket is also provided with a dustproof cover (4), which is installed on the bracket via a mounting bracket (5) and covers the slide unit.

8. A bidirectional anti-deformation slide module according to claim 2, characterized in that: The slide unit also includes a drive assembly, a sliding assembly, and a positioning assembly; the drive assembly includes a stator plate (33) disposed on the mounting base plate (2) and movers disposed on the first worktable (31) and the second worktable (32) respectively; the sliding assembly includes a slide rail (35) disposed on the mounting base plate (2) and a plurality of sliders slidably mounted on the slide rail (35), the first worktable (31) and the second worktable (32) being slidably mounted on the slide rail (35) in sequence via their respective sliders; the positioning assembly includes a grating measurement system and a position sensing system, wherein the grating measurement system includes a grating ruler (36) disposed on the mounting base plate (2) and a reading head (37) disposed on the worktable, and the position sensing system includes a sensor (38) disposed on the mounting base plate (2) and a sensing plate (39) disposed on the worktable.

9. A bidirectional anti-deformation slide module according to claim 2, characterized in that: The slide unit also has anti-collision components (6), and there are multiple anti-collision components (6), which are located at both ends of the first worktable (31) and the second worktable (32).

10. A bidirectional anti-deformation slide module according to claim 1, characterized in that: The slide unit also has a cable drag chain assembly (7), which has a fixed end and a movable end, wherein the fixed end is mounted on a bracket and the movable end is connected to the worktable, and the fixed end and the movable end are connected by a flexible chain link; the mounting base plate (2) has a mounting groove (8) for accommodating the chain link on the side away from the slide unit.

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