Unlocking tool for a lithography machine

Abstract

The utility model provides a kind of unlocking tool of photoetching machine, and unlocking tool includes: main body, its shape and size are suitable for being placed at the position of interface and predetermined wafer transfer box is carried;At least one trigger part is set on the main body, its position and configuration correspond with the position of at least one sensor, so that when unlocking tool is placed on interface, at least one trigger part can interact with at least one sensor, to simulate the existence state of wafer transfer box, so that photoetching machine receives the signal that wafer transfer box exists and can execute the operation of unlocking and taking out stuck box cover.The unlocking tool of the utility model can effectively simulate the existence of FOUP by its specially designed shape, size and trigger part corresponding with photoetching machine sensor accurately, so that photoetching machine can still execute the operation of unlocking and taking out box cover in the case that FOUP main body is missing and box cover is stuck.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to an unlocking tool for a lithography machine. Background Technology

[0002] In modern semiconductor manufacturing processes, lithography is a crucial step in defining the pattern of integrated circuits. The lithography machine (or stepper / scanner) is the core equipment for performing the lithography process, and its production efficiency and uptime are critical to the entire chip manufacturing process. To achieve automated production and maintain the cleanliness of the wafer environment, front-opening unified pods (FOUPs) are typically used to store and transport wafers.

[0003] A typical lithography machine, such as those manufactured by ASML, has at least one interface at its front end for receiving and loading / unloading FOUPs, also known as a load port. This interface is usually equipped with a sophisticated mechanical structure for opening the FOUP cover, removing the wafer, and transferring the wafer into the machine for processing. Simultaneously, multiple sensors, such as presence sensors, are installed at the interface to detect whether the FOUP is correctly positioned. The signals from these sensors are crucial for the lithography machine's control system to determine the FOUP status and execute subsequent operations (such as locking the FOUP, opening the cover, unlocking, and allowing FOUP removal).

[0004] In certain operational scenarios, such as maintenance and cleaning inside the lithography machine (e.g., cleaning the wafer stage) or certain non-standard processes, operators may need to place a FOUP at the lithography machine interface. However, there is an operational risk in the existing technology: if the FOUP is locked by the lithography machine or the unlocking procedure is not fully completed, the operator may forcibly remove the FOUP body from the interface due to negligence or misoperation. Because the FOUP cover is still connected to or interferes with the internal mechanism of the lithography machine interface (e.g., the latch mechanism), the cover may remain stuck inside the interface after the FOUP body is removed.

[0005] If the FOUP lid gets stuck in the interface, the lithography machine's control system will determine that there is no FOUP at the interface because the sensors cannot detect the FOUP body (since the body has been removed). In this state, the control system will typically prohibit FOUP-related operations, especially the normal unlocking and lid removal procedures. This prevents the stuck FOUP lid from being removed through standard procedures.

[0006] To address this issue, existing methods typically require complex intervention from equipment engineers, potentially involving manual operation of internal machine components or execution of specific engineering instructions, and may even necessitate extended equipment downtime. Based on actual production experience, handling such unexpected FOUP cover jamming incidents often results in several hours of downtime. For example, in some cases, each handling operation may take 2 to 3 hours. This not only severely impacts the lithography machine's effective uptime but also directly leads to reduced production efficiency and lost output (e.g., potentially hundreds of wafers lost).

[0007] Therefore, in the semiconductor manufacturing field, especially for highly automated lithography processes that pursue high production efficiency, there is an urgent need for a solution that can quickly, safely, and effectively solve the problem of the cover getting stuck in the lithography machine interface due to the accidental removal of the FOUP body, in order to minimize equipment downtime and improve equipment utilization and production efficiency. Utility Model Content

[0008] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide an unlocking tool for a lithography machine, which solves the problem that in the prior art, when the FOUP lid gets stuck in the interface, the lithography machine's control system will determine that there is no FOUP at the interface because the sensors cannot detect the FOUP body (since the body has been removed). In this state, the control system will usually prohibit the execution of FOUP-related operations, especially the normal unlocking and lid removal procedures. This results in the stuck FOUP lid being unable to be removed through standard operations.

[0009] To achieve the above and other related objectives, this utility model provides an unlocking tool for a lithography machine. The lithography machine includes an interface for receiving a front-opening wafer transfer cassette and at least one sensor disposed at the interface for detecting the presence of the wafer transfer cassette. When the main body of the wafer transfer cassette is removed but its cover is stuck in the interface, the unlocking tool is used to induce the lithography machine to perform an unlocking operation and remove the cover. The unlocking tool includes:

[0010] The main body, whose shape and size are adapted to be placed on the interface at a predetermined location to carry the wafer transport box;

[0011] At least one trigger is disposed on the main body, the position and configuration of which correspond to the position of the at least one sensor, such that when the unlocking tool is placed on the interface, the at least one trigger can interact with the at least one sensor to simulate the presence of the wafer transfer box, thereby enabling the lithography machine to receive a signal indicating the presence of the wafer transfer box and to perform the operation of unlocking and removing the stuck box cover.

[0012] Preferably, the at least one sensor is three presence sensors for detecting the presence of FOUP, and the unlocking tool has three triggering parts, each of which is configured to interact with the three presence sensors.

[0013] Preferably, the unlocking tool is made of metal.

[0014] Preferably, the metal material gives the unlocking tool a predetermined weight, which is sufficient to ensure that the unlocking tool is stably placed on the interface and that the at least one trigger can effectively interact with the at least one sensor.

[0015] Preferably, the at least one triggering part is configured to interact with the at least one sensor by physically approaching or directly contacting it to trigger the sensor.

[0016] Preferably, the lithography machine is an ASML lithography machine.

[0017] Preferably, the interface is the loading port of a lithography machine.

[0018] As described above, the unlocking tool for the lithography machine of this invention has the following beneficial effects:

[0019] The unlocking tool of this utility model, through its specially designed shape, size, and trigger part that precisely corresponds to the lithography machine sensor, can effectively simulate the presence of FOUP during use, so that the lithography machine can still perform the unlocking and removal of the lid even when the FOUP body is missing or the lid is stuck. Attached Figure Description

[0020] Figure 1 The diagram shows the three sensors of this utility model distributed at different positions on the interface.

[0021] Figure 2 The diagram shown is a structural schematic of the unlocking tool of this utility model. Detailed Implementation

[0022] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0023] This invention provides an unlocking tool for a lithography machine, which includes an interface 101 (Load Port) for receiving a front-opening wafer transfer cassette (FOUP) and at least one sensor 102 disposed at the interface 101 for detecting the presence of the FOUP.

[0024] In some preferred embodiments, the lithography machine is an ASML lithography machine, and this unlocking tool is particularly suitable for resolving the FOUP lid jamming problem that may occur on such advanced lithography equipment.

[0025] In some embodiments, the interface 101 is specifically a loading port of a lithography machine. When the body 103 of the FOUP is removed but its cover is stuck within the interface 101, the unlocking tool is used to prompt the lithography machine to perform an unlocking operation and remove the cover. This situation typically occurs during maintenance, cleaning, or other non-standard operations, where a misoperation causes the FOUP's body 103 to be removed without being fully unlocked.

[0026] In some embodiments, please refer to Figure 1 Specifically, the at least one sensor 102 consists of three presence sensors 102 used to detect the presence of the FOUP. These three sensors 102 are typically distributed at different locations on the interface 101 to comprehensively determine whether the FOUP is accurately placed in position.

[0027] Please see Figure 2 The unlocking tool includes:

[0028] The main body 103 is shaped and sized to be placed on the interface 101 at a predetermined location for carrying the FOUP;

[0029] And at least one trigger 104 is disposed on the main body 103, the position and configuration of which correspond to the position of at least one sensor 102, such that when the unlocking tool is placed on the interface 101, at least one trigger 104 can interact with at least one sensor 102 to simulate the presence of FOUP, thereby enabling the lithography machine to receive the signal of FOUP presence and perform the operation of unlocking and removing the stuck cover.

[0030] Accordingly, in these embodiments, the unlocking tool has three trigger units 104, which are respectively configured to interact with three presence sensors 102 to ensure that the standard presence state of FOUP on interface 101 can be reliably simulated, thereby satisfying the logical judgment conditions of the lithography machine control system for the presence of FOUP.

[0031] In some embodiments, the at least one trigger 104 is configured to interact with at least one sensor 102 by physically approaching or directly contacting it to trigger the sensor 102. This direct physical interaction method is simple, reliable, and easy to implement, without requiring complex electronic or signal simulation components.

[0032] With this design, when an unexpected situation occurs where the FOUP lid gets stuck, the operator does not need to perform complex equipment intervention or wait for engineers to handle it specially. They only need to place the unlocking tool of this utility model on the interface 101 of the lithography machine to deceive the sensor 102 system of the lithography machine into thinking that the FOUP is still there. This allows the standard unlocking and lid removal procedure to be started, which greatly reduces equipment downtime. For example, based on practical experience, each time a similar problem is handled, 2-3 hours of rework time can be saved, and production uptime and wafer throughput can be increased accordingly. For example, the throughput of wafers can be increased by 300-450, and the uptime is improved by about 0.7%, which significantly improves production efficiency and equipment utilization.

[0033] The unlocking tool provided by this utility model has a simple structure and is easy to use. It can quickly and effectively solve specific fault scenarios and is a practical auxiliary tool in the maintenance and operation of lithography equipment.

[0034] To ensure the tool's durability, stability, and the effectiveness of sensor triggering, in some embodiments, the unlocking tool is made of a metallic material. Metallic materials generally possess good strength and wear resistance, making them suitable for use in industrial environments.

[0035] In a further embodiment, the metallic material gives the unlocking tool a predetermined weight. This predetermined weight is carefully designed to ensure, on the one hand, that the unlocking tool can be stably placed on the smooth or precision surface of the lithography machine interface 101, preventing it from easily slipping or tipping over due to minor vibrations or accidental contact, thus ensuring operational safety and reliability; on the other hand, it also ensures that at least one trigger 104 can effectively interact with at least one sensor 102. For example, for certain types of sensors 102 (such as mechanical or proximity sensors 102), a certain proximity distance or stable contact pressure may be required for effective triggering, and the appropriate weight ensures the reliability of the triggering. This weight design contributes to ease of operation and success rate; the operator only needs to place it without additional fixing or adjustment.

[0036] In summary, the unlocking tool of this invention, through its specially designed shape and size, and a trigger part that precisely corresponds to the lithography machine's sensor, can effectively simulate the presence of the FOUP during use. This allows the lithography machine to still perform unlocking and lid removal operations even when the FOUP body is missing or the lid is stuck. Its use of metal materials and appropriate weight further ensures the tool's practicality, stability, and durability. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0037] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. An unlocking tool for a lithography machine, the lithography machine comprising an interface for receiving a front-opening wafer transfer box and at least one sensor disposed at the interface for detecting the presence of the wafer transfer box, wherein, When the main body of the wafer transfer cassette is removed but its cover is stuck in the interface, the unlocking tool is used to induce the lithography machine to perform an unlocking operation and remove the cover, characterized in that the unlocking tool comprises: The main body, whose shape and size are adapted to be placed on the interface at a predetermined location to carry the wafer transport box; At least one trigger is disposed on the main body, the position and configuration of which correspond to the position of the at least one sensor, such that when the unlocking tool is placed on the interface, the at least one trigger can interact with the at least one sensor to simulate the presence of the wafer transfer box, thereby enabling the lithography machine to receive a signal indicating the presence of the wafer transfer box and to perform the operation of unlocking and removing the jammed box cover.

2. The unlocking tool for a lithography machine according to claim 1, characterized in that: The at least one sensor is three presence sensors for detecting the presence of FOUP, and the unlocking tool has three triggers, each of which is configured to interact with the three presence sensors.

3. The unlocking tool for a lithography machine according to claim 1 or 2, characterized in that: The unlocking tool is made of metal.

4. The unlocking tool for a lithography machine according to claim 3, characterized in that: The metallic material gives the unlocking tool a predetermined weight, which is sufficient to ensure that the unlocking tool is stably placed on the interface and that the at least one trigger can effectively interact with the at least one sensor.

5. The unlocking tool for a lithography machine according to claim 1, characterized in that: The at least one triggering unit is configured to interact with the at least one sensor by physically approaching or directly contacting it to trigger the sensor.

6. The unlocking tool for a lithography machine according to claim 1, characterized in that: The lithography machine is an ASML lithography machine.

7. The unlocking tool for a lithography machine according to claim 1, characterized in that: The interface is the loading port of the lithography machine.

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